531474 A7 B7 五、發明説明（1 ) 發明背景 (請先聞讀背面之注意事項再填寫本頁} 發明領域 本發明係關於一種高精度鼓風加工法，係用以在矽、 玻璃或陶瓷等硬脆物質所製成之基材上產生穿孔、切割及 圖樣，且本發明亦關於使用此方法之高精度鼓風加工設備 〇 習知技術描述 作爲用以在矽、玻璃或陶瓷等硬脆物質所製成之基材 上產生穿孔、切割及圖樣之裝置，已經廣泛地使用一種能 夠產生乾式精加工的噴砂法。這種加工法是藉由壓縮空氣 從一噴嘴連續一段時間噴出細微的突起物質，例如氧化錦 或s i C，藉此加工目標工件的表面。 經濟部智慧財產局員工消費合作社印製 假設藉由上述鼓風法已經在基材內以預定間隔產生出 許多透明孔。爲了防止非加工的目標區域受到破壞，所以 當藉由從噴嘴進入之噴出物質的連續噴射而穿透一孔時， 則必須暫時停止噴射而將噴嘴移到下一個刺穿的目標位置 上。然後，再次噴射物質而執行刺穿加工。然而，在這種 情形下，由於停止噴射的緣故，所以噴射物質仍然會在軟 管內強迫將噴射物質饋送到噴嘴，且在下一次刺穿加工的 時候，剩餘的噴射物質會與後續的噴射物質一起噴出。結 果’會產生比固定噴射更大量的噴射物質，如此會使加工 精度變得很不準確。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4 - 531474 A7 B7 五、發明説明（2 ) (請先閱讀背面之注意事項再填寫本頁) 而且，假如藉由連續將噴射物質噴出而形成每個孔洞 均具有一定深度的刺穿時，很難從加工一半尙未刺穿的孔 洞中將噴射物質排出。結果，噴射物質會堆積在孔洞中而 阻止孔洞進一步被加工，如此將會嚴重降低加工速度且需 要很長的時間才能完成加工。此外，部分的噴射物質會濺 出來，而撞擊到欲加工之孔洞周圍。因此，假如需要很長 時間來形成孔洞的話，則沿著該孔洞周圍之非加工目標區 會變得粗糙與受損。 作爲阻止噴射物質碰撞到非加工目標區之裝置，已經 有提出一些方法，可以將非加工目標區予以掩蓋，而選擇 性地加工未掩蓋部位。例如，一種使用光阻作爲掩罩之方 法能夠產生最精確之加工。然而，如要使用掩罩，則須使 用照相底板經過圖案轉移、顯影及烘乾之步驟，以及在加 工之後剝下且淸洗掩罩等步驟。所有的步驟會變得相當複 雜因而增加成本。此外，必須執行廢液處理。基於這些原 因，無法輕易採行這種方法。 經濟部智慧財產局員工消費合作社印製 因此，本發明的目的是要提供一種高精度鼓風加工法 及高精度鼓風加工設備，能夠解決上述習知缺點，且精確 地加工基材而不會影響加工效率。本發明的另一個目的是 要提供一種高精度鼓風加工法及高精度鼓風加工設備，即 使完全不使用掩罩，也能夠精確地加工基材，而不會使非 加工目標區受損。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 531474 A7 B7 五、發明説明（3 ) 發明槪述 (請先閲讀背面之注意事項再填寫本頁) 在本發明的高精度鼓風加工法中，係以壓縮空氣從噴 嘴將噴射物質噴出而加工基材，而噴射物質的噴出係以間 斷方式噴出，重複噴出且以短暫間隔停止。因此，在刺穿 加工時，當加工進行到某一個程度時，則會將噴射物質排 出而不會使它們殘留在孔洞底部，如此能防止加工效率變 差，且能以比習知方法更短的時間完成加工。此外，可以 防止濺出的噴射物質撞擊在已經噴出的噴射物質上，藉此 防止孔洞的周圍部位受到噴射物質的濺射與碰撞而受損。 因此，根據本發明的高精度鼓風加工法，可以實施精加工 而不會降低加工效率，且即使不使用掩罩，也不會使非加 工目標區域受損。 經濟部智慧財產局員工消費合作社印製 根據本發明的較佳實施例，其中噴射物質的噴出係以 間斷方式噴出，重複噴出且以短暫間隔停止，所以高精度 鼓風加工法的實施方式係結合間斷噴射與連續噴射。藉此 ’比起僅使用間斷噴射之情形下，可以獲得更多的優點。 此外，最好間斷性噴射其中間的間隔不要超過1秒。要知 道的是最好以不超過5 0 // m平均顆粒直徑的噴射物質、 噴射率不超過50g/mi η，噴嘴內徑〇 . 2到2mm ，壓縮空氣壓力2·5MPa等條件下進行噴射，而進行 由矽、玻璃或陶瓷等硬脆物質之基材的加工。 本發明上述高精度鼓風加工法所使用之高精度鼓風加 工設備，包含：一噴嘴單元，可藉由壓縮空氣將噴射物質 強力饋送到噴嘴；及一將基材水平與垂直移動之工作台。 本紙張尺度適财麵家辟（〇^)44規格（21(^297公釐) ~ -6 - 531474 Α7 Β7 五、發明説明（4 ) 連接到噴嘴單元的是一控制單元，用於輸出間斷操作丨曰戚 以將噴射物質噴出與停止。另一方面，可以裝附一螺線管 閥到噴嘴單元上，以便對應於來自控制單元的信號而將噴 射物質噴出與停止。控制單元以預定間隔將噴嘴單元打開 或切掉，藉此允許噴射材質能夠間斷地噴出。此外’即使 完全停止噴射，殘留在軟管中的噴射物質量也會減少’藉 此可維持加工精度。 圖示簡單說明 圖1是一立體圖，顯示本發明高精度鼓風加工設備之 結構； 圖2是一圖形，顯示孔洞的深度相對於噴射物質的噴 出時間之變化；及 圖3是一圖形，顯示孔洞的直徑相對於噴射物質的噴 出時間之變化。 主要元件對照表 1 基材 2 噴嘴單元 3 噴嘴 4 工作台 5 螺線管閥 6 控制單元 7 X軸滑動器 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ297公釐1 ~ -7 - (請先閲讀背面之注意事項再填寫本頁) -裝 訂 經濟部智慧財產局員工消費合作社印製 531474 A7 B7 五、發明説明（5 ) 8 Y軸滑動器 9 Z軸滑動器 1 0 馬達驅動器 較佳實施例之詳細說明 以下將參考附圖說明本發明之較佳實施例。 圖1顯示本發明高精度鼓風加工設備之一範例。在圖 1中，參考數字1表示一受到鼓風加工之基材，參考數字 2表示一噴嘴單元，用以將噴射物質強力噴出到噴嘴，參 考數字3表示噴嘴，而參考數字4表示一工作台。噴嘴單 元2係連接至一軟管，其中噴射物質與壓縮空氣係從一未 顯示的進料斗供應至此軟管。而且，噴嘴單元具有一機構 ’其中噴射物質以預定量強力饋送至噴嘴3且從噴嘴噴出 。參考數字5表示兩螺線管閥，參考數字6表示一控制單 元，用以設定預定的週期時間，將信號輸出到這些螺線管 閥5，且藉此間斷地打開與切掉螺線管閥5。控制單元6 係連接到上述的噴嘴單元2。然後，在兩個螺線管閥5外 面，一個用來切掉噴射物質，另一個用來切掉壓縮空氣。 要知道的是可以使用個人電腦、N C單元、定序器等物來 作爲控制單元6。此外，不使用圖1所示的螺線管閥，用 來間斷地打開與切掉電子信號之控制單元也可以直接連接 到噴嘴單元，以便間斷地噴出噴射物質。工作台4可以藉 由一X軸滑動器7、Y軸滑動器8及Z軸滑動器9而垂直 水平移動。藉由從控制單元6經由馬達驅動器1 0可以將 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） m- ϋ— I- .....- - _ - ――........... an (請先閱讀背面之注意事項再填寫本貢) 訂 經濟部智慧財產局員工消費合作社印製 -8 - 531474 A7 __B7 ______ 五、發明説明（6 ) 移動信號傳送到個別的滑動器上，因而使工作台4產生移 動。 (請先閲讀背面之注意事項再填寫本頁) 藉由將噴嘴3放置在基材1的預定位置上且將具有預 定平均顆粒直徑之噴射物質以預定量預定壓力從噴嘴3噴 出而實施鼓風加工。在此，基於以下原因，噴嘴3的內徑 最好是0.2到2mm。假如噴嘴3的內徑超過2mm的 話，則設備的加工精度會變差，以至於難以實施想要的細 微加工。假如噴嘴3的內徑小於0 . 2 m m的話，則噴射 物質的量會減少，且噴嘴的拋光與淸潔性能會變差。此外 ，假如噴射物質的平均顆粒直徑大到足以超過5 0 // m的 話，則目標基材就無法被充分細微地加工。假如噴射物質 的平均顆粒直徑小於5 // m的話，則無法確保足夠的拋光 與淸潔性能。因此最好噴射物質的平均顆粒直徑介於5到 5 0 // m之間。要知道的是噴射物質的材質並未侷限於特 定一種，且可以使用氧化鋁、S i C或二氧化矽砂等粉末 〇 經濟部智慧財產局員工消費合作社印製 而且，根據本發明，基於以下原因，所以最好使用 0 . 2到2 . 5MP a之間壓力的壓縮空氣將噴射物質噴 出。假如壓縮空氣的壓力超過2 · 5 Μ P a的話，則噴射 物質會濺出到很大的範圍，則會嚴重損壞基材的非加工目 標區。另一方面，假如壓縮空氣的壓力小於0 . 2 Μ P a 的話，則無法確保足夠的拋光與淸潔性能。此外，假如噴 射物質的噴出量超過5 0 g /m i η的話，則在刺穿過程 中殘留在孔洞中的噴射材質量會增加很多，如此將會破壞 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐) ' '~ -9- 531474 A7 B7 五、發明説明（7 ) 加工精度。