JPH11290959A - Reflection body, manufacture of reflection body and tool for working plastic deformation of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a reflection body in a short time and to carry out working of many recessed parts in a high speed and with high precision by forming a transferring mold with a molding surface of a reversed projecting and recessed shape of the mold surface out of the molding surface of a mother mold for forming the reflection body and then, transferring the molding surface of the transferring mold. SOLUTION: A flat sheet type base material 31 for a mother mold is pressed many times with saphire balls 6 and thus obtained mother mold 32 for forming a reflection body having many recessed parts 31a is stored and arranged in a box-shaped vessel 33, then, a resin material 34 such as e.g. silicone is pored into the vessel 33, then, is left standing and is hardened, the hardened resin product is taken out of the vessel 33, unnecessary parts are cut off and then, a transferring mold 35 with a molding surface 35a having many projecting parts which is in a projecting and recessed shape reverse to many recessed parts forming the molding surface of the mother mold 32 is prepared. Next, by pressing the transferring mold 35 against e.g. a glass base plate 36 having a photosensitive resin layer on the surface, the molding surface is transferred, after the photo sensitive resin layer is hardened, by forming a reflection film 37 comprising Al or the like on the obtained mold surface, the reflection body is manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a reflector used as, for example, a part of a liquid crystal display device and a tool used for processing a surface of a reflector or a diffuser. And a tool for forming a large number of recesses.

[0002]

2. Description of the Related Art For example, a reflection plate or a diffusion plate used as a component of a liquid crystal display device having a smooth surface or a regular pattern is assembled into a liquid crystal display device. There is a problem in that light is sometimes strongly reflected or diffused only in a certain direction, resulting in unevenness in the brightness of the display surface. To prevent this, light is reflected or diffused in different directions,
A method of forming a large number of irregularities having irregular pitches and depths on the surface of a reflection plate, a diffusion plate, or the like has been considered. For that purpose, it is necessary to process the surfaces of the reflection plate, the diffusion plate and the like on the order of μm.

Conventionally, as a general method for performing such processing, plastic deformation processing and laser processing can be exemplified. The plastic deformation process is a method in which the surface of a reflection plate, a diffusion plate, or the like is pressed with a hard indenter such as diamond, and the pressure causes plastic deformation on the surface of the plate body to form a concave portion. Laser processing is a method of forming a concave portion by melting and removing the surface of a plate using a laser beam.

[0004]

However, in plastic deformation processing, the conventional apparatus has a limit in the processing speed, and it is difficult to perform high-speed processing of the concave portion, resulting in poor efficiency. Further, in the conventional apparatus, an indenter is mounted movably up and down with respect to the processing apparatus main body, and the depth of a concave portion formed in the plate is controlled by the amount of movement of the indenter from the processing apparatus main body. Was. That is, the pressing depth when pressing the plate with the indenter,
It was determined based on the positioning accuracy of the processing equipment. For this reason, for example, when the plate body is warped or distorted, when the plate thickness is uneven, or when there is a chucking error, a processing error such as a variation error occurs in the depth of a target concave portion depending on a place, and the like, is required. There was a problem that it would decrease. Further, in laser processing, there are problems that the machine is expensive and processing cost is increased, high-speed processing is inferior, and precision in forming concave portions is difficult. In view of the above, the present invention provides an efficient reflector manufacturing method, and a plastic deformation processing tool that can be used for the method and that can process a large number of concave portions on the surface of an object to be processed at high speed and with high accuracy. The purpose is to provide.

[0005]

According to a method of manufacturing a reflector according to the present invention, a plastic deformation processing tool having an indenter is attached to an arbitrary machine tool, and an object to be processed is pressed by the indenter. After plastically deforming the surface of the work piece, repeatedly move the tool for plastic deformation processing in the horizontal direction with respect to the work piece while the indenter body is floating above the work piece surface. By transferring the shape of the indenter to the surface of the object to be processed and forming a large number of recesses, a master body for forming a reflector was produced, and the concave and convex shape of the mold surface was reversed from the mold surface of the master mold. A transfer mold having a mold surface is formed, and the reflector is manufactured by transferring the mold surface of the transfer mold.

