JP2004170574A - Illuminator for magnified observation - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an illuminator for magnified observation capable of easily switching a bright field illumination and a dark field illumination with a simple structure and realizing reduction of the cost by using a common light source, a common switching mechanism and a common optical system. <P>SOLUTION: Light from the light source part 11 of a controller part 1 is transmitted to a head part 2 through an optical fiber bundle 31 for guiding light. In the case of the bright field illumination, a mask body 14 is removed from the space between the light source part 11 and the end face of the optical fiber bundle 31, whereby the light from the light source part 11 is made incident on two blocks of the end face of the optical fiber bundle 31 and emitted from a circular block and an annular block at the center part of the end face on the emitting side of the optical fiber bundle 31. In the case of the dark field illumination, the light from the light source part 11 is made incident on one block of the optical fiber bundle 31 through the aperture of the mask body 14 and emitted from the circular block at the center part of the end face on the emitting side of the optical fiber bundle 31. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an illumination device for magnifying observation that illuminates an object when obtaining an enlarged image of the object.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a magnifying observation device such as a microscope has been used to capture an image of an object while illuminating the object to obtain an enlarged image. In the magnifying observation apparatus, an enlarged image of the object is displayed on a screen.
[0003]
In the magnifying observation apparatus, when observing scattered light from a sample (object), dark-field illumination for irradiating the sample with light in an oblique direction is used. When observing directly reflected light from the sample, Bright field illumination that irradiates the sample with light from a vertical direction is used.
[0004]
When observing the reflected light from the sample, epi-illumination is used, and when observing the transmitted light from the sample, transmitted illumination is used.
[0005]
Furthermore, when obtaining an image with a three-dimensional effect, illumination from one direction is used for the sample, and when obtaining a flat image without shading, illumination from all directions is applied to the sample. Used.
[0006]
As a method of switching between bright-field illumination and dark-field illumination, a method of blocking a central portion of light in a light guide path at the time of dark-field illumination, and a method of shielding an outer peripheral portion of light at the time of bright-field illumination, or a method of controlling light from one light source to 2 A method of transmitting light by two optical systems and providing a shutter to each of the optical systems to open and close an optical path, and a method of turning on one light source using two light sources are used (for example, Patent Document 1, 2 and 3).
[0007]
As a method of switching between epi-illumination and transmitted illumination, the light of one light source is transmitted by two optical systems, and a shutter is provided in each of these optical systems to open and close the optical path. A method of receiving light with a two-branch fiber, transmitting light with two fibers, and separately providing shutters to open and close an optical path has been used (for example, see Patent Documents 3 and 4). Further, a method of switching between epi-illumination and transmitted illumination by turning on one light source using two light sources is also used (for example, see Patent Document 4).
[0008]
Furthermore, as a method of switching between illumination from one direction and illumination from all directions, a method in which an illumination switching cylinder is rotatably provided, and the illumination switching cylinder is provided with an annular mirror portion and a half-mirror portion of a shade portion. (For example, see Patent Document 5).
[0009]
[Patent Document 1]
JP-A-53-62387
[Patent Document 2]
JP-A-58-105208
[Patent Document 3]
JP-A-4-86614
[Patent Document 4]
JP-A-5-341200
[Patent Document 5]
JP-A-8-213327
[0010]
[Problems to be solved by the invention]
The method of switching between bright-field illumination and dark-field illumination by blocking the central part of light in the light guide path during dark-field illumination and blocking the outer periphery of light during bright-field illumination requires a ring-shaped lens and a switching mechanism. Is complicated, making it difficult to reduce the size and increasing the cost. In a method in which light from one light source is transmitted by two optical systems and a shutter is provided in each of the optical systems to open and close an optical path to switch between bright-field illumination and dark-field illumination, two shutters are used. In addition, since a mechanism for driving them is required, miniaturization is difficult, and the cost increases. Further, in a method of switching between bright-field illumination and dark-field illumination by turning on one of the light sources using two light sources, two light sources are required, so that miniaturization is difficult and cost is reduced. Get higher.
[0011]
Further, a method of transmitting light of one light source by two optical systems, providing a shutter in each of these optical systems, and opening and closing an optical path to switch between epi-illumination and transmitted illumination, and transmitting light of one light source to two light systems. In the method of receiving light with a branch fiber, transmitting light with two fibers, separately providing shutters and opening and closing the optical path to switch between epi-illumination and transmitted illumination, two shutters and a mechanism for driving them are used. Since it is necessary, miniaturization is difficult and the cost increases. In a method of switching between epi-illumination and transmitted-light illumination by turning on one light source using two light sources, two light sources are required, which makes it difficult to reduce the size and increases the cost.
[0012]
In the method of switching between illumination from one direction and illumination from all directions by rotatably providing the illumination switching cylinder, the structure of the illumination switching cylinder is complicated, so it is difficult to reduce the size. The cost increases.
[0013]
SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnified observation that can easily switch between bright-field illumination and dark-field illumination with a simple structure using a common light source, a common switching mechanism, and a common optical system, and can reduce the cost. It is to provide a lighting device for lighting.
[0014]
Another object of the present invention is to provide a magnifying observation illuminating device that can easily switch between epi-illumination and transmitted illumination with a simple structure using a common light source and a common switching mechanism and that can be reduced in cost. It is to be.
[0015]
Still another object of the present invention is to provide a simple structure using a common light source, a common switching mechanism, and a common optical system to easily switch between one-directional illumination and all-circumferential illumination, thereby reducing cost. It is an object of the present invention to provide a magnifying observation illuminating device which can be realized.
[0016]
Means for Solving the Problems and Effects of the Invention
The illumination device for magnifying observation according to the first invention is an illumination device for magnifying observation that illuminates the target object when capturing an image of the target object to obtain an enlarged image of the target object. A lighting unit for illuminating the object, a light guiding optical fiber bundle including a plurality of optical fibers for guiding light generated by the light source to the lighting unit, and guided to the lighting unit by the light guiding optical fiber bundle. An optical system for converging light and irradiating the object with light; one end surface of the light-guiding optical fiber bundle is arranged on the light source side and is divided into a first region and a second region; The other end face of the optical fiber bundle for use is arranged in the illumination unit and is divided into a third region at the center and a fourth region surrounding the third region, and the optical fiber in the first region is the third region. The optical fiber in the second area is guided to the area, and the optical fiber in the second area is guided to the fourth area and emitted by the light source. Switching to selectively switch between a state in which the emitted light is made incident on at least the first region of the light guide optical fiber bundle and a state in which light generated by the light source is made incident on the second region of the light guide optical fiber bundle. Means are provided.
[0017]
In the illumination device for magnifying observation according to the present invention, the light generated by the light source is guided to the illumination unit by the light guide optical fiber bundle including a plurality of optical fibers, and the illumination unit illuminates the object. In this case, one end face of the light guide optical fiber bundle is arranged on the light source side and is divided into a first area and a second area, and the other end face of the light guide optical fiber bundle is arranged on the illumination unit. And is divided into a third region at the center and a fourth region surrounding the third region.
[0018]
At the time of bright field illumination, the light generated by the light source is switched to a state of being incident on at least the first region of the light guide optical fiber bundle. Thereby, at least the light incident on the first region is emitted from at least the third region on the end face of the light guide optical fiber bundle on the illumination unit side, and is converged by the optical system to be substantially perpendicular to the object. It is illuminated and brightfield illumination is performed.
[0019]
At the time of dark field illumination, the light generated by the light source is switched to a state of being incident on the second region of the light guide optical fiber bundle. As a result, the light incident on the second region is emitted from the fourth region on the end face of the light guide optical fiber bundle on the illumination unit side, converged by the optical system, and obliquely reflected on the object from all directions. , And dark field illumination is performed.
[0020]
As described above, it is possible to easily switch between bright-field illumination and dark-field illumination with a simple structure using a common light source, a common switching unit, and a common optical system, and to reduce the cost.
