JP2011017875A - Observation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an observation device capable of selecting either epi-illumination or side-illumination, or both of them, and easily selecting an observation method suitable for a sample.SOLUTION: The observation device includes: an epi-illumination light source 11 for conducting epi-illumination to a sample 2; an objective lens 4 for condensing and radiating illumination light emitted by the epi-illumination light source 11, on the sample 2 on a sample placing table 3; a polarizing beam splitter 13, disposed between the epi-illumination light source 11 and the objective lens 4; a side-illumination light source 14, disposed annularly with an optical axis L of the objective lens 4 which is a central axis for conducting side-illumination to the sample 2 on the sample placing table 3; an observation adaptor 15, disposed between the sample 2 and the side-illumination light source 14 that transmits linearly polarized light in a specific direction of the illumination light emitted by the side-illumination light source 14; an imaging lens 16 for condensing observation light and imaging an observation image; and an imaging part 17 for imaging the observation image formed by the imaging lens 16.

Description

  The present invention relates to an observation apparatus that observes a sample by irradiating the sample such as a metal mineral, an electronic component, or a semiconductor wafer with light, and forming an image of reflected light from the sample on an image pickup device via an objective lens. Is.

  Conventionally, observation devices such as microscopes have been used in the field of medicine and biology, including the observation of cells, etc., in the industrial field, inspection of semiconductor wafers and magnetic heads, quality control of metal structures, research and development of new materials, etc. It is used for various purposes. In recent years, many observation apparatuses equipped with an image sensor such as a CCD are used for screen recording of an observation image.

  By the way, in the observation apparatus used conventionally, since the dynamic lens of the image sensor is narrow, when the reflectance is high due to factors such as a part of or the entire surface of the sample being close to a mirror surface, only a part of the image is obtained. Alternatively, halation is observed in which all are observed very brightly, making it difficult to observe the sample. In order to prevent the occurrence of halation, observation apparatuses using various observation methods have been known. For example, epi-illumination is used as illumination for the sample, and the amount of reflected light reflected from the sample through the polarizing plate is reduced and received by the image sensor to prevent halation from occurring on the sample with high reflectivity. On the other hand, an observation apparatus for observing the gloss and structure of a sample is known (see Patent Document 1).

  In addition, by adopting side-illumination that illuminates from the side of the sample via a polarizer, the amount of reflected light reflected from the sample via this polarizer is reduced and imaged on the image sensor, thereby causing halation. An observation apparatus for observing the unevenness of a sample while preventing the occurrence of this is known (see Patent Document 2).

  There is also known an observation apparatus that observes a sample by appropriately selecting either one or both of epi-illumination and side-illumination according to the reflectance of the sample and the observation content (see Patent Document 3).

JP 59-231402 A JP-A-11-308496 Japanese Patent Laid-Open No. 5-281475

  However, in Patent Document 1 described above, since halation is always prevented, when observing a sample with low reflectance, the amount of light of the observation image formed on the image sensor is insufficient, and the unevenness of the sample is reduced. There was a problem that it was difficult to identify.

  Further, since Patent Document 2 described above always prevents halation, in the case of a sample having a low reflectance, the observation image becomes dark because the light amount of the image formed on the image sensor is insufficient, and the gloss of the sample is reduced. There was a problem that it was difficult to identify the organization.

  On the other hand, in Patent Document 3 described above, unevenness or gloss of a sample can be observed by selecting either one or both of epi-illumination and side-illumination corresponding to the reflectance of the sample and the observation content. However, when halation occurs in a part of the captured image, only a part of the image is observed very brightly due to the halation, and as a result, it is difficult to observe the entire sample.

  The present invention has been made in view of the above, and it is possible to select either one or both of falling-down illumination and side illumination, and to easily select an observation method suitable for the sample. An object of the present invention is to provide an observation device that can be used.

  In order to solve the above-described problems and achieve the object, an observation apparatus according to the present invention includes a sample mounting table on which a sample is mounted, an epi-illumination light source that performs epi-illumination on the sample, and the epi-illumination light source. An objective lens that collects and irradiates the illumination light onto the sample on the sample mounting table and an optical axis between the incident light source and the objective lens, and reflects according to the polarization component of the incident light Alternatively, a polarizing beam splitter that transmits light, a lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table; and the sample and the lateral light source And a polarizing plate that transmits linearly polarized light in a specific direction out of the illumination light emitted by the side light source, and the polarizing beam splitter that passes through the objective lens among the reflected light that is reflected by the sample. Observation light collected An imaging lens for forming an, characterized by comprising a imaging means for imaging an observation image formed by the imaging lens.

  Further, the observation apparatus of the present invention provides a sample mounting table on which a sample is mounted, an epi-illumination light source for performing epi-illumination on the sample, and illumination light emitted from the epi-illumination light source on the sample on the sample mounting table. An objective lens that collects and irradiates; a polarizing beam splitter that is disposed on the optical axis between the incident light source and the objective lens and that reflects or transmits light according to a polarization component of incident light; and A circular light source having an optical axis as a central axis, and a side light source that performs side light illumination on the sample on the sample mounting table, and a quadrant disposed on the optical axis between the objective lens and the sample. An imaging lens for condensing observation light transmitted through the polarizing beam splitter via the wavelength plate and the objective lens among reflected light reflected by the sample; Observation image formed by the imaging lens Characterized by comprising a imaging means for imaging.

  Further, the observation apparatus of the present invention provides a sample mounting table on which a sample is mounted, an epi-illumination light source for performing epi-illumination on the sample, and illumination light emitted from the epi-illumination light source on the sample on the sample mounting table. An objective lens that collects and irradiates; a polarizing beam splitter that is disposed on the optical axis between the incident light source and the objective lens and that reflects or transmits light according to a polarization component of incident light; and A circular light source having an optical axis as a central axis, a side light source for performing side light illumination on the sample on the sample mounting table, and a side light source disposed between the sample and the side light source; A polarizing plate that transmits linearly polarized light in a specific direction among the emitted illumination light, a quarter-wave plate disposed on the optical axis of the objective lens and the sample, and the reflected light reflected by the sample The polarizing beam is passed through the wave plate and the objective lens. An imaging lens for forming an observation image by condensing the observation light transmitted through the splitter, characterized by comprising a imaging means for imaging an observation image formed by the imaging lens.

  In the observation device according to the present invention as set forth in the invention described above, the polarizing plate and the wave plate are rotatable about the optical axis of the objective lens.

  Moreover, the observation apparatus according to the present invention is characterized in that, in the above invention, the polarizing plate has an indicator indicating a polarization direction on the side surface.

  The observation device according to the present invention is characterized in that, in the above-mentioned invention, the wave plate is marked on the side surface with an index indicating at least a direction orthogonal to the high speed axis or a direction of 45 degrees from the high speed axis.

  In the observation device according to the present invention as set forth in the invention described above, the objective lens has an index indicating a reflection vibration direction of the polarizing beam splitter on a side surface.

  The observation apparatus according to the present invention can select either one or both of the epi-illumination and the side-illumination, and the polarization beam splitter regularly reflects the sample to remove the light observed as halation. Thus, it is possible to prevent the occurrence of halation in the observation image, and to easily select an observation method suitable for the sample.

FIG. 1 is a schematic diagram showing a configuration of an observation apparatus according to Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view taken along line AA. FIG. 3 is a plan view showing the observation adapter. FIG. 4 is a plan view showing the observation adapter. FIG. 5 is a diagram showing a schematic configuration of an observation apparatus according to the second embodiment of the present invention. FIG. 6 is a perspective view showing the configuration of the objective lens.

  Embodiments of an observation apparatus according to the present invention will be described below in detail with reference to the drawings. The invention is not limited to the embodiments. In the description of the drawings, the same parts are denoted by the same reference numerals.

(Embodiment 1)
1 is a schematic diagram showing a configuration of an observation apparatus according to Embodiment 1 of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a plan view showing an observation adapter. is there. As shown in FIG. 1, the observation apparatus 1 includes a sample mounting table 3 on which a sample 2 is mounted, an objective lens 4 that is disposed on the upper side of the sample 2, and an epi-illumination on the sample 2 via the objective lens 4. An epi-illumination optical system 5 that performs side illumination on the sample 2, and an observation optical system 7 that observes the observation light reflected from the sample 2 and passing through the objective lens 4.