因此，最好噴射物質的噴出量不要超過5 0 g / m i η 〇 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 而且，加工基材時，至少局部實施間斷噴射，致使噴 射物質的噴射與停止會以很短的間隔重複。亦即，在刺穿 加工時，僅實施間斷噴射。在切割加工與停止加工時，最 好結合間斷噴射與連續噴射以便將噴射物質噴出。現在將 說明間斷噴射與連續噴射的組合噴射。在切割加工時，發 現較少發生在加工一半時難以將噴射物質排出的情形。因 此，在切割加工時，基本上僅實施連續噴射就足夠了。假 如有需要高精度加工之區域的話，則可以在這些區域局部 實施間斷噴射。而且，在連續噴射之後用以暫停噴射物質 噴出的噴射停止加工時，恰好在加工開始及/或恰好在加 工尾聲之前實施間斷噴射。其原因爲：在鼓風加工設備中 ，軟管係插入噴射材質供應單元與噴嘴之間。因此，假如 在連續噴射之後暫時停止噴出的話，則當稍後開始噴出時 ，殘留在軟管內的噴射物質將會與後續的噴射物質一起噴 出，如此會使加工精度變差。藉由恰好在加工開始之後使 用間斷噴射，則殘餘在軟管內的噴射物質不會一次噴出。 藉由恰好在加工結束之前實施間斷噴射，則不會有大量的 噴射物質殘留在軟管內。 而且，間斷噴射中的噴射與噴射停止之間的間隔最好 不要超過1秒。這是因爲假如噴射時間與停止時間分別超 過1秒的話，則會使加工效率與加工精度變差。當然，在 本實施例中的間斷噴射意思是指間斷地噴出噴射物質來加 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐) ' 一 " -10- 531474 A7 B7 五、發明説明（8 ) 工基材。連續噴射意思是指連續噴出噴射物質來加工基材 。假如基材的加工目標部位係以所需之間隔放置且加工部 位係從一加工目標部位移動到下一個加工目標部位的話， 則即使在加工目標部位的移動過程中有停止噴射，也照樣 將這種噴射方式定義爲連續噴射。在間斷噴射時，壓縮空 氣或噴射物質的供應均可以暫停。最好能同時停止壓縮空 氣與噴射材質的供應，因爲殘留在軟管內的噴射物質不會 散播很長的距離。 現在，將以刺穿加工所用之範例（其中噴射物質係採 用間斷噴射）與比較例（其中噴射物質係採用連續噴射） 來詳細說明本發明。 在範例與比較例中，使用上述高精度鼓風加工設備。 使用具有平均顆粒直徑爲1 〇 # m的鋁粉作爲噴射物質， 噴射物質被噴射到一具有3 m m厚的碳酸鈣石灰玻璃板。 在5分鐘的噴射之後，檢查孔洞的直徑及孔洞周圍的損壞 情形。噴射的條件與加工結果均顯示在以下的表1中。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -11 - 531474 A7 B7 五、發明説明（9 ) 編 噴嘴 噴射物質 空氣 噴射物 噴射條件 5分鐘 5分鐘 有否 備註 號 內徑 的平均顆 壓力 質的噴 噴射時間 停止時 後的孔 後的孔 損壞 粒直徑 出量 間 洞深度 洞直徑 mm μιη MPa g/min sec sec mm mm 1 0.6 10 1 10 0.04 0.04 1.81 1.02 否 範例 2 0.6 10 1 10 0.5 0.5 1.21 1.15 否 範例 3 0.6 10 1 10 連續噴射 0.6 1.4 有 比較例 4 0.6 10 1 10 1.05 1.05 0.75 1.31 有 比較例 5 1.8 45 2.5 50 0.85 0.15 2.31 2.22 否 4 範例 6 1.8 45 2.5 50 連續噴射 1.5 2.66 有 比較例 7 0.2 5 0.2 2 0.06 0.06 0.41 0.38 否 範例 8 0.2 5 0.2 2 連續噴射 0.24 0.55 有 比較例 (請先閲讀背面之注意事項再填寫本頁) 在表1中，1到4號測試樣本顯示以噴嘴內徑爲 0 · 6mm、空氣壓力爲1 · 〇MP a及噴射物質的噴出 量爲1 0 g /m i n所進行之測試結果。 經濟部智慧財產局員工消費合作社印製 3號測試樣本係爲一比較例，其條件爲在5分鐘連續 噴射之後，孔洞的深度爲〇 . 6 m m、孔洞的直徑爲 1 · 4 0 m m，且由於噴射物質的濺出，所以會在孔洞周 圍產生損壞。相較之下，測試樣本1係本發明之範例，其 條件與3號均與測試樣本1相同，除了實施間斷噴射以外 ，其中噴射時間〇 . 〇 4秒而停止時間0 . 0 4秒。則在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -12- 531474 A7 B7 五、發明説明（10) (請先閲讀背面之注意事項再填寫本頁) 5分鐘之後，孔洞深度爲1 · 8 1 m m ’幾乎是三倍的比 較例之結果，如此反應出已經大幅度地提昇加工效率。而 且在噴射5分鐘之後，孔洞的直徑爲1 · 〇 2 m m，此直 徑小於3號測試樣本。也就是說，形成高精度的孔洞而在 孔洞周圍並沒有受損現象。 經濟部智慧財產局員工消費合作社印製 同樣地，在作爲本發明範例的2號測試樣本中，藉由 設定間斷噴射的噴射時間爲0 · 5秒而停止時間爲0 · 5 秒，其他條件均與3號測試樣本一樣，則在噴射5分鐘之 後，孔洞深度爲1 . 2 1 m m，此結果小於1號測試樣本 的結果，但卻是3號測試樣本中比較例之兩倍，如此亦顯 出高加工精度。而且，在噴射5分鐘之後，孔洞直徑爲 1 . 1 5 m m，此結果小於1號測試樣本的結果，但卻是 3號測試樣本中比較例之兩倍，如此亦能產生刺穿加工。 在1號測試樣本，其中設定間斷噴射的噴射時間爲 1 · 0 5秒而停止時間爲1 · 0 5秒，則5分鐘之後，孔 洞深度爲0 . 7 5 m m，孔洞直徑爲1 · 3 1 m m，且會 產生輕微的損壞在孔洞的周圍。然而，可以確定的是4號 測試樣本的結果是比3號測試樣本比較例來得好。 其次，圖2顯示在範例1號與2號測試樣本及比較例 3號測試樣本中的孔洞深度變化，且圖3顯示其直徑變化 之方式。從圖2與3可以發現，相較於比較例，本發明的 範例展現出高加工精度。 此外，在表1中，5到6號測試樣本顯示以噴嘴內徑 爲1 . 8 m m、噴射物質的平均顆粒直徑爲4 5 // m，空 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） ~ -13- 531474 Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明説明（11) 氣壓力爲2 . 5MP a及噴射物質的噴出量爲5 〇 g/ m i η所進行之測試結果。範例5號測試樣本，其中實施 間斷噴射，比起與5號測試樣本相同條件下卻實施連續噴 射之比較例6號測試樣本會具有較高的加工效率與精度。 而且，在表1中，7到8號測試樣本顯示以噴嘴內徑爲 〇 · 2mm、噴射物質的平均顆粒直徑爲5 //m，空氣壓 力爲0 · 2MP a及噴射物質的噴出量爲2 g/m i η所 進行之測試結果。範例7號測試樣本，其中實施間斷噴射 ，比起與7號測試樣本相同條件下卻實施連續噴射之比較 例8號測試樣本會具有較高的加工效率與精度。在6號與 8號測試樣本中，可以在孔洞周圍發現損壞。在範例5號 與7號測試樣本中，並未發現孔洞周圍有損壞。因此，可 以使用例如光阻等掩罩間斷地將噴射物質噴出加工基材而 產生高精度鼓風加工。 本發明高精度鼓風加工法特別是用於將噴嘴放入預定 位置且執行刺穿加工。然而，本發明亦可用於掃描噴嘴及 形成很大的方形凹穴。亦即，藉由恰好在加工開始之後與 加工結束之前實施間斷噴射可以減少在軟管中的殘餘噴射 材質，且僅在凹穴周圍部位實施間斷噴射加工以防止在凹 穴外圍部位上的損壞發生，即使噴射物質被連續噴射至凹 穴的中央部且噴射材質被移除而未殘留在凹穴中，外圍部 位也不會受損。因此，可以確保高速加工。且藉由結合間 斷噴射與連續噴射，可以實施高效率與高精度之加工而不 須使用掩罩。此外，在基材的切割加工之情形中，藉由間 I--------裝-- (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐） -14- 531474 A7 B7 五、發明説明（12) 斷噴射或結合間斷噴射與連續噴射，可以高速高精度切割 基材而不會在基材的切口端面附近產生損壞。