JPH11347942A - Micro-shape forming method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To establish a micro-shape forming method excellent in the practical application adopting a wet blast process, whereby it is possible to suppress sputter of abrasive grains, easily retrieve the blast material, form the micro- shape with good dimensional stability, and lower the rate of unacceptability of output products. SOLUTION: A mask 2 furnished with specified minute shapes 1 penetratively is provided on the applicable surface of a work to be processed 3, and a blast material 5 is jetted onto the mask 2 to grind the surface so that the micro- shapes are formed on the surface. In this method, the blast material 5 is prepared by including abrasive grains in a liquid and is jetted with air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a fine shape for forming fine holes and grooves.

[0002]

2. Description of the Related Art When manufacturing fine holes or grooves of about 0.1 to 0.2 mm in order to manufacture a workpiece such as a printed circuit board or a ball grid array, a general method is used. Specifically, a multi-axis small-diameter drill is used.

[0003] However, the method using the small diameter drill has a problem that it takes a long time to machine each part of the surface to be processed with a multi-axis small diameter drill.

On the other hand, in order to solve such problems of the small diameter drilling method, a method of forming a fine shape by a drive last method in which a mask is provided on a surface to be processed and abrasive grains are blown from above the mask onto the surface to be processed by air. However, this drive last method has the following problems.

[0005] Since the abrasive grains are easily scattered and must be collected by a collecting device such as a dust filter or a cyclone, the device becomes complicated and costly. In addition, there is a high possibility that the working environment is deteriorated due to leakage of the scattered abrasive grains from the processing device.

[0006] Processing heat easily accumulates on the surface to be processed, and errors tend to occur in processing dimensions such as depth and roughness.

[0007] Abrasive grains and shavings are likely to adhere to the fine shape formed on the surface to be processed, and there is a possibility that a defect may occur when precision is required, such as when manufacturing an integrated circuit.

The present invention solves the above problems,
By adopting the wet blast method to form the fine shape, the abrasive particles are less likely to be scattered and the collected blast material is easy to collect.Also, the fine shape can be formed with good dimensional stability, and the defect rate of the product can be reduced. An object of the present invention is to provide a method for forming a fine shape excellent in practicality, which can be reduced.

[0009]

The gist of the present invention will be described with reference to the accompanying drawings.

A mask 2 in which a fine predetermined shape 1 is formed in a penetrating state is provided on a processing surface 4 of a processing object 3.
This is a method for forming a fine shape in which a fine predetermined shape is formed on the work surface 4 by injecting the spray material 5 onto the work surface 4 and cutting the work surface 4. The method according to the present invention relates to a method for forming a fine shape, wherein the mixed material is mixed, and the jet material 5 is jetted with air.

Further, in the method for forming a fine shape according to the first aspect, the nozzle member 6 or the workpiece 3 for ejecting the injection material 5 is moved at a predetermined speed, and the injection material 5 is sprayed on the entire surface of the workpiece surface 4. In addition, the present invention relates to a method for forming a fine shape, wherein the amount of cutting of the processing surface 4 is adjusted by the moving speed of the nozzle body 6 or the processing object 3.

Further, in the method for forming a fine shape according to any one of claims 1 and 2, cutting the workpiece surface 4 by repeatedly moving the nozzle body 6 or the workpiece 3 for injecting the spray material 5. The present invention relates to a method for forming a fine shape, characterized in that the amount is adjusted.

[0013]

Since the blasting material 5 is formed by mixing abrasive grains into a liquid, the blasting material 5 is applied from above the mask 2 to the surface 4 to be processed.
When the fine predetermined shape 1 is formed by spraying, the abrasive particles and the cutting powder are hardly scattered (the abrasive particles and the cutting powder are mixed in the scattered liquid particles). It will be easier.

Further, the processing heat can be satisfactorily removed by the liquid in the blast material 5, the work surface 4 can be shaved under a constant condition, and the dimensional stability is improved.

Further, the abrasive grains and shavings in the blasting material 5 sprayed on the work surface 4 are satisfactorily removed from the working surface 4 by the liquid in the blasting material 5, and the abrasive grains and shavings are removed. This does not adversely affect the formation of the fine predetermined shape.

In this embodiment, as described above, the abrasive particles are hardly scattered and the blasting material can be easily collected. In addition, a fine predetermined shape can be formed with good dimensional stability, and defective products can be obtained. This is a method for forming a fine shape excellent in practicality that can also reduce the rate.

[0017]

BRIEF DESCRIPTION OF THE DRAWINGS The drawings illustrate one embodiment of the present invention and will be described below.

In this embodiment, a mask 2 in which a fine predetermined shape 1 is formed in a penetrating state is provided on a processing surface 4 of a processing object 3, and an injection material 5 is sprayed onto the mask 2 to perform the processing. This is a method for forming a fine shape in which a fine predetermined shape is formed on the surface to be processed 4 by cutting the surface 4, wherein the jetting material 5 is obtained by mixing abrasive grains in a liquid. It is jetted by air.

As the workpiece 3, a circuit board material is shown, and an injection material 5 is sprayed on the workpiece 3 to pattern a fine shape.

The mask 2 is formed by a known method.
Is provided on the surface 4 to be processed. Further, the mask 2 is provided with a fine shape 1 having the same shape as the fine shape for patterning the processing surface 4 by a known method.

As abrasive grains mixed in the blasting material 5, resin grains, metal grains, ceramic grains or glass grains having a diameter of several μm to several hundred μm are used, and water is used as a liquid. Incidentally, an alkaline degreaser or the like can be mixed into the spray material 5 for the purpose of cleaning.

The spray material 5 is sprayed together with air from a nozzle body 6 for spraying the spray material 5.

