JPH11344539A - Circuit board inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent damage of a circuit board of an inspection object, pin probes and inspection jigs by arranging a telescopically constituted pressing member for pressing a circuit board holding means. SOLUTION: When a moving means 6 moves a first inspection jig 3 toward a circuit board means 21 side holding a circuit board P, a telescopically constituted pressing member 33 contacts with the circuit board holding means 21. Next, when the inspection jig 3 is moved further, the pressing member 33 moves the circuit board holding means 21 toward a second inspection jig 4 in a slightly compressed state while pressing the circuit board holding means 21. In this case, since a pin probe 31 moves without contacting with a circuit board P, damage of the pin probe 31 and the circuit board P is prevented. The pin probes 31, 41 of both inspection jigs 3, 4 simultaneously contact with the circuit board P thereafter so as to prevent damage of the circuit board P and the pin probes 31, 41 caused when one side contacts earlier with the circuit board P.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed circuit board
C package, hybrid substrate and MCM (Mult
The present invention relates to a circuit board inspection apparatus for inspecting whether or not a terminal of a circuit component is floating on a circuit board such as an iChip Module.

[0002]

2. Description of the Related Art As a circuit board inspection apparatus of this kind, the applicant has already developed an in-circuit tester 71 shown in FIG. The in-circuit tester 71 includes, as shown in FIG.
The inspection jigs 73 and 74, motors 76 and 77, and a control unit 79 are provided. The XY moving mechanism 5 includes moving mechanisms 51 and 52, and the slider 5 of the moving mechanism 51
A rail 51b for moving 1a is fixed to the frame 80, and a rail 52b for moving the slider 52a of the moving mechanism 52 is fixed to the slider 51a of the moving mechanism 51. The XY moving mechanism 5 includes a controller 79
The sliders 51a and 52a are respectively moved according to the control described above, whereby the circuit board P to be inspected held by the circuit board holding section 72 is moved in an arbitrary XY direction. On the other hand, the circuit board holding unit 72 includes the XY moving mechanism 5.
The holding mechanism 21 is fixed to the slider 52a of the moving mechanism 52, and holds the circuit board P to be inspected such that the upper surface of the holding plate 21 and the upper surface of the circuit board P to be inspected are flush with each other. Probing holes 21a are formed in the holding plate 21 so that probing can be performed on the lower surface of the inspection target circuit board P in the holding state.

The inspection jig 73 includes a grip portion 32 fixed to a base 35 and a plurality of pin probes 31, 31... Collectively, "Pin Probe 31"
Also referred to as). In addition, the inspection jig 74
A grip portion 42 fixed to a base 45, and a head portion 42a
(Hereinafter, also collectively referred to as a “pin probe 41”) that are gripped by the gripping portion 42 so that the tips protrude from the pin probes 41. In this case, the tip portions 31a and 41a of the pin probes 31 and 41 are urged toward the circuit board P to be inspected by the elastic members disposed therein. (In the figure, in order to facilitate understanding of the configuration of the in-circuit tester 71,
The structure and number of the pin probes 31 and 41 and the signal cables connected to the rear ends of the pin probes 31 and 41 are not shown). The bases 35 and 45 are connected to the motors 76 and 77 via ball screws 76a and 77a, respectively. The pin probes 31 and 41 held by the holding portions 32 and 42 are fixed to the frame 80, respectively. It is moved up and down according to the rotation of the motors 76 and 77 that are present.

In the circuit board inspection by the in-circuit tester 71, first, as shown in FIG. 1, the sliders 51a and 52a of the XY moving mechanism 5 are respectively moved to hold the circuit board holding section 72. The inspection target circuit board P in the state is positioned between the head part 32a and the head part 42a (probing position). Next, the motor 7
6 and 77 are operated to rotate the ball screws 76a and 77a, thereby moving the inspection jig 73 upward in the direction indicated by the arrow A in FIG. Move. Thereby, head part 32a,
42a are moved toward the lower surface and the upper surface of the inspection target circuit board P, respectively, and the inspection jigs 73, 74 are further moved up and down, as shown in FIG. 31a and 41a are brought into contact with the lower surface and the upper surface of the circuit board P to be inspected, respectively. In this state, the circuit board P to be inspected is pinched by both pin probes 31 and 41. Thereafter, by conducting a predetermined current through the pin probes 31 and 41, an electrical inspection of the inspection target circuit board P is performed.