  The epi-illumination optical system 5 includes an epi-illumination light source 11, an illumination lens 12, and a polarization beam splitter 13. The epi-illumination light source 11 emits illumination light for forming an observation image of the sample 2 by the observation optical system 7, and is realized by, for example, LED illumination. The illumination lens 12 condenses the illumination light emitted from the incident light source 11 at a predetermined position. The polarization beam splitter 13 reflects or transmits light depending on the polarization component of incident light. Specifically, the polarization beam splitter 13 transmits only light in the same direction as the transmission vibration method, and reflects light in a direction orthogonal to the transmission vibration direction.

  The side illumination optical system 6 has a side light source 14 and an observation adapter 15. As shown in FIG. 2, a plurality of side light sources 14 are arranged in an annular shape with the optical axis L of the objective lens 4 as the central axis. The side light source 14 emits illumination light from an oblique direction with respect to the sample 2 and is realized by, for example, LED illumination. As shown in FIG. 3, the observation adapter 15 is formed in an annular shape with the optical axis L of the objective lens 4 as the central axis, and is realized by a polarizing plate 15a. The observation adapter 15 is disposed between the sample 2 and the side light source 14. The polarizing plate 15a transmits only linearly polarized light in a specific direction out of the illumination light emitted from the side light source 14. The polarizing plate 15 a is disposed so that the vibration direction of the polarizing plate 15 a is substantially perpendicular to the transmission vibration direction of the polarizing beam splitter 13. The side light source 14 may perform partial lighting corresponding to the type of the sample 2 or the like.

  The observation optical system 7 includes an objective lens 4, an imaging lens 16, and an imaging unit 17. The objective lens 4 irradiates the polarization beam splitter 13 with the light reflected by the sample 2. The imaging lens 16 focuses the observation light in the polarization direction that passes through the objective lens 4 and passes through the polarization beam splitter 13 out of the reflected light reflected by the sample 2 to form an observation image of the sample 2. The imaging unit 17 is realized by a CCD camera or the like, and captures an observation image of the sample 2 imaged by the imaging lens 16.

  Here, with reference to FIG. 1, the case where the sample 2 is observed by epi-illumination using the observation apparatus 1 is demonstrated. First, the illumination light emitted from the incident light source 11 is reflected by the polarization beam splitter 13 through the illumination lens 12 and illuminates the sample 2 through the objective lens 4. In this case, since the polarization beam splitter 13 reflects only linearly polarized light in a specific direction onto the optical axis L on the objective lens 4 side, the sample 2 is illuminated with linearly polarized light. Thereafter, when the surface of the sample 2 is illumination light applied to a mirror surface portion, for example, a metal portion having a high reflectance, the surface of the sample 2 is regularly reflected. For this reason, the light regularly reflected on the surface of the sample 2 enters the polarization beam splitter 13 again through the objective lens 4 while maintaining linearly polarized light. Since the light incident on the polarization beam splitter 13 is orthogonal to the transmission vibration direction of the polarization beam splitter 13, the light cannot be transmitted through the polarization beam splitter 13 and is reflected and does not enter the imaging unit 17.

  On the other hand, when the surface of the sample 2 is illumination light irradiated on a rough surface portion, for example, a resin portion having a low reflectance, the surface of the sample 2 is diffusely reflected. Therefore, the diffusely reflected light is in a state in which the polarization direction is not preserved and various polarizations are mixed, and only the light in the same direction as the transmission vibration direction of the polarization beam splitter 13 passes through the polarization beam splitter 13 through the objective lens 4. . The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  Next, a case where the sample 2 is observed by side illumination using the observation apparatus 1 will be described. First, only the linearly polarized light in a specific direction among the illumination light emitted from the side light source 14 is transmitted through the polarizing plate 15 a and illuminates the sample 2. In this case, the vibration direction of the polarizing plate 15 a is set to a direction orthogonal to the transmission direction of the polarizing beam splitter 13. For this reason, the light regularly reflected on the surface of the sample 2 enters the polarization beam splitter 13 again through the objective lens 4 while maintaining linearly polarized light. Since the light incident on the polarization beam splitter 13 is orthogonal to the transmission vibration direction of the polarization beam splitter 13, the light cannot be transmitted through the polarization beam splitter 13 and is reflected and does not enter the imaging unit 17.

