JP2001154103A - Illuminator for optical instrument - Google Patents
Illuminator for optical instrumentInfo
- Publication number
- JP2001154103A JP2001154103A JP34033299A JP34033299A JP2001154103A JP 2001154103 A JP2001154103 A JP 2001154103A JP 34033299 A JP34033299 A JP 34033299A JP 34033299 A JP34033299 A JP 34033299A JP 2001154103 A JP2001154103 A JP 2001154103A
- Authority
- JP
- Japan
- Prior art keywords
- light source
- illumination light
- dark
- field
- bright
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Microscoopes, Condenser (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、明視野照明と暗視
野照明とを切り替えて使用する顕微鏡等の光学器械の照
明装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lighting device for an optical instrument such as a microscope which switches between bright field illumination and dark field illumination.
【０００２】[0002]
【従来の技術】顕微鏡には透過型顕微鏡と反射型顕微鏡
とがあり、両顕微鏡共に照明に明視野照明と暗視野照明
とが利用される。この種の照明装置としては、従来より
白熱ランプを直接、或いは白熱ランプからの光をファイ
ババンドルを介して照明するようにした装置が知られて
おり、コンデンサレンズを使用してランプのフィラメン
ト像、或いはファイバ端画像を開口絞りに投影すること
がなされている。明視野照明では、観察対象を光軸に沿
って照明するため、光軸及びその周辺部を開口させた開
口絞りを使用して観察対象を中央部から照明する。この
場合、開口絞りを可変とすることで、照明ＮＡ（Numeri
cal Aperture）を可変としている。また、暗視野照明で
は、対物レンズのＮＡ範囲の外を周辺から照明するた
め、対物レンズのＮＡの範囲をカットするリング状マス
クを挿入する。明視野と暗視野とを切り替えるために
は、例えばメカニカルな移動機構を有した装置にノブ等
を取り付けて、これを移動させることにより、明視野と
暗視野とを切り替えるという方法が知られている（例え
ば実開昭６３−１７８８０７号）。2. Description of the Related Art There are a transmission microscope and a reflection microscope, and both microscopes use bright-field illumination and dark-field illumination for illumination. As this type of illuminating device, a device that illuminates an incandescent lamp directly or light from an incandescent lamp via a fiber bundle has been known, and a filament image of the lamp using a condenser lens, Alternatively, a fiber end image is projected on an aperture stop. In bright-field illumination, the observation target is illuminated from the center using an aperture stop having an opening in the optical axis and its peripheral portion in order to illuminate the observation target along the optical axis. In this case, by changing the aperture stop, the illumination NA (Numeri
cal Aperture) is variable. In dark field illumination, a ring-shaped mask for cutting the NA range of the objective lens is inserted to illuminate the outside of the NA range of the objective lens from the periphery. In order to switch between the bright field and the dark field, for example, a method of switching between the bright field and the dark field by attaching a knob or the like to an apparatus having a mechanical moving mechanism and moving the knob or the like is known. (For example, Japanese Utility Model Laid-Open No. 63-178807).
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来の顕微鏡
の照明装置では、白熱ランプの寿命が短いため、これを
頻繁に交換しなければならない。しかも、ランプのフィ
ラメント位置にばらつきがあるため、ランプ交換時に
は、コンデンサレンズに対するフィラメントの位置の調
整作業と調整のための機構とが必要になる。However, in the conventional illumination device for a microscope, the life of an incandescent lamp is short, so that the lamp must be replaced frequently. In addition, since there is a variation in the filament position of the lamp, when replacing the lamp, an operation of adjusting the position of the filament with respect to the condenser lens and a mechanism for adjustment are required.
【０００４】本発明は、かかる問題点に鑑みなされたも
ので、ランプ交換、そのための調整作業及び調整機構を
必要としない光学器械の照明装置を提供することを目的
とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide an illumination device for an optical instrument that does not require lamp replacement, adjustment work therefor, and an adjustment mechanism.
【０００５】[0005]
【課題を解決するための手段】本発明に係る顕微鏡の照
明装置は、光軸上に配置されて観察対象に対して明視野
照明光を照射する明視野照明光源と、前記光軸上に配置
されて前記観察対象に対して暗視野照明光を照射する暗
視野照明光源と、前記明視野照明光源と暗視野照明光源
とを切り替える照明切替手段とを備えた光学器械の照明
装置において、前記暗視野照明光源及び明視野照明光源
は、複数の半導体発光素子から構成されたものであるこ
とを特徴とする。An illumination device for a microscope according to the present invention is arranged on an optical axis to irradiate a bright-field illumination light to an observation object, and is arranged on the optical axis. The illumination device for an optical instrument, further comprising: a dark-field illumination light source configured to irradiate the observation target with dark-field illumination light; and an illumination switching unit configured to switch between the bright-field illumination light source and the dark-field illumination light source. The field illumination light source and the bright field illumination light source are configured by a plurality of semiconductor light emitting elements.