In the nozzle body 6, the injection port is provided in a slit shape. A compressed air supply port 7 provided at the base end of the slit of the nozzle body 6 is connected to a pressurized air supply unit (not shown). The mouth 8 is connected to a storage portion (not shown) for storing the propellant 5, and the propellant 5 is sucked into the nozzle body 6 by air and jetted at a constant concentration (propellant 5 / air).

The sprayed material 5 sprayed from the nozzle body 6 falls by free fall to a sprayed material recovery section (not shown) provided below the nozzle body 6 and below the workpiece 3, and is sprayed. It is temporarily stored in the material collection section.

The spray material 5 is made to have a constant concentration (abrasives / liquid) by stirring by a stirring device in the spray material collecting section. In addition, the lower part of the blast material collecting section serves as the storage section, and the blast material 5 is supplied from the storage section to the nozzle body 6 with the abrasive grain concentration kept constant.

When the work piece 3 is fixed, the spray material 5 is sprayed from the mask 2 onto the entire work surface 4 of the work piece 3 by the movement of the nozzle body 6. The surface 4 is shaved, and the same fine shape as the fine shape 1 provided on the mask 2 is patterned on the surface 4 to be processed. If the nozzle body 6 and the workpiece 3 are configured to be relatively movable, it is possible to inject the spray material 5 over the entire surface 4 to be processed.

At this time, since the abrasive 5 of the present embodiment is formed by mixing abrasive grains into a liquid, the amount of cutting is different from that of the dry-last method even when the processing conditions such as humidity are difficult to control. The amount of cutting can be set according to the injection time of the injection material 5 with little change (of course, the type of abrasive grains, the abrasive concentration, the air pressure, the material of the workpiece 3 Etc. are constant.). In addition, the injection material 5
By setting only the injection time, the workpiece 3 is prevented from penetrating the workpiece surface 4 as shown in FIG. 3 even if the workpiece 3 is thin, or the workpiece 3 as shown in FIG. 3 can be penetrated.

When the nozzle body 6 is moved at a constant speed, the nozzle body 6 is reciprocated many times at a place where the cutting amount is desired to be deep, so that a fine shape having a desired depth is formed on the surface 4 to be processed. can do.

According to the present embodiment, grooves and holes having a minimum width of 0.1 mm were formed in a resin circuit board material, ceramic material, silicon wafer material, and glass material. The shape could be formed. In addition, an enlarged photograph by a microscope confirmed that there was no noticeable unevenness in the fine shape, and that a fine shape requiring extremely high precision, such as an integrated circuit pattern, could be formed.

The effects of this embodiment are presumed to be due to the following effects.

Since the abrasive grains and the shavings are handled through the liquid, a simple recovery device for collecting the abrasive grains and the shavings (for example, a scattering liquid grain (the abrasive grains and the shavings are mixed)) is used. Such as utilizing free fall), and the work site can be clean.

The abrasive in the blasting material 5 removes the abrasive grains and powder from the finely-shaped portion satisfactorily.
The sprayed material 5 sprayed from the nozzle is always kept in good contact with the surface 4 to be machined, so that the working can proceed satisfactorily and the occurrence of product defects can be prevented.

Since a liquid film is formed on the abrasive grains in the blast material 5, the surface area of the abrasive grains increases, and the jet pressure of air is less likely to be lost.

The processing heat is well removed by the liquid in the blasting material 5, and the surface to be processed 4 is shaved by the blasting material 5 under certain conditions.

Since the liquid and abrasive grains in the blast material 5 are formed into particles by the expansion of the compressed air and come into contact with the processing surface 4, the blast material exhibits a high blasting force with a low blasting force as compared with the drive blast. Can be.

In the present embodiment, as described above, when the blasting material 5 is sprayed from the mask 2 to the surface 4 to be processed to form a fine predetermined shape 1, abrasive grains and powder are less likely to scatter. Since the injection material 5 can be easily collected, the apparatus can be simplified and inexpensive, and the processing heat can be satisfactorily removed by the liquid in the injection material 5, so that the surface 4 to be processed can be maintained under a certain condition. It is possible to form a fine shape with extremely dimensional stability because it is not affected by humidity etc.
This is a method for forming a fine shape excellent in practicability that can also reduce the defect rate.

[Brief description of the drawings]

FIG. 1 is an explanatory perspective view of this embodiment.

FIG. 2 is an explanatory side sectional view in an initial state of the present embodiment.

FIG. 3 is an explanatory side sectional view showing an example after processing in this embodiment.

FIG. 4 is an explanatory side sectional view showing an example after processing in this embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fine predetermined shape 2 Mask 3 Workpiece 4 Workpiece surface 5 Injection material 6 Nozzle body

Claims (3)

[Claims] 1. A mask in which a fine predetermined shape is formed in a penetrating state is provided on a processing surface of a processing object, and an injection material is sprayed on the mask to cut the processing surface, thereby forming a fine predetermined shape. A method for forming a fine shape, wherein a shape is formed on the surface to be processed, wherein the jetting material is obtained by mixing abrasive grains into a liquid, and the jetting material is jetted with air. Method. 2. A method for forming a fine shape according to claim 1, wherein the nozzle body or workpiece to be sprayed is moved at a predetermined speed, and the sprayed material is sprayed on the entire surface of the workpiece. Alternatively, a method of forming a fine shape, wherein a cutting amount of a processing surface is adjusted by a moving speed of the processing object. 3. The method for forming a fine shape according to claim 1, wherein a cutting amount of a surface to be processed is adjusted by repeatedly moving a nozzle body or a workpiece to eject a spray material. A method for forming a fine shape, characterized in that: