JP2010207865A - Plastic working method and apparatus therefor, and method for manufacturing die - Google Patents

Plastic working method and apparatus therefor, and method for manufacturing die Download PDF

Info

Publication number
JP2010207865A
JP2010207865A JP2009056966A JP2009056966A JP2010207865A JP 2010207865 A JP2010207865 A JP 2010207865A JP 2009056966 A JP2009056966 A JP 2009056966A JP 2009056966 A JP2009056966 A JP 2009056966A JP 2010207865 A JP2010207865 A JP 2010207865A
Authority
JP
Japan
Prior art keywords
indenter
workpiece
plastic working
cam
retainer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009056966A
Other languages
Japanese (ja)
Inventor
Masahide Katsuki
雅英 勝木
Masaaki Mitsuzono
正昭 満園
Makoto Sagara
誠 相良
Hiroshi Amano
啓 天野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP2009056966A priority Critical patent/JP2010207865A/en
Publication of JP2010207865A publication Critical patent/JP2010207865A/en
Pending legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fine shape array forming method by the plastic working capable of executing the working in a short time. <P>SOLUTION: A plastic working device including: a housing having a space for accommodating a cam 6 therein; a cylindrical or columnar cam arranged in the housing and having at least one projecting part on a side face; a retainer 2 which is fixed to the housing and has an indenter guide hole for accommodating an indenter 1 for executing the plastic working of a workpiece therein; the indenter arranged in the retainer; and a driving device for rotating the cam, is used and a workpiece 3 is arranged opposite to the plastic working device. By performing the simultaneous control of the cam drive and the surface travel of the workpiece by the NC, the driving device is driven to rotate the cam. By intermittently bringing a projecting part 7 formed on the cam surface into contact with the indenter, the indenter is pushed out to the workpiece side, and the pushed-out indenter is press-fitted in the workpiece to form a dent in the workpiece. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は微細形状をシートなどの媒体に加工するための金型又は金型を製造する鋳型を製造するための加工方法及びその装置にかかるものである。   The present invention relates to a processing method and apparatus for manufacturing a mold for processing a fine shape into a medium such as a sheet or a mold for manufacturing a mold.

フラットパネルディスプレイ等の装置において光源が発した光を分散させるために光学フィルムシートが使用されている。このような光学フィルムシートには例えば直径が100μmの微細パターン(微細形状アレイ)が反覆して存在している微細形状が施されている。この光学フィルムシートの微細形状は金型の凹凸を転写して形成されている。   Optical film sheets are used to disperse light emitted from light sources in devices such as flat panel displays. Such an optical film sheet has a fine shape in which, for example, a fine pattern (fine shape array) having a diameter of 100 μm is present in an inverted manner. The fine shape of the optical film sheet is formed by transferring the unevenness of the mold.

フラットパネルディスプレイにおいては、近年の大画面化、薄型化に伴い広面積かつ光散乱特性に優れた微細形状を施したシートが必要とされているが、このようなシートを製造するのに必要な金型の凹凸加工はレーザーを用いた加工法(特許文献1)や高速工具サーボを用いた切削法(FTS加工法:特許文献2)によって行うと、加工速度が遅いため、金型の製造に数日を要する。さらに、切削法で加工した場合は切屑が生じ加工部を損なうといった問題がある。   In the flat panel display, a sheet having a fine shape having a large area and excellent light scattering characteristics is required along with the recent increase in screen size and thickness, which is necessary for manufacturing such a sheet. When the concave / convex machining of the mold is performed by a machining method using a laser (Patent Document 1) or a cutting method using a high-speed tool servo (FTS machining method: Patent Document 2), the machining speed is slow. It takes several days. Furthermore, when it processes with the cutting method, there exists a problem that a chip | tip produces and a processed part is impaired.

また、上記の切削法では、長時間の加工にともなう加工途中のバイト交換は加工精度に問題を有するため、切削工具の寿命が問題となること、バイトの逃げ角には限度があること、加工深さに制限があること、連続溝加工の組合せによる微細形状加工では、凹加工が不可能であること等の問題点がある。   Also, in the above cutting method, the tool change during machining for a long time has a problem in machining accuracy, so the life of the cutting tool becomes a problem, the tool clearance angle is limited, There are problems that the depth is limited and that concave processing is impossible in fine shape processing by a combination of continuous groove processing.