In this manufacturing method, a master for forming a reflector is manufactured, and a transfer mold is manufactured from the master. Since the method of manufacturing the reflector by transferring the mold surface from the transfer mold is adopted, the reflector can be manufactured in a large amount in a short time, and the reflector having high accuracy of the depth and pitch of the concave portion can be obtained. . In this method of manufacturing a reflector, it is possible to control the size of the concave portion formed in the processing object by controlling the pressing pressure or the pressing depth of the indenter body against the processing object. The reflector according to the present invention,
The workpiece is continuously pressed by the indenter to plastically deform,
By transferring the irregularities on the surface of the master block for forming a reflector, which has a large number of recesses with irregular pitches and different depths on the surface of the workpiece, the irregular irregularities on the surface were transferred. Features.

[0007] A first plastic deformation tool according to the present invention is a tool body that can be mounted on an arbitrary machine tool, and an indenter body that is installed on the tool body and presses the surface of a workpiece to plastically deform. And a detecting means for detecting contact between the working portion and the workpiece, and a position of the working portion at the time when the contact between the working portion and the workpiece is detected by the detecting means. And a driving means for reciprocating the action portion in the vertical direction with respect to the tool body.

In the first plastic deformation machining tool according to the present invention, when the working part is pressed against the workpiece, the detecting means detects contact between the working part and the workpiece, and the position of the working part is used as a reference. Moves up and down, so that the criterion for determining the depth of the concave portion is on the surface of the workpiece. Therefore, even if the surface of the workpiece is warped or distorted, or even if there is a variation in the thickness of the workpiece or a chucking error, the working portion may be warped or deformed. Since it follows the distortion and the change in the plate thickness, the processing accuracy of the concave portion can be maintained. Also, such a plastic deformation processing tool has a relatively small number of components and is simple.
Occupied area is also small.

In the first plastic deformation working tool of the present invention, it is preferable that a piezo element or a magnetostrictive element is provided as a driving means. If a piezo element or a magnetostrictive element is used as the driving means, the processing accuracy of the concave portion can be further improved. Further, in the first plastic deformation working tool of the present invention, it is preferable that a force gauge is provided as the detecting means. If a force gauge is used as the detection means, the detection and control response speed can be further improved.

[0010] A second plastic deformation machining tool according to the present invention is to form a recess by plastically deforming the surface of an object to be machined. A tool body slidably supported by the housing, floating means for floating the tool body from the surface of the workpiece so as to maintain a constant gap, and a tool body installed on the tool body to clean the surface of the workpiece. It is characterized by comprising an action portion for beating and plastically deforming, and a drive means for reciprocating the action portion vertically with respect to the tool body.

[0011] In the second plastic deformation machining tool of the present invention, the tool body is floated from the surface of the workpiece by the floating means, whereby the frictional resistance between the tool body and the workpiece can be eliminated. The tool for plastic deformation processing can be moved at high speed on the object to be processed at regular intervals. In the second plastic deformation machining tool of the present invention, when the working object is hit with the working portion, the tool body is floated to a certain height based on the surface of the machining object, and the tool body is Since the action portion moves up and down, the reference for determining the depth of the concave portion is on the surface of the workpiece. Therefore, even if the surface of the workpiece is warped or distorted, or even if the thickness of the workpiece varies or there is a chucking error, the tool body may be warped or deformed. Since it follows the distortion and the change in the plate thickness, the processing accuracy of the concave portion can be maintained. At this time, by making the flying height as low as possible, the vertical movement distance of the acting portion can be made as small as possible, and the processing accuracy of the concave portion can be improved and the concave portion can be contributed to high-speed processing.

In the second plastic deformation machining tool according to the present invention, the tool body is slidably supported and a housing is provided which can be attached to any machine tool. By attaching to machine tools,
It is possible to cause the machine tool to perform positioning of the X, Y, and Z axes of the tool, control of the driving means of the tool, and control of the floating means.

In the second plastic deformation tool according to the present invention, it is preferable that a piezoelectric actuator is provided as the driving means. If a piezoelectric actuator is used as the driving means, the action portion for forming the concave portion on the surface of the object to be processed can reciprocate up and down at a high speed, and plastic deformation can be performed at a higher speed. Further, in the second plastic deformation working tool of the present invention, it is preferable to provide an air static pressure mechanism as a floating means. If an air static pressure mechanism is used as the floating means, the tool body can be stably levitated at a certain height from the surface of the workpiece.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is not limited to only these embodiments. In the present embodiment, when manufacturing a reflector, a plate having a large number of concave portions on its surface is formed in advance and used as a master, a transfer mold is created from the master, and reflection is performed from the transfer mold. Take the procedure of manufacturing the body. FIG. 6 is a flowchart illustrating an example of a method for manufacturing a reflector. As shown in FIG. 6A, for example, a sapphire ball 6 presses a flat base material 31 having a flat surface made of, for example, brass, stainless steel, tool steel, etc.
By forming a large number of concave portions 31a having different depths and arrangement pitches onto which the shape of the sapphire spheres 6 has been transferred, a reflector forming matrix 32 as shown in FIG. 6B can be obtained.