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210'〆297公釐） -15-531474 A7 B7 V. Description of the invention (1) Background of the invention (please read the notes on the back before filling out this page) FIELD OF THE INVENTION The present invention relates to a high-precision blast processing method, which is used for silicon, glass or ceramics. The substrate made of hard and brittle materials produces perforations, cuts and patterns, and the present invention also relates to high-precision blast processing equipment using this method. The conventional technology is described as being used for hard and brittle materials such as silicon, glass or ceramic The device for producing perforations, cuttings and patterns on the produced substrate has widely used a sand blasting method capable of producing dry finishing. This processing method uses compressed air to eject fine protrusions from a nozzle for a period of time. , Such as oxidized brocade or si C, to process the surface of the target workpiece. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, it is assumed that many transparent holes have been generated at predetermined intervals in the substrate by the above-mentioned air blowing method. In order to prevent non- The target area to be processed is damaged, so when a hole is penetrated by continuous jetting of the ejected substance entering from the nozzle, it must be temporarily stopped Spray and move the nozzle to the target position for the next piercing. Then, pierce the material again to perform the piercing process. However, in this case, because the ejection is stopped, the ejected material is still forced in the hose Feed the spray material to the nozzle, and in the next piercing process, the remaining spray material will be ejected together with the subsequent spray material. As a result, a larger amount of spray material will be generated than the fixed spray, which will make the processing accuracy very high. Inaccurate. This paper size applies Chinese National Standard (CNS) A4 (210X297mm) -4-531474 A7 B7 V. Description of the invention (2) (Please read the notes on the back before filling this page) And if you borrow When continuous ejection of the ejected material results in a puncture with a certain depth in each hole, it is difficult to eject the ejected material from the half of the unpunched hole processed. As a result, the ejected material will accumulate in the hole and prevent the hole from further Is processed, this will seriously reduce the processing speed and take a long time to complete the processing. In addition, some of the spray It will splash out and impact the hole to be processed. Therefore, if it takes a long time to form a hole, the non-processed target area around the hole will become rough and damaged. As a prevent spray material from colliding with For non-machined target area devices, some methods have been proposed to mask the non-machined target area and selectively process unmasked areas. For example, a method using photoresist as a mask can produce the most accurate processing. However If you want to use a mask, you must use the photographic substrate to go through the steps of pattern transfer, development, and drying, and peel and clean the mask after processing. All steps will become quite complicated and increase costs. In addition, It is necessary to perform waste liquid treatment. For these reasons, this method cannot be easily adopted. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics Therefore, the object of the present invention is to provide a high-precision blast processing method and high-precision blast Processing equipment can solve the above-mentioned conventional disadvantages and accurately process the substrate without affecting the processing efficiency. Another object of the present invention is to provide a high-precision blast processing method and high-precision blast processing equipment, which can accurately process a substrate without using a mask at all without damaging a non-processing target area. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -5- 531474 A7 B7 V. Description of the invention (3) Description of the invention (please read the precautions on the back before filling this page) In the high-precision air-blasting method, the substrate is processed by ejecting the ejected substance from a nozzle with compressed air, and the ejection of the ejected substance is ejected intermittently, repeatedly ejected, and stopped at short intervals. Therefore, during the piercing process, when the process reaches a certain level, the ejected substances will be discharged without leaving them on the bottom of the hole, which can prevent the processing efficiency from being deteriorated and can be shorter than conventional methods. Processing time. In addition, it is possible to prevent the ejected ejected material from colliding with the ejected ejected material, thereby preventing the surrounding area of the hole from being damaged by the ejected material's sputtering and collision. Therefore, according to the high-precision blast processing method of the present invention, finishing can be performed without reducing the processing efficiency, and even if a mask is not used, the non-processing target area is not damaged. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed a preferred embodiment according to the present invention, wherein the ejection of the ejected substance is ejected intermittently, repeatedly ejected and stopped at short intervals, so the implementation of the high-precision air-blasting method is combined Intermittent injection and continuous injection. Thereby, more advantages can be obtained than in the case of using only intermittent injection. In addition, it is best not to intermittently spray the interval between them more than 1 second. It should be known that it is best to spray under conditions such that the sprayed material does not exceed 5 0 // m average particle diameter, the spray rate does not exceed 50 g / mi η, the inner diameter of the nozzle is 0.2 to 2 mm, and the compressed air pressure is 2.5 MPa. , And the processing of substrates from hard, brittle substances such as silicon, glass or ceramics. The high-precision blast processing equipment used in the above-mentioned high-precision blast processing method of the present invention includes: a nozzle unit capable of feeding the sprayed substance to the nozzle by compressed air; and a table for horizontally and vertically moving the substrate . The paper size is suitable for household use (〇 ^) 44 size (21 (^ 297mm) ~ -6-531474 Α7 Β7 V. Description of the invention (4) Connected to the nozzle unit is a control unit for output interruption The operation is to eject and stop the ejected substance. On the other hand, a solenoid valve may be attached to the nozzle unit so as to eject and stop the ejected substance in response to a signal from the control unit. The control unit is arranged at predetermined intervals. Opening or cutting off the nozzle unit allows the jetting material to be intermittently ejected. In addition, 'even if the jetting is stopped completely, the mass of the jetted substance remaining in the hose will be reduced', thereby maintaining the processing accuracy. 1 is a perspective view showing the structure of the high-precision blast processing equipment of the present invention; FIG. 2 is a graphic showing the change of the depth of the hole with respect to the ejection time of the ejected substance; and FIG. 3 is a graphic showing the diameter of the hole with respect to Changes in the ejection time of the ejected substance. Table 1 Comparison of main components 1 Base material 2 Nozzle unit 3 Nozzle 4 Table 5 Solenoid valve 6 Control unit 7 X-axis slider Original paper Standards are applicable to Chinese National Standard (CNS) A4 specifications (210 × 297 mm 1 ~ -7-(Please read the notes on the back before filling out this