【０００６】本発明によれば、暗視野光源及び明視野光
源が、複数の半導体素子から構成されているので、ラン
プ交換、そのための調整作業及び調整機構が不要であ
り、発熱量も少なく、照明装置自体の大きさもコンパク
トにすることができる。According to the present invention, since the dark-field light source and the bright-field light source are composed of a plurality of semiconductor elements, lamp replacement, adjustment work and an adjustment mechanism therefor are not required, the amount of heat generation is small, and the illumination is reduced. The size of the device itself can be made compact.
【０００７】本発明の好ましい実施形態によれば、明視
野照明光源及び暗視野照明光源が、複数の半導体発光素
子を二次元的に配設してなる１つの共通照明光源からな
る。この場合、照明切替手段は、例えば共通照明光源の
中央部分の照明光を通過させる開口絞りと、共通照明光
源の周縁部分の照明光を通過させるリング状マスクと、
開口絞り及びリング状マスクを光軸上に選択的に配置す
る手段とを備えたものとするようにしても良いが、複数
の半導体発光素子を使用することによるメリットをより
高めるためには、共通照明光源を、複数の半導体発光素
子のうち中央部分の半導体発光素子と、周縁部分の半導
体発光素子とがそれぞれ独立に点灯可能に構成すること
が望ましい。この場合、照明切替手段は、共通照明光源
の中央部分の半導体発光素子と周縁部分の半導体発光素
子の点灯／消灯を切り替える手段であればよい。このよ
うに構成することで、照明切替手段を電気的に構成する
ことができ、機構部分をよりコンパクト化することがで
きる。According to a preferred embodiment of the present invention, the bright-field illumination light source and the dark-field illumination light source comprise one common illumination light source in which a plurality of semiconductor light emitting devices are two-dimensionally arranged. In this case, the illumination switching unit includes, for example, an aperture stop that allows illumination light at a central portion of the common illumination light source to pass therethrough, and a ring-shaped mask that allows illumination light at a peripheral portion of the common illumination light source to pass therethrough.
A means for selectively arranging the aperture stop and the ring-shaped mask on the optical axis may be provided, but in order to further increase the advantage of using a plurality of semiconductor light emitting elements, It is preferable that the illumination light source is configured such that the semiconductor light emitting element at the center and the semiconductor light emitting elements at the peripheral edge of the plurality of semiconductor light emitting elements can be turned on independently. In this case, the illumination switching means may be any means that switches on / off the semiconductor light emitting element at the center and the semiconductor light emitting element at the peripheral part of the common illumination light source. With this configuration, the illumination switching means can be electrically configured, and the mechanism can be made more compact.
【０００８】また、明視野照明光源と暗視野照明光源と
を別々に設けることも考えられる。この場合、明視野照
明光源は、光軸及びその周辺部を照明するように複数の
半導体発光素子を二次元的に配設して構成し、暗視野照
明光源は、明視野照明光源よりも外側の周縁部を照明す
るように複数の半導体発光素子をリング状に配設して構
成することができる。It is also conceivable to provide a bright-field illumination light source and a dark-field illumination light source separately. In this case, the bright-field illumination light source is configured by arranging a plurality of semiconductor light-emitting elements in a two-dimensional manner so as to illuminate the optical axis and the periphery thereof, and the dark-field illumination light source is located outside the bright-field illumination light source. A plurality of semiconductor light emitting elements can be arranged in a ring shape so as to illuminate the periphery of the light emitting element.
【０００９】[0009]
【発明の実施の形態】以下、添付の図面を参照してこの
発明の好ましい実施の形態について説明する。 図１
は、この発明の一実施例に係る反射型顕微鏡の特に照明
装置部分を示す部分断面図である。試料台１の上方位置
には、試料台１に載置された観察対象２と対向するよう
に対物レンズ３が配置されている。この対物レンズ３
は、暗視野鏡筒４の内部に同軸的に設置されている。暗
視野鏡筒４の内径は対物レンズ３の外径よりも大きく、
両者の間の環状空間の上端入口部分にリング状の暗視野
照明光源５が配置されている。この暗視野照明光源５
は、例えば図２（ａ）に示すように、リング状のＬＥＤ
ホルダ２１と、このＬＥＤホルダ２１に環状配列された
複数の半導体発光素子としてのＬＥＤ２２と、これらＬ
ＥＤ２２に電流を供給するケーブル２３とにより構成さ
れている。この暗視野照明光源５からの暗視野照明光
は、暗視野鏡筒４と対物レンズ３との間の環状空間を介
して観察対象２をその周囲の斜め方向から照明する。Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. FIG.
FIG. 1 is a partial cross-sectional view showing a lighting device, in particular, of a reflection microscope according to one embodiment of the present invention. An objective lens 3 is arranged above the sample table 1 so as to face an observation target 2 placed on the sample table 1. This objective lens 3
Are coaxially installed inside the dark field lens barrel 4. The inner diameter of the dark-field barrel 4 is larger than the outer diameter of the objective lens 3,
A ring-shaped dark-field illumination light source 5 is arranged at the entrance at the upper end of the annular space between the two. This dark field illumination light source 5
Is a ring-shaped LED, for example, as shown in FIG.