The following plastic deformation working tools can be used to manufacture the reflector forming matrix 32. FIG. 1 is a schematic configuration diagram showing a plastic deformation processing tool according to the first embodiment. This plastic deformation processing tool 1
It comprises a tool body 2, a piezo element 3 (driving means), a force gauge 4 (detecting means), a holder 5, and a sapphire ball 6 (action part).

The tool body 2 can be attached to a machine tool such as an NC machine. A cylindrical piezo element 3 made of PZT (lead zirconate titanate) is provided on the lower surface of the tool body 2. A cylindrical force gauge 4 made of quartz is provided on the lower surface of the piezo element 3.
A substantially conical holding body 5 is provided on the lower surface of the force gauge 4, and a sapphire ball 6 is fixed to the top of the holding body 5 as an indenter. The sapphire ball 6 moves up and down by the operation of the piezo element 3.

When a voltage is applied, the piezo element 3
It is configured such that the crystal lattice of T is distorted and its entire length is extended. For example, it can be displaced by about several tens of μm by applying a voltage of 100 to 150V. The force gauge 4 is made of sliced quartz, and can detect the pressure in the z direction and convert it into an electric signal.

Next, a procedure for forming a large number of recesses on the surface of the plate 10 using the plastic deformation processing tool 1 of the first embodiment will be described. First, the plastic deformation processing tool 1 is attached to a machining center of a machine tool, and the plastic deformation processing tool 1 is set in a state where it can be controlled by the machine tool. In this state, the plastic deformation processing tool 1 moves to the recess forming portion of the plate 10. Next, the machine tool gradually brings the plastic deformation processing tool 1 closer to the plate body 10. When the plastic deformation tool 1 approaches the plate 10 to some extent, the operation of the machine tool is stopped, and the piezo element 3 is activated to bring the plastic deformation tool 1 closer to the plate 10. Sapphire ball 6 and plate 10
When the surface of the sapphire ball 6 comes into contact, the force gauge 4 detects the contact, and the piezo element 3 operates again with reference to the position of the sapphire sphere 6 at that time, and the sapphire sphere 6 is pressed against the surface of the plate body 10 to make The recess can be formed by plastically deforming the body 10.

When the concave portion is formed by plastically deforming the plate body 10, the concave portion becomes shallow due to plastic recovery after a lapse of time as compared with immediately after processing. Therefore, the processing depth is set in consideration of this. There is a need. The above recess forming operation is performed by the plate 10
And the plastic deformation working tool 1 are repeatedly moved while moving in the horizontal direction, whereby a large number of concave portions can be formed on the surface of the plate body 10. At this time, the depth of the concave portion can be arbitrarily changed by adjusting the voltage applied to the piezo element 3.

FIG. 7 is a plan view showing an example of a pattern of concave portions on the surface of the reflector forming matrix 32 prepared using the plastic deformation working tool 1 of the first embodiment. When the top row (first row) pattern of FIG. 7 will be described as an example, r _1,
The recesses of four different sizes of r ₂ , r ₃ , and r ₄ are sequentially denoted by t ₁ ,
t _2, t _3, to press so that the pitch of t _4. At this time,
The greater the size of the recess, the greater the depth of the recess (FIG. 7).
Among, indicated by _{d 1, d 2, d 3} , d 4). By repeating this, the pattern in the uppermost row can be formed. Less than,
Patterns r ₁ of the second column or later, r _2, r _3, and 4 kinds of sizes of the recess of _{r 4, t 1, t 2} , t 3, 4 kinds of properly changing the order of the pitch t ₄ Can be formed.
Thereby, an irregular pattern of a pitch and a depth is formed on the surface of the matrix base material 31, and the reflector forming matrix 32 can be obtained.

