JPH08211328A - Lighting device for observation/image pickup device - Google Patents

Abstract

PURPOSE: To observe selectively lighted images by respective lighting of side oblique light and vertically illuminating light on the whole periphery corresponding to an observation purpose even when a specimen body to be tested is a plane shape having minute ruggedness. CONSTITUTION: A lighting light introduction part 13 is arranged on one side part of an outer peripheral surface of a cylindrical body part 12, and a half mirror member 16 facing to the lighting light introduction part 13 at a prescribed angle on a central optical axis A and formed with an annular mirror part 17 on a peripheral part of a bottom surface side and a half mirror part 18 on a central part is arranged in the cylindrical body part 12, and an observation optical system 19 incorporating an objective lens corresponding to the half mirror part 18 on the central optical axis A is arranged on the lower part side of the member 16, and an optical path switch damper 23 for switching an outer peripheral side optical path 21 with an inner peripheral side optical path 22 is provided on an upper surface light guide side opposing to the annular mirror part 17, and an objective opening part 24 facing to a surface of a part to be observed of a specimen body C to be tested as an observation object is opened on the outer peripheral side optical path 21 extended downward on the central axis A, and the lower side opening part 25 of the inner peripheral side optical path 22 is opened facing to the specimen body C to be tested.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an illuminating device of an observation / imaging device which is applied to observe or image a surface image of an arbitrary sample of a subject (hereinafter, simply referred to as a subject sample). Is the illumination of the surface of the observed portion of the subject sample as an observation target, if necessary, side oblique illumination,
The present invention relates to an illuminating device of an observation / imaging device capable of arbitrarily selecting either one of falling light illumination.

[0002]

2. Description of the Related Art Conventionally, in a state of facing a surface of an observed portion in a subject sample as an observation target of this type,
For example, by arranging an illuminating head or an imaging head, each of which has a floodlight illuminating means, facing each other, and illuminating the observed portion, the surface image or an enlarged surface image is directly observed. In the case of an observing device or an image pickup device which is displayed on the screen of a monitor TV and indirectly observes, the surface of the object to be observed of the subject sample faces obliquely from the side surface oblique to the surface of the observed part. Illumination that emits only oblique rays, that is, illumination that mainly consists of side rays is performed, or only parallel rays that are directed vertically to the surface of the observed portion from the plane side that faces it. In general, the illumination is mainly made up of so-called incident light.

[0003]

However, in the above-described conventional side-light-based illumination method or incident-light-based illumination method, for example, the plane portion of the subject sample to be observed is relatively small. In the case of a shape with fine unevenness, even if each of these lighting methods is executed individually,
There is a disadvantage that the fine uneven shape of the surface portion cannot always be precisely observed, and a method of simultaneously executing each of these illumination methods can be considered, but the configuration of the device itself becomes complicated. There was a point.

The present invention has been made to solve the above-mentioned conventional problems, and the purpose thereof is to:
The surface of the observed portion in the subject sample as the observation target,
Even if it is a plane shape having relatively fine unevenness, the illumination mainly on the side oblique light on the entire outer circumference or the incident light on the same axis corresponds to each observation purpose of the surface of the observed portion. Approximately one of the illuminations mainly composed of the falling light is arbitrarily selected, and the observation of each corresponding illumination image can be effectively and appropriately performed within the same simplified configuration. An object of the present invention is to provide an illumination device of an observation / imaging device that can observe each illumination image in the field of view.

[0005]

In order to achieve the above-mentioned object, the illuminating device of the observation / imaging device according to the present invention is constructed as follows.

That is, the present invention has a main body barrel in which an illumination light introducing portion for guiding the illumination light is arranged on one side of the outer peripheral surface of the tubular body, and the central light is provided in the tubular body. A half mirror member having an annular mirror portion in the peripheral portion on the lower surface side and a half mirror portion in the central portion is disposed while facing the illumination light introducing portion on the axis at a predetermined angle, and the half mirror An observation optical system including an objective lens corresponding to the half mirror portion on the central optical axis is disposed on the lower side of the member,
Further, while having an optical path switching damper for switching the outer peripheral side optical path and the inner peripheral side optical path on the upper surface light guide side opposed to the annular mirror portion, the outer peripheral side optical path extended downward is used as an observation target on the central optical axis. The objective opening portion facing the surface of the observed portion of the subject sample is opened, and the lower opening portion of the inner peripheral side optical path is configured to be opened toward the subject sample, and if necessary,
By switching the optical path switching damper to the inner peripheral side, the illumination light introduced into the outer peripheral side optical path can be irradiated to the subject sample as side oblique light from the inner peripheral surface of the objective opening, and switched to the outer peripheral side, The illumination device for an observation / imaging device is characterized in that the illumination light introduced into the optical path on the inner peripheral side can be irradiated to the subject sample as falling light from the opening surface of the lower opening.

[0007]

In the present invention, by selectively switching the optical path switching damper to the inner peripheral side or the outer peripheral side, the illumination light guided to the illumination light introducing portion is tested as the corresponding side oblique light or falling light. The surface of the observed portion of the body sample can be illuminated.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an illuminating device for an observation / imaging device according to the present invention will be described in detail below with reference to FIGS.

The present embodiment is a case where the present illuminating device is used for an image pickup device, and it is needless to say that it can be applied as an illuminating device of an observing device.

First, a schematic structure of the illumination device in the image pickup apparatus of this embodiment shown in FIG. 1 will be described.

FIG. 1 is a vertical cross-sectional view schematically showing the schematic construction of an image pickup device to which an illuminating device according to one embodiment of the present invention is applied. In FIG. The case where illumination is performed is shown.

That is, in the configuration of the embodiment apparatus shown in FIG. 1, the main body barrel 11 of the image pickup apparatus guides the illumination light on the incident optical axis B to the predetermined position on one side of the outer peripheral surface through the optical fiber bundle 13a. It has a cylindrical body portion 12 in which the illumination light introducing portion 13 is arranged, and the illumination light introducing portion 13 has a ring shape as a light transmitting portion only in the portion corresponding to the entire circumference on the incident optical axis B. By providing the converging lens 14 for the illumination light flux, the introduced illumination light can be made into an annular parallel light flux and can be guided to the inner side of the tubular body portion 12, and the other central portion is provided with the non-light transmitting portion 15. As the illumination light is blocked.

Further, in the cylindrical body portion 12, the illumination light introducing portion 13 is faced at an angle of 45 ° on the central optical axis A, and the outer peripheral portion on the lower surface side is separately provided. A half mirror member 16 is formed by performing a vapor deposition process to form an annular mirror portion 17 that totally reflects an illumination light flux guided in an annular shape through the focusing lens 14 downward and a half mirror portion 18 is formed in a central portion. There is.

An observation optical system 19 including an objective lens corresponding to the half mirror portion 18 of the half mirror member 16 is provided on the lower side of the half mirror member 16 on the central optical axis A, Further, an optical path switching damper 23 for switching between the outer peripheral side optical path 21 and the inner peripheral side optical path 22 is provided on the upper surface light guide side opposed to the annular mirror section 17, and the central optical path is provided for the outer peripheral side optical path 21 extending downward. On the axis A, an objective opening 24 facing the surface of the observed portion of the subject sample C as an observation target is opened, and for the inner peripheral side optical path 22, the lower opening 25 is made the subject sample C. A light collecting guide member 20 that is open toward the side is provided.

On the other hand, on the upper side of the half mirror member 16, similarly on the central optical axis A, the focus operation ring 2 is provided.
7 through a focus mechanism (which may be of a known type and therefore will not be described in detail) through a focus mechanism 7 (also of a known type, which will not be described in detail). 29)
A CCD element 28 having a is arranged.

Next, the operation in the case of observing the sample C of the test subject in each of the different illumination modes using the illumination device according to the above-mentioned embodiment will be described in order. Here, the focus operation ring 27 is previously set for the subject sample C facing the objective opening 24 of the main body barrel 11 by each of these illumination forms.
It is assumed that the focus operation D of the focus mechanism 26 and the variable magnification operation E of the variable magnification mechanism 29 are respectively performed by the above.
It is assumed that the imaging light b when illuminating is properly set to be incident on the CCD element 28.

First, when the image pickup apparatus according to the above-mentioned embodiment is used in a side oblique light mainly illumination mode (hereinafter referred to as a first illumination mode), the optical path modes of the illumination light and the imaging light are as shown in FIG. is there.

In the first illumination mode, as shown in FIG. 1, the optical path switching damper 23 is selectively switched to the inner peripheral side, whereby the outer optical path 2 of the light collecting guide member 20.
Take advantage of 1. Here, the switching of the optical path switching damper 23 to the inner peripheral side corresponds to the illumination of the subject sample C by the side oblique light passing through the outer peripheral side optical path 21.

That is, in the case of the first illumination mode, the illumination light a guided to the illumination light introducing section 13 is first converted into an annular parallel light flux by the converging lens 14, and at the same time the annular shape of the half mirror member 16 is changed. The light is totally reflected by the mirror portion 17 and guided to the upper light guide side of the light collecting guide member 20, and the inner peripheral side optical path 21.
Introduced within. Then, in the inner peripheral side optical path 21, after repeating reflection on each inner surface of itself including the switching outer surface of the optical path switching damper 23, from the entire inner peripheral surface side where the objective aperture 24 is opened to the entire periphery. The falling light a ₁ is applied to the observed portion of the test sample C, and in this case,
Illumination using the side oblique light a ₁ from the entire circumferential direction is independently performed on the observed portion of the subject sample C.

After that, the imaging light b ₁ reflected by the observed part of the sample C to be examined is observed from the objective aperture 24 to the observation optical system 19.
Through the half mirror portion 18 of the half mirror member 16 and then enters the CCD element 28, and the CCD element 28 converts the imaging light b ₁ into an electric signal, which is not shown. By displaying it on the screen of the monitor TV, the illumination image (observation image) of the observed portion by the side oblique light a _{1 as} expected, that is, the illumination image illuminated in the first illumination form can be easily and effectively obtained. Can be observed from the beginning.

Next, when the image pickup apparatus according to the above-mentioned embodiment is used in the illumination mode mainly for falling light (hereinafter referred to as the second illumination mode), the optical path modes of the illumination light and the imaging light are as shown in FIG. Is.

In the first illumination mode, as shown in FIG. 2, the optical path switching damper 23 is selectively switched to the outer peripheral side so that the optical path 2 on the inner peripheral side of the light collecting guide member 20.
Take advantage of 2. Here, the switching of the optical path switching damper 23 to the outer peripheral side corresponds to the illumination of the subject sample C by the falling light that has passed through the inner peripheral side optical path 21.

That is, also in the case of the second illumination form,
The illumination light a guided to the illumination light introducing portion 13 is first converted into an annular parallel light flux by the focusing lens 14, and is totally reflected by the annular mirror portion 17 of the half mirror member 16 so that the upper surface of the focusing guide member 20. It is guided to the light guide side and is introduced into the inner peripheral side optical path 22 here. Then, the inner optical path 22
In the inside, after the reflection is repeated on each inner surface of itself including the inner switching surface of the optical path switching damper 23, the lower opening 25 is formed.
Is irradiated to the observed portion of the subject sample C as falling light a ₂ from the entire opened lower surface side to the entire periphery. In this case, with respect to the observed portion of the subject sample C, Illumination using the falling light a ₂ from all directions is independently performed.

