JP2006337925A - Lighting device of microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lighting device of a microscope that can efficiently irradiate a sample with illumination light obtained by emitting projection light from a light source by changing the size of a lens shape provided at a pupil position and vary the size of a light source image by constituting a switching mechanism for lenses, and is inexpensive and compact. <P>SOLUTION: The lighting device of the microscope is equipped with an LED element 21, a condenser lens 22 converging the light emitted from the LED element 21, a plurality of rod lenses 11 irradiating an objective 4 with the light converged by the condenser lens 22, and a switching slider 29 switching the rod lenses 11 by sliding. Then, the lighting device can have compact and inexpensive constitution with a short optical path length and efficiently irradiate the sample with the illumination light through the switchable rod lenses 11. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an illumination device for a microscope that mounts an LED element and irradiates a specimen.

  In general, a microscope is provided with stops such as a field stop and an aperture stop. Such a microscope is provided with a Koehler illumination type illumination device that is an illumination system that uniquely adjusts illumination, and for example, provides illumination light necessary for observation of a specimen having a multi-wiring structure such as a semiconductor substrate or a liquid crystal substrate. Irradiating. First, a microscope using a general epi-type Koehler illumination method will be described with reference to FIG.

  Such an episcopic Koehler illumination microscope 101 is provided with a stage 103 on which a specimen 102 is placed. An epi-illumination projection tube 109 is provided above the epi-illumination Koehler illumination microscope 101, and a light source 104 is provided at one end of the epi-illumination projection tube 109. For example, a halogen lamp filament is used as the light source 104.

  A condensing lens 105 is provided on the light source 104 side of the epi-illuminated Koehler illumination microscope 101, and an epi-illumination projection tube 109 has an aperture stop 107 for condensing light transmitted through the condensing lens 105, a condensing lens 106, A half mirror 108 that reflects transmitted light downward is provided. Further, in the epi-type Koehler illumination microscope 101, a revolver 110 is provided below the half mirror 108, and a plurality of objective lenses 112 are attached to the revolver 110.

  The Koehler illumination in the epi-illuminated Koehler illumination microscope 101 projects the light emitted from the light source 104 onto the back focal position of the objective lens 112 (hereinafter referred to as the objective pupil 111). As a result, the sample 102 is uniformly irradiated without being affected by the luminance distribution of the light source 104. Therefore, the observer can observe with less unevenness in the amount of light.

  In such an episcopic Koehler illumination microscope 101, an aperture stop 107 is provided on the illumination optical path in order to prevent unnecessary light such as flare and ghost from entering the observation optical path to reduce the contrast of the specimen 102. As a result, the light emitted from the light source 104 is intermediately formed once on the surface of the aperture stop 107 with the image of the light source. At that time, the incident-light Koehler illumination microscope 101 adjusts the size of the light source image to be incident on the objective pupil 111 by the aperture stop 107 and cuts the unnecessary light not used for observation not to be incident on the objective lens 112. .

  In general, since the size of the objective pupil 111 varies depending on the magnification of the objective lens to be used, the observer needs to adjust the diameter of the aperture stop 107 every time the magnification of the objective lens 112 is switched.

  However, such an adjustment method makes the illumination light path longer because an intermediate light source image is formed. When the illumination optical path becomes longer, the length of the light projection tube 109 having such an illumination optical path becomes longer, which causes a problem that the configuration of the microscope 101 is enlarged.

  In addition, since the illumination light emitted from the light source 104 cannot be used efficiently in order to stop the light with the aperture stop 107, it is necessary to use a light source that emits higher luminance. When such a light source is used, the price of the apparatus becomes expensive.

To solve such a problem, Patent Document 1 discloses a microscope in which an LED array is arranged directly at an aperture stop position to constitute a Kohler illumination system. Such a microscope uses partial lighting of the LED array in order to change the size of the light source image projected onto the objective pupil.
JP 2001-154103 A

  However, the microscope disclosed in Patent Document 1 must be provided with a dedicated LED lighting circuit necessary for partial lighting, which complicates the configuration itself and makes the apparatus expensive. In addition, since there are some LEDs that are not turned on by partial lighting, there is a problem that illumination light emitted from the LED array cannot be used efficiently.