Tool 1 for plastic deformation processing according to the first embodiment
For the formation of the reflector forming master block 32 using the above, by designing the pattern to be formed on the master block base member 31 in advance, the concave portion of which size is located at which position of the base member base member 31 A method of controlling the plastic deformation machining tool 1 and the machine tool according to the present embodiment can be adopted by programming whether to form. At this time, the matrix substrate 31
The order of formation of the recesses formed on the base material 31 is, for example, one row as a basic unit, and the recesses are continuously formed on the matrix substrate 31 from the end of the row by r ₁ , r ₂ , r ₃ , r ₄ , r ₁ , r ₂ ... and may also be formed, or a method of forming grouped by recesses of the same size, first be formed only r ₁ if r ₁ for a train for example, for sequentially r _2, r _3, r ₄ However, the procedure of forming the same may be acceptable.

As described above, in the plastic deformation machining tool 1 according to the first embodiment, the plate 10
Is pressed, the force gauge 4 detects the contact between the sapphire ball 6 and the plate body 10 and the sapphire ball 6 moves up and down based on the position thereof. It is in. For this reason, even if the surface of the plate 10 is warped or distorted, or even if there is a variation in plate thickness or a chucking error, the sapphire spheres 6 And distortion,
Since it follows the change in the plate thickness, the processing accuracy of the concave portion can be maintained. In addition, such a plastic deformation processing tool 1
Has a relatively small number of components, is simple, and occupies a small area.

Tool 1 for plastic deformation processing according to the first embodiment
Since the piezo element 3 is provided as a driving means in (2), the processing accuracy of the concave portion can be further improved. Further, in the plastic deformation machining tool 1 according to the first embodiment, since the force gauge 4 is provided as the detecting means, the detection and control response speed can be further improved.

Tool 1 for plastic deformation processing according to the first embodiment
In the above, by attaching the tool body 12 to the machining center of the machine tool, X,
Positioning of Y and Z axes, piezo element 3 and force gauge 4
Can be controlled by a machine tool. Since a general-purpose machine tool can be used, the processing cost can be reduced.

In manufacturing the above-described reflector forming matrix 32,
The following plastic deformation tools can also be used. 2 and 3 are schematic configuration diagrams showing a plastic deformation processing tool according to a second embodiment. FIG. 2 is a partial cross-sectional view.
FIG. 3 is a bottom view. As shown in FIG. 2, the plastic deformation machining tool 11 is schematically constituted by a tool body 12 and a housing 13. The tool body 12 is inserted into a hollow housing 13, and the space between the tool body 12 and the housing 13 is formed. A ball bearing guide (bush) 20 is interposed between the two. With this configuration, the tool main body 12 is connected to the housing 1.
3 is mounted so as to be slidable up and down. The housing 13 can be attached to a machine tool such as an NC machine.

As shown in FIG. 2, the tool body 12 has a disk-shaped lower part 1 having a circular opening 12c on the lower surface.
2a and an upper part 1 of a cylindrical tool body having an enlarged diameter portion at an upper end
2b, the lower end of the upper part 12b of the tool body is fixed to the center part of the upper surface of the lower part 12a of the tool body and is integrally formed. A piezoelectric actuator 14 (driving means), a holder 15, a sapphire ball 16
(Working portion), an air ejection hole 17, an air flow path 18, and an air escape groove 19 are provided. The air ejection hole 17, the air flow path 18, and the air escape groove 19 form an air static pressure mechanism (floating means). Make up.

The piezoelectric actuator 14 is formed by laminating a large number of ceramic thin plates, and the upper end is attached to the center of the upper surface of the circular opening 12c on the lower surface of the lower part 12a of the tool body, and the lower end thereof is shaped like a pyramid. Is fixed. A sapphire ball 16 is fixed to the vertex of the holder 15 as an indenter. The sapphire ball 16 moves up and down by the operation of the piezoelectric actuator 14.

As shown in FIG. 2, the sapphire ball 16 does not protrude from the lower surface of the tool body lower part 12a, and is set at a position close to the lower surface. Since the sapphire ball 16 does not protrude from the lower surface of the tool body lower portion 12a, the sapphire ball 16 does not come into contact with the plate when the tool body lower portion 12a is placed on the plate. Also, since the sapphire ball 16 is close to the lower surface of the tool body lower part 12a,
When the recess is formed in the plate, the amount of displacement of the length of the piezoelectric actuator 14 can be kept small, and it is not necessary to apply a high voltage to the piezoelectric actuator 14.