[0021]
The illuminating device for magnifying observation according to the second invention is the illuminating device for magnifying observation according to the first invention, wherein the third region is a substantially circular region at the center of the end face, and the fourth region is It is a substantially annular area surrounding the third area.
[0022]
At the time of bright field illumination, light is emitted from at least a substantially circular region on the end face of the light-guiding optical fiber bundle, is converged by the optical system, and is irradiated substantially perpendicularly to the object. At the time of dark field illumination, light is emitted from a substantially annular region on the end face of the light guide optical fiber bundle, is converged by the optical system, and the object is irradiated obliquely from the entire circumferential direction.
[0023]
A lighting device for magnifying observation according to a third invention is the lighting device for magnifying observation according to the first or second invention, wherein the switching means is provided between the light source and one end face of the light guide optical fiber bundle. A light-shielding body provided so as to be insertable into and removable from the light source, a position through which at least light incident on the first region from the light source passes, and light incident on the first region from the light source and incident on the second region from the light source. Light-shielding body driving means for moving the light-shielding body to a position through which light passes.
[0024]
At the time of bright field illumination, the light shield moves to a position where light from the light source enters at least the first region. Thereby, the light incident on at least the first region is emitted from at least the third region, is converged by the optical system, and is irradiated on the target.
[0025]
At the time of dark field illumination, the light shield moves to a position where it blocks light incident on the first region from the light source and passes light incident on the second region from the light source. Accordingly, the light that has entered the second region is emitted from the fourth region, is converged by the optical system, and is irradiated on the target.
[0026]
The illumination device for magnifying observation according to the fourth invention is the illumination device for magnifying observation according to the first or second invention, wherein the switching means is provided between the light source and one end face of the light guiding optical fiber bundle. And lens driving means for moving the lens to a position where light from the light source converges to the first and second regions and a position where light from the light source converges to the second region. Including.
[0027]
During bright field illumination, the lens moves to a position where light from the light source converges on the first and second regions. Thereby, the light that has entered the first and second regions is emitted from the third and fourth regions, converged by the optical system, and irradiated onto the target.
[0028]
During dark field illumination, the lens moves to a position where light from the light source converges on the second area. Accordingly, the light that has entered the second region is emitted from the fourth region, is converged by the optical system, and is irradiated on the target.
[0029]
A lighting device for magnifying observation according to a fifth aspect of the present invention is a lighting device for magnifying observation that illuminates an object when capturing an image of the object and obtaining an enlarged image of the object, comprising: a light source that generates light; A lighting unit for illuminating the object, a light guiding optical fiber bundle including a plurality of optical fibers for guiding light generated by the light source to the lighting unit, and guided to the lighting unit by the light guiding optical fiber bundle. An optical system for converging light and irradiating the object with light; one end surface of the light-guiding optical fiber bundle is arranged on the light source side and is divided into a first region and a second region; The other end face of the optical fiber bundle for use is arranged in the illumination unit and is divided into a third area where the object can be irradiated with light from one direction and a fourth area excluding the third area. The optical fiber in the area is guided to the third area, and the optical fiber in the second area is guided to the fourth area. The state in which the light generated by the light source is made incident on the first and second regions of the light guide optical fiber bundle, and the light generated by the light source is made incident on the first region of the light guide optical fiber bundle Switching means for selectively switching the state to be set.
[0030]
In the illumination device for magnifying observation according to the present invention, the light generated by the light source is guided to the illumination unit by the light guide optical fiber bundle including a plurality of optical fibers, and the illumination unit illuminates the object. In this case, one end face of the light guide optical fiber bundle is arranged on the light source side and is divided into a first area and a second area, and the other end face of the light guide optical fiber bundle is arranged on the illumination unit. At the same time, the target object is divided into a third region in which light can be irradiated from one direction and a fourth region excluding the third region.
[0031]
At the time of illumination from all directions, the state is switched to a state in which the light generated by the light source is made incident on the first region and the second region of the light-guiding optical fiber bundle. Thereby, the light incident on the first area and the second area is emitted from the third area and the fourth area on the end face of the light guide optical fiber bundle on the illumination unit side, and is converged by the optical system. The object is irradiated with light from all directions, and illumination is performed from all directions.
[0032]
At the time of illumination from one direction, the state is switched to a state in which light generated by the light source is made incident on the first region of the light-guiding optical fiber bundle. Thereby, the light incident on the first region is emitted from the third region on the end face of the light guide optical fiber bundle on the illumination unit side, converged by the optical system, and the object is irradiated with light from one direction. , Illumination from one direction is performed.
[0033]
As described above, it is possible to easily switch between illumination from one direction and illumination from all directions with a simple structure using a common light source, a common switching unit, and a common optical system, and to reduce the cost. Becomes possible.
[0034]
The illumination device for magnifying observation according to the sixth invention is the illumination device for magnifying observation according to the fifth invention, wherein the switching means is inserted and removed between the light source and one end face of the light guide optical fiber bundle. A light-shielding member provided so as to allow light incident on the first region and the second region from the light source to pass therethrough and light incident on the first region from the light source and incident on the second region Light-shielding body driving means for moving the light-shielding body to a position where light is shielded.
[0035]
During illumination from all directions, the light shield moves to a position where light from the light source passes through the first region and the second region. Accordingly, light incident on the first region and the second region is emitted from the third region and the fourth region, is converged by the optical system, and is irradiated on the object.
[0036]
At the time of illumination from one direction, the light-shielding body moves to a position that allows light incident on the first region from the light source to pass therethrough and blocks light incident on the second region. Thereby, the light that has entered the first region is emitted from the third region, is converged by the optical system, and is irradiated on the target.
[0037]
The illumination device for magnifying observation according to a seventh invention is the illumination device for magnifying observation according to the fifth invention, wherein the switching means is provided between the light source and one end surface of the light guide optical fiber bundle. And a lens driving means for moving the lens to a position where light from the light source converges on the first and second regions and a position where light from the light source converges on the first region.
[0038]
During illumination from all directions, the lens moves to a position where light from the light source converges on the first region and the second region. Thereby, the light that has entered the first and second regions is emitted from the third and fourth regions, converged by the optical system, and irradiated onto the target.
[0039]
During illumination from one direction, the lens moves to a position where light from the light source converges on the first area. Thereby, the light that has entered the first region is emitted from the third region, is converged by the optical system, and is irradiated on the target.
[0040]
An illumination device for magnifying observation according to an eighth invention is an illumination device for magnifying observation that illuminates an object when capturing an image of the object and obtaining an enlarged image of the object, comprising: a light source that generates light; A first illuminating unit for illuminating the object from the imaging side, a second illuminating unit for illuminating the object from the side opposite to the imaging side, and first and second light sources for emitting light generated by the light source. A light guiding optical fiber bundle composed of a plurality of optical fibers for guiding to the second illumination unit, one end face of the light guiding optical fiber bundle being disposed on the light source side and having a first region and a second region. , The other side of the light guide optical fiber bundle is branched into a first optical fiber bundle and a second optical fiber bundle, the end face of the first optical fiber bundle is disposed in the first illumination unit, The end face of the second optical fiber bundle is disposed in the second illumination unit, and the optical fibers in the first region are connected to the first optical fiber. A state where the light is guided to the end face of the optical fiber bundle, the optical fiber in the second area is guided to the end face of the second optical fiber bundle, and light generated by the light source is incident on the first area of the optical fiber bundle for light guiding. Switching means for selectively switching between a state in which the light generated by the light source and the state in which the light generated by the light source is incident on the second region of the light-guiding optical fiber bundle.
