JP2011017875A5 - - Google Patents

Download PDF

Info

Publication number
JP2011017875A5
JP2011017875A5 JP2009162259A JP2009162259A JP2011017875A5 JP 2011017875 A5 JP2011017875 A5 JP 2011017875A5 JP 2009162259 A JP2009162259 A JP 2009162259A JP 2009162259 A JP2009162259 A JP 2009162259A JP 2011017875 A5 JP2011017875 A5 JP 2011017875A5
Authority
JP
Japan
Prior art keywords
sample
objective lens
light source
mounting table
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009162259A
Other languages
Japanese (ja)
Other versions
JP5415850B2 (en
JP2011017875A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2009162259A priority Critical patent/JP5415850B2/en
Priority claimed from JP2009162259A external-priority patent/JP5415850B2/en
Publication of JP2011017875A publication Critical patent/JP2011017875A/en
Publication of JP2011017875A5 publication Critical patent/JP2011017875A5/ja
Application granted granted Critical
Publication of JP5415850B2 publication Critical patent/JP5415850B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (7)

試料が載置される試料載置台と、
前記試料に対して落射照明を行う落射光源と、
前記落射光源が発する照明光を前記試料載置台上の前記試料に集光して照射する対物レンズと、
前記落射光源と前記対物レンズとの間の光軸上に配置され、入射する光の偏光成分に応じて反射または透過させる偏光ビームスプリッタと、
前記対物レンズの光軸を中心軸に円環状に設けられ、前記試料載置台上の前記試料に側射照明を行う側射光源と、
前記試料と前記側射光源との間に配置され、前記側射光源が発する照明光のうち特定方向の直線偏光を透過する偏光板と、
前記対物レンズと前記試料との光軸上に配置された４分の１波長板と、
前記試料が反射する反射光のうち前記波長板および前記対物レンズを介して前記偏光ビームスプリッタを透過する観察光を集光して観察像を結像する結像レンズと、
前記結像レンズによって結像された観察像を撮像する撮像手段と、
を備えたことを特徴とする観察装置。 A sample mounting table on which the sample is mounted;
An epi-illumination light source for performing epi-illumination on the sample;
An objective lens that condenses and irradiates the illumination light emitted from the incident light source onto the sample on the sample mounting table;
A polarization beam splitter that is disposed on the optical axis between the incident light source and the objective lens, and reflects or transmits light according to a polarization component of incident light;
A lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table;
A polarizing plate that is disposed between the sample and the side light source and transmits linearly polarized light in a specific direction among the illumination light emitted from the side light source,
A quarter-wave plate disposed on the optical axis of the objective lens and the sample;
An imaging lens that focuses observation light transmitted through the polarizing beam splitter through the wave plate and the objective lens among reflected light reflected by the sample, and forms an observation image;
Imaging means for capturing an observation image formed by the imaging lens;
An observation apparatus comprising: 前記偏光板および前記波長板は、前記対物レンズの光軸を中心軸として回転可能であることを特徴とする請求項１に記載の観察装置。 The observation apparatus according to claim 1 , wherein the polarizing plate and the wave plate are rotatable about the optical axis of the objective lens as a central axis. 前記偏光板は、偏光方向を示す指標を側面に標記していることを特徴とする請求項１または請求項２に記載の観察装置。 The polarizing plate, the observation apparatus according to claim 1 or claim 2, characterized in that it is the title of the index showing the polarization direction in the side surface. 前記波長板は、少なくとも高速軸の直交方向または高速軸から４５度方向を示す指標を側面に標記していることを特徴とする請求項１〜３のいずれか一つに記載の観察装置。 The observation apparatus according to any one of claims 1 to 3 , wherein the wave plate has an index indicating at least a direction orthogonal to the high-speed axis or a 45-degree direction from the high-speed axis on a side surface. 前記対物レンズは、前記偏光ビームスプリッタの反射振動方向を示す指標を側面に標記していることを特徴とする請求１〜４のいずれか一つに記載の観察装置。 The observation apparatus according to any one of claims 1 to 4 , wherein the objective lens has an index indicating a reflection vibration direction of the polarizing beam splitter on a side surface. 試料が載置される試料載置台と、
前記試料に対して落射照明を行う落射光源と、
前記落射光源が発する照明光を前記試料載置台上の前記試料に集光して照射する対物レンズと、
前記落射光源と前記対物レンズとの間の光軸上に配置され、入射する光の偏光成分に応じて反射または透過させる偏光ビームスプリッタと、
前記対物レンズの光軸を中心軸に円環状に設けられ、前記試料載置台上の前記試料に側射照明を行う側射光源と、
前記試料と前記側射光源との間に配置され、前記側射光源が発する照明光のうち特定方向の直線偏光を透過する偏光板と、
前記試料が反射する反射光のうち前記対物レンズを介して前記偏光ビームスプリッタを透過する観察光を集光して観察像を結像する結像レンズと、
前記結像レンズによって結像された観察像を撮像する撮像手段と、
を備えたことを特徴とする観察装置。 A sample mounting table on which the sample is mounted;
An epi-illumination light source for performing epi-illumination on the sample;
An objective lens that condenses and irradiates the illumination light emitted from the incident light source onto the sample on the sample mounting table;
A polarization beam splitter that is disposed on the optical axis between the incident light source and the objective lens, and reflects or transmits light according to a polarization component of incident light;
A lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table;
A polarizing plate that is disposed between the sample and the side light source and transmits linearly polarized light in a specific direction among the illumination light emitted from the side light source,
An imaging lens that focuses observation light transmitted through the polarizing beam splitter through the objective lens among reflected light reflected by the sample, and forms an observation image;
Imaging means for capturing an observation image formed by the imaging lens;
An observation apparatus comprising: 試料が載置される試料載置台と、
前記試料に対して落射照明を行う落射光源と、
前記落射光源が発する照明光を前記試料載置台上の前記試料に集光して照射する対物レンズと、
前記落射光源と前記対物レンズとの間の光軸上に配置され、入射する光の偏光成分に応じて反射または透過させる偏光ビームスプリッタと、
前記対物レンズの光軸を中心軸に円環状に設けられ、前記試料載置台上の前記試料に側射照明を行う側射光源と、
前記対物レンズと前記試料との間の光軸上に配置された４分の１波長板と、
前記試料が反射する反射光のうち前記波長板および前記対物レンズを介して前記偏光ビームスプリッタを透過する観察光を集光して観察像を結像する結像レンズと、
前記結像レンズによって結像された観察像を撮像する撮像手段と、
を備えたことを特徴とする観察装置。 A sample mounting table on which the sample is mounted;
An epi-illumination light source for performing epi-illumination on the sample;
An objective lens that condenses and irradiates the illumination light emitted from the incident light source onto the sample on the sample mounting table;
A polarization beam splitter that is disposed on the optical axis between the incident light source and the objective lens, and reflects or transmits light according to a polarization component of incident light;
A lateral light source that is provided in an annular shape with the optical axis of the objective lens as a central axis, and that laterally illuminates the sample on the sample mounting table;
A quarter wave plate disposed on the optical axis between the objective lens and the sample;
An imaging lens that focuses observation light transmitted through the polarizing beam splitter through the wave plate and the objective lens among reflected light reflected by the sample, and forms an observation image;
Imaging means for capturing an observation image formed by the imaging lens;
An observation apparatus comprising:
JP2009162259A 2009-07-08 2009-07-08 Observation device Expired - Fee Related JP5415850B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009162259A JP5415850B2 (en) 2009-07-08 2009-07-08 Observation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009162259A JP5415850B2 (en) 2009-07-08 2009-07-08 Observation device

Publications (3)

