JPH11508101A5 - - Google Patents

Info

Publication number
JPH11508101A5
JPH11508101A5 JP1997503529A JP50352997A JPH11508101A5 JP H11508101 A5 JPH11508101 A5 JP H11508101A5 JP 1997503529 A JP1997503529 A JP 1997503529A JP 50352997 A JP50352997 A JP 50352997A JP H11508101 A5 JPH11508101 A5 JP H11508101A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP1997503529A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11508101A (ja
Filing date
Publication date
Priority claimed from DK072695A external-priority patent/DK172085B1/da
Application filed filed Critical
Publication of JPH11508101A publication Critical patent/JPH11508101A/ja
Publication of JPH11508101A5 publication Critical patent/JPH11508101A5/ja
Ceased legal-status Critical Current

Links

JP9503529A 1995-06-23 1996-06-21 マイクロメカニカルマイクロホン Ceased JPH11508101A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DK726/95 1995-06-23
DK072695A DK172085B1 (da) 1995-06-23 1995-06-23 Mikromekanisk mikrofon
PCT/DK1996/000276 WO1997001258A1 (en) 1995-06-23 1996-06-21 Micromechanical microphone

Publications (2)

Publication Number Publication Date
JPH11508101A JPH11508101A (ja) 1999-07-13
JPH11508101A5 true JPH11508101A5 (enExample) 2004-08-05

Family

ID=8096839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9503529A Ceased JPH11508101A (ja) 1995-06-23 1996-06-21 マイクロメカニカルマイクロホン

Country Status (8)

Country Link
US (1) US6075867A (enExample)
EP (1) EP0872153B1 (enExample)
JP (1) JPH11508101A (enExample)
AT (1) ATE205355T1 (enExample)
DE (1) DE69615056T2 (enExample)
DK (2) DK172085B1 (enExample)
ES (1) ES2159747T3 (enExample)
WO (1) WO1997001258A1 (enExample)

