JP2002036119A - Jet cutting method for work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a jet cutting method for cutting platy work with making a cutting end surface vertical without chipping. SOLUTION: In this jet cutting method for work, grinding material is jetted from a nozzle by a compressed medium to cut the work. A tip end of the nozzle main body 11 provided with a jetting port having a rectangular cross-section which is not more than 5 mm in width, and not less than 3 in length/width ratio, is brought close to the work 3 so as to have a distance of not more than 1 mm. While jetting the grinding material, the nozzle main body 11 is made to travel in a longitudinal direction of the jetting port, thereby cutting the work in a generally vertical direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for jet cutting a flat work such as a glass plate or a synthetic resin substrate such as a liquid crystal panel or a semiconductor substrate.

[0002]

2. Description of the Related Art Conventionally, when a flat work such as a glass substrate or a synthetic resin substrate such as a liquid crystal panel or a semiconductor substrate is cut by a jet, an annular nozzle 1 having a jet port having a circular cross section as shown in FIG. This was used to scan in the cutting direction, and a cutting material made of hard abrasive grains such as Alundum was sprayed to perform cutting. Further, as shown in FIG. 4, the distance between the injection port 2 of the annular nozzle 1 and the work 3 is 3 mm.
To a relatively large extent, since the abrasive was sprayed and cut, the abrasive was spread radially from the tip of the annular nozzle 1 and was sprayed. It was difficult to maintain the dimensions of the workpiece after cutting high. Also, during the cutting, the abrasive material hits one cut end face 7 and rebounds, and the rebounded abrasive material scavenges the other cut end face 7 so that the inlet side of the abrasive material is broadly wide at the entrance side and narrow at the exit side. As a result, the positions of the upper end 4 and the lower end 5 of the cutting end face 7 are shifted and the cutting is performed diagonally.

In the case where hard and brittle materials such as glass, Si, and ceramics are jet-cut, the hard and brittle materials are lost at one time when the cut portion finally penetrates from the front to the back as the polishing proceeds. To cause chipping 6 frequently,
There is a problem in that the cutting precision is significantly impaired, so that the precision parts are cut with inappropriate dimensional accuracy.

[0004]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems and cuts a flat work such as a synthetic resin substrate such as a liquid crystal panel or a semiconductor substrate or a glass substrate without causing chipping. The present invention has been made to provide a method of spraying and cutting a workpiece for cutting so that an end surface is substantially vertical.

[0005]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a method for jetting and cutting a workpiece according to the present invention is to jet and cut a workpiece by jetting an abrasive material from a nozzle with a compressed medium to cut the workpiece. In the method, a nozzle provided with a rectangular cross-section injection port having a width of 0.5 mm or less and a length / width ratio of 3 or more is used to eject a polishing material while the distance between the nozzle tip and the work is close to 1 mm or less. The basic configuration is that the workpiece is vertically cut by moving the nozzle in the longitudinal direction of the injection port.

In the above-mentioned invention, the distance between the nozzle tip and the workpiece must be 100 to 100 μm in order to ensure accuracy such that the deviation between the upper and lower ends of the cut end face is 100 μm or less.
It is preferable that the abrasive has a thickness of 200 μm and that the abrasive has a center particle diameter of 30 to 80 μm. Further, in each of the above-mentioned inventions, since the chipping of the lower end of the cut end surface of the work can be prevented by attaching at least one of the protective tape and the mask member to the back surface of the work, the work can be cut with higher precision. This is defined as claim 4 of the present invention.

[0007]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 (a), (b), (c)
1 is a front cross-sectional view, a side cross-sectional view, and a plan cross-sectional view illustrating an embodiment of a nozzle used in the present invention. An injection port 12 of a nozzle body 11 having a rectangular cross section has a width of 0.5 mm or less and a long length. It is formed in a rectangular cross section having a height / width ratio of 3 or more. In addition, the width of the injection port 12 may be 0.5 mm or less, but 0.3 mm or less, particularly 0.2 mm to 0.1 mm.
More preferably, it is 1 mm. Further, the length / width ratio of the injection port 12 may be 3 or more, but is 10 or more, especially 1
More preferably, it is 5 or more. Also. The nozzle body 11 is held by a moving device (not shown) and travels in the longitudinal direction of the rectangular cross section, thereby preventing the abrasive material from being sprayed radially and applying the abrasive material to the workpiece. Can be injected almost vertically.

FIG. 2 is a view showing a state where the flat plate-shaped work 3 is jet-cut using the nozzle main body 11 of the present invention. The jet port 12 of the nozzle main body 11 is oriented perpendicular to the work 4. In addition, while the distance between the injection port 12 and the upper surface of the work 3 is set to be equal to or less than 1 mm, the abrasive is injected perpendicularly to the work, thereby preventing the abrasive from being radially injected. The distance between the injection port 12 and the upper surface of the work 3 is 1 m.
m or less, but 0.5 mm or less, especially 100 mm
It is particularly desirable to set it to 200 μm.

As described above, the injection port 12 of the nozzle body 11
Is formed in the above-described rectangular cross section, and the nozzle main body 11 is arranged at the above-mentioned optimum position with respect to the work 3, and the nozzle main body 11 is moved from the nozzle main body 11 by a compressed medium such as compressed air. By injecting the cleaning material vertically to the work without spreading it radially, and by running the nozzle body 11 an appropriate number of times in the longitudinal direction of the rectangular cross section,
The work can be cut almost vertically with high precision. Here, that the cut end face 7 of the work 3 is substantially vertical means that the deviation between the upper end 4 and the lower end 5 of the cut end face 7 is 200 μm or less, particularly preferably 100 μm or less.