As shown in FIG. 2, a high-pressure air flows into the lower part 12a of the tool main body from a side surface thereof, and has an air flow path 18 formed therein to blow it out from a lower surface thereof. The air passage 18 is provided with the air inlet 1 on the side surface of the lower part 12a of the tool body.
Air is supplied from an air supply source (not shown) connected to 8a. On the lower surface of the tool main body lower portion 12a, eight large-resistance air ejection holes 17, which are end portions of the air flow path 18, are provided at equal intervals. FIG.
Are formed on the lower surface of the lower part 12a of the tool body, air escape grooves 19, 19,.
.. Through the circular opening 12c and the tool body lower part 12
Air is allowed to escape to the outside of a. Each of the rectangular regions between the air escape grooves 19, 19,... Has a pad 21, 21,.
It has become.

The area of the pads 21, 21... Is one of the parameters that affect the floating force of the tool body 12. If the other parameters are the same, pads 21, 21
The larger the area of..., The greater the floating force of the tool body 2. In order to levitate the tool body 12, the floating force of the tool body 12 only needs to be greater than the weight of the tool body 12. Also,
The piezo actuator 14 is operated, and the sapphire sphere 16
When the concave portion is machined on the surface of the plate body 30, a machining reaction force is applied to the tool body 12 as a reaction of hitting the sapphire ball 16 against the plate body 30. In order to stabilize the flying height of the tool body, it is necessary to make the tool body lower part 12a and the tool body upper part 12b sufficiently heavy, and to make the rigidity of the tool body 12 in the floating direction sufficiently larger than the processing reaction force.

This processing reaction force is about 150 to 300 gf.
Levitation force if the machining reaction force is 5% of the levitation force
Requires 6000 gf. At this time, the weight of the tool body 12 is
The amount may be about 4000 g. In this embodiment
Therefore, since there are eight pads, 75
A floating force of 0 gf is sufficient. Here, the tool body 12 and
The distance from the plate 30 is 10 μm,
Supply pressure 3kg / cm ^TwoSet the value of the parameter, such as
When calculating the pad area, 4cm^TwoFind the value
be able to. Considering this, plastic deformation
It is important to design the working tool 11.

In the above-described second embodiment, the air ejection holes 17 are used as the air ejection portions of the levitation means. However, in another embodiment, for example, a ceramic porous material may be provided. 4 and 5 are schematic configuration diagrams showing a plastic deformation processing tool according to a third embodiment, FIG. 4 is a partial cross-sectional view, and FIG. 5 is a bottom view. In FIGS. 4 and 5, the same parts as those in FIGS. 2 and 3 are denoted by the same reference numerals, and description thereof will be omitted.

The tool body 2 of the plastic deformation machining tool 25
6, eight rectangular porous ceramic materials 27, 27 are provided.
Are provided so that one surface thereof is exposed to the lower surface of the tool main body 26. These ceramic porous materials 27, 27
.. Are provided from an air supply source (not shown)
Air is supplied through the ceramic porous material 27, 27
Are configured so that air can be blown out.

Next, a procedure for forming a large number of recesses on the surface of the plate 30 using the plastic deformation working tool 11 of the second embodiment will be described. First, the tool for plastic deformation processing 1
1 is attached to the machining center of the machine tool, and the plastic deformation processing tool 11 is set in a state where it can be controlled by the machine tool. When air is supplied from an air supply source (not shown) to the air introduction port 18a, the air ejection holes 17, 17 pass through the air flow path 18.
Air is blown out from..., And the tool body 12 that has been in contact with the surface of the plate 30 slightly rises as shown in FIG.

When the piezoelectric actuator 14 operates in this state, the sapphire ball 16 hits the surface of the plate 30 and the plate 30 is plastically deformed to form a concave portion.
The above-described recess forming operation is performed by the plate 30 and the plastic deformation processing tool 1.
By repeating 1 while relatively moving in the horizontal direction, a large number of concave portions can be formed on the surface of the plate 30. At this time, by adjusting the voltage applied to the piezoelectric actuator 14, the depth of the concave portion can be arbitrarily changed. Also, the plastic deformation tool 25 has the same function as the plastic deformation tool 11 described above, and a large number of recesses can be formed on the surface of the plate 30 in the same procedure. .