A holder 21, LEDs 22 as a plurality of semiconductor light emitting elements annularly arranged in the LED holder 21,
And a cable 23 for supplying a current to the ED 22. The dark-field illumination light from the dark-field illumination light source 5 illuminates the observation target 2 from an oblique direction around the object through an annular space between the dark-field column 4 and the objective lens 3.
【００１０】暗視野鏡筒４の上端は、水平方向に張り出
した本体部６の下端部に結合されている。この本体部６
の内部の対物レンズ３の上方位置にはハーフミラー７が
配置されている。観察対象２を反射して対物レンズ３及
びハーフミラー７を垂直方向に透過した観察対象２の光
学像は、観察鏡筒部８を介して観察者により観察され
る。また、ハーフミラー７には、明視野照明光源９から
の明視野照明光が照明レンズ１０を介して水平方向から
入射されている。明視野照明光源９は、図２（ｂ）に示
すように、暗視野照明光源５の内径よりも外径が小さな
円盤状のＬＥＤホルダ３１と、このＬＥＤホルダ３１に
二次元配列された複数のＬＥＤ３２と、これらＬＥＤ３
２に電流を供給するケーブル３３とにより構成されてい
る。この明視野照明光源９からの明視野照明光は、ハー
フミラー７で反射して下方に進行し、対物レンズ３を通
過して観察対象２を上方から垂直に照明する。The upper end of the dark-field lens barrel 4 is connected to the lower end of a main body 6 which extends horizontally. This body 6
A half mirror 7 is arranged at a position above the objective lens 3 inside the camera. The optical image of the observation target 2 that reflects the observation target 2 and transmits through the objective lens 3 and the half mirror 7 in the vertical direction is observed by the observer via the observation lens barrel 8. Bright field illumination light from a bright field illumination light source 9 is incident on the half mirror 7 through an illumination lens 10 in a horizontal direction. As shown in FIG. 2B, the bright-field illumination light source 9 includes a disk-shaped LED holder 31 having an outer diameter smaller than the inner diameter of the dark-field illumination light source 5, and a plurality of two-dimensionally arranged LED holders 31. LED32 and these LEDs3
And a cable 33 for supplying current to the cable 2. The bright-field illumination light from the bright-field illumination light source 9 is reflected by the half mirror 7 and travels downward, passes through the objective lens 3, and vertically illuminates the observation target 2 from above.
【００１１】一方、顕微鏡の支持台１１の前面パネル部
には、スイッチ類、例えば明暗視野切替スイッチ１２、
調光スイッチ１３及び照明方向可変スイッチ１４が設け
られており、これらスイッチ１２〜１４はケーブル１５
を介してコントロール電装部１６に接続されている。コ
ントロール電装部１６は、ケーブル２３，３３を介して
暗視野照明光源５及び明視野照明光源９と接続されると
共に、電源部１７から必要な電力を供給される。On the other hand, switches such as a bright / dark field switch 12,
A dimming switch 13 and an illumination direction variable switch 14 are provided, and these switches 12 to 14 are connected to a cable 15.
Is connected to the control electrical unit 16 via the. The control electrical unit 16 is connected to the dark-field illumination light source 5 and the bright-field illumination light source 9 via cables 23 and 33, and is supplied with necessary power from a power supply unit 17.
【００１２】このように構成された反射型顕微鏡におい
て、暗視野観察を行う場合には、明暗視野切替スイッチ
１２を暗視野に切り替える。これにより、コントロール
電装部１６は、暗視野照明光源５を点灯、明視野照明光
源９を消灯となるように制御する。点灯された暗視野照
明光源５からの暗視野照明光は、暗視野鏡筒４と対物レ
ンズ３との間の環状光路を介して観察対象２を斜めから
照明し、その散乱光が対物レンズ３と観察鏡筒８を介し
て観察者に観察される。When performing a dark field observation in the reflection type microscope configured as described above, the bright / dark field switch 12 is switched to a dark field. Thereby, the control electrical unit 16 controls the dark-field illumination light source 5 to be turned on and the bright-field illumination light source 9 to be turned off. The dark field illumination light from the lit dark field illumination light source 5 illuminates the observation target 2 obliquely through an annular optical path between the dark field column 4 and the objective lens 3, and the scattered light is used as the objective lens 3. Is observed by the observer via the observation lens barrel 8.
【００１３】調光スイッチ１３が操作されると、コント
ロール電装部１６は、暗視野照明光源５のＬＥＤ２２へ
の供給電流値を変化させるか、パルス電流のデューティ
ー比を変化させるか、又はＬＥＤ２２を個別に点灯・消
灯してその点灯するＬＥＤ２２の数を変化させる等の制
御を行って調光する。また、照明方向可変スイッチ１４
が操作されると、コントロール電装部１６は、ＬＥＤ２
２を個別に点灯・消灯して、点灯しているＬＥＤ２２の
位置を変えることで、自在に照明方向を変更する。When the dimming switch 13 is operated, the control electrical unit 16 changes the value of the current supplied to the LED 22 of the dark-field illumination light source 5, changes the duty ratio of the pulse current, or controls the LED 22 individually. The lighting is controlled by changing the number of LEDs 22 to be turned on and off and changing the number of LEDs 22 to be turned on. In addition, the illumination direction variable switch 14
Is operated, the control electrical unit 16 turns on the LED 2
2 is individually turned on and off, and the position of the lighted LED 22 is changed to freely change the illumination direction.