[0005]

However, the in-circuit tester 71 already developed by the applicant has the following problems to be improved. First, in the in-circuit tester 71, the inspection jigs 73 and 74 are moved up and down by separate motors 76 and 77, respectively. For this reason, it is difficult to make the pin probes 31 and 41 simultaneously contact the circuit board P to be inspected.
Therefore, for example, when the pin probe 31 is brought into contact with the circuit board P to be inspected before the pin probe 41, as shown in FIG. 18, the pin probe moved upward in the direction of arrow A in FIG. Due to 31, there is a problem that the inspection target circuit board P may be lifted upward and fall off from the holding plate 21. Conversely, when the pin probe 41 is brought into contact with the circuit board P to be inspected before the pin probe 31, as shown in FIG. 19, the pin probe 41 moved downward in the direction of arrow B in FIG. As a result, the circuit board P to be inspected is bent downward, and in the worst case, the circuit board P to be inspected is damaged,
Excessive pressurization of the pin probe 41 may cause deformation of the tip of the pin probe, deterioration or damage of the built-in spring (hereinafter, also collectively referred to as "damage of the pin probe"), and destruction of the grip portion 42. There is a problem that. In particular, since the pin probe 41 is very expensive, if it is damaged, it will cause a great deal of damage. Further, when the circuit board holding portion 72 is excessively pressed, the force is applied to the slider 52, so that the accuracy of the slider 52 is deteriorated,
In some cases, readjustment of the entire in-circuit tester 71 may be required.

In this case, a sensor for monitoring the vertical movement of the inspection jigs 73 and 74 is provided, and the inspection jig 73 is moved above a predetermined height, or the inspection jig 74 is moved to a predetermined height. When it is moved below the height, the motor 7
It is also conceivable to adopt a method of stopping the rotation of 6,77. However, the motors 76 and 77 are not connected to the inspection jigs 73 and 7.
4 is moved at a high speed, so that even if the rotation of the motors 76 and 77 is stopped based on the detection of a sensor abnormality,
There is a possibility that it may not be in time.

Second, for example, when the inspection jigs 73 and 74 are moved up and down before the slider 51a of the moving mechanism 51 is moved to a predetermined position, as shown in FIG. Since the circuit board P has not been moved to the probing position, the tip portions 31 a and 41 a of the pin probes 31 and 41 are attached to the holding plate 21 of the circuit board holding section 72.
May be interposed. In such a case, the tip portions 31a, 41a of the pin probes 31, 41, the holding plate 2
There is a problem that the gripper 1 and the grip portions 32 and 42 may be broken.

The present invention has been made in view of the above-mentioned points, and provides a circuit board inspection apparatus capable of preventing breakage of a circuit board to be inspected, a pin probe, an inspection jig, and the like. The main purpose is.

[0009]

According to a first aspect of the present invention, there is provided a circuit board inspection apparatus which holds a circuit board to be inspected and is vertically movable. A pressing member which is moved by the moving means from either one of the upper surface and the lower surface of the holding means toward the circuit board holding means, and which is configured to extend and contract in the moving direction and press the circuit board holding means, is provided. A first inspection jig provided, and an elastic member for pressing the circuit board from the other surface side opposite to the one surface when the circuit board holding means is moved by the pressing of the pressing member. A second inspection jig having at least one of the two inspection jigs, the circuit board holding means being pressed by the pressing member, and the circuit board being pressed by the elastic member. Characterized in that it comprises a plurality of pins probes telescopically each configured to contact the road substrate.