page)-Binding Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 531474 A7 B7 V. Invention Explanation (5) 8 Y-axis slider 9 Z-axis slider 1 0 Detailed description of the preferred embodiment of the motor driver The preferred embodiment of the present invention will be described below with reference to the drawings. An example. In FIG. 1, reference numeral 1 denotes a substrate subjected to a blow process, reference numeral 2 denotes a nozzle unit for vigorously ejecting a spraying substance to the nozzle, reference numeral 3 denotes the nozzle, and reference numeral 4 Represents a workbench. The nozzle unit 2 is connected to a hose in which the spray material and compressed air are supplied to the hose from an unshown hopper. Furthermore, the nozzle unit has a mechanism 'where the spray material is strongly fed in a predetermined amount To nozzle 3 and spraying from nozzle. Reference numeral 5 indicates two solenoid valves, and reference numeral 6 indicates a control unit, which is used to set a predetermined cycle time and output signals. Out to these solenoid valves 5, and thereby intermittently open and cut off the solenoid valve 5. The control unit 6 is connected to the above-mentioned nozzle unit 2. Then, outside of the two solenoid valves 5, one is used To cut off the spray material, the other is to cut off the compressed air. It should be known that a personal computer, NC unit, sequencer, etc. can be used as the control unit 6. In addition, the solenoid shown in Fig. 1 is not used Valve, the control unit for intermittently opening and cutting off the electronic signal can also be directly connected to the nozzle unit to intermittently eject the ejected material. The table 4 can be controlled by an X-axis slider 7, Y-axis slider 8 and Z The shaft slider 9 moves vertically and horizontally. The paper size can be adapted to the Chinese National Standard (CNS) A4 specification (210X297 mm) by the control unit 6 via the motor driver 10. m- ϋ— I- ..... --_-——.............. an (Please read the notes on the back before filling in this tribute) Order printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-8-531474 A7 __B7 ______ 5 2. Description of the invention (6) The mobile signal is transmitted to an individual slider, Moving the table 4 is generated. (Please read the precautions on the back before filling in this page) Blowing is performed by placing the nozzle 3 at a predetermined position on the substrate 1 and ejecting a spraying substance having a predetermined average particle diameter from the nozzle 3 at a predetermined amount and a predetermined pressure. machining. Here, the inner diameter of the nozzle 3 is preferably 0.2 to 2 mm for the following reasons. If the inner diameter of the nozzle 3 exceeds 2 mm, the processing accuracy of the equipment will be deteriorated, making it difficult to perform the desired fine processing. If the inner diameter of the nozzle 3 is less than 0.2 mm, the amount of ejected material will be reduced, and the polishing and cleaning performance of the nozzle will be deteriorated. In addition, if the average particle diameter of the sprayed substance is large enough to exceed 50 0 // m, the target substrate cannot be processed sufficiently finely. If the average particle diameter of the sprayed material is less than 5 // m, sufficient polishing and cleaning performance cannot be ensured. Therefore, the average particle diameter of the sprayed substance is preferably between 5 and 5 0 // m. It should be understood that the material of the spraying substance is not limited to a specific one, and powders such as alumina, Si C, or silica sand can be used. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and according to the present invention, based on the following For this reason, it is best to use compressed air with a pressure between 0.2 and 2.5 MP a to eject the ejected material. If the pressure of compressed air exceeds 2.5 Mpa, the sprayed material will spill out to a large area, which will seriously damage the non-processed target area of the substrate. On the other hand, if the pressure of the compressed air is less than 0.2 MPa, sufficient polishing and cleaning performance cannot be ensured. In addition, if the ejection amount of the ejected substance exceeds 50 g / mi η, the quality of the ejected material remaining in the hole during the puncture process will increase a lot, which will destroy the paper standard and apply the Chinese National Standard (CNS) Α4 Specifications (210 × 297 mm) '' ~ -9- 531474 A7 B7 V. Description of the invention (7) Processing accuracy. Therefore, it is best not to spray more than 50 g / mi η 〇 (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and at least partially when processing the substrate Intermittent spraying is performed so that the spraying and stopping of the spraying substance are repeated at short intervals. That is, during the piercing process, only intermittent spraying is performed. When cutting and stopping processing, it is best to combine intermittent spraying and continuous spraying to spray the sprayed material. The combined injection of intermittent injection and continuous injection will now be described. During the cutting process, it was found that it was rare that it was difficult to discharge the ejected material at half of the process. Therefore, during the cutting process, it is basically sufficient to perform only continuous spraying. If there is a need for high-precision machining, intermittent jetting can be performed locally in these areas. Furthermore, when the injection is stopped to stop the ejection of the ejected substance after the continuous ejection, the intermittent ejection is performed just before the start of processing and / or just before the end of the processing. The reason is: In the blower processing equipment, the hose is inserted between the spray material supply unit and the nozzle. Therefore, if the ejection is temporarily stopped after continuous ejection, when ejection is started later, the ejected substance remaining in the hose will be ejected together with the subsequent ejected substance, which will deteriorate the processing accuracy. By using intermittent spraying right after the start of processing, the spraying material remaining in the hose is not sprayed out at one time. By carrying out the intermittent spraying just before the end of the process, a large amount of spraying material does not remain in the hose. Also, it is preferable that the interval between the ejection in the intermittent ejection and the ejection stop does not exceed 1 second. This is because if the injection time and the stop time exceed 1 second, respectively, the machining efficiency and machining accuracy will be deteriorated. Of course, the intermittent spraying in this embodiment means intermittently spraying the spraying material to add the paper size to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 'One " -10- 531474 A7 B7 V. Invention Explanation (8). Continuous spraying means continuous spraying of sprayed material to process the substrate. If the processing target parts of the substrate are placed at a desired interval and the processing parts are moved from one processing target position to the next processing target position, then even if the jetting is stopped during the movement of the processing target position, the This injection method is defined as continuous injection. During intermittent injection, the supply of compressed air or injected material can be suspended. It is best to stop the supply of compressed air and spray material at the same time, because the spray