[0041]
In the illumination device for magnifying observation according to the present invention, the light generated by the light source is guided to the first or second illumination unit by the light-guiding optical fiber bundle including a plurality of optical fibers, and the first or second illumination unit is provided. The object is illuminated by the illumination unit. In this case, one end face of the light guiding optical fiber bundle is disposed on the light source side and divided into a first region and a second region, and the other side of the light guiding optical fiber bundle is a first optical fiber. The optical fiber is branched into a bundle and a second optical fiber bundle, and an end surface of the first optical fiber bundle is arranged in the first illumination unit, and an end surface of the second optical fiber bundle is arranged in the second illumination unit. .
[0042]
At the time of epi-illumination, the state is switched to a state in which light generated by the light source is made incident on the first region of the light-guiding optical fiber bundle. Thereby, the light incident on the first region is emitted from the end face of the first optical fiber bundle on the first illumination unit side, and the object is irradiated with light from the imaging side to perform epi-illumination.
[0043]
At the time of transmissive illumination, the state is switched to a state in which the light generated by the light source is made incident on the second region of the light-guiding optical fiber bundle. Accordingly, the light incident on the second region is emitted from the end face of the second optical fiber bundle on the side of the second illumination unit, and the object is irradiated with light from the side opposite to the imaging side. Done.
[0044]
As described above, it is possible to easily switch between the epi-illumination and the transmitted illumination with a simple structure using the common light source and the common switching unit, and it is possible to reduce the cost.
[0045]
The illuminating device for magnifying observation according to a ninth invention is the illuminating device for magnifying observation according to the eighth invention, wherein the switching means is inserted and removed between the light source and one end face of the light guide optical fiber bundle. A light shield provided so as to allow light incident on the first region from the light source to pass therethrough, and a position for shielding light incident on the second region; A light-shielding body driving means for moving the light-shielding body to a position where light incident on the second region passes.
[0046]
At the time of epi-illumination, the light-shielding body moves to a position where it passes light incident on the first region from the light source and blocks light incident on the second region. Thereby, the light incident on the first region is emitted from the end face of the first optical fiber bundle, and is irradiated on the target from the imaging side.
[0047]
At the time of transmissive illumination, the light shield moves to a position where it blocks light incident on the first region from the light source and passes light incident on the second region from the light source. Thereby, the light incident on the second region is emitted from the end face of the second optical fiber bundle, and is irradiated on the object from the side opposite to the imaging side.
[0048]
A lighting device for magnifying observation according to a tenth aspect of the present invention is a lighting device for magnifying observation that illuminates an object when an image of the object is taken to obtain an enlarged image of the object, and a light source that generates light. A first illumination unit for illuminating the object from the imaging side, a second illumination unit for illuminating the object from the side opposite to the imaging side, and guiding the light generated by the light source to the illumination unit A light guiding optical fiber bundle comprising a plurality of optical fibers; and an optical system for converging light guided to the first illumination unit by the first optical fiber bundle and irradiating the object with the light. One end face of the fiber bundle is disposed on the light source side and is divided into a first area, a second area, and a third area, and the other side of the light guide optical fiber bundle has the first optical fiber bundle and the second area. And a second optical fiber bundle, and an end face of the first optical fiber bundle is disposed in the first illumination unit. And a fourth region in the center portion and a fifth region surrounding the fourth region, the end face of the second optical fiber bundle is disposed in the second illumination unit, and the optical fiber in the first region is The optical fiber in the second area is guided to the fourth area on the end face of the first optical fiber bundle, the optical fiber in the second area is guided to the fifth area on the end face of the first optical fiber bundle, and the optical fiber in the third area is A state in which the light generated by the light source is guided to the end face of the second optical fiber bundle and is incident on the first region of the light guiding optical fiber bundle, and the light generated by the light source is transmitted to the second region of the light guiding optical fiber bundle. A switching means for selectively switching between a state in which the light is incident on the second area and a state in which light generated by the light source is incident on the third area of the light-guiding optical fiber bundle is provided.
[0049]
In the illumination device for magnifying observation according to the present invention, the light generated by the light source is guided to the first or second illumination unit by the light-guiding optical fiber bundle including a plurality of optical fibers, and the first or second illumination unit is provided. The object is illuminated by the illumination unit. In this case, one end face of the light guiding optical fiber bundle is disposed on the light source side and is divided into a first area, a second area, and a third area, and the other side of the light guiding optical fiber bundle is a second area. The first optical fiber bundle is branched into a first optical fiber bundle and a second optical fiber bundle, and an end face of the first optical fiber bundle is disposed in the first illumination unit and surrounds a fourth region and a fourth region in the center. The optical fiber bundle is divided into a fifth region, and an end face of the second optical fiber bundle is disposed in the second illumination unit.
[0050]
At the time of the bright-field illumination of the epi-illumination, the light generated by the light source is switched to a state of being incident on the first region of the optical fiber bundle for guiding light. Thereby, the light incident on the first area is emitted from the fourth area on the end face of the first optical fiber bundle on the first illumination unit side, is converged by the optical system, and is substantially focused on the object from the imaging side. Light is emitted vertically, and bright-field illumination is performed.
[0051]
At the time of the dark-field illumination of the epi-illumination, the light generated by the light source is switched to a state of being incident on the second region of the optical fiber bundle for light guiding. As a result, the light incident on the second area is emitted from the fifth area on the end face of the first optical fiber bundle on the side of the first illumination unit, is converged by the optical system, and is entirely focused on the object from the imaging side. Light is applied obliquely from the circumferential direction, and dark-field illumination is performed.
[0052]
At the time of transmitted illumination, the state is switched to a state in which light generated by the light source is incident on the third region of the light-guiding optical fiber bundle. Thereby, the light entered into the third area is emitted from the end face of the second optical fiber bundle on the side of the second illumination unit, and is irradiated on the object from the side opposite to the imaging side.
[0053]
As described above, it is possible to easily switch the bright-field illumination of the epi-illumination and the dark-field illumination of the epi-illumination with a simple structure using the common light source, the common switching unit, and the common optical system. Using a light source and a common switching unit, it is possible to easily switch between epi-illumination and transmitted illumination with a simple structure and to reduce the cost.
[0054]
The illuminating device for magnifying observation according to an eleventh invention is the illuminating device for magnifying observation according to the tenth invention, wherein the fourth region is a substantially circular region at the center of the end face, and the fifth region is It is a substantially annular region surrounding the fourth region.
[0055]
At the time of bright-field illumination of epi-illumination, light is emitted from a substantially circular area on the end face of the first optical fiber bundle, is converged by the optical system, and is irradiated almost perpendicularly to the object from the imaging side. During dark-field illumination of epi-illumination, light is emitted from a substantially annular region of the end face of the first optical fiber bundle, converged by the optical system, and the object is illuminated obliquely from the imaging side to the object from the imaging side. .
[0056]
The illuminating device for magnifying observation according to the twelfth invention is the illuminating device for magnifying observation according to the tenth or eleventh invention, wherein the switching means is provided between the light source and one end face of the light guiding optical fiber bundle. A light-blocking member provided so as to be insertable into and removable from the light source, a position for passing light incident on the first region from the light source and blocking light incident on the second and third regions, and light incident on the second region from the light source And a light-shielding body at a position for blocking light incident on the first and third areas and a position for passing light incident on the third area from the light source and blocking light incident on the first and second areas. And a light-shielding body driving means to be moved.
[0057]
At the time of bright field illumination, the light shield moves to a position where it passes light incident on the first region from the light source and blocks light incident on the second and third regions. Thereby, the light incident on the first region is emitted from the fourth region of the first optical fiber bundle, converged by the optical system, and irradiated on the object from the imaging side.
[0058]
At the time of dark field illumination, the light shield moves to a position where light from the light source enters the second region and blocks light incident on the first and third regions. Thereby, the light incident on the second area is emitted from the fifth area of the first optical fiber bundle, is converged by the optical system, and is irradiated on the object from the imaging side.
[0059]
At the time of transmissive illumination, the light shield moves to a position where it passes light incident on the third region from the light source and blocks light incident on the first and second regions. Thereby, the light incident on the third region is emitted from the end face of the second optical fiber bundle, and is irradiated on the object from the side opposite to the imaging side.
[0060]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is a schematic diagram showing a configuration of a head section of a magnifying observation device using a lighting device for magnifying observation according to an embodiment of the present invention, and FIG. 2 is a lighting device for magnifying observation according to an embodiment of the present invention. It is a schematic diagram which shows the structure of the controller part of the magnifying observation apparatus using.
[0061]
As shown in FIGS. 1 and 2, the magnifying observation apparatus includes a controller 1, a head 2, and a cable 3.
[0062]
As shown in FIG. 1, the head unit 2 includes an imaging unit 21, a mirror 23, a half mirror 24, an objective lens 25, a mirror 26, an incident-light illumination holding unit 35, and a transmitted-light illumination holding unit 36. The cable 3 includes a light guide optical fiber bundle 31 composed of a plurality of optical fibers and an image signal transmission line 32. The distal end portion of the light guide optical fiber bundle 31 is held by the epi-illumination holder 35 during epi-illumination, and held by the trans-illumination holder 36 during trans-illumination. In this example, the distal end of the light guide optical fiber bundle 31 is held by the epi-illumination holder 35. As shown in FIG. 2, the controller unit 1 includes a light source unit 11, a power supply circuit 12, a signal processing unit 13, and a mask body 14. The display 15 is connected to the signal processing unit 13.
[0063]
The power supply circuit 12 supplies power to the light source unit 11 and the signal processing unit 13. The mask body 14 is arranged between the light source unit 11 and the end of the light guide optical fiber bundle 31. The light generated by the light source unit 11 enters the light guide optical fiber bundle 31 through the opening of the mask body 14. The light-guiding optical fiber bundle 31 transmits light from the light source unit 11 to the head unit 2 in FIG.
[0064]
The light transmitted to the head unit 2 by the light guiding optical fiber bundle 31 is emitted from the distal end of the light guiding optical fiber bundle 31. The light emitted from the light guide optical fiber bundle 31 is reflected by the mirror 23, reflected by the half mirror 24, and irradiates the sample (object) through the objective lens 25. The imaging unit 21 captures an image of the sample 100 through the half mirror 24 and the objective lens 25, and transmits the obtained image as an image signal to the signal processing unit 13 of the controller unit 1 in FIG. The signal processing unit 13 displays an image of the sample on the screen of the display 15 based on the image signal transmitted from the head unit 2.
[0065]
FIG. 3 is a schematic diagram showing epi-illumination by the head unit 2 of FIG. As shown in FIG. 4, the light emitted from the distal end of the light-guiding optical fiber bundle 31 is converged by the objective lens 25 and irradiated onto the sample 100. Out of the light converged by the objective lens 25, the light at the center where the incident angle on the sample 100 is small is a bright-field illumination component, and the light at the outer periphery where the incident angle on the sample 100 is large is a dark-field illumination component. In FIG. 3, the bright-field illumination component is indicated by a solid line, and the dark-field illumination component is indicated by a broken line. Normally, the bright-field illumination component is strongly dominant as compared to the dark-field illumination component. Therefore, when the dark-field illumination component and the bright-field illumination component are mixed, bright-field illumination is performed.
[0066]
FIG. 4 is a schematic diagram showing an optical system at the time of epi-illumination by the head unit of FIG.
As shown in FIG. 4, the imaging unit 21 includes a CCD (charge coupled device) 22. At the time of epi-illumination, light emitted from the light guide optical fiber bundle 31 is reflected by the mirror 23, further reflected by the half mirror 24, converged by the objective lens 25, and irradiated onto the sample 100. The CCD 22 captures an image of the sample and outputs the obtained image as an image signal.
[0067]
FIG. 5A is a diagram illustrating an example of the configuration of the light source unit 11 in the controller unit 1 of FIG. 2 and a distribution of the amount of light incident on the end face of the light-guiding optical fiber bundle 31. FIG. FIG. 6 is a diagram illustrating another example of the configuration of the light source unit 11 in the unit 1 and a distribution of the amount of light incident on the end face of the light guide optical fiber bundle 31.
[0068]
In the example of FIG. 5A, the light source unit 11 includes a light source 110 and a lens 111. Light from the light source 110 is converged by the lens 111 and is incident on the end face of the light guide optical fiber bundle 31. The intensity of light incident on the end face of the light guiding optical fiber bundle 31 is highest at the center and decreases toward the outside.
[0069]
In the example of FIG. 5B, the light source unit 11 includes a light source 110 and a concave mirror 112. The light from the light source 110 is reflected and converged by the mirror 112 and is incident on the end face of the light guiding optical fiber bundle 31. The intensity of light incident on the end face of the light guiding optical fiber bundle 31 is highest at the center and decreases toward the outside.
[0070]
6A and 6B are diagrams illustrating an example of a light guiding optical fiber bundle 31 capable of switching between bright-field illumination and dark-field illumination. FIG. 6A illustrates an end face on the light source unit 11 side, and FIG. The end face on the emission side is shown.
[0071]
As shown in FIG. 6A, on the light source unit 11 side, the end face of the light guiding optical fiber bundle 31 is divided into a central circular block 31A and a peripheral annular block 31B. As shown in FIG. 6B, on the emission side, the end face of the light-guiding optical fiber bundle 31 is divided into a central circular block 31a and a peripheral annular block 31b. The optical fiber in the block 31A on the light source unit 11 side is guided into the output side block 31a, and the optical fiber in the block 31B on the light source unit 11 side is guided into the output side block 31b. Accordingly, the light incident on the block 31A on the light source unit 11 side is emitted from the output block 31a, and the light incident on the block 31B on the light source unit 11 side is emitted from the block 31b on the output side.
[0072]
FIG. 7 is a plan view of the mask body 14 used for the light guide optical fiber bundle 31 of FIG. FIG. 8 is a schematic diagram of a driving device for moving the mask body 14 of FIG.
[0073]
As shown in FIG. 7, the mask body 14 has a circular light-shielding portion 14B at the center and an annular opening 14A between the outer peripheral portion and the light-shielding portion 14B. The light-shielding portion 14B is supported on the outer peripheral portion via a plurality of support portions 14C. The light-shielding portion 14B has substantially the same area as the block 31A on the end face of the light-guiding optical fiber bundle 31 shown in FIG.
[0074]
As shown in FIG. 8, the mask body 14 is arranged between the end face of the light guiding optical fiber bundle 31 and the light source 110 in the light source unit 11. The direct-acting solenoid 16 moves the mask body 14 in the direction of the arrow Z crossing between the end face of the light-guiding optical fiber bundle 31 and the light source 110.
[0075]
When the mask body 14 is separated from between the end face of the light guide optical fiber bundle 31 and the light source 110, light from the light source 110 enters the blocks 31A and 31B on the end face of the light guide optical fiber bundle 31. As a result, the light transmitted through the light guiding optical fiber bundle 31 is emitted from the blocks 31a and 31b on the end surface on the emission side, and bright field illumination is performed.
[0076]
When the light blocking portion 14B of the mask body 14 faces the block 31A on the end face of the light guide optical fiber bundle 31, light from the light source 110 passes through the annular opening 14A to the end face block 31B of the light guide optical fiber bundle 31. Incident. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the block 31b on the end surface on the emission side, and dark field illumination is performed.
[0077]
9A and 9B are diagrams illustrating another example of the light guide optical fiber bundle 31 that can switch between bright-field illumination and dark-field illumination. FIG. 9A illustrates an end face on the light source unit 11 side, and FIG. 2 shows the end face of the side.
[0078]
As shown in FIG. 9A, the end surface of the light guide optical fiber bundle 31 on the light source unit 11 side is divided into a semicircular block 31A and the remaining semicircular block 31B. As shown in FIG. 9B, the end face of the light guide optical fiber bundle 31 on the emission side is divided into a circular block 31a at the center and an annular block 31b around it.