【００１４】一方、明視野観察を行う場合には、明暗視
野切替スイッチ１２を明視野に切り替える。これによ
り、コントロール電装部１６は、暗視野照明光源５を消
灯、明視野照明光源９を点灯となるように制御する。点
灯された明視野照明光源９からの明視野照明光は、照明
レンズ１０でリレーしてハーフミラー７で反射したの
ち、対物レンズ３を含む観察光路を経て観察対象２を照
明する。この場合にも、ＬＥＤ３２を個別に点灯・消灯
することで調光や照明方向の制御を自在に行うことがで
きる。On the other hand, when performing bright field observation, the bright / dark field switch 12 is switched to bright field. Thereby, the control electrical unit 16 controls the dark-field illumination light source 5 to be turned off and the bright-field illumination light source 9 to be turned on. Bright field illumination light from the lit bright field illumination light source 9 is relayed by the illumination lens 10 and reflected by the half mirror 7, and then illuminates the observation target 2 through the observation optical path including the objective lens 3. Also in this case, the dimming and the control of the illumination direction can be freely performed by individually turning on and off the LEDs 32.
【００１５】この装置によれば、次のような効果を得る
ことができる。 （１）暗視野照明光源５としてＬＥＤ２２を環状に配置
した光源を用いているので、観察光学系に対して光路を
遮断することが無い。 （２）暗視野照明光源５を暗視野鏡筒４の直上に配置し
たことにより暗視野照明光源５と観察対象２との間にハ
ーフミラーやレンズ等が一切介在しない構造となるの
で、顕微鏡本体内での暗視野照明光による迷光が発生し
難い。なお、この構造により、倍率が異なる複数の対物
レンズを有するターレット式の顕微鏡にも適用が可能で
ある。暗視野鏡筒４から下の部分のみを動かせば足りる
からである。 （３）暗視野照明光源５が照明光路を塞ぐように配置さ
れているので、結像に寄与しない光、例えば観察対象２
で反射した光が対物レンズ３と暗視野鏡筒４との間の環
状照明光路を通過後、図示しない観察光学系及び接眼レ
ンズを通り、観察視野に到達するようなことがない。従
って、よりコントラストの高い暗視野観察像を得ること
ができる。 （４）明視野と暗視野とを電気的なスイッチにより切り
替えるようにしているので、切替に必要な機構部品、遮
光部品及び光学部品が不要で、レバーによる切替作業も
無くなるので、操作性が向上する。 （５）ＬＥＤを個別に点灯・消灯制御することにより、
自在に照明方向を変更することができる。According to this device, the following effects can be obtained. (1) Since a light source in which the LEDs 22 are arranged in a ring shape is used as the dark-field illumination light source 5, the optical path to the observation optical system is not interrupted. (2) By arranging the dark-field illumination light source 5 directly above the dark-field lens barrel 4, there is no half mirror or lens between the dark-field illumination light source 5 and the observation target 2, so that the microscope body The stray light due to dark-field illumination light in the interior is hardly generated. This structure can be applied to a turret type microscope having a plurality of objective lenses having different magnifications. This is because it is sufficient to move only the portion below the dark-field lens barrel 4. (3) Since the dark-field illumination light source 5 is arranged so as to block the illumination optical path, light that does not contribute to image formation, for example, the observation target 2
After passing through the annular illumination optical path between the objective lens 3 and the dark-field lens barrel 4, the light reflected by the optical path does not reach the observation field via the observation optical system and the eyepiece (not shown). Therefore, a dark field observation image with higher contrast can be obtained. (4) Since the bright field and the dark field are switched by an electric switch, there is no need for a mechanical component, a light shielding component, and an optical component required for switching, and there is no need for a switching operation using a lever, thereby improving operability. I do. (5) By individually turning on and off the LEDs,
The lighting direction can be changed freely.
【００１６】図３は、本発明の他の実施例に係る透過型
顕微鏡の透過照明装置を示す図で、同図（ａ）は明視野
照明時、同図（ｂ）は暗視野照明時をそれぞれ示してい
る。この実施例では、対物レンズ５１によって観察され
る観察対象５２が載置される試料台５３の下側に照明装
置が構成される。即ち、試料台５３の下側には、明視野
照明光源と暗視野照明光源とを兼用する共通照明光源５
４が配置されている。共通照明光源５４からの照明光
は、コンデンサレンズ５５を介して試料台５３の下側か
ら観察対象を照明する。FIGS. 3A and 3B show a transmission illumination device of a transmission microscope according to another embodiment of the present invention. FIG. 3A shows a bright field illumination, and FIG. 3B shows a dark field illumination. Each is shown. In this embodiment, an illumination device is configured below a sample table 53 on which an observation target 52 to be observed by an objective lens 51 is placed. That is, a common illumination light source 5 that serves both as a bright-field illumination light source and a dark-field illumination light source is provided below the sample stage 53.