  The present invention includes at least one light emitting element that emits light, a condensing lens that condenses light emitted from the light emitting element, and light collected by the condensing lens is incident from an incident end face. And at least one light transmission member that emits incident light as linear light having substantially uniform intensity, and a projection optical system that projects light emitted from the emission end face of the light transmission member onto the pupil position of the objective lens. The light transmission member is an illumination device for a microscope, wherein the light transmission member is arranged to be exchangeable or switchable according to the type of the objective lens.

  According to the present invention, the illumination light emitted from the light source is efficiently irradiated onto the specimen by changing the size of the lens shape provided at the pupil position, and the lens switching mechanism is provided. By configuring, the size of the light source image can be changed, and an inexpensive and small illumination device for a microscope can be provided.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  The first embodiment according to the present invention will be described in detail with reference to FIGS. FIG. 1 is a diagram showing a schematic configuration of the entire apparatus in the present embodiment used for bright field. FIG. 2 is an enlarged cross-sectional view around the light source unit.

  The microscope main body 1 is provided with an XYZ table 3. A specimen 2 is placed on the XYZ table 3, and the specimen 2 is moved to an observation and measurement target region and a focusing operation is performed.

  An epi-illumination projection tube 7 is provided on the upper part of the microscope body 1. The incident light projection tube 7 reflects a light source unit 8 that emits light to irradiate the specimen 2, a projection lens 9 that transmits the emitted light emitted from the light source unit 8, and a transmitted light that has transmitted through the projection lens 9. Then, a half mirror 10 that projects onto the specimen 2 and transmits the reflected light from the specimen 2 is provided. Among these, the half mirror 10 is provided on the observation optical axis 5.

  A revolver 6 is rotatably provided on the observation optical axis 5 in the microscope body 1 and below the half mirror 10. A plurality of objective lenses 4 are attached to the revolver 6. The revolver 6 rotates to arrange a desired objective lens 4 among the plurality of objective lenses 4 on the observation optical axis 5.

  In addition, a lens barrel 11 is provided on the observation optical axis 5 and above the half mirror in the microscope body 1. The lens barrel 11 is provided for observing an enlarged image of the sample 2.

  A dimming controller 12 for turning on and dimming the light source is connected to the light source unit 8. As shown in FIG. 2, the light source unit 8 includes an LED element 21 that is a light emitting element that emits light, a condensing lens 22 that condenses the light emitted from the LED element 21, and a condensing lens 22. A plurality of, for example, three rod lenses 23 a, 23 b, and 23 c that enter the collected light, reflect the light multiple times inside, and emit the light toward the projection lens 9 are provided. In this embodiment, the number of LED elements is one, but a plurality of LED elements may be arranged like an LED array. In this embodiment, three rod lenses are arranged, but the number is not limited to three.

  The exit end faces of the rod lenses 23a, 23b, and 23c are arranged so as to be in a position conjugate to the back focal position (objective pupil plane 13) of the objective lens 4 or in the vicinity thereof.

The rod lens 23a is formed in a cylindrical shape having a uniform diameter, for example. A diffusion surface 24a for diffusing and emitting light is provided on the exit end face of the rod lens 23a. The diffusion surface 24a is a surface called a grained surface, for example.
On the other hand, the size of the incident end face of each of the rod lenses 23b and 23c is equal to that of the rod lens 23a, but has a tapered shape in which the cross-sectional area changes toward the exit end face. Among these, the rod lens 23b is formed in a taper shape whose cross-sectional shape becomes smaller from the incident end face toward the exit end face. The rod lens 23c is formed in a taper shape whose cross-sectional shape increases from the incident end surface toward the exit end surface. Diffusion surfaces 24b and 24c similar to the diffusion surface 24a are provided on the exit end surfaces of the rod lenses 23b and 23c, respectively.