  On the other hand, the light diffusely reflected on the surface of the sample 2 is in a state in which the polarization direction of linearly polarized light is not preserved and various polarizations are mixed, and the same direction as the transmission vibration direction of the polarization beam splitter 13 through the objective lens 4. Only the light of the component is transmitted through the polarization beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  That is, in the first embodiment, in the incident illumination and the side illumination, the polarization beam splitter 13 removes the light that is regularly reflected by the sample 2 and observed as halation, so that the observation image captured by the imaging unit 17 is captured. It is possible to prevent halation from occurring.

  By the way, the observation adapter 15 is detachable from the objective lens 4 and can be replaced with the observation adapter 18 shown in FIG. As shown in FIG. 4, the observation adapter 18 has a wave plate 18a. The wave plate 18a is formed in a disc shape corresponding to the shape of the objective lens 4, and is held by a plurality of holding portions 18b. The wave plate 18 a is realized by a quarter wave plate and is disposed on the optical axis between the side light source 14 and the sample 2. The observation adapter 18 is arranged so that the direction of the high-speed axis of the wave plate 18 a is 45 degrees with respect to the reflection vibration direction of the polarization beam splitter 13 when attached to the objective lens 4.

  Here, the case where the sample 2 is observed by epi-illumination using the observation adapter 18 in the observation apparatus 1 will be described. First, the illumination light emitted from the epi-illumination light source 11 is reflected by the polarization beam splitter 13 through the illumination lens 12, and irradiates the sample 2 through the objective lens 4 and the wave plate 18a. In this case, since the polarization beam splitter 13 reflects only linearly polarized light in a specific direction onto the optical axis L on the objective lens 4 side, linearly polarized light is incident on the wavelength plate 18a. The wave plate 18a converts the linearly polarized light incident on the wave plate 18a into circularly polarized light because the fast axis of the wave plate 18a is arranged at 45 degrees with respect to the reflection vibration direction of the polarization beam splitter 13. Make it transparent. Thereafter, the light regularly reflected on the surface of the sample 2 maintains circular polarization. The light that maintains the circularly polarized light is incident again on the wave plate 18a, and is converted into linearly polarized light in the same direction as the transmission vibration direction of the polarizing beam splitter 13 by the wave plate 18a. The linearly polarized light enters the polarization beam splitter 13 through the objective lens 4 and passes through the polarization beam splitter 13 because it is in the same direction as the transmission vibration direction of the polarization beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  On the other hand, since the light diffusely reflected on the surface of the sample 2 is incident on the wave plate 18a in a state where the polarization direction is not preserved and various polarizations are mixed, various polarizations are mixed even after passing through the wave plate 18a. Then, only the polarized light in the same direction as the transmission vibration direction of the polarization beam splitter 13 passes through the polarization beam splitter 13 through the objective lens 30. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  Next, the case where the sample 2 is observed by side illumination using the observation adapter 18 in the observation apparatus 1 will be described. First, the illumination light emitted from the side light source 14 irradiates the sample 2 in a non-polarized state. The light that has been specularly reflected or diffusely reflected on the surface of the sample 2 is incident on the wave plate 18a in a state in which various polarized lights are mixed. Therefore, after the light passes through the wave plate 18a, various polarized lights are mixed and transmitted through the polarizing beam splitter 13. Only polarized light in the same direction as the vibration direction is transmitted through the polarization beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  According to the first embodiment, by attaching the observation adapter 18 having the wave plate 18a, it is possible to illuminate both in the epi-illumination and the side-illumination in a non-polarized state, and in the positive direction on the surface of the sample 2. Both reflected or diffusely reflected light can be observed.

(Embodiment 2)
Next, a second embodiment of the present invention will be described. In the first embodiment, the halation reduction observation or the normal observation is switched with respect to the epi-illumination and the side-illumination by exchanging the observation adapter. However, in the second embodiment, the polarization is changed via the objective lens. The observation method of the sample 2 is switched by attaching a plate and a wave plate and rotating each of them.

  FIG. 5 is a schematic diagram showing a configuration of an observation apparatus according to Embodiment 2 of the present invention, and FIG. 6 is a perspective view of an objective lens. As shown in FIG. 5, the observation apparatus 100 includes an objective lens 30 instead of the objective lens 4 of the first embodiment. In FIG. 5, parts having the same configuration as the observation apparatus 1 described in the first embodiment are given the same reference numerals.