[0010] In this circuit board inspection apparatus, the moving means includes:
When the first inspection jig is moved toward the circuit board holding means side while holding the circuit board, the pressing member provided on the first inspection jig contacts the circuit board holding means. I do. Next, when the first inspection jig is further moved, the pressing member moves while pressing the circuit board holding means toward the second inspection jig in a slightly compressed state. In this case, when the pin probe is provided on the first inspection jig, the pin probe moves without being brought into contact with the circuit board, so that the pin probe and the circuit board to be inspected at that time are damaged. Is prevented. Also,
It is possible to prevent the circuit board from floating and dropping off from the circuit board holding means due to the pressing of the pin probe attached to the first inspection jig. Thereafter, when the first inspection jig is further moved, the second inspection jig is moved.
The elastic member disposed on the inspection jig contacts the circuit board to urge the circuit board toward the first inspection jig. At this time, the pin probe provided on the first inspection jig is brought into contact with the circuit board by further compressing the pressing member. Further, when the pin probe is provided on the second inspection jig, the pin probe is also brought into contact with the circuit board, and the pressing by the pin probes attached to the first and second inspection jigs is performed. The circuit board will be arranged at a position where the balance is achieved.
Thereby, the pin probe can be brought into contact with the circuit board at a predetermined probing position, and both the pin probes respectively provided on the first and second inspection jigs are simultaneously brought into contact with the circuit board. Therefore, it is possible to prevent the circuit board and the pin probe from being damaged due to the pin probe on one side of the circuit board being brought into contact with the circuit board first. In addition, since only one moving unit needs to be provided, the cost of the apparatus can be reduced.

According to a second aspect of the present invention, there is provided a circuit board inspection apparatus according to the first aspect, wherein a pressure for absorbing the pressure when the pressure by the first inspection jig exceeds a predetermined pressure. It is characterized by comprising an elastic member for absorption.

For example, if the expansion or contraction of the pressing member is hindered for some reason or the moving means excessively moves the first inspection jig, the pressing by the first inspection jig reduces the predetermined pressure. May exceed. In such a case, in this circuit board inspection device, the pressure absorbing elastic member absorbs a pressure exceeding a predetermined pressure. Therefore, excessive pressurization of the pin probe on the circuit board and excessive pressurization of the first and second inspection jigs are prevented, thereby preventing damage to the inspection jig including the pin probe and the circuit board. It is possible to do.

According to a third aspect of the present invention, there is provided the circuit board inspection apparatus according to the first or second aspect, wherein the elastic member includes a plurality of pin probes.

In this circuit board inspection apparatus, when the circuit board is moved toward the second inspection jig by the pressing member of the first inspection jig, the circuit board is disposed on the second inspection jig. The pin probe presses the circuit board toward the first inspection jig by the repulsive force. Therefore, probing can be performed on both sides of the circuit board, and the pin probe also serves as the elastic member of the second inspection jig.
Accordingly, the number of components of the circuit board inspection device can be reduced.

According to a fourth aspect of the present invention, there is provided a circuit board inspection apparatus according to any one of the first to third aspects, wherein the first inspection jig is pressed by contacting the circuit board holding means. A protection stopper for preventing the plurality of pin probes from being excessively compressed.

In this circuit board inspection apparatus, if the pin probe is about to be compressed by a predetermined amount due to the pressing of the first inspection jig due to some cause, the protection stopper is provided to the circuit board. The contact with the holding means prevents the pin probe from being excessively compressed. Therefore, excessive pressurization of the pin probe on the circuit board and excessive pressurization of the first and second inspection jigs are prevented, thereby preventing damage to the inspection jig including the pin probe and the circuit board. This can be prevented.

According to a fifth aspect of the present invention, there is provided the circuit board inspection apparatus according to any one of the first to fourth aspects, wherein the first position detecting means detects a movement position of the first inspection jig. Wherein the moving means is stopped when the first inspection jig passes the reference position based on the detected moving position of the first position detecting means.

In this circuit board inspection apparatus, when the first inspection jig passes a predetermined position, the first position detection means detects the passage of the first inspection jig, Then, the moving means is stopped. Therefore, since the first inspection jig is prevented from being moved excessively, it is possible to prevent the circuit board inspection apparatus itself and the circuit board from being damaged. In this case, when the first inspection jig is being moved at a high speed and the stopping means of the moving means for the excessive movement of the first inspection jig cannot be made in time, the pressure absorbing elastic member is moved. In addition, a pressure exceeding a predetermined pressure by the first inspection jig is absorbed.

According to a sixth aspect of the present invention, there is provided the circuit board inspection apparatus according to any one of the first to fifth aspects, wherein the circuit board holding means is moved by pressing the first inspection jig. A second position detecting means for detecting a position of the first inspection jig with respect to the moving direction is provided, and the circuit board holding means presses the substrate surface of the held circuit board by the first inspection jig. The portion to be projected is configured to protrude toward the first inspection jig, and the moving unit is stopped according to the detection position of the second position detection unit.