  These rod lenses 23 a, 23 b and 23 c are held by a switching slider 29. The switching slider 29 is provided with V-grooves 25 at positions corresponding to the arrangement positions of the rod lenses 23a, 23b, and 23c.

The switching slider 29 is provided so as to be slidable in the direction of the arrow 28 by a guide mechanism (not shown) provided in the incident light projection tube 7.
Inside the incident light projection tube 7, a bearing 26 and an ita spring 27 are provided. The bearing 26 and the ita spring 27 constitute a click mechanism. This click mechanism presses the bearing 26 against the switching slider 29 by the urging force of the ita spring 27. Therefore, when the switching slider 29 is slid in the direction of the arrow 28 and the bearing 26 is engaged in one V groove 25 of each V groove 25, the rod lens 23a, 23b or 23c corresponding to the V groove 25 is irradiated with illumination light. Positioned on the axis L. FIG. 2 shows a state in which the rod lens 23a is fixedly disposed on the illumination optical axis L.

  Next, the operation of the microscope illumination apparatus configured as described above will be described with reference to FIG.

  The emitted light emitted from the LED element 21 is collected by the condenser lens 22 and enters the incident end face of the rod lens 23a. Incident light that has entered the incident end face is diffused in various directions from the diffusing surface 24a that is the exit end face while being repeatedly reflected inside the rod lens 23a. At this time, the incident light incident on the rod lens 23 is emitted as uniform light on the front surface of the diffusion surface 24a.

  The diffused light diffused from the diffusing surface 24a is collected by the projection lens 9, reflected by the half mirror 10 toward the objective lens on the observation optical axis 5, and then the back focal position of the objective lens 4 (hereinafter referred to as objective). An image of the diffusion surface 24a is formed on the pupil plane 13). That is, Koehler illumination that is a projection optical system using the diffusion surface 24a as a secondary light source is performed.

The projection lens 9 is arranged at a position where the size of the diffused secondary light source image formed on the objective pupil plane 13 is substantially equal to the pupil diameter of the objective lens 4.
The reflected light reflected from the surface of the sample 2 is condensed again on the objective lens 4 and enters the lens barrel 11 via the objective pupil surface 13 and the half mirror 10. Thereby, the observer observes an enlarged image of the specimen 2 with an eyepiece (not shown) of the lens barrel 11. At this time, the observer can increase or decrease the amount of light with respect to the observation image by adjusting the brightness of the light source unit 8 with the dimming controller 12.

  Next, an operation method when switching the objective lens 4 will be described.

  For example, when the observer rotates the revolver 6 to switch to a high-magnification objective lens, the switching slider 29 is pulled out one step in the downward direction indicated by the arrow 28 in order to place the rod lens 23 b on the illumination optical path L. That is, when the switching slider 29 is slid in the direction of the arrow 28 and the bearing 26 is engaged in one V groove 25 of each V groove 25, the rod lens 23b corresponding to the V groove 25 is placed on the illumination optical axis L. Positioned. As a result, the incident light incident on the drawn rod lens 23b is repeatedly reflected and sequentially emitted from the diffusion surface 24b within the rod lens 23b.

  Diffused light diffused from the diffusing surface 24 b is collected by the projection lens 9, reflected by the half mirror 10, and forms an image of the diffusing surface 24 b on the objective pupil surface 13. Since the area of the diffusing surface 24b is smaller than that of the diffusing surface 24a, the diffusion secondary light source image projected onto the objective pupil surface 13 is small and the luminance is high.

  In general, the objective pupil diameter tends to decrease as the magnification of the objective lens increases. However, since the projection image of the diffusing surface 24b is also made small, almost all the light emitted from the LED element 21 is condensed on the objective lens 4. That is, switching the rod lens by the switching slider 29 has a function equivalent to the adjustment of the aperture stop.