material remaining in the hose will not spread for a long distance. Now, the present invention will be described in detail with an example used in the piercing process (in which the spray material is intermittently sprayed) and a comparative example (in which the spray material is continuously sprayed). In the examples and comparative examples, the above-mentioned high-precision blast processing equipment was used. An aluminum powder having an average particle diameter of 10 m was used as a spray material, and the spray material was sprayed onto a calcium carbonate lime glass plate having a thickness of 3 mm. After 5 minutes of spraying, check the hole diameter and damage around the hole. The spraying conditions and processing results are shown in Table 1 below. (Please read the precautions on the back before filling out this page) The paper size printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -11-531474 A7 B7 V. Description of the invention (9) Nozzle spraying material Air spraying material spraying conditions 5 minutes 5 minutes Are there any comments? The average particle diameter of the inner diameter of the spraying time is stopped. After the hole is damaged, the diameter of the hole is damaged. The diameter of the hole is between the hole depth and the hole diameter. μιη MPa g / min sec sec mm mm 1 0.6 10 1 10 0.04 0.04 1.81 1.02 No example 2 0.6 10 1 10 0.5 0.5 1.21 1.15 No example 3 0.6 10 1 10 Continuous injection 0.6 1.4 With comparative example 4 0.6 10 1 10 1.05 1.05 0.75 1.31 Yes Comparative Example 5 1.8 45 2.5 50 0.85 0.15 2.31 2.22 No 4 Example 6 1.8 45 2.5 50 Continuous injection 1.5 2.66 Yes Comparative Example 7 0.2 5 0.2 2 0.06 0.06 0.41 0.38 No Example 8 0.2 5 0.2 2 Continuous Injection 0.24 0.55 Yes Comparative Example (Please read the precautions on the back before filling out this page) In Table 1, test samples Nos. 1 to 4 show the nozzle inner diameter as 0 · 6mm, empty Discharge pressure and an amount of 1 · 〇MP a spray material to 1 0 g / test results for the m i n. The test sample No. 3 printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economics is a comparative example, and the conditions are that after 5 minutes of continuous spraying, the depth of the holes is 0.6 mm, the diameter of the holes is 1. 40 mm, and Due to the spattering of the spray material, damage can occur around the holes. In comparison, test sample 1 is an example of the present invention, and its conditions and No. 3 are the same as test sample 1, except that intermittent injection is performed, wherein the injection time is 0.4 seconds and the stop time is 0.4 seconds. In this paper size, the Chinese National Standard (CNS) A4 specification (210X 297 mm) applies -12- 531474 A7 B7 V. Description of the invention (10) (Please read the precautions on the back before filling this page) 5 minutes later, The result of the comparative example with a hole depth of 1.81 mm is almost three times, which reflects that the processing efficiency has been greatly improved. And after 5 minutes of spraying, the diameter of the hole was 1.02 mm, which was smaller than the test sample No. 3. In other words, high-precision holes are formed without damage around the holes. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Similarly, in the No. 2 test sample as an example of the present invention, the intermittent injection time is set to 0 · 5 seconds and the stop time is 0 · 5 seconds. All other conditions are As with the test sample No. 3, after 5 minutes of spraying, the hole depth was 1.21 mm. This result is less than that of the test sample No. 1, but it is twice as much as the comparative example in the test sample No. 3. High machining accuracy. In addition, after 5 minutes of spraying, the hole diameter was 1. 