If the circuit board holding means is displaced from the normal position, the pin probe to be brought into contact with the circuit board when the first inspection jig is moved by the moving means is replaced by the circuit board holding means. There is a possibility that the circuit board holding means may be moved by pressing the button. In this circuit board inspection apparatus, the portion of the circuit board holding means pressed by the first inspection jig in a normal state protrudes toward the first inspection jig from the substrate surface of the held circuit board. ing. For this reason, for example, the pressing member of the first inspection jig may not press the circuit board holding means, and the pin probe disposed on the first inspection jig may press the circuit board holding means. . In such a case, the circuit board holding means starts to move before the position in which the pressing member presses and moves the circuit board holding means in a normal state in the moving direction.
For this reason, when the position of the first inspection jig detected by the second position detecting means when the circuit board holding means starts moving is short of the predetermined position, the moving means is stopped. Therefore, it is possible to prevent the pin probe, the first and second inspection jigs, and the circuit board holding means from being damaged due to the displacement of the circuit board holding means.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a circuit board inspection apparatus according to the present invention will be described below with reference to the accompanying drawings. Note that the same components as those of the in-circuit tester 71 already developed by the applicant are denoted by the same reference numerals, and redundant description will be omitted.

First, the configuration of an in-circuit tester 1 corresponding to a circuit board inspection apparatus according to the present invention will be described with reference to FIGS.

As shown in FIG. 1, the in-circuit tester 1 includes a circuit board holder 2, inspection jigs 3, 4, an XY moving mechanism 5, a motor 6, springs 7, 7,. And also referred to as "spring 7"), photo sensor 8
a, 8b, 8c and a control unit 9. The circuit board holding section 2 includes a holding plate 21 corresponding to a circuit board holding means in the present invention, and a moving mechanism 22. The holding plate 21 is formed in a flat plate shape, and by changing its thickness T (see FIG. 2) according to the thickness of the circuit board P to be inspected, probing is performed on the circuit board P having various thicknesses. It can be performed. Also, the holding plate 2
Reference numeral 1 denotes an inspection target circuit board P which is formed to be thicker than the thickness of the inspection target circuit board P held and whose lower surface is held.
Project below the lower surface of the. The moving mechanism 22 has X
-Slider 52a in moving mechanism 52 of Y moving mechanism 5
And a slider 22a configured to be able to move the holding plate 21 up and down along the rail 22b. The moving mechanism 22 is used for the inspection jig 3
The holding plate 21 can be moved up and down in a smooth and horizontal state when moving up and down. Under normal conditions, as shown in FIG. 1, the weight of the circuit board holding section 2 and the circuit board P to be inspected, etc. It is located at the bottom end.

As shown in FIGS. 1 and 2, the inspection jig 3 has a base 35 having a bottomed rectangular cylindrical shape whose bottom is connected to the motor 6 via a ball screw 6a, and an upper opening of the base 35. A resin gripping portion 32 fixed to cover the portion, a plurality of pin probes 31 gripped by the gripping portion 32,
Pushers 33, 33 corresponding to pressing members in the present invention
.. (hereinafter collectively referred to as "pusher 33")
And a base 35 corresponding to a protection stopper in the present invention.
Metal stoppers 34, 34,.
(Collectively referred to as "stopper 34"). Further, as shown in both figures, the inspection jig 4 has a bottomed rectangular cylindrical base 45 whose upper bottom is connected and fixed to the frame 10 via a spring 7, and a resin made of resin fixed to the base 45. , A plurality of pin probes 41 gripped by the gripper 42, and metal stoppers 44, 44... (Hereinafter collectively referred to as protection stoppers in the present invention and fixed to a base 45). , "Stopper 44"
Also referred to as).