  The illumination light that has passed through the objective pupil plane 13 is condensed on the objective lens 4 and Koehler illuminates the sample 2. The light reflected and scattered by the sample surface is condensed again on the objective lens 4, passes through the objective pupil surface 13 and the half mirror 10, enters the lens barrel 11, and an enlarged image of the sample 2 is observed as described above. .

  In addition, when the observer switches to a low magnification objective lens, the observation is performed by the same procedure as described above. The observer pulls up the rod lens 23c with the switching slider 29 as shown by the arrow 28 so as to enter the illumination optical path. That is, when the switching slider 29 is slid in the direction of the arrow 28 and the bearing 26 is engaged in any one of the V grooves 25, the rod lens 23c corresponding to the V groove 25 is placed on the illumination optical axis L. Is positioned. Thereby, the area of the diffusing surface 24c of the rod lens 23c is larger than that of the diffusing surfaces 24a and 24b, and the size thereof is a size capable of obtaining a projection image corresponding to the size of the pupil of the low-magnification objective lens 4 to be used. That's it. Also in this case, the emitted light emitted from the LED element 21 is efficiently irradiated onto the specimen 2 and illumination that satisfies all the size of the objective pupil 13 can be performed.

  As described above, according to the first embodiment, it is possible to switch to any one of the rod lenses 23a, 23b, and 23c having different exit end face shapes by simply sliding the switching slider 29. The size of the light source image projected onto the objective pupil plane 13 can be changed. As a result, the observer can obtain a high-contrast observation image that blocks harmful light causing flare and ghost.

  Further, since it is not necessary to project the light source image once at the aperture stop position, the illumination optical path is shortened. In addition, according to the first embodiment, it is not necessary to newly provide a diaphragm mechanism in order to perform the same function as the diaphragm mechanism by switching the rod lenses 23a, 23b, and 23c by the switching slider 29. There is no need for a special lighting circuit for lighting. Therefore, the device has an inexpensive and small configuration.

  Furthermore, according to the first embodiment, since the exit end face shape of the rod lens is changed in accordance with the pupil diameter of the objective lens 4, the sample 2 can be efficiently irradiated onto the specimen 2 without losing the emitted light from the LED element 21. . Therefore, the observer can obtain a bright observation image even when using a low-cost and low-luminance light source or a high-magnification objective lens with a small pupil diameter.

Next, a second embodiment according to the present invention will be described in detail with reference to FIG.
In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  For example, three sliders 29a, 29b, and 29c are prepared. Among these, the slider 29a is provided with a rod lens 23a, the slider 29b is provided with a rod lens 23b, and the slider 29c is provided with a rod lens 23c. These sliders 23a, 23b, and 23c are exchanged according to the objective lens 4 to be used.

  Thus, when the objective lens 4 to be used is determined in advance, the observer need only prepare the slider 29a, 29b or 29c provided with the necessary rod lens 23a, 23b or 23c corresponding to the objective lens 4. . Accordingly, since only the rod lens to be used needs to be prepared, the present apparatus has an inexpensive configuration, and the same effect as that of the first embodiment described above can be obtained.

Next, a third embodiment according to the present invention will be described in detail with reference to FIG.
In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  In the first embodiment described above, only the rod lens is replaced. However, in the present embodiment, the LED units 31a, 31b, and 31c that integrally form the LED element 21, the condenser lens 22, and the rod lens are integrated. It is the structure exchanged for any one of these. Each LED unit 31a, 31b, 31c is provided with each rod lens 23a, 23b, 23c having a different shape.

  As a result, the present embodiment can have an inexpensive configuration in the same manner as the second embodiment described above, and can obtain the same effects as those of the first embodiment described above.

Next, a fourth embodiment according to the present invention will be described in detail with reference to FIG.
In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  The present embodiment is a microscope using a transmission illumination system. A light source unit 8, a mirror 32, and a projection lens 33 are provided below the microscope body 1. Although the light source unit 8 is provided at the lower part of the microscope main body 1, the light source unit 8 includes a switching slider 29 that holds, for example, the rod lenses 23a, 23b, and 23c, as in the first embodiment, and a bearing. The rod lens 23 a, 23 b, or 23 c is positioned on the illumination optical axis L by a click mechanism that includes a spring 26 and a spring 27.

  Since each exit end face of each rod lens 23a, 23b, 23c is arranged at a position corresponding to the aperture stop of transmitted illumination, an image of the exit end is projected onto the objective pupil plane 13 of the objective lens 4. Thus, a Kohler illumination system is configured.

  As described above, according to the present embodiment, it can be applied to a microscope using a transmission illumination method, and a transmission illumination image of a specimen to be observed can be observed. Other operations and effects are the same as those in the first embodiment described above. It is the same.

  Moreover, the microscope which has both transmitted illumination and epi-illumination may be sufficient.

Next, a fifth embodiment according to the present invention will be described in detail with reference to FIG.
In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  In the present embodiment, the relay lens 35 is provided on the illumination optical axis L between the projection lens 9 and the light source unit 8. As a result, the optical image of the diffusing surface at the exit end of the rod lens 23 is formed on the intermediate image plane 36 in the epi-illumination projection tube via the relay lens 35 and projected onto the objective pupil plane 13. In this case, the intermediate image plane 36 corresponds to the aperture stop position of the microscope, but the aperture mechanism is unnecessary because the NA (numerical aperture) of the illumination is adjusted by the shape and size of the rod lens.

  With this configuration, light is not lost at the aperture stop, and the specimen 2 is efficiently irradiated with illumination light, so that a bright observation image can be obtained.

Next, a sixth embodiment according to the present invention will be described in detail with reference to FIGS.
FIG. 7 is a configuration diagram of a microscope according to the present embodiment used for dark field illumination. FIG. 8 is an enlarged cross-sectional view around the light source unit 8.
In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  The microscope main body 1 has an XYZ table 3 that moves the observation specimen 2 to the observation measurement target region and performs a focusing operation, and a plurality of objective lenses 4 that are used for observation and have a dark field illumination optical path. Thus, a revolver 6 for disposing a desired objective lens 4 on the observation optical axis 5 and an epi-illumination projection tube 7 disposed above the revolver 6 are provided.

  The incident light projection tube 7 includes a light source unit 8 that illuminates the specimen 2, a projection lens 9 that guides the illumination light emitted from the light source unit 8 to the objective lens 4, and illumination light that has passed through the projection lens 9. A half mirror 10 is provided that reflects the sample 2 on the axis 5 side, irradiates the sample 2, and transmits the reflected light from the sample 2. Among these, the light source unit 8 is connected to a dimming controller 12 for turning on and dimming the light source. Further, a lens barrel 11 for observing an enlarged image of the specimen 2 is provided above the half mirror 10 and on the extension of the observation optical axis 5.

  FIG. 8 is a configuration diagram of the light source unit 8. The light source unit 8 includes an LED element 21, a condensing lens 22 that condenses the light emitted from the LED element 21, and a conical hollow part 37 provided behind the condensing lens 22. A rod lens 23d is provided. The rod lens 23d can be exchanged or switched to one having a different exit end shape by the same mechanism as in the first embodiment.

  Further, the exit end face of the rod lens 23d is disposed so as to be in a position that is beneficial to the objective pupil 13 or in the vicinity thereof.

  The rod lens 23d has a cylindrical shape on the incident end face side and a cylindrical shape on the exit end face side, and emits light incident on the circular incident end face as annular light from the exit end face. That is, the end surface of the conical hollow portion is provided on the exit end side of the rod lens 23d. A diffusion surface 18d (grained surface) is provided on the light emission end face. By forming the conical hollow portion 37, the shape of the diffusing surface 18d is annular, that is, a donut shape.

  Next, the operation method in the present embodiment will be described in detail.