[0079]
The optical fiber in the block 31A on the light source unit 11 side is guided into the output side block 31a, and the optical fiber in the block 31B on the light source unit 11 side is guided into the output side block 31b. Accordingly, the light incident on the block 31A on the light source unit 11 side is emitted from the output block 31a, and the light incident on the block 31B on the light source unit 11 side is emitted from the block 31b on the output side.
[0080]
FIG. 10 is a schematic view showing an example of the mask body 14 and the driving device used in the light guide optical fiber bundle 31 of FIG.
[0081]
As shown in FIG. 10, the mask body 14 has a semicircular opening 14A. The opening 14A has substantially the same area as the blocks 31A and 31B of the light guide optical fiber bundle 31 on the light source unit 11 side shown in FIG. 9A. The mask body 14 is arranged so as to face the end face of the light guide optical fiber bundle 31. The mask body 14 is provided so as to be rotatable about an axis 14D. A circular rotating member 17b attached to the rotating shaft of the motor 17a is provided so as to contact the outer peripheral surface of the mask body 14. The rotation of the rotating member 17b by the motor 17a causes the mask body 14 to rotate about the axis 14D as shown by the arrow Q.
[0082]
When the opening 14A of the mask body 14 faces the block 31A on the end face of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31A on the end face of the light guide optical fiber bundle 31. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the block 31a on the end surface on the emission side, and bright field illumination is performed.
[0083]
When the opening 14A of the mask body 14 faces the block 31B on the end surface of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31B on the end surface of the light guide optical fiber bundle 31. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the block 31b on the end surface on the emission side, and dark field illumination is performed.
[0084]
11A and 11B show still another example of the light guide optical fiber bundle 31 capable of switching between bright-field illumination and dark-field illumination. FIG. 11A shows an end face on the light source unit 11 side, and FIG. The end face on the emission side is shown.
[0085]
As shown in FIG. 11A, the end face of the light guiding optical fiber bundle 31 on the light source section 11 side is divided into a central circular block 31B and a peripheral annular block 31A. As shown in FIG. 11B, the end face of the light guide optical fiber bundle 31 on the emission side is divided into a central circular block 31a and a peripheral annular block 31b.
[0086]
The optical fiber in the block 31A on the light source unit 11 side is guided into the output side block 31a, and the optical fiber in the block 31B on the light source unit 11 side is guided into the output side block 31b. Accordingly, the light incident on the block 31A on the light source unit 11 side is emitted from the output block 31a, and the light incident on the block 31B on the light source unit 11 side is emitted from the block 31b on the output side.
[0087]
FIG. 12 is a schematic diagram showing an example of the mask body 14 used for the light guide optical fiber bundle 31 of FIG.
[0088]
As shown in FIG. 12, the mask body 14 has a circular opening 14A at the center. The opening 14A has substantially the same area as the block 31B on the end face of the light-guiding optical fiber bundle 31 shown in FIG.
[0089]
As a driving device for moving the mask body 14 in FIG. 12, the direct acting solenoid 16 shown in FIG. 8 is used.
[0090]
When the mask body 14 is separated from between the end face of the light guide optical fiber bundle 31 and the light source 110, light from the light source 110 enters the blocks 31A and 31B on the end face of the light guide optical fiber bundle 31. As a result, the light transmitted through the light guiding optical fiber bundle 31 is emitted from the blocks 31a and 31b on the end surface on the emission side, and bright field illumination is performed.
[0091]
When the opening 14A of the mask body 14 faces the block 31B on the end surface of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31B on the end surface of the light guide optical fiber bundle 31 through the opening 14A. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the block 31b on the end surface on the emission side, and dark field illumination is performed.
[0092]
In the magnifying observation apparatus according to the present embodiment, it is possible to easily switch between bright-field illumination and dark-field illumination with a simple structure using a common light source 110, a common driving device, and a common optical system. In addition, the cost can be reduced. Further, it is possible to automatically and quickly switch between bright-field illumination and dark-field illumination.
[0093]
In the magnifying observation apparatus according to the present embodiment, by exchanging the light guide optical fiber bundle 31, it is possible to switch between illumination of the sample from all around and illumination of the sample from one direction. Here, the illumination of the sample from all around refers to illumination from above 360 degrees around the center of the sample. Illumination of the sample from one direction refers to illumination from above one side of the sample, and the one side is a side portion on the far side (far side) of the sample when viewed from the observer. This one side corresponds to the upper part of the screen in the image of the sample displayed on the screen. Hereinafter, illumination of the sample from all around is referred to as overall illumination, and illumination of the sample from one side is referred to as partial illumination.
[0094]
FIG. 13 is a schematic diagram showing an image of a sample displayed on a screen by overall illumination. FIG. 14 is a schematic diagram showing an image of a sample displayed on a screen by partial illumination.
[0095]
Here, the sample 100 has the convex portion 101. In the overall illumination, as shown in FIG. 13, light is emitted from all directions in the image of the sample 100 displayed on the screen. Thus, no shadow is formed around the convex portion 101, and the sample 100 can be observed in a planar manner. In addition, since the light is applied almost uniformly over the entire sample 100, the entire sample 100 displayed on the screen can be easily observed.
[0096]
With partial illumination, as shown in FIG. 14, in the image of the sample 100 displayed on the screen, a shadow due to the convex portion 101 is formed, and the three-dimensional effect is emphasized. In addition, since human senses are accustomed to the illumination from the back side (the other side) of the sample 100, the partial illumination can minimize the misunderstanding between the concave portion and the convex portion, and the sample 100 can be observed naturally. .
[0097]
FIGS. 15A and 15B are views showing an example of a light guide optical fiber bundle 31 capable of switching between overall illumination and partial illumination, wherein FIG. 15A shows an end face on the light source section 11 side, and FIG. Is shown.
[0098]
As shown in FIG. 15A, the end face of the light guiding optical fiber bundle 31 on the side of the light source unit 11 is divided into a central circular block 31A and a peripheral annular block 31B. As shown in FIG. 15B, the end face of the light guide optical fiber bundle 31 on the emission side is divided into a semicircular block 31a and the remaining semicircular block 31b.
[0099]
The optical fiber in the block 31A on the light source unit 11 side is guided into the output side block 31a, and the optical fiber in the block 31B of the light source unit 11 is guided into the output side block 31b. Accordingly, the light incident on the block 31A on the light source unit 11 side is emitted from the output block 31a, and the light incident on the block 31B on the light source unit 11 side is emitted from the block 31b on the output side.
[0100]
The mask body 14 shown in FIG. 12 is used for the light guide optical fiber bundle 31 of FIG. As a driving device for moving the mask body 14, a direct acting solenoid 16 shown in FIG. 8 is used.
[0101]
When the mask body 14 is separated from between the end face of the light guide optical fiber bundle 31 and the light source 110, light from the light source 110 enters the blocks 31A and 31B on the end face of the light guide optical fiber bundle 31. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the blocks 31a and 31b on the end surface on the emission side, and the entire illumination is performed.
[0102]
When the opening 14A of the mask body 14 faces the block 31A on the end face of the light guiding optical fiber bundle 31, light from the light source 110 enters the block 31A on the end face of the light guiding optical fiber bundle 31 through the opening 14A. As a result, the light transmitted through the light guiding optical fiber bundle 31 is emitted from the block 31a on the end surface on the emission side, and partial illumination is performed.
[0103]
In the magnifying observation apparatus according to the present embodiment, it is possible to easily switch between the entire illumination and the partial illumination with a simple structure using the common light source 110, the common driving device, and the common optical system. Cost reduction becomes possible. Further, it is possible to automatically and quickly switch between the entire illumination and the partial illumination.
[0104]
Further, in the magnifying observation apparatus according to the present embodiment, it is possible to switch between epi-illumination and transmitted illumination by exchanging the light guide optical fiber bundle 31.