4 are arranged. The illumination light from the common illumination light source 54 illuminates the observation target from below the sample stage 53 via the condenser lens 55.
【００１７】共通照明光源５４は、図４に平面図を示す
ように、複数のレンズ付ＬＥＤ５６を円状に二次元配列
させて構成されている。このレンズ付ＬＥＤ５６は、照
明視野との関係で発散角の比較的小さいレンズ付ＬＥＤ
を使用する。この共通照明光源５４は、同図（ａ）に濃
い色で示した内側のＬＥＤ５６ａと、同図（ｂ）に濃い
色で示した外側のＬＥＤ５６ｂと、両グループの中間の
ＬＥＤ５６ｃとがグループ化され、これら各グループ毎
にＬＥＤ５６が点灯・消灯制御されるようになってい
る。As shown in the plan view of FIG. 4, the common illumination light source 54 is constituted by arranging a plurality of LEDs 56 with lenses in a circular two-dimensional array. This LED 56 with a lens is an LED with a lens having a relatively small divergence angle in relation to the illumination visual field.
Use In the common illumination light source 54, an inner LED 56a shown in dark color in FIG. 11A, an outer LED 56b shown in dark color in FIG. 10B, and an LED 56c in the middle of both groups are grouped. The LEDs 56 are controlled to be turned on / off for each of these groups.
【００１８】従って、外側の環状のＬＥＤ５６ｂのみを
点灯すれば暗視野照明となり、この外側のＬＥＤ５６ｂ
を除いた内側のＬＥＤ５６ｂ，ＬＥＤ５６ｃとを点灯す
れば、高ＮＡ明視野照明となり、最も内側のＬＥＤ５６
ｃを点灯すれば低ＮＡ明視野照明となる。従って、明視
野照明における従来の可変絞り、並びに暗視野照明にお
けるリング状マスク等が不要となり、相互の機械的切替
も不要となる。また、この実施例でも、ＬＥＤ５６の点
灯位置を制御することで、照明方向を変えることがで
き、方向性のある測定物の検査にも使用することができ
る。Therefore, if only the outer annular LED 56b is turned on, dark-field illumination is achieved.
By turning on the inner LEDs 56b and 56c except for the innermost LED 56b, a high NA bright field illumination is obtained.
When c is turned on, low-NA bright-field illumination is achieved. Therefore, a conventional variable stop for bright-field illumination, a ring-shaped mask for dark-field illumination, and the like are not required, and mutual mechanical switching is not required. Also in this embodiment, by controlling the lighting position of the LED 56, the illumination direction can be changed, and it can be used for inspection of a directional measurement object.
【００１９】なお、本発明は上述した実施例に限定され
るものではない。図５は、図３のレンズ付ＬＥＤ５６か
らなる共通照明光源５４に代えて、レンズ無しのＬＥＤ
からなる共通照明光源６１を用いた例を示している。同
図（ａ）は明視野照明時、同図（ｂ）は暗視野照明時を
それぞれ示している。なお、図５において図３と同一部
分には同一符号を付し、重複する部分の説明は割愛す
る。The present invention is not limited to the embodiment described above. FIG. 5 shows an LED without a lens in place of the common illumination light source 54 of FIG.
2 shows an example using a common illumination light source 61 composed of: FIG. 7A shows the state during bright-field illumination, and FIG. 7B shows the state during dark-field illumination. In FIG. 5, the same portions as those in FIG. 3 are denoted by the same reference numerals, and the description of the overlapping portions will be omitted.
【００２０】明視野照明時には、同図（ａ）に示すよう
に、共通照明光源６１からの照明光が、コンデンサレン
ズ６２、開口可変絞り６３、コンデンサレンズ５５をそ
れぞれ介して試料台５３の裏面から観察対象５２を真っ
直ぐに照明する。暗視野照明時には、同図（ｂ）に示す
ように、共通照明光源６１からの照明光が、コンデンサ
レンズ６２、リング状マスク６４、コンデンサレンズ５
５をそれぞれ介して試料台５３の裏面から観察対象の５
２を斜め方向に照明する。At the time of bright field illumination, as shown in FIG. 1A, illumination light from a common illumination light source 61 is transmitted from a back surface of a sample table 53 through a condenser lens 62, a variable aperture stop 63, and a condenser lens 55, respectively. The observation target 52 is illuminated straight. At the time of dark field illumination, as shown in FIG. 3B, illumination light from a common illumination light source 61 is supplied to a condenser lens 62, a ring-shaped mask 64, and a condenser lens 5.
5 from the back surface of the sample table 53
Illuminate 2 obliquely.