[0025] As shown in FIG.
The pin probes 31, 41 are gripped in a state where the tip portions 31a, 41a of the pin probes 31, 41 project from the head portions 32a, 42a by, for example, about 0.6 mm. Also,
The entirety of the pin probes 31 and 41 is formed in a rod shape of, for example, about 2 cm, and a push rod integrally formed with a tip portion is housed inside a very small diameter pipe together with a spring. Accordingly, when the tip portions 31a and 41a are brought into contact with the circuit board P to be inspected, the distal end portions 31a and 41a are pushed toward the grip portions 32 and 42, respectively, and the lower and upper surfaces of the circuit board P to be inspected due to the repulsive force of the spring. Each side is urged. At this time, the leading ends 31a and 41a are each appropriately urged against the circuit board P to be inspected by being stroked, for example, by about 0.4 mm. The pusher 33 is urged upward by a spring as shown in FIG.
This spring is also referred to as "pusher 33").

The motor 6 corresponds to the moving means in the present invention, and is fixed to the frame 10. The motor 6
Moves the inspection jig 3 up and down via the ball screw 6a under the control of the control unit 9. The spring 7 corresponds to the pressure absorbing elastic member of the present invention, and has one end of the frame 1.
0 and the other end of the base 4 of the inspection jig 4
5 and fixedly connected. The photo sensor 8a corresponds to the second position detecting means in the present invention, and detects the position of the inspection jig 3 in the vertical direction. Also, the photo sensor 8b
Detects the start of movement of the circuit board holding unit 2. further,
The photo sensor 8c corresponds to a first position detecting unit in the present invention, and detects the vertical position of the moving mechanism 22 to thereby determine the position of the circuit board holding unit 2 in the vertical direction and the position of the inspection jig 3. The position in the vertical direction is indirectly detected. Note that these photosensors 8a to 8c
Are output to the control unit 9. On the other hand, the control unit 9
Executes movement control of the XY movement mechanism 5 in the XY directions with respect to the sliders 51a and 52a, rotation control of the motor 6, and stop control of the motor 6 based on sensor signals of the photo sensors 8a to 8c.

Next, the operation at the time of probing the circuit board P to be inspected using the in-circuit tester 1 will be described with reference to the drawings.

First, after the circuit board P to be inspected is held by the circuit board holding section 2, the slider 5 of the XY moving mechanism 5 is moved.
By moving the circuit boards 1a and 52a, the circuit board holding section 2 is moved, and as shown in FIG.
Head portion 32a and head portion 42a of inspection jig 4
The circuit board P to be inspected is positioned between the two. Next, the motor 6 is operated to rotate the ball screw 6a, thereby moving the inspection jig 3 upward in the direction of the arrow A in FIG.
Thereby, the pusher 33 contacts the lower surface of the holding plate 21 of the circuit board holding unit 2. At this time, as the pusher 33 approaches the holding plate 21, the control unit 9 gradually controls the rotation of the motor 6 at a low speed. This prevents the circuit board P to be inspected from jumping up from the holding plate 21 when the pusher 33 comes into contact with the holding plate 21.

When the inspection jig 3 is further moved upward, FIG.
As shown in (2), the pusher 33 presses the circuit board holding portion 2 upward while being slightly pushed. At this time, the tip portion 31a of the pin probe 31 is, as shown in FIG.
It is separated from the lower surface of the circuit board P to be inspected. Therefore, as compared with the case where the pusher 33 is not provided, the unnecessary force is not applied to the pin probe 31, so that the elastic force of the pin probe 31 is reduced and the distal end portion 31a is prevented from being deformed.

When the inspection jig 3 is further moved up in this state, the slider 2 moves along the rail 22b of the moving mechanism 22.
Since the circuit board 2a moves upward, the circuit board holding unit 2 holding the circuit board P to be inspected moves upward together with the inspection jig 3.
Thereby, as shown in FIGS.
Is in contact with the upper surface of the circuit board P to be inspected. At this time, the control unit 9 controls the rotation of the motor 6 at a lower speed, so that the tip 41
a is gently brought into contact with the circuit board P to be inspected.
When the inspection jig 3 is continuously moved upward, the pusher 3 is moved by the elastic force of the pin probe 41 as shown in FIGS.
As a result, the pin probe 31 becomes
It contacts the lower surface of the circuit board P to be inspected. At this time, the pin probes 31 and 41 are brought into contact with both surfaces of the circuit board P to be inspected while being urged. Thereafter, the control unit 9 stops the motor 6 when the holding plate 21 reaches the predetermined position, and then applies the signal pattern and the pin probes 31 and 41 to the circuit pattern on the circuit board P to be inspected. An electrical test is performed by conducting a predetermined current.