[0105]
FIG. 16 is a schematic diagram showing an example of a light guide optical fiber bundle 31 that can switch between epi-illumination and transmitted illumination.
[0106]
As shown in FIG. 16, the exit side portion of the light guide optical fiber bundle 31 is branched into an epi-illumination optical fiber bundle 311 and a transmitted illumination optical fiber bundle 312. On the light source 11 side, the end face of the light guide optical fiber bundle 31 is divided into a semicircular block 31A and the remaining semicircular block 31B. The optical fiber in the block 31A on the light source unit 11 side is guided to the block 32a on the end face of the epi-illumination optical fiber bundle 311. The optical fiber in the block 31B on the light source unit 11 side is connected to the end face of the optical fiber bundle 312 for transmitted illumination. It is led into the block 32b. As a result, the light incident on the block 31A on the light source unit 11 side is emitted from the block 32a on the end surface on the emission side of the epi-illumination optical fiber bundle 311, and the light incident on the block 31B on the light source unit 11 side is transmitted illumination light. The light is emitted from the block 32b on the end face of the fiber bundle 312.
[0107]
FIG. 17 is a schematic view showing an example of the mask body 14 and the driving device used for the light guide optical fiber bundle 31 of FIG.
[0108]
As shown in FIG. 17, the mask body 14 has a semicircular opening 14A. The opening 14A has substantially the same area as the blocks 31A and 31B on the end face of the optical fiber bundle 31 for light guide shown in FIG. The mask body 14 is arranged so as to face the end face of the light guide optical fiber bundle 31. The mask body 14 is provided so as to be rotatable about an axis 14D. A circular rotating member 17b attached to the rotating shaft of the motor 17a is provided so as to contact the outer peripheral surface of the mask body 14. The rotation of the rotating member 17b by the motor 17a causes the mask body 14 to rotate about the axis 14D as shown by the arrow Q.
[0109]
When the opening 14A of the mask body 14 faces the block 31A on the end face of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31A on the end face of the light guide optical fiber bundle 31. Accordingly, the light transmitted through the light guiding optical fiber bundle 31 passes through the transmitted illumination optical fiber bundle 311 and is emitted from the block 32a on the end surface on the emission side.
[0110]
When the opening 14A of the mask body 14 faces the block 31B on the end surface of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31B on the end surface of the light guide optical fiber bundle 31. As a result, the light transmitted through the optical fiber bundle for light guide 31 passes through the optical fiber bundle for transmission illumination 312 and is emitted from the block 32b on the end surface on the emission side.
[0111]
FIG. 18 is a schematic diagram showing an optical system when switching between epi-illumination and transmitted illumination using the light guide optical fiber bundle 31 of FIG.
[0112]
As shown in FIG. 18, the end of the epi-illumination optical fiber bundle 311 of the light-guiding optical fiber bundle 31 is inserted into the epi-illumination holding unit 35, and the transmitted illumination optical fiber bundle of the light guide optical fiber bundle 31 is inserted. The end of 312 is inserted into the transmitted light holder 36.
[0113]
The light emitted from the end face 32a on the emission side of the epi-illumination optical fiber bundle 311 is reflected by the mirror 23, further reflected by the half mirror 24, converged by the objective lens 25, and irradiated onto the sample 100 from above. Thereby, epi-illumination is performed. Light reflected from the sample 100 is incident on the CCD 22.
[0114]
The light emitted from the end face 32b on the emission side of the transmission illumination optical fiber bundle 312 is reflected by the mirror 26 and illuminates the sample 100 from below. Thereby, transmitted illumination is performed. The transmitted light from the sample 100 enters the CCD 22.
[0115]
In the magnifying observation apparatus according to the present embodiment, it is possible to easily switch between epi-illumination and transmitted-light illumination with a simple structure using a common light source 110 and a common driving device, and to reduce the cost. Become. Further, it is possible to automatically and quickly switch between the epi-illumination and the transmitted illumination.
[0116]
Further, in the magnifying observation apparatus according to the present embodiment, by exchanging the optical fiber bundle 31 for light guide, it is possible to switch between bright-field illumination of epi-illumination, dark-field illumination of epi-illumination, and transmitted illumination.
[0117]
FIG. 19 is a schematic diagram showing an example of a light guiding optical fiber bundle 31 capable of switching between bright-field illumination of epi-illumination and dark-field illumination and epi-illumination of epi-illumination.
[0118]
As shown in FIG. 19, the exit side of the light guide optical fiber bundle 31 is branched into an epi-illumination optical fiber bundle 311 and a transmitted illumination optical fiber bundle 312. On the light source unit 11 side, the end face of the light guide optical fiber bundle 31 is divided into fan-shaped blocks 31A, 31B, 31C. On the emission side, the end face of the optical fiber bundle for epi-illumination 311 is divided into a central circular block 31a and a peripheral annular block 31b. The entire end face of the optical fiber bundle for transmission illumination 312 is a block 31c. The optical fiber in the block 31A on the light source unit 11 side is guided to the block 31a on the end face of the optical fiber bundle 311 for epi-illumination, and the optical fiber in the block 31B on the side of the light source unit 11 is connected to the end face of the optical fiber bundle 311 for epi-illumination. The optical fiber in the block 31C on the light source section 11 side is guided into the block 31b, and is guided into the block 31c on the end face of the optical fiber bundle for transmitted illumination 312. As a result, light incident on the block 31A on the light source unit 11 side is emitted from the block 31a on the end face of the epi-illumination optical fiber bundle 311. Light incident on the block 31B on the light source unit 11 side is reflected on the epi-illumination optical fiber bundle 311. The light emitted from the block 31b on the end face of the light source section 11 and incident on the block 31C on the light source section 11 side is emitted from the block 31c on the end face of the optical fiber bundle for transmission illumination 312.
[0119]
FIG. 20 is a diagram showing an example of the mask body 14 used for the light guide optical fiber bundle 31 of FIG. FIG. 21 is a schematic view showing an example of a driving device of the mask body 14 in FIG.
[0120]
As shown in FIG. 20, the mask body 14 has a fan-shaped opening 14A. The opening 14A has substantially the same area as the blocks 31A, 31B, and 31C of the light guide optical fiber bundle 31 on the light source unit 11 side.
[0121]
The mask body 14 is arranged so as to face the end face of the light guide optical fiber bundle 31. The mask body 14 is provided so as to be rotatable about an axis 14D. A circular rotating member 17b attached to the rotating shaft of the motor 17a is provided so as to contact the outer peripheral surface of the mask body 14. The rotation of the rotating member 17b by the motor 17a causes the mask body 14 to rotate about the axis 14D as shown by the arrow Q.
[0122]
When the opening 14A of the mask body 14 faces the block 31A on the end face of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31A on the end face of the light guide optical fiber bundle 31. As a result, the light transmitted through the light guiding optical fiber bundle 31 is emitted from the block 31a on the end face of the epi-illumination optical fiber bundle 311, and bright-field illumination of epi-illumination is performed.
[0123]
When the opening 14A of the mask body 14 faces the block 31B on the end surface of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31B on the end surface of the light guide optical fiber bundle 31. As a result, light transmitted through the optical fiber bundle 31 for light guide is emitted from the block 31b on the end surface of the optical fiber bundle 311 for epi-illumination, and dark-field illumination of epi-illumination is performed.
[0124]
When the opening 14A of the mask body 14 faces the block 31C on the end face of the light guide optical fiber bundle 31, light from the light source 110 enters the block 31C on the end face of the light guide optical fiber bundle 31. Accordingly, the light transmitted through the light guiding optical fiber bundle 31 is emitted from the block 31c on the end face of the transmitted illumination optical fiber bundle 312, and the transmitted illumination is performed.