さらに、加工に長時間を要すると、製造時において、環境温度の変化に伴う装置のトラブルや地震等の外的要因により、加工形状の位置大きさにばらつきが生じてしまう恐れが高くなる。そのため、上記従来の方法で金型を製造すると、加工に数日を要するため、完成品の歩留まりが低く実用的では無い。   Furthermore, if a long time is required for processing, there is a high possibility that variations in the position size of the processed shape will occur due to external factors such as equipment troubles and earthquakes accompanying changes in environmental temperature during manufacturing. For this reason, when a mold is manufactured by the above-described conventional method, it takes several days for processing, so the yield of finished products is low and not practical.

一方、塑性加工方法として、転造も挙げられる。転造はダイスや転造工具の溝を回転させながら連続して転写する。この方法ではネジや歯車等を作成するのには向いているが、加工精度に問題があるため、微細な形状を加工する場合には向かない。また、ダイスや転造工具が回転して形状を転写するため、被加工物に皺が生じ易くなり、光学シート等の微細な形状を加工するための金型を加工する方法には好適ではない。   On the other hand, rolling is also mentioned as a plastic working method. Rolling is continuously transferred while rotating a groove of a die or a rolling tool. This method is suitable for producing screws, gears, and the like, but is not suitable for processing fine shapes because of a problem in processing accuracy. In addition, since the die and the rolling tool rotate to transfer the shape, wrinkles are likely to occur on the workpiece, which is not suitable for a method of processing a mold for processing a fine shape such as an optical sheet. .

また、微細形状を施したシートはフラットパネルディスプレイのみならず、光メモリやDNAチップ等の他の用途に用いることが可能であり、高速かつ高精度に、安価で短時間に微細加工を施された金型が求められている。   In addition, the sheet having a fine shape can be used not only for a flat panel display but also for other applications such as an optical memory and a DNA chip, and has been finely processed in a short time at high speed and high accuracy. There is a need for molds.

特開2004−344957号公報JP 2004-344957 A 特開2006−123085号公報JP 2006-123085 A

レーザーやFTS加工法では、加工速度が遅いこと、加工形状に制限があること、切屑の発生があること、加工時間の長期化及び外的要因に伴う装置のトラブル等により、歩留まりが低くなることがあり、金型の製造効率があまりよくない。また、転造では精度に問題があるため、光学シート等の高い精度が求められる金型には向かないことが問題点である。   With laser and FTS processing methods, the processing speed is slow, the processing shape is limited, chips are generated, the processing time is prolonged, and the device troubles due to external factors reduce the yield. The mold manufacturing efficiency is not very good. Moreover, since there is a problem in accuracy in rolling, it is a problem that it is not suitable for a mold that requires high accuracy such as an optical sheet.

そこで本発明の目的は、上記課題を解決するためになされたもので、従来の加工方法に比べ短時間で加工することが可能な塑性加工による微細形状アレイ創成方法を提供する。   Accordingly, an object of the present invention has been made to solve the above-described problems, and provides a method for creating a fine shape array by plastic working that can be processed in a shorter time than a conventional processing method.

そこで本発明の塑性加工方法は内部にカムを収容する空間を有するハウジングと、前記ハウジング内に配置され、側面に1条以上の突出部を有する円筒形又は円柱形のカムと、前記ハウジングに固定され、内部に被加工物を塑性加工する圧子を収容する圧子案内孔を有するリテーナと、前記リテーナ内に配置された前記圧子と、前記カムを回転駆動させる駆動装置を備えた塑性加工装置を用い、前記塑性加工装置に対向して被加工物を配置し、前記駆動装置を駆動して前記カムを回転させて、前記カム表面に形成されている前記突出部と、前記圧子とを間欠的に接触させることにより前記圧子を前記被加工物側に圧出させ、圧出された前記圧子が被加工物に圧入することによって被加工物に圧痕を形成することを特徴とする。   Therefore, the plastic working method of the present invention includes a housing having a space for accommodating a cam therein, a cylindrical or columnar cam disposed in the housing and having one or more protrusions on a side surface, and fixed to the housing. A retainer having an indenter guide hole for accommodating an indenter for plastically processing a workpiece, the indenter disposed in the retainer, and a plastic working device including a drive device for rotating the cam. The workpiece is disposed opposite to the plastic working device, the drive device is driven to rotate the cam, and the protruding portion formed on the cam surface and the indenter are intermittently provided. The indenter is pressed out to the workpiece side by bringing it into contact, and the pressed indenter is pressed into the workpiece to form an indentation in the workpiece.

また、本発明の塑性加工装置は内部にカムを収容する空間を有するハウジングと、前記ハウジング内に配置され、側面に1条以上の突出部を有する円筒形又は円柱形のカムと、前記ハウジングに固定され、内部に被加工物を塑性加工する圧子を収容する圧子案内孔を有するリテーナと、前記リテーナ内に配置された前記圧子と、前記カムを回転駆動させる駆動装置を備えたことを特徴とする。   The plastic working device of the present invention includes a housing having a space for accommodating a cam therein, a cylindrical or columnar cam disposed in the housing and having one or more protrusions on a side surface, and the housing. A retainer having an indenter guide hole that accommodates an indenter that is fixed and plastically processes a workpiece, the indenter disposed in the retainer, and a drive device that rotationally drives the cam. To do.

また、本発明の金型の製造方法は前記塑性加工方法によって金型の母材である被加工物に対して塑性加工を行うことを特徴とする。   Moreover, the manufacturing method of the metal mold | die of this invention is characterized by performing plastic working with respect to the workpiece which is a preform | base_material of a metal mold | die by the said plastic working method.

微細形状の加工において、高速かつ高精度な加工が可能となる。   In the processing of fine shapes, high-speed and high-precision processing is possible.

本発明の塑性加工方法における被加工物に対する圧入を示す概念図である。It is a conceptual diagram which shows the press injection with respect to the workpiece in the plastic working method of this invention. 本発明の塑性加工装置の断面図である。It is sectional drawing of the plastic working apparatus of this invention. 本発明の塑性加工装置の断面図である。It is sectional drawing of the plastic working apparatus of this invention. 本発明の圧子の一例と示す概念図であり、図中のaは正面図、bは左側面図である。It is a conceptual diagram shown as an example of the indenter of this invention, a in the figure is a front view and b is a left view. 本発明の短冊状圧子の例を示す概念図であり、図中のaは正面図、bは左側面図である。It is a conceptual diagram which shows the example of the strip-shaped indenter of this invention, a in the figure is a front view and b is a left view. 本発明の塑性加工装置のリテーナ(A)と、図6(A)中の破線部で囲った部位を拡大した概念図(B)を示す図である。It is a figure which shows the retainer (A) of the plastic working apparatus of this invention, and the conceptual diagram (B) which expanded the site | part enclosed with the broken-line part in FIG. 6 (A). 本発明のカムの一部を示す概念図の斜視図(A)と(A)の概念図の展開図(B)である。It is the perspective view (A) of the conceptual diagram which shows a part of cam of this invention, and the expanded view (B) of the conceptual diagram of (A). 本発明のカムの一部を示す概念図の斜視図(A)と(A)の概念図の展開図(B)である。It is the perspective view (A) of the conceptual diagram which shows a part of cam of this invention, and the expanded view (B) of the conceptual diagram of (A). 規則配列形状(A)とディンプルアレイ形状(D)を示す概念図で、図9(B)、(C)はそれぞれ図9(A)中のイ、ロの一点長鎖線における断面の概念図で、図9(E)、(F)はそれぞれ図9(D)中のハ、ニの一点長鎖線における断面の概念図である。FIGS. 9B and 9C are conceptual diagrams showing a regular array shape (A) and a dimple array shape (D), respectively. FIGS. FIGS. 9E and 9F are conceptual views of cross sections taken along the single-dot long chain line C in FIG. 9D, respectively. 規則配列形状を示す概念図で、図10(B)、(C)はそれぞれ図10(A)中のイ、ロの一点長鎖線における断面の概念図で、図10(E)、(F)はそれぞれ図10(D)中のハ、ニの一点長鎖線における断面の概念図である。FIG. 10B and FIG. 10C are conceptual diagrams of cross sections taken along the one-dot long chain line in FIG. 10A, respectively. FIG. 10E and FIG. FIG. 11 is a conceptual diagram of a cross section taken along a one-dot long chain line in FIG. 10 (D). 本発明の円筒形の被加工物に加工する際の被加工物と塑性加工装置の配置の一例を示す概念図の斜視図である。It is a perspective view of the conceptual diagram which shows an example of arrangement | positioning of the to-be-processed object and the plastic working apparatus at the time of processing into the cylindrical to-be-processed object of this invention. 本発明の円筒形の被加工物に加工する際の被加工物と塑性加工装置の配置の一例を示す概念図である。It is a conceptual diagram which shows an example of arrangement | positioning of the to-be-processed object and a plastic working apparatus at the time of processing into the cylindrical to-be-processed object of this invention. 本発明の塑性加工方法によって円筒形の被加工物に規則配列加工をする工程を示すフローチャートである。It is a flowchart which shows the process of carrying out regular array processing to a cylindrical workpiece by the plastic working method of this invention. 本発明の平板形の被加工物に加工する際の被加工物と塑性加工装置の配置の一例を示す概念図の斜視図である。It is a perspective view of the conceptual diagram which shows an example of arrangement | positioning of the to-be-processed object and the plastic working apparatus at the time of processing into the flat plate-shaped to-be-processed object of this invention. 本発明の平板形の被加工物に加工する際の被加工物と塑性加工装置の配置の一例を示す概念図である。It is a conceptual diagram which shows an example of arrangement | positioning of the to-be-processed object and a plastic working apparatus at the time of processing into the flat plate-shaped to-be-processed object of this invention. 本発明の塑性加工方法によって平板形の被加工物に規則配列加工をする工程を示すフローチャートである。It is a flowchart which shows the process of carrying out regular array processing to the flat plate-shaped workpiece by the plastic processing method of this invention.

そこで本発明の塑性加工方法では、回転するダイスや転造工具の凹凸を連続的に被加工物に転写する転造方法ではなく、リテーナに挿入された圧子が間欠的に被加工物に圧入して圧痕を形成する。   Therefore, in the plastic working method of the present invention, the indenter inserted into the retainer is intermittently press-fitted into the work piece, not the rolling method in which the unevenness of the rotating die or the rolling tool is continuously transferred to the work piece. Form indentations.

本発明の塑性加工方法を図1(A)−(C)の概念図を用いて詳細に説明する。図1(A)は回転駆動部により、回転しているカム6の突出部7と圧子1が接していない時の概念図を示す。この時、圧子1には被加工物3に圧痕を形成するための圧力がかかっていない状態である。   The plastic working method of the present invention will be described in detail with reference to the conceptual diagrams of FIGS. FIG. 1A shows a conceptual diagram when the indenter 1 is not in contact with the projecting portion 7 of the rotating cam 6 by the rotation driving unit. At this time, the indenter 1 is in a state where no pressure is applied to form an indentation on the workpiece 3.

次に、図1(B)はカム6が回転し、カム6の突出部7と圧子1が接触して、圧子1に押圧がかかった際の概念図である。押圧がかかった圧子1が被加工物3に圧入し、被加工物3に圧痕を形成する。   Next, FIG. 1B is a conceptual diagram when the cam 6 rotates, the protruding portion 7 of the cam 6 and the indenter 1 come into contact, and the indenter 1 is pressed. The pressed indenter 1 is press-fitted into the workpiece 3 to form an indentation on the workpiece 3.

そして、図1(C)はカム6がさらに回転して、圧子1とカム6の突出部7の先端が非接触となった際の概念図である。圧子1と突出部7が非接触となると、圧子1にかかっていた塑性加工するための押圧がなくなる。このような図1(A)〜(C)の動作を繰り返し、被加工物3に圧痕を形成していく。
上記塑性加工装置において、圧子1は、複数配置することが好ましく、この場合、同時に多数の圧痕を形成できるので、加工時間の大幅な短縮に寄与する。
FIG. 1C is a conceptual diagram when the cam 6 further rotates and the tip of the protrusion 7 of the indenter 1 and the cam 6 is not in contact. When the indenter 1 and the projecting portion 7 are not in contact with each other, there is no pressure applied to the indenter 1 for plastic working. Such operations in FIGS. 1A to 1C are repeated to form indentations on the workpiece 3.
In the plastic working apparatus, it is preferable to dispose a plurality of indenters 1. In this case, a large number of indentations can be formed at the same time, which contributes to a significant reduction in working time.

本発明の方法によると、被加工物との接触時間は極めて短く、加工時間の短縮が可能であることから、上記理由により、完成品の歩留まりを高くすることが可能である。すなわち、本発明を適用するのに適しているフラットパネルディスプレイのレンズアレイのような極微細な形状を金型となる被加工物表面に形成する場合、パターン形成に長時間を要すると、その間に、環境温度の変化や予知不可能な地震の発生確率が高くなり正確な塑性変形が損なわれる。従って、金型の製造が完了する時間内に正確な塑性変形が損なわれないように短時間に金型製造作業が終了することが重要となってくる。   According to the method of the present invention, the contact time with the workpiece is extremely short, and the processing time can be shortened. For the above reason, the yield of the finished product can be increased. That is, when a very fine shape such as a lens array of a flat panel display suitable for applying the present invention is formed on the surface of a workpiece to be a mold, if a long time is required for pattern formation, The probability of occurrence of changes in environmental temperature and unpredictable earthquakes is increased, and accurate plastic deformation is impaired. Therefore, it is important to complete the mold manufacturing operation in a short time so that accurate plastic deformation is not impaired within the time when the mold manufacturing is completed.

また、転造法によって微細形状を被加工物表面に形成する場合には、転造に用いるダイスや転造工具などの表面全体に微細形状を施す必要があるが、本発明の方法によると、被加工物に加工する1列分以下の圧痕の数の圧子で大幅な加工時間の短縮が可能となる。   In addition, when forming a fine shape on the surface of the workpiece by the rolling method, it is necessary to apply the fine shape to the entire surface of the die or rolling tool used for rolling, but according to the method of the present invention, The machining time can be greatly shortened with the number of indentations equal to or less than one row to be processed into the workpiece.

また、本発明の方法によれば、切削加工とは異なりバイトの逃げ角を考慮しなければならないことに起因する加工形状の制限はない。さらに、圧子の形状等を考慮すれば凹加工、凸加工、凹及び凸を組み合わせた加工も可能である。   Further, according to the method of the present invention, there is no limitation on the machining shape due to the fact that the clearance angle of the cutting tool has to be taken into account, unlike cutting. Furthermore, if the shape of the indenter is taken into consideration, concave processing, convex processing, and processing that combines concave and convex are possible.

次に、塑性加工方法を示す図1及び本発明の塑性加工装置の一例を示す概念図である図2及び図3を基に本発明の塑性加工装置の構成を説明する。本発明の塑性加工装置は1つ以上の圧子1を具備する。リテーナ2はハウジングに13に固定されている。そして、リテーナ2には圧子1の数に応じた圧子案内孔2が高精度なピッチ間隔で設けられて、圧子案内孔4に圧子1が保持されている。また、圧子1が被加工物側に飛び出さず、圧子案内孔4から一部突出するように、圧子1の動作を制限する突起5が圧子案内孔4に設けられていることが好ましい。カム6は図2のように突出部を1条以上具備する。そして、カム6は回転軸8を介して軸受け10にてハウジング13に支えられ、継手11を介してサーボ電動機などの回転駆動部12によって回転する。   Next, the configuration of the plastic working apparatus of the present invention will be described based on FIG. 1 showing the plastic working method and FIGS. 2 and 3 which are conceptual diagrams showing an example of the plastic working apparatus of the present invention. The plastic working apparatus of the present invention includes one or more indenters 1. The retainer 2 is fixed to the housing 13. The retainer 2 is provided with indenter guide holes 2 corresponding to the number of indenters 1 at a highly accurate pitch interval, and the indenter 1 is held in the indenter guide holes 4. In addition, it is preferable that the indenter guide hole 4 is provided with a protrusion 5 that restricts the operation of the indenter 1 so that the indenter 1 does not protrude toward the workpiece and partly protrudes from the indenter guide hole 4. The cam 6 has one or more protrusions as shown in FIG. The cam 6 is supported by a housing 13 by a bearing 10 via a rotary shaft 8 and is rotated by a rotary drive unit 12 such as a servo motor via a joint 11.

以下本発明の塑性加工装置の構成要素である圧子、リテーナ、圧子案内孔、突起、カム、突出部、軸受け及び回転駆動部について及び被加工物について詳細に説明する。   Hereinafter, the indenter, the retainer, the indenter guide hole, the projection, the cam, the projecting portion, the bearing and the rotation driving unit, which are components of the plastic working apparatus of the present invention, and the workpiece will be described in detail.

まず、圧子1について説明する。圧子1の具体的な形状の例を図4に示す。圧子1は球状、円柱状、多角柱状、円錐状、微細パターン多角面状等の形態が挙げられる。圧子1の材質は高硬度、高靱性、高耐摩耗性を有する材質が好ましい。具体的には、超硬、ダイヤモンド、ルビー、セラミックス、サーメット等が挙げられる。
なお、圧子を一列に束ねた様な短冊状の形状にしてもよい。短冊状圧子の一例を図5に示す。
First, the indenter 1 will be described. An example of a specific shape of the indenter 1 is shown in FIG. Examples of the indenter 1 include a spherical shape, a cylindrical shape, a polygonal column shape, a conical shape, and a fine pattern polygonal shape. The material of the indenter 1 is preferably a material having high hardness, high toughness, and high wear resistance. Specific examples include cemented carbide, diamond, ruby, ceramics, cermet and the like.
It should be noted that a strip-like shape in which indenters are bundled in a line may be used. An example of a strip-shaped indenter is shown in FIG.