On the other hand, the holding plate 21 is pushed upward to the inspection jig 4 more than necessary due to a decrease in the elastic force of the pin probe 41 and excessive pressing by the motor 6, etc. It may be compressed more than the fixed amount. In such a case, in this in-circuit tester 1, as shown in FIG.
1 is in contact with the upper surface. In this case, the stopper 44 is formed such that its lower surface protrudes below the lower surface of the head portion 42 a which is the lowermost surface of the grip portion 42. Therefore, in this case, as shown in FIG.
The lower surface of “a” and the circuit board P to be inspected are separated from each other. Therefore, the pin probe 41 or the head 4
As a result of preventing excessive pressurization of the circuit board P to be inspected by 2a, the pin probe 41, the circuit board P to be inspected
And the damage of the holding part 42 is prevented.

Further, when the pin probe 31 is about to be compressed to a predetermined amount or more due to a decrease in the elastic force of the pin probe 31 or the pusher 33 and excessive pressing by the motor 6, as shown in FIG. And stopper 3
4 contacts the lower surface of the holding plate 21 of the circuit board holding unit 2. In this case, the upper surface of the stopper 34 is
2 is formed so as to protrude above the upper surface of the head portion 32a, which is the uppermost end surface of the second. Therefore, at this time, as shown in FIG. 12, the upper surface of the head portion 32a and the circuit board P to be inspected are separated from each other. As a result, excessive pressurization of the circuit board P to be inspected by the pin probe 31 or the head part 32a is prevented,
Pin probe 31, circuit board P to be inspected, and gripper 3
2 is prevented from being damaged.

Further, as shown in FIG. 13, when a control abnormality such as the execution of the upward movement control of the inspection jig 3 before the movement of the slider 51a in the XY movement mechanism 5 is completed, There is a possibility that the circuit board holding part 2 may move upward in a state where the tip part 31a of the pin probe 31 is in contact with the lower surface of the holding plate 21 in the circuit board holding part 2. In such a case, as shown in FIG.
41 sandwiches the holding plate 21. At this time, the pin probe 31 is brought into contact with the holding plate 21 without the pusher 33 coming into contact with the holding plate 21. Therefore, the position of the inspection jig 3 when the circuit board holding unit 2 starts to move upward is a position lower than the position during normal probing.
In this case, the control unit 9 monitors the sensor signal of the photo sensor 8a when the sensor signal is output from the photo sensor 8b due to the start of the upward movement of the circuit board holding unit 2, so that the position of the inspection jig 3 is adjusted. It is determined whether the position is lower than the normal position. At this time, when it is determined that the position is the low position, the control unit 9 stops the upward movement of the inspection jig 3 by stopping the motor 6. As a result, the holding of the holding plate 21 by the pin probes 31 and 41 is prevented, so that the pin probes 31 and 41, the grips 32 and 42, and the inspection target circuit board P are prevented from being damaged.

Since the in-circuit tester 1 performs a very high-speed probing process, even if the motor 6 is stopped based on the sensor signals of the photosensors 8a and 8b, the two-pin probes 31 and 41 hold the motor. There is a possibility that the sandwiched state of the plate 21 may occur. In such a case, in the in-circuit tester 1, as shown in FIG. 15, the spring 7 is compressed, thereby preventing the pin probes 31, 41 from being excessively compressed. As a result, breakage of the pin probes 31, 41 and the grip portions 32, 42 due to excessive pressurization is prevented. Although FIG. 3 shows a state in which the holding plate 21 is sandwiched between the two pin probes 31 and 41, even when the two pin probes 31 and 41 are normally in contact with the circuit board P to be inspected, For example, when the circuit board P to be inspected is excessively pressurized by the pin probe 31, the spring 7 is compressed so that the pin lobe 3 is pressed.
1, 41 and the circuit board P to be inspected are prevented from being damaged, and pressurization exceeding the strength of the grips 32, 42 is prevented, so that the grips 32, 42 can be prevented from being damaged. .

As described above, in the in-circuit tester 1, the pin probes 31 and 41 and the circuit board P
Various protection controls are performed when excessive pressurization of the holding plate 21 or when the holding plate 21 is pinched by the pin probes 31 and 41 due to control abnormality. For this reason,
Damage to the circuit board P to be inspected, the pin probes 30, 41, and the grippers 32, 42 is reliably prevented.