Publication Number Publication Date
JP2011017875A JP2011017875A (en) 2011-01-27
JP2011017875A5 true JP2011017875A5 (en) 2012-07-05
JP5415850B2 JP5415850B2 (en) 2014-02-12

Family

ID=43595715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009162259A Expired - Fee Related JP5415850B2 (en) 2009-07-08 2009-07-08 Observation device

Country Status (1)

Country Link
JP (1) JP5415850B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013161073A (en) * 2012-02-09 2013-08-19 Topcon Corp Wavelength selection optical element, microscope using the wavelength selection optical element, and digital camera using the wavelength selection optical element
JP6095359B2 (en) * 2012-12-25 2017-03-15 オリンパス株式会社 microscope
CN105807413B (en) * 2016-05-18 2018-11-02 麦克奥迪实业集团有限公司 It is a kind of to fall radioglold phase microscope based on light modulation techniques
JP6897712B2 (en) * 2019-03-29 2021-07-07 カシオ計算機株式会社 Lighting device and imaging device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3012681B2 (en) * 1990-10-24 2000-02-28 オリンパス光学工業株式会社 Variable magnification optical device
JP2987218B2 (en) * 1991-02-05 1999-12-06 オリンパス光学工業株式会社 Variable magnification optical device
JP2787678B2 (en) * 1992-04-24 1998-08-20 聡 河田 Polarized light microscope
JPH06229910A (en) * 1992-12-29 1994-08-19 New Oji Paper Co Ltd Measuring method for retardation
JP3980722B2 (en) * 1997-04-03 2007-09-26 株式会社モリテックス CCD microscope
JP3956942B2 (en) * 1998-09-18 2007-08-08 株式会社日立製作所 Defect inspection method and apparatus
JP2001154103A (en) * 1999-11-30 2001-06-08 Mitsutoyo Corp Illuminator for optical instrument
JP2002267932A (en) * 2001-03-12 2002-09-18 Olympus Optical Co Ltd Differential interference microscope
JP2007163553A (en) * 2005-12-09 2007-06-28 Tokyo Seimitsu Co Ltd Microscope, objective lens unit for microscope, and adaptor for objective lens
JP4667313B2 (en) * 2006-07-10 2011-04-13 株式会社モリテックス Observation device with polarized illumination
EP2088459B1 (en) * 2006-11-22 2016-06-15 Nikon Corporation Image measuring device
JP2008233608A (en) * 2007-03-22 2008-10-02 Olympus Corp Microscope apparatus

Similar Documents

Publication Publication Date Title
TWI456255B (en) Microscopy imaging structure with phase conjugated mirror and the method thereof
JP2013518261A5 (en) Holographic mask inspection system, holographic mask inspection method, and lithography system
WO2008152801A1 (en) Inspection device, inspection method, and program
RU2013105474A (en) DEVICE FOR FORMING OPTICAL TOMOGRAPHIC IMAGES AND METHOD FOR FORMING IMAGES FOR THE INDICATED DEVICE
JP2013506152A5 (en)
WO2010104265A3 (en) Inspection device for defect inspection
JP2015184203A5 (en)
JP2010169496A5 (en)
JP2006201465A5 (en)
JP2014026195A5 (en)
JP2011017875A5 (en)
JP2009163069A5 (en)
KR101393514B1 (en) High-sensitivity and video-rate confocal fluorescence microscope
JP2015161527A5 (en)
JP2009109788A5 (en)
JP2012502316A5 (en)
JP2006112974A5 (en)
JP2013195114A (en) White light interference measurement device
JP2005309415A5 (en)
JP2006105780A5 (en)
KR101117501B1 (en) Structured illumination confocal microscope with the use of cross-type linear structured illumination
JP2009192331A (en) Film thickness distribution measuring device
JP5415850B2 (en) Observation device
TWI279580B (en) Co-focal microscopic imaging system with adjustable light source pattern
US20050088735A1 (en) Multi-axis imaging system with single-axis relay