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US7881486B1 (en) * 1996-12-31 2011-02-01 Etymotic Research, Inc. Directional microphone assembly
DE19715365C2 (de) * 1997-04-11 1999-03-25 Sennheiser Electronic Kondensatormikrofon
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US7003127B1 (en) 1999-01-07 2006-02-21 Sarnoff Corporation Hearing aid with large diaphragm microphone element including a printed circuit board
JP2002534933A (ja) 1999-01-07 2002-10-15 サーノフ コーポレイション プリント回路基板を有する大型ダイアフラムマイクロフォン素子を備えた補聴器
AT407322B (de) * 1999-03-23 2001-02-26 Akg Acoustics Gmbh Klein-mikrophon
US6522762B1 (en) 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6505076B2 (en) * 2000-12-08 2003-01-07 Advanced Bionics Corporation Water-resistant, wideband microphone subassembly
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
GB0113255D0 (en) * 2001-05-31 2001-07-25 Scient Generics Ltd Number generator
US20070113964A1 (en) * 2001-12-10 2007-05-24 Crawford Scott A Small water-repellant microphone having improved acoustic performance and method of constructing same
US20030210799A1 (en) * 2002-05-10 2003-11-13 Gabriel Kaigham J. Multiple membrane structure and method of manufacture
JP2004056438A (ja) * 2002-07-19 2004-02-19 Matsushita Electric Ind Co Ltd マイクロフォン
US7072482B2 (en) 2002-09-06 2006-07-04 Sonion Nederland B.V. Microphone with improved sound inlet port
US7142682B2 (en) 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
EP1629687A1 (en) * 2003-05-15 2006-03-01 Oticon A/S Microphone with adjustable properties
JP4188325B2 (ja) * 2005-02-09 2008-11-26 ホシデン株式会社 防塵板内蔵マイクロホン
DE102005008512B4 (de) * 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005008514B4 (de) * 2005-02-24 2019-05-16 Tdk Corporation Mikrofonmembran und Mikrofon mit der Mikrofonmembran
DE102005008511B4 (de) * 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
JP4863993B2 (ja) * 2005-05-31 2012-01-25 日本碍子株式会社 物体の通過検出装置
DE102005053767B4 (de) * 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
DE102005053765B4 (de) * 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
US8081783B2 (en) * 2006-06-20 2011-12-20 Industrial Technology Research Institute Miniature acoustic transducer
TWI370101B (en) * 2007-05-15 2012-08-11 Ind Tech Res Inst Package and packaging assembly of microelectromechanical sysyem microphone
TWI323242B (en) * 2007-05-15 2010-04-11 Ind Tech Res Inst Package and packageing assembly of microelectromechanical system microphone
TWI343756B (en) * 2009-08-10 2011-06-11 Ind Tech Res Inst Flat loudspeaker structure
US7832080B2 (en) * 2007-10-11 2010-11-16 Etymotic Research, Inc. Directional microphone assembly
TWI336770B (en) * 2007-11-05 2011-02-01 Ind Tech Res Inst Sensor
WO2009154981A2 (en) * 2008-05-27 2009-12-23 Tufts University Mems microphone array on a chip
US9071910B2 (en) * 2008-07-24 2015-06-30 Cochlear Limited Implantable microphone device
TWI405472B (zh) * 2008-07-31 2013-08-11 Htc Corp 電子裝置及其電聲換能器
DE102008058787B4 (de) * 2008-11-24 2017-06-08 Sennheiser Electronic Gmbh & Co. Kg Mikrofon
US9247357B2 (en) 2009-03-13 2016-01-26 Cochlear Limited DACS actuator
US20100303274A1 (en) * 2009-05-18 2010-12-02 William Ryan Microphone Having Reduced Vibration Sensitivity
WO2011116246A1 (en) * 2010-03-19 2011-09-22 Advanced Bionics Ag Waterproof acoustic element enclosures and apparatus including the same
DE102010017959A1 (de) * 2010-04-22 2011-10-27 Epcos Ag Mikrofon mit breitem Dynamikbereich
EP2432249A1 (en) * 2010-07-02 2012-03-21 Knowles Electronics Asia PTE. Ltd. Microphone
CN106878838B (zh) 2011-01-18 2019-04-30 领先仿生公司 防潮耳机和包括防潮耳机的可植入耳蜗刺激系统
DE112012005578B4 (de) * 2012-01-05 2019-11-07 Tdk Corporation Differenzielles Mikrofon und Verfahren zum Ansteuern eines differenziellen Mikrofons
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device
US9002037B2 (en) 2012-02-29 2015-04-07 Infineon Technologies Ag MEMS structure with adjustable ventilation openings
US8983097B2 (en) 2012-02-29 2015-03-17 Infineon Technologies Ag Adjustable ventilation openings in MEMS structures
JP6426620B2 (ja) 2012-12-18 2018-11-21 Tdk株式会社 トップポートmemsマイクロフォン及びその製造方法
US9173024B2 (en) * 2013-01-31 2015-10-27 Invensense, Inc. Noise mitigating microphone system
DE102013207497A1 (de) * 2013-04-25 2014-11-13 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur
DE102013106353B4 (de) * 2013-06-18 2018-06-28 Tdk Corporation Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement
US9181080B2 (en) 2013-06-28 2015-11-10 Infineon Technologies Ag MEMS microphone with low pressure region between diaphragm and counter electrode
US9024396B2 (en) 2013-07-12 2015-05-05 Infineon Technologies Ag Device with MEMS structure and ventilation path in support structure
DE102013214823A1 (de) * 2013-07-30 2015-02-05 Robert Bosch Gmbh Mikrofonbauteil mit mindestens zwei MEMS-Mikrofonbauelementen
US9510107B2 (en) 2014-03-06 2016-11-29 Infineon Technologies Ag Double diaphragm MEMS microphone without a backplate element
US9438979B2 (en) * 2014-03-06 2016-09-06 Infineon Technologies Ag MEMS sensor structure for sensing pressure waves and a change in ambient pressure
US9494477B2 (en) 2014-03-31 2016-11-15 Infineon Technologies Ag Dynamic pressure sensor
US9554207B2 (en) * 2015-04-30 2017-01-24 Shure Acquisition Holdings, Inc. Offset cartridge microphones
GB2554470A (en) 2016-09-26 2018-04-04 Cirrus Logic Int Semiconductor Ltd MEMS device and process
DE102017103195B4 (de) * 2017-02-16 2021-04-08 Infineon Technologies Ag Mikroelektromechanisches Mikrofon und Herstellungsverfahren für ein Mikroelektromechanisches Mikrofon
WO2018178772A2 (en) 2017-03-28 2018-10-04 Nanofone Ltd. High performance sealed-gap capacitive microphone
DE102017213277B4 (de) * 2017-08-01 2019-08-14 Infineon Technologies Ag Mems-sensoren, verfahren zum bereitstellen derselben und verfahren zum betreiben eines mems-sensors
WO2019135204A1 (en) 2018-01-08 2019-07-11 Nanofone Limited High performance sealed-gap capacitive microphone with various gap geometries
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
CN112840676B (zh) 2018-10-05 2022-05-03 美商楼氏电子有限公司 响应于声学信号来生成电信号的声学换能器和麦克风组件
WO2020072920A1 (en) 2018-10-05 2020-04-09 Knowles Electronics, Llc Microphone device with ingress protection
CN112789239A (zh) 2018-10-05 2021-05-11 美商楼氏电子有限公司 形成包括褶皱的mems振膜的方法
US11932533B2 (en) 2020-12-21 2024-03-19 Infineon Technologies Ag Signal processing circuit for triple-membrane MEMS device
US11889283B2 (en) 2020-12-21 2024-01-30 Infineon Technologies Ag Triple-membrane MEMS device
US12240748B2 (en) 2021-03-21 2025-03-04 Knowles Electronics, Llc MEMS die and MEMS-based sensor
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint
KR20230115058A (ko) * 2022-01-26 2023-08-02 주식회사 디비하이텍 맴스 마이크로폰 구조 및 제조방법

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US3980838A (en) * 1974-02-20 1976-09-14 Tokyo Shibaura Electric Co., Ltd. Plural electret electroacoustic transducer
FR2402374A1 (fr) * 1977-08-30 1979-03-30 Thomson Brandt Dispositif de montage d'un microphone incorpore dans un appareil d'enregistrement sonore et appareil a microphone incorpore
FR2542552B1 (fr) * 1983-03-07 1986-04-11 Thomson Csf Transducteur electroacoustique a diaphragme piezo-electrique
US5085070A (en) * 1990-02-07 1992-02-04 At&T Bell Laboratories Capacitive force-balance system for measuring small forces and pressures
WO1995015067A1 (de) * 1993-11-23 1995-06-01 Lux Wellenhof Gabriele Hülle für hörgeräte, damit versehene hörgeräte bzw. teile davon und hörtestvorrichtung und verfahren

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