The present invention is not limited to the configuration shown in the above embodiment of the present invention. For example, in the embodiment of the present invention, the spring 7 is provided between the base 45 of the inspection jig 4 and the frame 10, but the spring 7 is provided between the base 35 of the inspection jig 3 and the ball screw 6a. , The spring 7 may be arranged between the motor 6 and the frame 10. In the embodiment of the present invention, the stoppers 34 and 44 are fixed to the bases 35 and 45, respectively. However, the stoppers 34 and 44 are fixed to the lower surface side and the upper surface side of the holding plate 21 of the circuit board holding unit 2. Or holding plate 2
1 and may be formed integrally. Further, in the embodiment of the present invention, the pusher 33 is provided only on the inspection jig 3 side. The pin probes 31 and 41 can be reliably brought into contact at the same time. Further, the position detecting means in the present invention is not limited to the photo sensor, but may be various sensors such as limit switches, switches, encoders directly connected to the motor 6, and the like.

In the embodiment of the present invention, the circuit board holder 2 is fixed to the XY moving mechanism 5 and the circuit board holder 2 is moved with respect to the inspection jigs 3 and 4 in the XY direction. Although the configuration in which the inspection jigs 3 and 4 move with respect to the circuit board holding unit 2 may be employed. Further, a configuration in which the motor 6 is disposed at an upper position and the inspection jig 4 is moved down may be adopted.

[0038]

As described above, according to the circuit board inspection apparatus of the first aspect, when the pin probes are respectively provided on the first and second inspection jigs, the pin probes are simultaneously used. Since it can be brought into contact with the circuit board, damage to the circuit board, the pin probe, and the first and second inspection jigs caused by contacting only the pin probe on one side with the circuit board can be prevented. Can be prevented. In addition, since only one moving unit needs to be provided, the cost of the apparatus can be reduced.

According to the circuit board inspection apparatus of the second aspect, when the pressure by the first inspection jig exceeds a predetermined pressure, the pressure absorbing elastic member absorbs the pressure. Excessive pressurization of the pin probe on the substrate and excessive pressurization of the first and second inspection jigs can be prevented, thereby preventing damage to the inspection jig including the pin probe and the circuit board. Can be prevented.

Further, according to the circuit board inspection apparatus of the third aspect, since the elastic member is constituted by the plurality of pin probes, probing can be performed on both sides of the circuit board, and the pin probe can be connected to the second probe. Since the elastic member of the inspection jig is also used, the number of components and the cost of the circuit board inspection device can be reduced.

According to the circuit board inspection apparatus of the fourth aspect, the protection stopper abuts on the circuit board holding means to prevent the plurality of pin probes from being excessively compressed, thereby preventing the circuit board from being excessively compressed. Excessive pressurization of the pin probe and excessive pressurization of the first and second inspection jigs can be prevented, thereby preventing damage to the inspection jig including the pin probe and the circuit board. be able to.

Further, according to the circuit board inspection apparatus of the fifth aspect, the moving means is stopped when the first inspection jig passes the reference position based on the detected moving position of the first position detecting means. Accordingly, the first inspection jig can be prevented from being moved excessively, so that the circuit board inspection apparatus itself and the circuit board can be prevented from being damaged.

According to the circuit board inspection apparatus of the present invention, the moving means is stopped in accordance with the position detected by the second position detecting means, so that the position of the circuit board holding means can be reduced. The pin probe, the first and second inspection jigs, and the circuit board holding means can be prevented from being damaged.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of an in-circuit tester according to an embodiment of the present invention as viewed from the front.

FIG. 2 is a cross-sectional view of the vicinity of a circuit board holding unit in the in-circuit tester according to the embodiment of the present invention.

FIG. 3 is a cross-sectional view of the vicinity of the holding plate when the pusher is in contact with the holding plate in the in-circuit tester according to the embodiment of the present invention.

4 is a cross-sectional view of the vicinity of a pin probe and a circuit board to be inspected in the state of FIG. 3;

FIG. 5 is a cross-sectional view of the vicinity of a holding plate when an upper pin probe is in contact with a circuit board to be inspected in the in-circuit tester according to the embodiment of the present invention.

FIG. 6 is a cross-sectional view of the vicinity of the holding plate in the state of FIG.