圧子1の動作領域を制限し、圧子1がリテーナ2から脱落せず、圧子1の先端のみが被加工物3に圧入するような機構を圧子1又は圧子案内孔4等に設けても良い。   The operating area of the indenter 1 may be limited, and a mechanism may be provided in the indenter 1 or the indenter guide hole 4 so that only the tip of the indenter 1 is pressed into the workpiece 3 without the indenter 1 falling off from the retainer 2.

圧子1の被加工物3と接する側の先端形状は凹形又は凸形の球形、円柱形、三角錘、四角錘などの多角形錘、三角柱、六角柱などの多角柱等が挙げられる。複数種の形状を組み合わせたものでも良い。圧子の先端形状はミリ、マイクロ又はナノメートルオーダーであるため、レーザー加工、電子ビーム加工、エッチング加工等によって加工することが好ましい。
また、突出部7が接する圧子底部は球面等にすることが好ましい。
Examples of the tip shape of the indenter 1 on the side in contact with the workpiece 3 include a concave or convex spherical shape, a cylindrical shape, a polygonal weight such as a triangular weight and a quadrangular weight, a polygonal pillar such as a triangular pillar and a hexagonal pillar, and the like. A combination of multiple types of shapes may also be used. Since the tip shape of the indenter is on the order of millimeters, micros or nanometers, it is preferably processed by laser processing, electron beam processing, etching processing or the like.
Further, it is preferable that the bottom of the indenter with which the protruding portion 7 contacts is a spherical surface or the like.

次にリテーナについて説明する。リテーナ2の一例を図6(A)の概念図に示す。本発明で用いるリテーナ2は1以上の圧子案内孔4を有し、圧子1が飛び出さないために圧子1の突出を制限する突起5を有している。また、圧子案内孔4の形状は圧子1の形状による。   Next, the retainer will be described. An example of the retainer 2 is shown in the conceptual diagram of FIG. The retainer 2 used in the present invention has one or more indenter guide holes 4 and a protrusion 5 that restricts the protrusion of the indenter 1 so that the indenter 1 does not pop out. The shape of the indenter guide hole 4 depends on the shape of the indenter 1.

リテーナ2の突起5の位置は被加工物側の端部等であると、圧子1が脱落しにくく、加工が容易であって好ましい。突起5の形状は円柱状等特に限定されない。リテーナ2は超硬、高硬度鋼、セラミックなどの耐摩耗性に優れた材質であることが好ましい。   It is preferable that the position of the protrusion 5 of the retainer 2 is the end portion on the workpiece side, etc., because the indenter 1 is difficult to drop off and is easy to process. The shape of the protrusion 5 is not particularly limited, such as a columnar shape. The retainer 2 is preferably made of a material having excellent wear resistance, such as carbide, high hardness steel, or ceramic.

本発明の塑性加工方法及び塑性加工装置は一度の加工で意図した形状が必ずしも形成されるわけではない。そこで、塑性加工装置が特定の領域を加工し、意図した形状が形成されるまでの工程を1ターンとすると、1ターンで加工可能な加工領域は圧子1及び圧子案内孔4の数とその径及び圧子案内孔間隔14によって決まる。規則配列の場合は隣り合う圧痕の中心間距離を1ピッチとする。そして被加工物に加工されるピッチは図6(A)のリテーナ2の概念図の一部を拡大した図6(B)中に示した圧子案内孔間隔14によって調整が可能である。   In the plastic working method and the plastic working apparatus of the present invention, the intended shape is not necessarily formed by one working. Therefore, if the plastic processing apparatus processes a specific region and the process until the intended shape is formed is one turn, the processing region that can be processed in one turn is the number of indenters 1 and indenter guide holes 4 and their diameters. And indenter guide hole interval 14. In the case of a regular arrangement, the distance between the centers of adjacent indentations is 1 pitch. And the pitch processed into a to-be-processed object can be adjusted with the indenter guide hole space | interval 14 shown in FIG. 6 (B) which expanded a part of conceptual diagram of the retainer 2 of FIG. 6 (A).