As described above, in the plastic deformation machining tool 11 according to the second embodiment, the air is blown out from the air blowing holes 17, 17. Is lifted from the surface of the plate 30 to eliminate frictional resistance between the tool body 12 and the plate 30, and the plastic deformation working tool 11 can be moved on the plate 30 at high speed.

Tool 1 for plastic deformation processing according to the second embodiment
In 1, when the plate 30 is hit with the sapphire ball 16, the tool body 12 is floated to a certain height with respect to the surface of the plate 30, and the sapphire ball 16 moves up and down with respect to the tool body 12. Therefore, the reference for determining the depth of the recess is on the surface of the plate 30. For this reason, even if the surface of the plate 30 is warped or distorted, or even if the plate thickness varies, the processing accuracy of the concave portion can be maintained. At this time, by lowering the flying height as much as possible, the vertical movement distance of the sapphire ball 16 can be reduced, thereby improving the processing accuracy of the concave portion and contributing to high-speed processing of the concave portion.

Tool 1 for plastic deformation processing according to the second embodiment
1, a housing 13 that slidably supports the tool body 12 and is attachable to any machine tool is provided. By attaching this housing 13 to a machining center of the machine tool, a plastic deformation machining tool is provided. It is possible to cause the machine tool to perform positioning of the X, Y, and Z axes of 11, and control of the piezoelectric actuator 14 and the air supply source.
Since a general-purpose machine tool can be used, the processing cost can be reduced.

As described above, the matrix 32 obtained by using the plastic deformation working tool 1 or 11 of the embodiment is
As shown in FIG. 3C, the container 3 is stored and arranged in a box-shaped container 33,
3, a resin material 34 such as silicone is poured,
The cured resin product is left and cured at room temperature, the cured resin product is taken out of the container 33, and unnecessary portions are cut off, so that the concave and convex portions of the mold surface of the matrix 32 are reversed as shown in FIG. 6D. Transfer mold 35 having mold surface 35a having many convex portions
Create

Next, as shown in FIG. 6E, the mold surface is transferred by, for example, pressing a transfer mold 35 against a glass substrate 36 having a photosensitive resin layer on the surface, and thereafter, the photosensitive resin layer is cured to obtain the obtained mold. By forming the reflection film 37 made of aluminum or the like on the mold surface, a reflector as shown in FIG. 6F can be manufactured. By using such a method,
A high-quality reflector can be mass-produced in a short time, and a reflector having a high accuracy of the depth and pitch of the concave portion can be obtained.

In the method of manufacturing a reflector according to the present embodiment, a master for forming a reflector is manufactured, and a transfer mold is manufactured from the master. Since the method of manufacturing the reflector by transferring the mold surface from the transfer mold is adopted, the reflector can be manufactured in a large amount in a short time, and the reflector having high accuracy of the depth and pitch of the concave portion can be obtained. . In this method of manufacturing a reflector, it is possible to control the size of the concave portion formed in the processing object by controlling the pressing pressure or the pressing depth of the indenter body against the processing object.

The technical scope of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention. For example, the shape and material of the tool body, the piezo element, the force gauge and the housing, the material of the sapphire ball, the shape of the air static pressure mechanism, and the like can be appropriately changed. Further, in the above embodiment, the upper portion 12b of the tool main body has a columnar shape, but may have a prismatic shape. By making the upper part 12b of the tool main body into a prismatic shape, it is possible to eliminate minute blurring of the upper part 12b of the tool main body 12 about the axis.

[0043]

As described above, in the method of manufacturing a reflector according to the present invention, a master for forming a reflector is manufactured, and a transfer mold is manufactured from the master. Since the method of manufacturing the reflector by transferring the mold surface from the transfer mold is adopted, the reflector can be manufactured in a large amount in a short time, and the reflector having high accuracy of the depth and pitch of the concave portion can be obtained. . In this method of manufacturing a reflector, it is possible to control the size of the concave portion formed in the processing object by controlling the pressing pressure or the pressing depth of the indenter body against the processing object. The reflector of the present invention obtained by using such a method for producing a reflector has a concave-convex shape having a different depth at an irregular pitch, which is transcribed from the master for forming the reflector on the surface thereof. And it is excellent.