After that, the imaging light b ₂ reflected by the observed portion of the sample C to be examined is observed from the objective aperture 24 to the observation optical system 20.
Through the half mirror section 18 of the half mirror member 16 and then enters the CCD element 28, and the CCD element 28 converts the imaging light b ₂ into an electric signal, which is not shown. By displaying it on the screen of the monitor TV, the illumination image (observation image) of the observed portion by the expected falling light a ₂ , that is, the illumination image illuminated by the second illumination form can be easily and effectively obtained. Can be observed from the beginning.

[0025]

As described above in detail with reference to the embodiments and the respective usage examples, according to the present invention, the illumination light introducing portion for guiding the illumination light to one side of the outer peripheral surface of the tubular body is provided. It has a main body barrel arranged, and in the tubular body, faces the illumination light introducing part at a predetermined angle on the central optical axis, and has an annular mirror part in the peripheral part on the lower surface side and a half in the central part. A half mirror member having a mirror portion is arranged, and an observation optical system including an objective lens corresponding to the half mirror portion on the central optical axis is arranged on the lower side of the half mirror member, and a ring shape. A specimen sample as an observation target on the central optical axis in the outer optical path that extends downward while having an optical path switching damper that switches the outer optical path and the inner optical path on the upper light guide side facing the mirror section. Open the objective aperture to face the surface of the observed part of Since the lower opening of the inner optical path is opened toward the subject sample, it is a simple operation to selectively switch the optical path switching damper to the inner or outer side according to the purpose of observation. Allows the illumination light guided to the illumination light introducing part to be converted into either side oblique light or falling light, so that the surface of the observed portion of the subject sample can be effectively illuminated according to each purpose. In addition, the device configuration itself is extremely simple and has excellent features such as easy implementation.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view schematically showing a schematic configuration of an image pickup device in the case of lateral oblique illumination to which an illumination device according to an embodiment of the present invention is applied.

FIG. 2 is a vertical cross-sectional view schematically showing a schematic configuration of an image pickup device in the case of falling light illumination in the illumination device of the above embodiment.

[Explanation of symbols]

11 Main body barrel 12 Cylindrical barrel portion 13 Illumination light introducing portion 13a Optical fiber bundle 14 Annular condenser lens 15 Non-light transmitting portion 16 Half mirror member 17 Annular mirror portion 18 Half mirror portion 19 Imaging optical system 20 Condensing guide member 21 Outer periphery Side optical path 22 Inner peripheral side optical path 23 Optical path switching damper 24 Objective opening 25 Lower opening 26 Focus mechanism 27 Focus operating ring 28 CCD element 29 Variable magnification mechanism A Center optical axis B Incident optical axis C Subject sample a Illumination light a ₁ Side oblique light a ₂ Falling light b ₁ , b ₂ Imaging light

Claims (1)

[Claims] 1. A main body barrel having an illumination light introducing portion for guiding illumination light is provided on one side of an outer peripheral surface of a tubular body, and the main body barrel is provided in the tubular body on the central optical axis. A half mirror member having an annular mirror portion in the peripheral portion on the lower surface side and a half mirror portion in the central portion is arranged while facing the illumination light introducing portion at a predetermined angle, and the lower side of the half mirror member. Is provided with an observation optical system including an objective lens corresponding to the half mirror section on the central optical axis, and an outer peripheral side optical path and an inner peripheral side optical path are provided on the upper surface light guide side facing the annular mirror section. In addition to having an optical path switching damper that switches the optical path, the outer optical path that extends downward has an objective opening on the central optical axis that faces the surface of the observed part of the specimen sample as the observation target Open the lower opening of the side optical path toward the specimen sample. If necessary, by switching the optical path switching damper to the inner peripheral side, it is possible to irradiate the subject sample as side oblique light from the inner peripheral surface of the objective opening with the illumination light introduced into the outer peripheral side optical path, Further, the illumination device of the observation / imaging device is characterized in that the illumination light introduced into the optical path on the inner peripheral side can be switched to the outer peripheral side to irradiate the subject sample as falling light from the opening surface of the lower opening. .