【００２１】この実施例では、コンデンサレンズ６２で
高ＮＡの光を集めるため、図６に示すように、共通照明
光源６１は、多数のＬＥＤ７１をレンズを使用しないで
素子のまま二次元配列する。又は、ＬＥＤ７１の光を広
く発散させるために発散角の広いレンズ付ＬＥＤを使用
する。ＬＥＤ７１は、図示のような四角いＬＥＤチップ
を格子状に正方形に配置するか、環状に配置する。In this embodiment, in order to collect light having a high NA by the condenser lens 62, as shown in FIG. 6, the common illumination light source 61 has a large number of LEDs 71 two-dimensionally arranged as elements without using lenses. Alternatively, an LED with a lens having a wide divergence angle is used to diffuse the light of the LED 71 widely. As the LED 71, a square LED chip as shown in the drawing is arranged in a square shape in a lattice or in an annular shape.
【００２２】この実施例では、従来と同様、開口可変絞
り６３及びリング状マスク６４を使用するが、ＬＥＤに
よる共通照明光源６１を使用しているので、ランプ交換
や調整工程が不要である。In this embodiment, as in the prior art, the variable aperture stop 63 and the ring-shaped mask 64 are used. However, since the common illumination light source 61 using LEDs is used, there is no need for a lamp replacement or adjustment process.
【００２３】[0023]
【発明の効果】以上述べたように、本発明によれば、暗
視野光源及び明視野光源が、複数の半導体素子から構成
されているので、ランプ交換、そのための調整作業及び
調整機構が不要であり、発熱量も少なく、照明装置自体
の大きさもコンパクトにすることができるという効果を
奏する。As described above, according to the present invention, since the dark-field light source and the bright-field light source are composed of a plurality of semiconductor elements, there is no need for lamp replacement, adjustment work and adjustment mechanism therefor. There is an effect that the amount of heat generation is small and the size of the lighting device itself can be reduced.
【図１】 本発明の一実施例に係る反射型顕微鏡の部分
断面図である。FIG. 1 is a partial sectional view of a reflection microscope according to one embodiment of the present invention.
【図２】 同顕微鏡に使用される暗視野照明光源（ａ）
及び明視野照明光源（ｂ）を示す斜視図である。FIG. 2 shows a dark-field illumination light source (a) used in the microscope.
FIG. 4 is a perspective view showing a bright field illumination light source (b).
【図３】 本発明の他の実施例に係る透過型顕微鏡の照
明装置の模式図で、同図（ａ）は明視野照明時、同図
（ｂ）は暗視野照明時をそれぞれ示す図である。FIGS. 3A and 3B are schematic diagrams of an illumination device of a transmission microscope according to another embodiment of the present invention, wherein FIG. 3A illustrates a bright-field illumination and FIG. 3B illustrates a dark-field illumination. is there.
【図４】 同照明装置の共通照明光源の平面図で、同図
（ａ）は明視野照明時、同図（ｂ）は暗視野照明時をそ
れぞれ示す図である。FIGS. 4A and 4B are plan views of a common illumination light source of the illumination device. FIG. 4A is a diagram illustrating bright field illumination, and FIG. 4B is a diagram illustrating dark field illumination.
【図５】 本発明の更に他の実施例に係る透過型顕微鏡
の照明装置の模式図で、同図（ａ）は明視野照明時、同
図（ｂ）は暗視野照明時をそれぞれ示す図である。5A and 5B are schematic diagrams of an illumination device of a transmission microscope according to still another embodiment of the present invention, wherein FIG. 5A shows a bright-field illumination and FIG. 5B shows a dark-field illumination. It is.
【図６】 同照明装置の共通照明光源の平面図である。FIG. 6 is a plan view of a common illumination light source of the illumination device.
１，５３…試料台、２，５２…観察対象、３，５１…対
物レンズ、４…暗視野鏡筒、５…暗視野照明光源、９…
明視野照明光源、２２，３２，５６，７１…ＬＥＤ、５
４，６１…共通照明光源。1, 53: sample stage, 2, 52: observation target, 3, 51: objective lens, 4: dark-field column, 5: dark-field illumination light source, 9:
Bright field illumination light source, 22, 32, 56, 71 ... LED, 5
4,61 ... Common illumination light source.
Claims (6)
視野照明光を照射する明視野照明光源と、 前記光軸上に配置されて前記観察対象に対して暗視野照
明光を照射する暗視野照明光源と、 前記明視野照明光源と暗視野照明光源とを切り替える照
明切替手段とを備えた光学器械の照明装置において、 前記暗視野照明光源及び明視野照明光源は、複数の半導
体発光素子から構成されたものであることを特徴とする
光学器械の照明装置。1. A bright-field illumination light source arranged on an optical axis to irradiate a bright-field illumination light to an observation object, and a dark-field illumination light arranged on the optical axis to irradiate the dark-field illumination light to the observation object A dark-field illumination light source, and an illumination switching unit that switches between the bright-field illumination light source and the dark-field illumination light source. An illumination device for an optical instrument, comprising: an element.
は、複数の半導体発光素子を二次元的に配設してなる１
つの共通照明光源からなるものであることを特徴とする
請求項１記載の光学器械の照明装置。2. The bright-field illumination light source and the dark-field illumination light source include a plurality of semiconductor light-emitting elements arranged two-dimensionally.
2. The illumination device for an optical instrument according to claim 1, wherein the illumination device comprises two common illumination light sources.