[0125]
In the magnifying observation apparatus according to the present embodiment, bright field illumination of epi-illumination and dark field illumination of epi-illumination can be easily performed with a simple structure using a common light source 110, a common driving device, and a common optical system. This makes it possible to switch between epi-illumination and transmitted-light illumination with a simple structure using a common light source 110 and a common driving device, and to reduce the cost. Further, it is possible to automatically and rapidly switch between bright-field illumination of epi-illumination, dark-field illumination of epi-illumination, and transmission illumination.
[0126]
FIG. 22 is a schematic diagram showing another example of the switching mechanism of the lighting method. In the example of FIG. 22, the light source unit 11 includes a lens 113 and a driving mechanism 114 instead of using a mask body.
[0127]
The lens 113 is disposed between the end face of the light guide optical fiber bundle 31 and the light source 110. The drive mechanism 114 moves the lens 113 in the direction of the arrow X along the optical axis of the light guide optical fiber bundle 31.
[0128]
Here, a case will be described in which the bright-field illumination and the dark-field illumination are switched using the optical fiber bundle 31 for guiding light in FIG.
[0129]
As shown in FIG. 22A, the light from the light source 110 is converged by the lens 113 at a position where the lens 113 has moved away from the light source 110, and is incident on the blocks 31A and 31B on the end face of the optical fiber bundle 31 for light guiding. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the emission side blocks 31a and 31b, and bright field illumination is performed.
[0130]
As shown in FIG. 22B, at a position where the lens 113 approaches the light source 110, the light from the light source 110 is converged by the lens 113 and enters the block 31B on the end face of the light guiding optical fiber bundle 31. Thereby, the light transmitted through the light guide optical fiber bundle 31 is emitted from the emission side block 31b, and dark field illumination is performed.
[0131]
In this example, by arranging the block 31B on the side of the light source unit 11 at the center where the light intensity is the highest, a high light amount is obtained during dark-field illumination, and a uniform light amount distribution is obtained during bright-field illumination. Note that it is also possible to switch between partial illumination and overall illumination by using the switching mechanism in FIG. 22 and the light guide optical fiber bundle 31 in FIG.
[0132]
FIG. 23 is a schematic view showing another example of the mask body and the driving device in the magnifying observation apparatus of FIG.
[0133]
The mask body 140 shown in FIG. 23 has a pair of fan shapes, and is supported so as to be rotatable about a rotation shaft 141. Six openings 14a, 14b, 14c, 14d, 14e, and 14f are formed in the vicinity of one fan-shaped outer periphery of the mask body 140. The opening 14a has substantially the same area as the block 31B of the end face of the light guide optical fiber bundle 31 shown in FIG. 11A, and the opening 14b has the end face of the light guide optical fiber bundle 31 shown in FIG. The opening 14c has substantially the same area as the block 31B on the end face of the light guiding optical fiber bundle 31 shown in FIG. The opening 14d has substantially the same area as the block 31A of the end face of the light guide optical fiber bundle 31 shown in FIG. 19, and the opening 14e has the block 31B of the end face of the light guide optical fiber bundle 31 shown in FIG. The opening 14f has substantially the same area as the block 31C on the end face of the light guide optical fiber bundle 31 shown in FIG. A gear 142 is provided on the other fan-shaped outer peripheral portion of the mask body 140.
[0134]
The mask body 140 is arranged between the end face of the light guiding optical fiber bundle 31 and the light source 110. The gear 18 that meshes with the gear 142 of the mask body 140 is provided on the rotating shaft 17 of the motor 19. Thus, when the rotation shaft 17 of the motor 19 rotates, the mask body 140 rotates in the direction indicated by the arrow R.
[0135]
The functions of the mask body 14 of FIG. 12, the mask body 14 of FIG. 17, and the mask body 14 of FIG. 20 can be realized by one mask body 140 by using the mask body 140 and the driving device of FIG. . Therefore, by replacing the light guiding optical fiber bundle 31, switching between bright field illumination and dark field illumination, switching between overall illumination and partial illumination, switching between epi-illumination and transmission illumination, and bright-field illumination as epi-illumination It is possible to easily perform switching between dark field illumination and epi-illumination and epi-illumination with a simple structure.
[0136]
In the present embodiment, the head unit 2 corresponds to a lighting unit, a first lighting unit, and a second lighting unit. In particular, the epi-illumination holding unit 35 corresponds to a first lighting unit, and the transmitted illumination holding unit 36 corresponds to a second lighting unit. Further, the objective lens 25 corresponds to an optical system. The mask body 14 and the direct-acting solenoid 16, the lens 113 and the drive mechanism 114, or the mask body 140 and the motor 19 correspond to switching means. Further, the mask body 14 corresponds to a light shield, the direct-acting solenoid 16 or the motor 19 corresponds to a light shield drive unit, and the drive mechanism 114 corresponds to a lens drive unit.
[0137]
Further, the block 31A corresponds to a first area, the block 31B corresponds to a second area, the block 31a corresponds to a third area, and the block 31b corresponds to a fourth area. When the optical fiber bundle 31 for light guide of FIG. 19 is used, the block 31A corresponds to the first area, the block 31B corresponds to the second area, the block 31C corresponds to the third area, The block 31a corresponds to a fourth area, and the block 31b corresponds to a fifth area.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration of a head section of a magnifying observation apparatus using an illumination device for magnifying observation according to an embodiment of the present invention.
FIG. 2 is a schematic diagram showing a configuration of a controller section of the magnifying observation apparatus using the illumination device for magnifying observation according to one embodiment of the present invention.
FIG. 3 is a schematic diagram showing epi-illumination by a head unit in FIG. 1;
FIG. 4 is a schematic diagram showing an optical system at the time of epi-illumination by the head unit of FIG.
5 is a diagram illustrating an example of a configuration of a light source unit in the controller unit of FIG. 2 and a distribution of a light amount incident on an end face of a light guiding optical fiber bundle.
FIG. 6 is a diagram illustrating an example of a light guiding optical fiber bundle that can be switched between bright field illumination and dark field illumination.
FIG. 7 is a plan view of a mask body used for the light guide optical fiber bundle of FIG. 6;
FIG. 8 is a schematic diagram of a driving device for moving the mask body of FIG. 7;
FIG. 9 is a diagram illustrating another example of a light-guiding optical fiber bundle that can switch between bright-field illumination and dark-field illumination.
FIG. 10 is a schematic diagram showing an example of a mask body and a driving device used for the light guide optical fiber bundle of FIG. 9;
FIG. 11 is a diagram showing still another example of a light-guiding optical fiber bundle that can switch between bright-field illumination and dark-field illumination.
FIG. 12 is a schematic view showing an example of a mask body used for the light guide optical fiber bundle of FIG. 11;
FIG. 13 is a schematic diagram showing an image of a sample displayed on a screen by overall illumination.
FIG. 14 is a schematic diagram showing an image of a sample displayed on a screen by partial illumination.
FIG. 15 is a diagram illustrating an example of a light guide optical fiber bundle that can switch between overall illumination and partial illumination.
FIG. 16 is a schematic diagram showing an example of a light guide optical fiber bundle that can switch between epi-illumination and transmitted illumination.
FIG. 17 is a schematic diagram showing an example of a mask body and a driving device used for the light guide optical fiber bundle of FIG.
FIG. 18 is a schematic diagram showing an optical system when switching between epi-illumination and transmitted illumination using the light-guiding optical fiber bundle of FIG.
FIG. 19 is a schematic diagram showing an example of a light-guiding optical fiber bundle that can switch between bright-field illumination of epi-illumination, dark-field illumination of epi-illumination, and transmitted illumination.
20 is a diagram illustrating an example of a mask body used for the light guide optical fiber bundle of FIG. 19;
21 is a schematic diagram illustrating an example of a driving device for the mask body in FIG. 20;
FIG. 22 is a schematic view showing another example of a switching mechanism of an illumination method.