In the plastic deformation tool according to the present invention,
A criterion for determining the depth of the concave portion can be set on the surface of the workpiece. Therefore, even if the surface of the workpiece is warped or distorted, or even if there is a variation in the thickness of the workpiece or a chucking error, the working portion may be warped or deformed. Since it follows the distortion and the change in the plate thickness, the processing accuracy of the concave portion can be maintained.
By mounting the tool for plastic deformation processing of the present invention on a general-purpose machine tool, it is possible to cause the machine tool to perform positioning of the X, Y, and Z axes of the tool, control of a tool driving unit, a floating unit, and the like.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram illustrating a plastic deformation processing tool according to a first embodiment.

FIG. 2 is a schematic configuration diagram (partial cross-sectional view) illustrating a plastic deformation processing tool according to a second embodiment.

FIG. 3 is a schematic configuration diagram (a bottom view) illustrating a plastic deformation processing tool according to a second embodiment.

FIG. 4 is a schematic configuration diagram (partial cross-sectional view) showing a plastic deformation processing tool according to a third embodiment.

FIG. 5 is a schematic configuration diagram (a bottom view) illustrating a plastic deformation processing tool according to a third embodiment.

FIG. 6 is a flowchart illustrating an example of a method for manufacturing a reflector.

FIG. 7 is a plan view showing an example of a pattern of a concave portion on the surface of the reflector forming mother die 32 created using the plastic deformation working tool of the first embodiment.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 plastic deformation processing tool 2 tool body 3 piezo element (driving means) 4 force gauge (detection means) 5 holder 6 sapphire sphere (working part) 11 plastic deformation processing tool 12 tool body 13 housing 14 piezoelectric actuator (driving means) 15) Holder 16 Sapphire sphere (working part) 17 Air ejection hole 18 Air flow path 18a Air inlet 19 Air escape groove 20 Ball bearing guide (bushing) 21 Pad 27 Ceramic porous material 31 Base for base mold 32 Reflector formation Transfer mold 35 Transfer mold

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masami Masuda 8050 Igarashi Ninomachi, Niigata City, Niigata Prefecture Niigata University

Claims (10)

[Claims] 1. A tool for plastic deformation processing having an indenter body is attached to an arbitrary machine tool, and an object to be processed is pressed by the indenter body to plastically deform the surface of the object to be processed. In a state of being floated at a position higher than the surface of the object, repeatedly moving the tool for plastic deformation processing relative to the object in the horizontal direction, so that the indenter body is placed on the surface of the object. By transferring the shape of the mold and forming a large number of recesses, a master body for forming a reflector is produced, and a transfer mold having a mold surface with the concave and convex shape of the mold surface reversed from the mold surface of the master mold is formed. And manufacturing a reflector by transferring a mold surface of the transfer mold. 2. The reflector according to claim 1, wherein a size of a concave portion formed in the object is controlled by controlling a pressing pressure of the indenter against the object. Method. 3. The size of a concave portion formed in the object is controlled by controlling a depth of the indenter pressed into the object.
The method for producing the reflector according to the above. 4. A reflector-forming mother in which a workpiece is continuously pressed by an indenter body to be plastically deformed, and a plurality of recesses having irregular depths and different depths are formed on the surface of the workpiece. A reflector characterized by forming irregular irregularities on the surface by transferring the irregularities on the surface of the mold. 5. A tool for plastic deformation processing used in the method of manufacturing a reflector according to claim 1, comprising: a tool main body that can be attached to an arbitrary machine tool; An action part having an indenter body that presses the surface to plastically deform the workpiece, detection means for detecting contact between the action part and the workpiece, and contact between the action part and the workpiece by the detection means. Based on the position of the action section at the time of detection,
And a driving means for reciprocating the action portion in the vertical direction with respect to the tool body. 6. The plastic deformation working tool according to claim 5, wherein said driving means is a piezo element or a magnetostrictive element. 7. The tool according to claim 5, wherein said detecting means is a force gauge. 8. A tool for plastic deformation processing used in the method of manufacturing a reflector according to claim 1, wherein a housing attachable to an arbitrary machine tool, and a tool body slidably supported by the housing. Floating means for floating the tool main body from the surface of the workpiece so as to maintain a constant gap, and an indenter body installed on the tool main body to strike and deform the surface of the workpiece by plastic deformation A tool for plastic deformation processing, comprising: an operating portion; and a driving means for causing the operating portion to reciprocate up and down with respect to the tool main body. 9. A plastic deformation working tool according to claim 8, wherein said driving means is a piezoelectric actuator. 10. The plastic deformation working tool according to claim 8, wherein said floating means is an air static pressure mechanism.