FIG. 7 is a cross-sectional view of the vicinity of the holding plate when all the pin probes are in contact with the circuit board to be inspected in the in-circuit tester according to the embodiment of the present invention.

8 is a cross-sectional view near the holding plate in the state of FIG.

FIG. 9 is a cross-sectional view of the vicinity of the inspection jig 4 when the stopper 44 is in contact with the circuit board holding portion in the in-circuit tester according to the embodiment of the present invention.

10 is a cross-sectional view near the circuit board to be inspected in the state of FIG.

FIG. 11 is a cross-sectional view of the vicinity of the inspection jig 4 when the stopper 34 is in contact with the circuit board holding portion in the in-circuit tester according to the embodiment of the present invention.

12 is a cross-sectional view near the circuit board to be inspected in the state of FIG.

FIG. 13 is a cross-sectional view when the pin probe 31 is in contact with the holding plate in the in-circuit tester according to the embodiment of the present invention.

FIG. 14 is a cross-sectional view when all pin probes are in contact with a holding plate in the in-circuit tester according to the embodiment of the present invention.

FIG. 15 is a cross-sectional view when the spring 7 is in a compressed state in the in-circuit tester according to the embodiment of the present invention.

FIG. 16 is a front sectional view of an in-circuit tester that has been already developed by the applicant.

FIG. 17 is a cross-sectional view of the vicinity of the holding plate when the in-circuit tester that has been already developed by the applicant is properly probinged.

FIG. 18 is a cross-sectional view of the vicinity of the holding plate when the pin probe 31 pushes up the circuit board to be inspected in the in-circuit tester developed by the applicant.

FIG. 19 is a cross-sectional view of the vicinity of the holding plate when the pin probe 41 is pushing the circuit board to be inspected in the in-circuit tester that has already been developed by the applicant.

FIG. 20 is a cross-sectional view of the vicinity of a holding plate when both pin probes 31, 41 sandwich the holding plate in an in-circuit tester that has already been developed by the applicant;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 In-circuit tester 2 Circuit board holding part 3 Inspection jig 4 Inspection jig 6 Motor 7 Spring 8a-8c Photosensor 21 Holding plate 31 Pin probe 32 Gripping part 33 Pusher 34 Stopper 41 Pin probe 42 Holding part 44 Stopper P Inspection target circuit board

Claims (6)

[Claims] A circuit board holding means configured to hold a circuit board to be inspected and to be vertically movable, and to the circuit board holding means from either one of an upper surface and a lower surface of the circuit board holding means. A first inspection jig provided with a pressing member that is configured to extend and contract in the moving direction and that presses the circuit board holding unit, and that the pressing member presses the pressing member. A second inspection jig having an elastic member that presses the circuit board from the other surface side opposite to the one surface when the circuit board holding means is moved; The circuit board holding means is disposed on at least one of the jigs and is in contact with the circuit board when the circuit board holding means is pressed by the pressing member and the circuit board is pressed by the elastic member. And a plurality of pin probes each configured to extend and retract as described above. 2. The circuit according to claim 1, further comprising a pressure absorbing elastic member for absorbing the pressure when the pressure by the first inspection jig exceeds a predetermined pressure. Board inspection equipment. 3. The elastic member according to claim 1, wherein the elastic member includes a plurality of the pin probes.
The circuit board inspection apparatus according to the above. 4. A protection stopper for preventing the plurality of pin probes from being excessively compressed by pressing the first inspection jig by contacting the circuit board holding means. 4. The method according to claim 1, wherein
The circuit board inspection device according to any one of the above. 5. A method according to claim 1, further comprising a first position detecting means for detecting a moving position of the first inspection jig, wherein the first inspection jig is provided based on the detected moving position of the first position detecting means. 5. The circuit board inspection apparatus according to claim 1, wherein said moving means is stopped when passing through a reference position. 6. A second position detecting means for detecting a position of the first inspection jig with respect to a moving direction when the circuit board holding means moves by pressing the first inspection jig. The circuit board holding means is configured such that a portion pressed by the first inspection jig projects from the board surface of the held circuit board toward the first inspection jig. The circuit board inspection apparatus according to any one of claims 1 to 5, wherein the moving unit is stopped according to a position detected by the second position detecting unit.