絞りと、 前記共通照明光源の周縁部分の照明光を通過させるリン
グ状マスクと、 前記開口絞り及びリング状マスクを光軸上に選択的に配
置する手段とを備えたものであることを特徴とする請求
項２記載の光学器械の照明装置。3. The illumination switching unit includes: an aperture stop that allows illumination light at a central portion of the common illumination light source to pass; a ring-shaped mask that allows illumination light at a peripheral portion of the common illumination light source to pass; 3. An illuminating device for an optical instrument according to claim 2, further comprising means for selectively disposing a ring-shaped mask on the optical axis.
発光素子のうち中央部分の半導体発光素子と、周縁部分
の半導体発光素子とがそれぞれ独立に点灯可能であり、 前記照明切替手段は、前記共通照明光源の前記中央部分
の半導体発光素子と前記周縁部分の半導体発光素子の点
灯／消灯を切り替える手段であることを特徴とする請求
項２記載の光学器械の照明装置。4. The common illumination light source, wherein a semiconductor light emitting element in a central part and a semiconductor light emitting element in a peripheral part among the plurality of semiconductor light emitting elements can be turned on independently of each other. 3. The illumination device for an optical instrument according to claim 2, wherein the illumination device is a means for switching on / off of the semiconductor light emitting element in the central part and the semiconductor light emitting element in the peripheral part of the common illumination light source.
の周辺部を照明するように複数の半導体発光素子を二次
元的に配設してなるものであり、 前記暗視野照明光源は、前記明視野照明光源よりも外側
の周縁部を照明するように複数の半導体発光素子をリン
グ状に配設してなるものであることを特徴とする請求項
１記載の光学器械の照明装置。5. The bright-field illumination light source includes a plurality of semiconductor light-emitting elements arranged two-dimensionally so as to illuminate the optical axis and a peripheral portion thereof. The illumination device for an optical instrument according to claim 1, wherein a plurality of semiconductor light emitting elements are arranged in a ring shape so as to illuminate a peripheral portion outside the bright field illumination light source.
が独立に又は複数ずつ独立に点灯／消灯制御可能に構成
されていることを特徴とする請求項１〜５のいずれか１
項記載の光学器械の照明装置。6. The semiconductor light emitting device according to claim 1, wherein each of the plurality of semiconductor light emitting elements is configured to be capable of independently turning on / off a plurality of semiconductor light emitting elements.
A lighting device for an optical instrument according to any one of the preceding claims.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34033299A JP2001154103A (en) | 1999-11-30 | 1999-11-30 | Illuminator for optical instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34033299A JP2001154103A (en) | 1999-11-30 | 1999-11-30 | Illuminator for optical instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001154103A true JP2001154103A (en) | 2001-06-08 |
Family
ID=18335936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34033299A Pending JP2001154103A (en) | 1999-11-30 | 1999-11-30 | Illuminator for optical instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001154103A (en) |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075725A (en) * | 2001-09-04 | 2003-03-12 | Olympus Optical Co Ltd | Transmitted illumination device |
| JP2003207717A (en) * | 2002-01-10 | 2003-07-25 | Olympus Optical Co Ltd | Microscope system |
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| EP1553436A1 (en) * | 2004-01-08 | 2005-07-13 | Olympus Corporation | Fluorescence microscope with LED light source and controller unit for synchronizing imaging and switching the light source on and off |
| JP2005221561A (en) * | 2004-02-03 | 2005-08-18 | Olympus Corp | Microscope |
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| JP2006209035A (en) * | 2005-01-31 | 2006-08-10 | Tokyoto Igaku Kenkyu Kiko | Biological microscope and dark-field lighting system |
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| JP2018515802A (en) * | 2015-03-13 | 2018-06-14 | ジェネア アイピー ホールディングス ピーティーワイ リミテッド | Method and apparatus for microscopy |
| CN109031637A (en) * | 2018-08-08 | 2018-12-18 | 杭州上池科技有限公司 | A kind of light-source system suitable for high-velocity scanning |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398619A (en) * | 1986-10-16 | 1988-04-30 | Olympus Optical Co Ltd | Lighting device for microscope |
| JPS63178807U (en) * | 1987-05-11 | 1988-11-18 | ||
| JPH04125609A (en) * | 1990-09-18 | 1992-04-27 | Satoshi Kawada | Optical microscope |
| JPH04136807A (en) * | 1990-09-28 | 1992-05-11 | Olympus Optical Co Ltd | Vertical lighting device |
| JPH04321212A (en) * | 1991-02-25 | 1992-11-11 | Tokyo Electron Yamanashi Kk | Symbol/character identifying device for sample to be identified |
| JPH04336444A (en) * | 1991-05-14 | 1992-11-24 | Rohm Co Ltd | Microscope |