圧痕を一部重ねて加工する場合や隣り合う圧痕の間隔が狭い場合は、圧子案内孔間隔14が1ピッチ分ではない。例えば、加工形状が規則配列の場合は、圧痕の重なりが2重の時や隣り合う圧痕の間隔が狭い圧子案内孔間隔14が2ピッチ分に、圧痕の重なりが3重の時は圧子案内孔間隔14が3ピッチ分になることがある。ただし、圧子が短冊状の場合は上記とは異なる場合がある。
また、圧子案内孔間隔14は製作精度及び機械的強度の限界まで可能である。
When processing a part of the indentations, or when the distance between adjacent indentations is narrow, the indenter guide hole interval 14 is not one pitch. For example, when the machining shape is a regular arrangement, when the overlap of the indentations is double or when the distance between the indenter guide holes 14 adjacent to each other is two pitches, and when the overlap of the indentations is triple, the indenter guide holes The interval 14 may be 3 pitches. However, when the indenter has a strip shape, it may be different from the above.
Further, the indenter guide hole interval 14 can be made to the limit of manufacturing accuracy and mechanical strength.

リテーナ2の固定はハウジング等の安定した部位に交換が容易な方法で固定されていることが好ましい。リテーナ2は装置の外部から容易に脱着可能な構造であることが好ましい。リテーナ2の交換が容易な構造とすることで、加工形状の変更に伴う圧子1又は/及びピッチの変更に伴うリテーナ2の交換が可能になるだけでなく、使用することで摩耗する圧子1、圧子案内孔4、突起5、カム6等の摩耗を観察するなどのメンテナンスが容易となる。   The retainer 2 is preferably fixed to a stable part such as a housing by a method that can be easily replaced. The retainer 2 preferably has a structure that can be easily detached from the outside of the apparatus. By adopting a structure in which the retainer 2 can be easily replaced, not only the indenter 1 accompanying the change of the machining shape and / or the retainer 2 accompanying the change of the pitch can be replaced, but also the indenter 1 that wears when used. Maintenance such as observing wear of the indenter guide hole 4, the protrusion 5, and the cam 6 is facilitated.

次にカムについて説明する。カム6の一例の概念図を図7(A)に、図7(A)のカム6の展開図を図7(B)に示す。円い筒の円筒形又は円い柱の円柱形で、その表面に突出部7を具備するカム6が好ましい。カムの突出部と圧子が高速で接触するため、高硬度、耐摩耗性、靱性等が要求される。そこで、カムの材質としては窒化鋼、セラミックス等が挙げられる。   Next, the cam will be described. A conceptual diagram of an example of the cam 6 is shown in FIG. 7A, and a developed view of the cam 6 in FIG. 7A is shown in FIG. A cam 6 having a cylindrical shape of a round cylinder or a cylindrical shape of a round column and having a protrusion 7 on the surface thereof is preferable. High hardness, wear resistance, toughness, etc. are required because the protruding portion of the cam and the indenter contact at high speed. Therefore, examples of the material of the cam include nitrided steel and ceramics.

圧子1による被加工物3への押し付け加工は(1)被加工物を割出し、停止させる(2)被加工物を連続的に走行させることが好ましい。被加工物3を連続走行させて形状創成する場合、カム1の突出部7の形状は、突出部7の製作を容易にするために、図1の概念図のカム6に示すように、被加工物3と圧子1の干渉をできる限り少なくするように二つの長円が相対する形状となっていることが好ましい。なお、被加工物3と圧子1との干渉を考慮すると、被加工物3の走行速度とカム6の周速比より大きな比率の長円であることがより好ましい。突出部先端の形状は塑性加工の際の安定性を考慮した形状を有していることが好ましい。   It is preferable to press the workpiece 3 with the indenter 1 by (1) indexing and stopping the workpiece (2) continuously running the workpiece. When the workpiece 3 is continuously run to create a shape, the shape of the protrusion 7 of the cam 1 is as shown in the cam 6 of the conceptual diagram of FIG. It is preferable that the two ellipses are opposed to each other so as to minimize the interference between the workpiece 3 and the indenter 1 as much as possible. In consideration of interference between the workpiece 3 and the indenter 1, it is more preferable that the ellipse has a larger ratio than the running speed ratio of the workpiece 3 and the peripheral speed ratio of the cam 6. The shape of the tip of the protruding portion preferably has a shape that takes into account stability during plastic working.