15 mm, which was smaller than that of the test sample No. 1 but twice as large as that of the comparative example in the test sample No. 3. This also produced a puncture process. In the test sample No. 1, which set the intermittent injection time to 1.05 seconds and the stop time to 1.05 seconds, then after 5 minutes, the hole depth was 0.75 mm and the hole diameter was 1 · 3 1 mm, and minor damage will occur around the hole. However, it can be confirmed that the result of the test sample No. 4 is better than the comparative example of the test sample No. 3. Secondly, Fig. 2 shows the variation of the hole depth in the test samples No. 1 and No. 2 and the test sample No. 3 of the comparative example, and Fig. 3 shows the way of the diameter change. As can be seen from Figs. 2 and 3, compared with the comparative example, the example of the present invention exhibits high machining accuracy. In addition, in Table 1, test samples Nos. 5 to 6 show that the nozzle inner diameter is 1.8 mm, and the average particle diameter of the ejected material is 4 5 // m. The blank paper size applies the Chinese National Standard (CNS) A4 specification. (210 X 297 mm) ~ -13- 531474 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (11) Air pressure is 2.5MP a and the ejection amount of the sprayed substance is 50 g / mi η Test results. The test sample No. 5 in which the intermittent injection is performed has higher processing efficiency and accuracy than the test sample No. 6 in the comparative example where continuous injection is performed under the same conditions as the test sample No. 5. Furthermore, in Table 1, test samples Nos. 7 to 8 show that the nozzle inner diameter is 0.2 mm, the average particle diameter of the sprayed substance is 5 // m, the air pressure is 0, 2 MP a, and the ejection amount of the sprayed substance is 2 g / mi η test results. Example No. 7 test sample, in which intermittent spraying is performed, has a higher processing efficiency and accuracy than the comparison example in which continuous injection is performed under the same conditions as in No. 7 test sample. In test samples 6 and 8, damage was found around the holes. No damage was found around the holes in test samples Nos. 5 and 7. Therefore, a mask, such as a photoresist, can be used to intermittently eject the ejected material out of the processing base material to produce high-precision blast processing. The high-precision air-blasting method of the present invention is particularly used to put a nozzle into a predetermined position and perform a piercing process. However, the invention can also be used to scan nozzles and form large square pockets. That is, by performing intermittent spraying immediately after the start of the processing and before the end of the processing, the residual spraying material in the hose can be reduced, and intermittent spraying processing can be performed only in the area around the cavity to prevent damage on the periphery of the cavity. Even if the spray material is continuously sprayed to the center of the cavity and the spray material is removed without remaining in the cavity, the peripheral part will not be damaged. Therefore, high-speed processing can be ensured. And by combining intermittent and continuous spraying, high-efficiency and high-precision processing can be performed without using a mask. In addition, in the case of substrate cutting processing, by the time I -------- install-(Please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS) Α4 specification (210 X 297 mm) -14- 531474 A7 B7 V. Description of the invention (12) Interrupted jet or combination of intermittent jet and continuous jet can cut the substrate at high speed and high precision without generating near the notch end surface of the substrate damage. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210'〆297 mm) -15-