FIG. 23 is a schematic view showing another example of the mask body and the driving device in the magnifying observation apparatus of FIG. 1;
[Explanation of symbols]
1 Controller
2 Head
3 cable
11 Light source
14,140 Mask body
14A, 14a, 14b, 14c, 14d, 14e, 14f aperture
14B Shading part
16 Direct acting solenoid
17a, 19 motor
17b Rotating member
21 Imaging unit
22 CCD
23,26 mirror
24 half mirror
25 Objective lens
31 Optical fiber bundle for light guide
31A, 31B, 31C, 31a, 31b, 31c blocks
35 Epi-illumination holder
36 Holder for transmitted illumination
100 samples
113 lenses
114 drive mechanism
311 Optical fiber bundle for epi-illumination
312 Optical fiber bundle for transmitted illumination

Claims (12)

An illumination device for magnifying observation that illuminates the object when capturing an image of the object to obtain an enlarged image of the object,
A light source for generating light,
An illumination unit for illuminating an object;
A light guiding optical fiber bundle including a plurality of optical fibers for guiding the light generated by the light source to the illumination unit,
An optical system that converges light guided to the illumination unit by the light guiding optical fiber bundle and irradiates the object with the light.
One end face of the light guide optical fiber bundle is disposed on the light source side and is divided into a first area and a second area, and the other end face of the light guide optical fiber bundle is connected to the illumination unit. The optical fiber of the first region is arranged and divided into a third region at the center and a fourth region surrounding the third region, and the optical fiber of the first region is guided to the third region, A region of optical fiber is directed to said fourth region,
A state in which light generated by the light source is incident on at least the first region of the optical fiber bundle for light guiding, and light generated by the light source is incident on the second region of the optical fiber bundle for light guiding. A lighting device for magnifying observation, comprising a switching means for selectively switching between a state to be turned on and a state to be turned on. 2. The enlarged observation according to claim 1, wherein the third area is the substantially circular area at the center of the end face, and the fourth area is a substantially annular area surrounding the third area. 3. Lighting equipment. The switching means,
A light-shielding body provided so as to be insertable and removable between the light source and the one end face of the light guide optical fiber bundle,
A position where light from the light source enters at least the first region and a position where light that enters the first region from the light source is blocked and light that enters the second region from the light source passes; 3. The illumination device for magnifying observation according to claim 1, further comprising: a light-shielding body driving means for moving the light-shielding body. The switching means,
A lens provided between the light source and the one end face of the light guide optical fiber bundle,
Lens driving means for moving the lens to a position where light from the light source converges on the first and second regions and a position where light from the light source converges on the second region; The illumination device for magnifying observation according to claim 1 or 2, wherein: An illumination device for magnifying observation that illuminates the object when capturing an image of the object to obtain an enlarged image of the object,
A light source for generating light,
An illumination unit for illuminating an object;
A light guiding optical fiber bundle including a plurality of optical fibers for guiding the light generated by the light source to the illumination unit,
An optical system that converges light guided to the illumination unit by the light guiding optical fiber bundle and irradiates the object with the light.
One end face of the light guide optical fiber bundle is disposed on the light source side and is divided into a first area and a second area, and the other end face of the light guide optical fiber bundle is connected to the illumination unit. The optical fiber of the first region is divided into a third region that is arranged and can irradiate the object with light from one direction and a fourth region excluding the third region. And the optical fiber in the second area is guided to the fourth area,
The state in which the light generated by the light source is incident on the first region and the second region of the light guiding optical fiber bundle, and the light generated by the light source is transmitted through the light guiding optical fiber bundle in the light guiding optical fiber bundle. A illuminating device for magnifying observation, comprising a switching unit for selectively switching between a state where the light is incident on the first region and a state where the light is incident on the first region. The switching means,
A light-shielding body provided so as to be insertable and removable between the light source and the one end face of the light guide optical fiber bundle,
A position through which light from the light source enters the first region and the second region; a position through which light enters the first region from the light source; and a position through which light enters the second region is blocked. 6. The illumination device for magnifying observation according to claim 5, further comprising: a light-shielding body driving means for moving the light-shielding body to a position. The switching means,
A lens provided between the light source and the one end face of the light guide optical fiber bundle,
Lens driving means for moving the lens to a position where light from the light source converges on the first region and the second region and a position where light from the light source converges on the first region; The illumination device for magnifying observation according to claim 5, characterized in that: An illumination device for magnifying observation that illuminates the object when capturing an image of the object to obtain an enlarged image of the object,
A light source for generating light,
A first illumination unit for illuminating the object from the imaging side;
A second illumination unit for illuminating the object from the side opposite to the imaging side;
A light guiding optical fiber bundle comprising a plurality of optical fibers for guiding light generated by the light source to the first and second lighting units,
One end face of the light guide optical fiber bundle is disposed on the light source side and is divided into a first region and a second region, and the other side of the light guide optical fiber bundle is a first optical fiber. The optical fiber is branched into a bundle and a second optical fiber bundle, and an end face of the first optical fiber bundle is disposed in the first lighting section, and an end face of the second optical fiber bundle is arranged in the second lighting section. Arranged, the first region of optical fiber is guided to an end face of the first optical fiber bundle, and the second region of optical fiber is guided to an end surface of the second optical fiber bundle;
A state in which light generated by the light source is incident on the first region of the light guide optical fiber bundle, and a state in which light generated by the light source is incident on the second region of the light guide optical fiber bundle A lighting device for magnifying observation, comprising a switching means for selectively switching between a state and a state. The switching means,
A light-shielding body provided so as to be insertable and removable between the light source and the one end face of the light guide optical fiber bundle,
A position that allows light incident on the first region from the light source to pass therethrough and blocks light incident on the second region, and blocks light incident on the first region from the light source and the second 9. The illumination device for magnifying observation according to claim 8, further comprising: a light-shielding body driving unit that moves the light-shielding body to a position where light incident on the region passes. An illumination device for magnifying observation that illuminates the object when capturing an image of the object to obtain an enlarged image of the object,
A light source for generating light,
A first illumination unit for illuminating the object from the imaging side;
A second illumination unit for illuminating the object from the side opposite to the imaging side;
A light guiding optical fiber bundle including a plurality of optical fibers for guiding the light generated by the light source to the illumination unit,
An optical system that converges light guided to the first illumination unit by the first optical fiber bundle and irradiates the object with the light;
One end face of the light guide optical fiber bundle is disposed on the light source side and is divided into a first region, a second region, and a third region, and the other side of the light guide optical fiber bundle is a second region. The first optical fiber bundle is branched into one optical fiber bundle and a second optical fiber bundle, and an end face of the first optical fiber bundle is arranged in the first illumination unit, and a fourth region in the center and the fourth region An end surface of the second optical fiber bundle is disposed in the second illumination unit, and an optical fiber of the first region is an end surface of the first optical fiber bundle. Is guided to the fourth region, the optical fiber of the second region is guided to the fifth region on the end face of the first optical fiber bundle, and the optical fiber of the third region is guided to the second region. Is guided to the end face of the optical fiber bundle,
A state in which light generated by the light source is made incident on the first region of the light guide optical fiber bundle, and light generated by the light source is made incident on the second region of the light guide optical fiber bundle A lighting device for magnifying observation, comprising: switching means for selectively switching between a state and a state in which light generated by the light source is incident on the third region of the light guide optical fiber bundle. The enlarged observation according to claim 10, wherein the fourth region is the substantially circular region at the center of the end face, and the fifth region is a substantially annular region surrounding the fourth region. Lighting equipment. The switching means,
A light-shielding body provided so as to be insertable and removable between the light source and the one end face of the light guide optical fiber bundle,
A position for passing light incident on the first region from the light source and blocking light incident on the second and third regions, and transmitting light incident on the second region from the light source; The light shield is moved to a position where light incident on the third region is blocked and a position where light incident on the third region from the light source is passed and light incident on the first and second regions is blocked. The illumination device for magnifying observation according to claim 11, further comprising a light-shielding body driving unit.

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