  The emitted light emitted from the LED element 21 is collected by the condenser lens 22 and then enters the incident end of the rod lens 23d. The incident light that has entered is repeatedly reflected inside the rod lens 23d. This reflected light is guided to the peripheral side of the rod lens 23d by the conical hollow portion 37 and diffused from the doughnut-shaped diffusion surface 24d. In this manner, light enters the rod lens 23d at various angles and positions from the condenser lens 22, and the incident light is emitted as light having a uniform amount of light from the diffusion surface 24d. The light diffused from the diffusing surface 24d does not pass on the observation optical axis 5. The diffused light is collected by the projection lens 9 and reflected by the half mirror 10 to form an image of the diffusion surface 24d on the objective pupil plane 13 of the objective lens 4.

  The projection lens 9 has an optical arrangement such that the shape of the diffuse secondary light source image formed on the objective pupil plane 13 is substantially equal to the aperture shape of the dark field illumination optical path in the objective lens 4 to be used. Thereby, the light that has passed through the objective pupil plane 13 illuminates the sample 2 from an oblique direction via the dark field optical path provided in the objective lens 4. Of the light scattered on the sample surface, the light that enters the NA range of the objective lens 4 is condensed on the objective lens 4, passes through the objective pupil surface 13, passes through the half mirror 10, and then enters the lens barrel 11. Incident. Thereby, the observer can observe the dark field enlarged image of the sample 2. At this time, the observer increases or decreases the amount of light with respect to the observation image by adjusting the brightness of the light source unit 8 with the dimming controller 12.

  In addition, when the observer switches the observation method to bright field observation, similarly to the first embodiment described above, the observer switches to each rod lens 23a, 23b, 23c as shown in the first embodiment using the switching slider. Just do it.

  In this embodiment, the observer can change the shape of the light source image projected onto the objective pupil simply by moving the switching slider, and light is diffused from the peripheral edge of the exit end of the rod lens. It is also possible to observe a specimen that requires a light source image other than a circular shape. Further, since the observer can efficiently use the irradiation light from the LED element as dark field illumination light without waste, a bright observation image can be obtained.

Next, a seventh embodiment according to the present invention will be described in detail with reference to FIG. In addition, the same code | symbol is attached | subjected to the part same as 1st and 2nd embodiment mentioned above, and the detailed description is abbreviate | omitted.
As shown in the figure, this embodiment can be applied to a microscope that performs oblique illumination (hereinafter referred to as annular illumination) within the range of NA of the objective lens, unlike the sixth embodiment described above. The objective lens 4 used in the microscope in the present embodiment is a bright-field objective lens, but in the present embodiment, the sample 2 is irradiated with light obliquely.
The rod lens 23e has an exit end in a donut shape as in the sixth embodiment described above. Since the configuration other than the rod lens and the objective lens is the same as that of the above-described sixth embodiment, detailed description thereof is omitted.

  The size of the exit end face image of the rod lens 23e on the objective pupil plane 13 is substantially the same as the pupil diameter of the objective lens. However, since the exit end of the rod lens 23e has a donut shape, illumination light is not guided on the observation optical axis 5. That is, the sample is illuminated from the outer peripheral portion of the NA of the objective lens 4.

  The light reflected and scattered by the sample surface is again collected by the objective lens 4, passes through the objective pupil plane 13, passes through the half mirror 10 and enters the lens barrel 11, and an enlarged image of the sample 2 is observed. .

  In the present embodiment, in bright field observation, the illumination light is emitted obliquely with respect to the sample, not from the optical axis with respect to the sample 2. Therefore, the observer can obtain an observation image in which the contrast of a portion having a fine shape change having an edge portion or a step of the sample 2 is emphasized.

  In addition, the present embodiment enables not only bright-field observation and dark-field observation but also observation in which illumination NA such as annular illumination can be freely changed by selectively using rod lenses having various shapes. Since this embodiment can be realized with the same light projecting tube, it is not necessary to prepare a dedicated light projecting tube according to the observation method, and the configuration is small and inexpensive. Further, the illumination is not limited to epi-illumination, and transmission illumination may be used for observation of dark field and annular illumination.

  Next, an eighth embodiment according to the present invention will be described in detail with reference to FIGS. In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  In this embodiment, instead of the rod lens 23, optical fiber bundles 39 and 40 in which a plurality of optical fibers are bundled as shown in FIGS. 10 and 11 are used.

  In the optical fiber bundle 39 shown in FIG. 10, the arrangement density of each optical fiber is greatly changed, for example, as it goes from the entrance surface 39a to the exit surface 39b. In the present embodiment, a Koehler illumination system using the optical fiber bundle 39 and the emission surface 39b as a secondary light source may be configured.

  Further, in the optical fiber bundle 40 shown in FIG. 11, the arrangement position of the optical fiber bundle 40 is changed into a donut shape as it goes from the incident surface 40a to the exit surface 40b, and it is in a state of being densely packed on the outer periphery. In the present embodiment, such an optical fiber bundle 40 may be used to form a dark field illumination or an annular illumination system in which the exit surface 40b is a secondary light source.

  Next, a ninth embodiment according to the present invention will be described in detail with reference to FIGS. FIG. 12 is a configuration diagram of a microscope according to the present embodiment. In addition, the same code | symbol is attached | subjected to the part same as 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

  The microscope main body 1 is provided with an XYZ table 3 for moving the observation specimen 2 to the observation target region and performing a focusing operation. The plurality of objective lenses 4 used for observation arranged opposite to the XYZ table 3 illuminate the specimen 2 above the electric revolver 45 where the desired objective lens 4 is arranged on the observation optical axis 5 by the rotation of the electric revolver 45. An epi-illumination tube 7 is disposed.

  The incident light projection tube 7 includes an LED element 21 that illuminates light, a condensing lens 22 that condenses the illumination light from the LED element 21, and a plurality of tapered rod lenses 46 that are held by a turret 47. , A projection lens 9 that collects and transmits illumination light from the light source unit 8, and a half that reflects illumination light that has passed through the projection lens 9 and transmits reflected light from the specimen 2. And a mirror 10. A lens barrel 11 for observing an enlarged image of the specimen 2 is disposed above the half mirror 10 and on the extension of the observation optical axis 5.

  As shown in FIG. 13, rod lenses 46 a, 46 b, 46 c, 46 d having different emission surface shapes and sizes are arranged by a turret 47. The center of the turret 47 is fixed to the rotating shaft 48. The rotating shaft 48 is rotated by a motor 49 fixed to the microscope body 1.

  The motor 49, the LED element 21, and the electric revolver 45 are connected to a controller 50 that controls the motor 49, adjusts the light amount of the LED element 21, and controls the electric revolver 45. The controller 50 is connected to an instruction unit 51 for instructing dimming of the LED element 21 and switching of the objective lens 4.

  The functions and the like of the rod lenses having different sizes and shapes arranged in the turret 47 are the same as those in the first and second embodiments described above. In this embodiment, the rod lens to be used is switched by rotating the turret 47 by the motor 49.

  The observer gives an instruction to the instruction unit 51 to switch to the desired objective lens 4. Upon receiving the instruction, the controller 50 drives the electric revolver 45 to switch to the designated objective lens 4 and drives the motor 49 to switch to the rod lens corresponding to the pupil diameter of the objective lens 4. That is, the switching of the objective lens 4 and the switching of the rod lens are interlocked.

  Other operations are the same as those in the first and second embodiments described above.

  In this embodiment, the observer can obtain an optimal illumination state simply by selecting a desired objective lens, and can save time and effort. In this embodiment, four rod lenses are arranged in the turret 47, but the number is not limited to this. For example, if six types of objective lenses are attached to the revolver, six rod lenses having shapes corresponding thereto may be provided.