-
1999
- 1999-11-30 JP JP34033299A patent/JP2001154103A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398619A (en) * | 1986-10-16 | 1988-04-30 | Olympus Optical Co Ltd | Lighting device for microscope |
| JPS63178807U (en) * | 1987-05-11 | 1988-11-18 | ||
| JPH04125609A (en) * | 1990-09-18 | 1992-04-27 | Satoshi Kawada | Optical microscope |
| JPH04136807A (en) * | 1990-09-28 | 1992-05-11 | Olympus Optical Co Ltd | Vertical lighting device |
| JPH04321212A (en) * | 1991-02-25 | 1992-11-11 | Tokyo Electron Yamanashi Kk | Symbol/character identifying device for sample to be identified |
| JPH04336444A (en) * | 1991-05-14 | 1992-11-24 | Rohm Co Ltd | Microscope |
Cited By (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| JP2003207717A (en) * | 2002-01-10 | 2003-07-25 | Olympus Optical Co Ltd | Microscope system |
| JP2004347777A (en) * | 2003-05-21 | 2004-12-09 | Olympus Corp | Total reflection fluorescence microscope |
| JP4546741B2 (en) * | 2004-01-08 | 2010-09-15 | オリンパス株式会社 | Fluorescence microscope |
| EP1553436A1 (en) * | 2004-01-08 | 2005-07-13 | Olympus Corporation | Fluorescence microscope with LED light source and controller unit for synchronizing imaging and switching the light source on and off |
| JP2005195940A (en) * | 2004-01-08 | 2005-07-21 | Olympus Corp | Fluorescence microscope |
| US7397602B2 (en) | 2004-01-08 | 2008-07-08 | Olympus Corporaton | Fluorescent microscope |
| JP2005221561A (en) * | 2004-02-03 | 2005-08-18 | Olympus Corp | Microscope |
| JP2005227442A (en) * | 2004-02-12 | 2005-08-25 | Olympus Corp | Illuminator for microscope |
| JP4579554B2 (en) * | 2004-02-12 | 2010-11-10 | オリンパス株式会社 | Microscope illumination system |
| JP2006209035A (en) * | 2005-01-31 | 2006-08-10 | Tokyoto Igaku Kenkyu Kiko | Biological microscope and dark-field lighting system |
| JP2007057296A (en) * | 2005-08-23 | 2007-03-08 | Denso Wave Inc | Optical reader |
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| JPWO2008114372A1 (en) * | 2007-03-19 | 2010-07-01 | 株式会社島津製作所 | Fluorescence measurement apparatus for living body and excitation light irradiation apparatus for fluorescence measurement |
| WO2008114372A1 (en) * | 2007-03-19 | 2008-09-25 | Shimadzu Corporation | Fluorescent measurement device for living body and exciting light-irradiating device for fluorescent measurement |
| JP4952784B2 (en) * | 2007-03-19 | 2012-06-13 | 株式会社島津製作所 | Fluorescence measurement apparatus for living body and excitation light irradiation apparatus for fluorescence measurement |
| US8304746B2 (en) | 2007-03-19 | 2012-11-06 | Shimadzu Corporation | Fluorescent measurement device for living body and exciting light-irradiating device for fluorescent measurement |
| JP2009063856A (en) * | 2007-09-07 | 2009-03-26 | Shibuya Optical Co Ltd | Dark field objective lens device |
| JP2009257777A (en) * | 2008-04-11 | 2009-11-05 | Shimadzu Corp | Fluorescence imaging device |
| JP2011017875A (en) * | 2009-07-08 | 2011-01-27 | Olympus Corp | Observation device |
| JP2014092697A (en) * | 2012-11-05 | 2014-05-19 | Olympus Corp | Microscope and dark field objective lens |
| JP2014211633A (en) * | 2013-04-19 | 2014-11-13 | カール ツァイス マイクロスコピー ゲーエムベーハーＣａｒｌ Ｚｅｉｓｓ Ｍｉｃｒｏｓｃｏｐｙ Ｇｍｂｈ | Method for illuminating object in digital optical microscope, digital optical microscope and bright field reflection light illumination device for digital optical microscope |
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| JP2016024195A (en) * | 2014-07-17 | 2016-02-08 | オルボテック リミテッド | Seamless fusion type lighting device of telecentric bright field and annular dark field |
| KR102373287B1 (en) * | 2014-07-17 | 2022-03-10 | 오르보테크 엘티디. | Telecentric bright field and annular dark field seamlessly fused illumination |
| JP2018515802A (en) * | 2015-03-13 | 2018-06-14 | ジェネア アイピー ホールディングス ピーティーワイ リミテッド | Method and apparatus for microscopy |
| CN113514945A (en) * | 2015-03-13 | 2021-10-19 | 格尼亚Ip控股私人有限公司 | Method and apparatus for microscopy |
| CN113514945B (en) * | 2015-03-13 | 2024-04-09 | 格尼亚Ip控股私人有限公司 | Method and apparatus for microscopy |
| CN105700124A (en) * | 2016-04-13 | 2016-06-22 | 麦克奥迪实业集团有限公司 | Microscope lighting system based on LED array |
| CN105700124B (en) * | 2016-04-13 | 2018-04-06 | 麦克奥迪实业集团有限公司 | A kind of microscope illumination system based on LED array |
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| CN109031637B (en) * | 2018-08-08 | 2024-01-05 | 杭州上池科技有限公司 | Light source system suitable for high-speed scanning |
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