  As shown in FIGS. 5 and 6, the objective lens 30 includes a polarizing plate 40 and a wave plate 50. On the side surface of the objective lens 30, an index 30a indicating the reflection vibration direction of the polarization beam splitter 13 is marked.

  The polarizing plate 40 is formed in an annular shape and is provided so as to be rotatable about the optical axis L of the objective lens 30 as a central axis. The polarizing plate 40 transmits only linearly polarized light in a specific direction out of the illumination light emitted from the side light source 14. An indicator 40 a is marked on the side surface of the polarizing plate 40. The index 40 a indicates the polarization direction of the polarizing plate 40.

  The wave plate 50 is realized by a quarter wave plate and is formed in a disk shape. The wave plate 50 is provided so as to be rotatable about the optical axis L of the objective lens 30 as a central axis. On the side surface of the wave plate 50, an index 50a and an index 50b are marked. The index 50 a indicates a direction orthogonal to the high speed axis of the wave plate 50. The index 50b indicates a 45-degree direction from the high-speed axis of the wave plate 50. The index 50a and the index 50b may be marked with different colors and shapes so that they can be easily confirmed.

  Here, with reference to FIG. 5, the case where the sample 2 is observed by epi-illumination while reducing halation using the observation apparatus 100 will be described. First, the wave plate 50 is rotated so that the index 50 a coincides with the index 30 a of the objective lens 30. The illumination light emitted from the epi-illumination light source 11 is reflected by the polarization beam splitter 13 through the illumination lens 12 and irradiates the sample 2 through the objective lens 30 and the wave plate 50. In this case, since the polarization beam splitter 13 reflects only linearly polarized light in a specific direction onto the optical axis L on the objective lens 30 side, linearly polarized light is incident on the wavelength plate 50. In the wave plate 50, the vibration direction of the linearly polarized light reflected by the polarizing beam splitter 13 coincides with the direction orthogonal to the high-speed axis of the wave plate 50, and therefore the linearly polarized light reflected by the polarizing beam splitter 13. The light is transmitted while maintaining the vibration direction. Thereafter, the light regularly reflected on the surface of the sample 2 maintains linearly polarized light. The light that maintains the linearly polarized light is incident again on the wave plate 50 and enters the polarization beam splitter 13 through the objective lens 30 while maintaining the linearly polarized light. Since the light incident on the polarization beam splitter 13 is in a direction orthogonal to the transmission vibration direction of the polarization beam splitter 13, the light cannot be transmitted through the polarization beam splitter 13 and is reflected and does not enter the imaging unit 17.

  On the other hand, the light diffusely reflected by the surface of the sample 2 is incident on the wave plate 50 again in a state where the polarization direction of the linearly polarized light is not preserved and mixed with various polarizations. It passes through the wave plate 50. Since the transmitted light enters the polarization beam splitter 13 through the objective lens 30 in a state where various polarizations are mixed, only the polarization in the same direction as the transmission vibration direction of the polarization beam splitter 13 is transmitted through the polarization beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  Next, a case where the sample 2 is normally observed by epi-illumination using the observation apparatus 100 will be described. First, the wave plate 50 is rotated so that the index 50 b coincides with the index 30 a of the objective lens 30. In this case, the observation adapter 18 according to the first embodiment is attached to the objective lens 30, and the illumination light for illuminating the sample 2 is not circularly polarized light but circularly polarized light. In other words, the light that has been specularly reflected and diffusely reflected on the surface of the sample 2 is incident on the waveplate 50 again in a state where the polarization direction is not preserved and various polarizations are mixed. Only polarized light in the same direction as the transmission vibration direction of the polarization beam splitter 13 is transmitted through the polarization beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  When the sample 2 is observed by epi-illumination using the observation apparatus 100, the wavelength plate 50 is rotated so that the index 30a of the objective lens 30 is between the index 50a and the index 50b of the wavelength plate 50. The sample 2 can be observed between the halation reduction observation and the normal observation. Specifically, when observation is performed with halation reduction, only the diffusely reflected light from the sample is observed, so that the amount of light taken into the imaging unit 17 is reduced and the observation image becomes darker than when performing normal observation. For this reason, the operator rotates the wave plate 50 and adjusts the positional relationship between the index 50a and the index 50b with respect to the index 30a, thereby obtaining a halation reduction effect corresponding to the sample 2 and a brightness balance. Can be adjusted.