It is a figure which shows schematic structure of the whole apparatus in 1st Embodiment which concerns on this invention. It is an expanded sectional view of the light source part periphery which concerns on this embodiment. It is a figure which shows 2nd Embodiment based on this invention. It is a figure which shows 3rd Embodiment based on this invention. It is a figure which shows 4th Embodiment based on this invention. It is a figure which shows 5th Embodiment which concerns on this invention. It is a figure which shows schematic structure of the whole apparatus in the 6th Embodiment concerning this invention. It is an expanded sectional view of the light source part periphery which concerns on this embodiment. It is a figure showing a 7th embodiment concerning the present invention. It is a figure which shows 8th Embodiment which concerns on this invention. It is a figure which shows 8th Embodiment which concerns on this real invention. It is a figure which shows schematic structure of the whole apparatus in 9th Embodiment which concerns on this invention. It is arrangement | positioning block diagram of the rod lens which concerns on this embodiment. It is a figure which shows the structure of the conventional microscope.

Explanation of symbols

  1: Microscope, 2: Specimen, 3: Stage, 4: Objective lens, 5: Observation optical axis, 6: Revolver, 7: Slope tube, 8: Light source, 9: Projection lens, 10: Half mirror, 11: lens barrel, 12: controller, 13: objective pupil plane, 21: LED element, 22: condenser lens, 23: rod lens, 24a, 24b, 24c, 24d: diffusion surface, 25: V groove, 26: bearing 27: Ita spring, 28: Arrow, 29: Switching slider, 31a, 31b, 31c: LED unit, 35: Relay lens, 36: Intermediate imaging plane, 37: Hollow part, 39, 40: Optical fiber bundle, 45: Electric Revolver, 47: Turret, 48: Rotating shaft, 49: Motor, 50: Controller, 51: Instruction unit.

Claims (13)

At least one light emitting element that emits light;
A condenser lens that condenses the light emitted from the light emitting element;
The light collected by the condenser lens is incident from an incident end face, and the incident light is emitted from the exit end face as linear light having substantially uniform intensity; and
A projection optical system that projects the light emitted from the exit end face of the light transmission member onto a pupil position of an objective lens;
Comprising
The illumination device for a microscope, wherein the light transmission member is arranged to be exchangeable or switchable according to a type of the objective lens. At least one light emitting element that emits light;
A condenser lens that condenses the light emitted from the light emitting element;
The light collected by the condenser lens is incident from an incident end face, and the incident light is emitted from the exit end face as linear light having substantially uniform intensity; and
A projection optical system that projects the light emitted from the exit end face of the light transmission member onto a pupil position of an objective lens;
Comprising
The illumination device for a microscope, wherein the light emitting element, the condensing lens, and the light transmission member are integrally exchangeable.   The illumination device for a microscope according to claim 1, wherein the light transmission member is a rod lens, and the emission end surface has a diffusion surface.   The illumination device for a microscope according to claim 1, wherein the exit end surface is disposed at a position conjugate with or near a pupil position of the objective lens.   The illumination device for a microscope according to claim 1, wherein the light transmission member is formed in a tapered shape.   4. The microscope illumination device according to claim 1, wherein the light transmission member is exchanged or switched according to a slider type.   The illumination apparatus for a microscope according to any one of claims 1, 2, and 3, wherein the emission end face of the light transmission member is disposed at an aperture stop position of a Kohler illumination optical system.   The light transmission member has a cylindrical shape on the incident end face side and a cylindrical shape on the exit end face side, and emits the light incident on the circular incident end face as an annular light from the exit end face. The illumination device for a microscope according to any one of claims 1, 2, and 3.   The illumination device for a microscope according to claim 1, wherein the light transmission member is formed in an annular shape.   The illumination device for a microscope according to claim 1, wherein the light transmission member is formed of an optical fiber bundle.   The optical fiber bundle is arranged uniformly over the entire area of the incident end face, is arranged in an annular shape from the incident end face toward the exit end face, and a hollow portion is formed in the exit end face. The microscope illumination apparatus according to 10.   4. The microscope illumination apparatus according to claim 1, wherein the light transmission member is switched by a turret type.   4. The microscope illumination apparatus according to claim 1, wherein the light transmission member is switched in conjunction with the switching of the objective lens. 5.

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