As shown in FIG. 2, by attaching or abutting at least one of the protective tape 13 and the mask member 14 on the back surface of the work 3, the lower end of the cut end surface 3 of the work 3 is chipped. 6 can be prevented. The material of the protective tape 13 may be any material as long as it can be adhered to vinyl, cellophane, paper or other work 3, and its material is not limited. The mask member 14 is also made of synthetic resin or the like. Relatively soft, even glass,
Hard and brittle materials such as ceramics may be used, and the material is not limited at all. Each of the protective tape 13 and the mask member 14 can be independently adhered or abutted on the back surface of the work. The mask member can be adhered directly to the back surface of the work 3 or via the protective tape 13, or the object can be sufficiently achieved by simply abutting. When a hard and brittle material such as glass or ceramics is used as the mask member 14, the mask member 14 corresponds to the cutting width cut by the abrasive.
It is desirable that the mask member 14 be disposed such that the slit 15 is formed at the same position as the cut end face 7.

In particular, when the work 3 is not relatively soft, such as synthetic resin, but hard and brittle, such as glass or ceramics, as described above, By sticking or abutting the protective tape 13 and the mask member 14, it is possible to prevent the occurrence of chipping 6 at the lower end of the cut end face 7 of the work 3.

[0012]

EXAMPLE A pressure blasting machine equipped with an injection material metering device was provided with a width of 0.18 mm, a length of 3.0 and a length / width ratio of 16.
7, a nozzle body 11 having an injection port 12 having a rectangular cross section was mounted, and the nozzle body 11 was placed perpendicular to a glass plate having a thickness of 2 mm, and the pressure was set to 1.3 MPa.
a, Abrasive particles having a particle size of 50 μm were sprayed at a spraying amount of 30 g / min to cut. The distance between the upper surface of the glass and the injection port 12 was set to 150 μm, and the nozzle body 11 was reciprocated three times in the longitudinal direction of the rectangular cross section of the injection port 12 while the abrasive material was injected from the injection port 12. At this time, a protective tape was adhered to the back surface of the glass plate, and a mask member 14 having a slit 15 having a width of 0.18 mm was brought into contact with the glass plate to perform jet cutting. According to the experimental results under these conditions, the gap between the upper end 4 and the lower end 5 of the cut end face 7 can be made substantially perpendicular to 60 μm, and the glass plate can be jet-cut with sufficiently high precision without occurrence of chipping. Was completed.

[0013]

As described above, according to the method for cutting and cutting a workpiece of the present invention, a nozzle having a rectangular cross-section having a width of 0.5 mm or less and a length / width ratio of 3 or more is formed by the nozzle. The distance between the tip and the workpiece is less than 1 mm, and the nozzle is moved in the longitudinal direction of the nozzle while the abrasive is being sprayed, thereby preventing the abrasive from being sprayed radially from the nozzle orifice. Thus, the workpiece can be cut almost vertically with high precision. Also, by attaching or abutting at least one of the surface protection tape and the mask member to the back surface of the work, even if the work is a hard brittle material such as glass, Si, ceramics, etc., chipping of the lower end of the cut end surface is prevented from occurring. By preventing the work, the work can be jet-cut with high precision. Therefore, the present invention solves the conventional problems, and has been developed in the industry as a jet cutting method capable of cutting a flat work such as a liquid crystal, a semiconductor, a synthetic resin, and a glass substrate with the cut end face vertical without causing chipping. Some of the contributions are extremely large.

[Brief description of the drawings]

FIG. 1 is a view showing a nozzle body used in the present invention;
(A) is a front sectional view, (b) is a side sectional view, and (c) is a plan sectional view.

FIG. 2 is a diagram showing a state in which a workpiece is spray-cut using the nozzle body shown in FIG. 1;

3A and 3B are views showing a conventional annular nozzle, in which FIG. 3A is a front sectional view and FIG. 3B is a plan sectional view.

FIG. 4 is a diagram showing a state in which a workpiece is spray-cut using a conventional annular nozzle.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Nozzle body 12 Injection port 13 Protective tape 14 Mask member 15 Slit

Claims (4)

[Claims] 1. A method for cutting a workpiece by injecting an abrasive material from a nozzle with a compressed medium to cut the workpiece, wherein the injection port has a rectangular cross section having a width of 0.5 mm or less and a length / width ratio of 3 or more. The distance between the nozzle tip and the workpiece is set to 1 mm or less, and the nozzle body travels in the longitudinal direction of the injection port while the abrasive is being sprayed to cut the workpiece substantially vertically. The feature is the injection cutting method of the work. 2. The distance between the nozzle tip and the workpiece is 100 to 2
2. The method according to claim 1, wherein the thickness is set to 00 μm. 3. The method according to claim 1, wherein an abrasive having a center particle diameter of 30 to 80 μm is used. 4. The work according to claim 1, wherein at least one of a protective tape and a mask member is adhered to the back surface of the work to prevent chipping of the lower end of the cut end surface of the work. Injection cutting method.