  Next, a case where the observation apparatus 100 observes the sample 2 by side illumination while reducing halation will be described. First, the operator rotates the polarizing plate 40 and the wave plate 50, and arranges the index 50a of the wave plate 50 at a position that is exactly the center between the index 30a of the objective lens 30 and the index 40a of the polarizing plate 40. Illumination light emitted from the side light source 14 passes through the polarizing plate 40 and the wave plate 50 and is irradiated onto the sample 2. In this case, the polarizing plate 40 transmits only linearly polarized light in a specific direction of the polarizing plate 40. The wave plate 50 transmits light while maintaining the polarization state because the vibration direction of the linearly polarized light transmitted through the polarizing plate 40 coincides with the direction orthogonal to the high-speed axis of the wave plate 50. Thereafter, the light regularly reflected on the surface of the sample 2 reaches the polarizing beam splitter 13 through the wave plate 50 and the polarizing plate 40. Since the regular reflection light is light that vibrates in a direction orthogonal to the transmission vibration direction of the polarization beam splitter 13, the regular reflection light is not transmitted through the polarization beam splitter but reflected and does not enter the imaging unit 17.

  On the other hand, the light diffusely reflected on the surface of the sample 2 is incident again on the wave plate 50 in a state where the polarization direction of the linearly polarized light is not preserved and mixed with various polarized light, and after the light is transmitted through the wave plate 50 The polarized light enters the polarizing beam splitter 13 through the polarizing plate 40 and the objective lens 30 in a mixed state. The light incident on the polarization beam splitter 13 passes through the polarization beam splitter 13 only in the same direction as the transmission vibration direction of the polarization beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  Further, the side surface of the objective lens 30 is an angle indicating an angle from the index 40a so that the positional relationship between the index 30a of the objective lens 30, the index 40a of the polarizing plate 40, and the index 50a of the wave plate 50 can be easily recognized. The scale 30b is marked. Specifically, the angle position of the index 50a is read from the angle scale 30b. For example, when the angle scale is 5 degrees, the polarizing plate 40 is rotated so that the index 40a coincides with the 10-degree angle scale. Thus, it is possible to perform halation reduction observation. In addition, the range of the angle scale 30b only needs to be marked with a scale of 90 degrees because the effect of the polarizing plate 40 changes with a period of 90 degrees and the effect of the wave plate 50 changes with a period of 45 degrees.

  Next, a case where the sample 2 is normally observed by side illumination using the observation apparatus 100 will be described. First, the operator rotates the polarizing plate 40 and the wave plate 50 so that the index 40 a of the polarizing plate 40 and the index 50 b of the wave plate 50 coincide. The illumination light emitted from the side light source 14 passes through the polarizing plate 40 and the wave plate 50 and irradiates the sample 2. In this case, the polarizing plate 40 transmits only linearly polarized light in a specific direction of the polarizing plate 40. Since the wave plate 50 is arranged so that the polarization direction of the polarizing plate 40 and the high-speed axis of the wave plate 50 are different by 45 degrees, it converts linearly polarized light into circularly polarized light and transmits it. The light specularly reflected on the surface of the sample 2 enters the wave plate 50 again while maintaining circular polarization, is converted into linearly polarized light, passes through the wave plate 50, and enters the polarizing beam splitter 13 through the polarizing plate 40. To do. The light incident on the polarizing beam splitter 13 passes through the polarizing beam splitter 13 only in the same direction as the transmission vibration direction of the polarizing beam splitter 13. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  On the other hand, the light diffusely reflected on the surface of the sample 2 is incident again on the wave plate 50 in a state where the polarization direction is not preserved and mixed with various polarized light, and mixed with various polarized light after passing through the wave plate 50. In this state, the light enters the polarizing beam splitter 13 through the polarizing plate 40 and the objective lens 30. The light incident on the polarization beam splitter 13 passes through the polarization beam splitter 13 only in the same direction as the transmission vibration direction of the polarization beam splitter. The transmitted light enters the imaging unit 17 through the imaging lens 16 and is observed.

  Moreover, when performing side illumination using the observation apparatus 100, the halation reduction effect can be adjusted by adjusting the positional relationship between the polarizing plate 40 and the wave plate 50, as in the case of epi-illumination.

  In the second embodiment, by rotating the polarizing plate 40 and the wave plate 50 about the optical axis L of the objective lens 30 as a central axis, it is possible to simultaneously reduce the halation or adjust the light quantity in the epi-illumination and the side-illumination. The observation method corresponding to the sample 2 can be easily selected. In addition, since the indices are marked on the side surfaces of the objective lens 30, the polarizing plate 40, and the wave plate 50, the observation state can be easily confirmed.

  In Embodiment 2 described above, when the index 40a of the polarizing plate 40 and the index 50b of the wave plate 50 are made to coincide with each other and the side illumination is illuminated in a circularly polarized state, the polarizing plate 40, the wave plate 50, By simultaneously rotating the, the reduction in halation can be adjusted when observing the sample 2 with epi-illumination while maintaining the illumination conditions of side-illumination.

  Further, in the first and second embodiments described above, the case where the epi-illumination and the side-illumination are performed at the same time has been described. You may make a selection.

DESCRIPTION OF SYMBOLS 1,100 Observation apparatus 2 Sample 4,30 Objective lens 11 Epi-illumination light source 13 Polarization beam splitter 14 Side light source 15a, 40 Polarizing plate 16 Imaging lens 17 Imaging part 18a, 50 Wave plate 30a, 40a, 50a, 50b Index L Light axis

Claims (7)

A sample mounting table on which the sample is mounted;
An epi-illumination light source for performing epi-illumination on the sample;
An objective lens that condenses and irradiates the illumination light emitted from the incident light source onto the sample on the sample mounting table;
A polarization beam splitter that is disposed on the optical axis between the incident light source and the objective lens, and reflects or transmits light according to a polarization component of incident light;
A lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table;
A polarizing plate that is disposed between the sample and the side light source and transmits linearly polarized light in a specific direction among the illumination light emitted from the side light source,
An imaging lens that focuses observation light transmitted through the polarizing beam splitter through the objective lens among reflected light reflected by the sample, and forms an observation image;
Imaging means for capturing an observation image formed by the imaging lens;
An observation apparatus comprising: A sample mounting table on which the sample is mounted;
An epi-illumination light source for performing epi-illumination on the sample;
An objective lens that condenses and irradiates the illumination light emitted from the incident light source onto the sample on the sample mounting table;
A polarization beam splitter that is disposed on the optical axis between the incident light source and the objective lens, and reflects or transmits light according to a polarization component of incident light;
A lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table;
A quarter wave plate disposed on the optical axis between the objective lens and the sample;
An imaging lens that focuses observation light transmitted through the polarizing beam splitter through the wave plate and the objective lens among reflected light reflected by the sample, and forms an observation image;
Imaging means for capturing an observation image formed by the imaging lens;
An observation apparatus comprising: A sample mounting table on which the sample is mounted;
An epi-illumination light source for performing epi-illumination on the sample;
An objective lens that condenses and irradiates the illumination light emitted from the incident light source onto the sample on the sample mounting table;
A polarization beam splitter that is disposed on the optical axis between the incident light source and the objective lens, and reflects or transmits light according to a polarization component of incident light;
A lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table;
A polarizing plate that is disposed between the sample and the side light source and transmits linearly polarized light in a specific direction among the illumination light emitted from the side light source,
A quarter-wave plate disposed on the optical axis of the objective lens and the sample;
An imaging lens that focuses observation light transmitted through the polarizing beam splitter through the wave plate and the objective lens among reflected light reflected by the sample, and forms an observation image;
Imaging means for capturing an observation image formed by the imaging lens;
An observation apparatus comprising:   The observation apparatus according to claim 3, wherein the polarizing plate and the wave plate are rotatable about the optical axis of the objective lens as a central axis.   The observation apparatus according to claim 3 or 4, wherein the polarizing plate has an indicator indicating a polarization direction on a side surface.   The observation apparatus according to claim 3, wherein the wave plate has an index indicating at least a direction orthogonal to the high-speed axis or a 45-degree direction from the high-speed axis on a side surface.   The observation apparatus according to claim 3, wherein the objective lens has an index indicating a reflection vibration direction of the polarizing beam splitter on a side surface.

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