また、カム6の回転軸に平行なカム表面の仮想線9と交わる突出部のなす角度が一定であり、その角度は90°を除く0°≦θ<180°(θ=0°は図7のカムの概念図に相当)の範囲内の角度(θ)を有する突出部7とすることが好ましい。この仮想線9はカムの概念図である図8(A)、(B)の点線で表された線である。このような突出部7の角度が0°以外の場合の概念図を図8(A)に、側面の展開図を図8(B)に示す。図7のカムの概念図に示すθ=0°の場合は一度に複数の圧子1が被加工物3に圧入するため、塑性加工装置又は/及び被加工物3に大きな衝撃がかかる。そこで仮想線に対する突出部の角度を90°を除く0°≦θ<180°にすることで、塑性加工装置又は/及び被加工物3に加わる衝撃を減らし、装置全体の耐久性を向上させることが可能となる。   In addition, the angle formed by the protrusion intersecting with the imaginary line 9 on the cam surface parallel to the rotation axis of the cam 6 is constant, and the angle is 0 ° ≦ θ <180 ° excluding 90 ° (θ = 0 ° is shown in FIG. 7). It is preferable that the protruding portion 7 has an angle (θ) within a range of (equivalent to the conceptual diagram of the cam). This imaginary line 9 is a line represented by a dotted line in FIGS. 8A and 8B which is a conceptual diagram of the cam. FIG. 8A shows a conceptual diagram when the angle of the protruding portion 7 is other than 0 °, and FIG. 8B shows a developed view of a side surface. In the case of θ = 0 ° shown in the conceptual diagram of the cam in FIG. 7, a plurality of indenters 1 are press-fitted into the work piece 3 at a time, so that a large impact is applied to the plastic working apparatus and / or the work piece 3. Therefore, by setting the angle of the protrusion with respect to the imaginary line to 0 ° ≦ θ <180 ° excluding 90 °, the impact applied to the plastic working device or / and the workpiece 3 is reduced, and the durability of the entire device is improved. Is possible.

突出部7の角度が0°ではない場合、0°の際と同様に規則配列を形成するためには圧子案内孔間隔14、ピッチ及び、θを考慮して、カム6と被加工物3の回転又は/及び移動の速度比を調節して加工を行う必要がある。   When the angle of the protruding portion 7 is not 0 °, in order to form a regular arrangement as in the case of 0 °, the cam 6 and the work piece 3 are formed in consideration of the indenter guide hole interval 14, the pitch, and θ. It is necessary to perform processing by adjusting the speed ratio of rotation or / and movement.

なお、軸受けはカムの回転精度を重視する場合、油静圧、空気静圧軸受けを適用してもよい。また、継手、回転駆動部はいずれも周知の技術を用いることができる。   In the case where importance is attached to the rotational accuracy of the cam, a hydrostatic bearing or an aerostatic bearing may be applied to the bearing. Moreover, a well-known technique can be used for both the joint and the rotation drive unit.

微細形状が施される被加工物3は円筒形、平板形等が挙げられる。被加工物3の表面材質はニッケル−燐、銅、黄銅やアルミニウム等が挙げられる。その中でもニッケル−燐、銅は加工性、耐久性等に優れるため好ましい。被加工面の表面は平滑であることが好ましい。なお、被加工物3の表面が平滑でない部位は塑性加工前又は後にダイヤモンドツールで削り平滑化することが好ましい。   Examples of the workpiece 3 to which a fine shape is applied include a cylindrical shape and a flat plate shape. Examples of the surface material of the workpiece 3 include nickel-phosphorus, copper, brass and aluminum. Among these, nickel-phosphorus and copper are preferable because they are excellent in workability and durability. The surface of the work surface is preferably smooth. In addition, it is preferable that the site | part whose surface of the to-be-processed object 3 is not smooth is shaved and smoothed with a diamond tool before or after plastic processing.

次に、上記塑性加工装置15を用いて被加工物3を加工して、円筒形又は平板形の金型等を製造する方法について説明する。   Next, a method for manufacturing a cylindrical or flat plate mold by processing the workpiece 3 using the plastic processing device 15 will be described.

本発明の金型の製造方法の例として、図9(D)の概念図のようなディンプルアレイ形状の塑性加工について説明する。この場合、1度形成した圧痕を一部重ねて加工する方法等が挙げられる。しかし、リテーナ2の圧子案内孔4はそれぞれ間隔があるため、同列の圧子1を重ねて圧入することは出来ない。そこで、ディンプルアレイ形状に加工する場合は一度、図9(A)の概念図の様に加工して、その後に1ピッチずらして加工する方法が挙げられる。なお、図9(B)、(C)はそれぞれ図9(A)中のイ、ロの一点長鎖線における断面の概念図で、図9(E)、(F)はそれぞれ図9(D)中のハ、ニの一点長鎖線における断面の概念図である。   As an example of the mold manufacturing method of the present invention, a dimple array-shaped plastic working as shown in the conceptual diagram of FIG. 9D will be described. In this case, a method of processing a part of the indentation formed once may be used. However, since the indenter guide holes 4 of the retainer 2 are spaced apart from each other, it is impossible to press-fit the indenters 1 in the same row. Therefore, when processing into a dimple array shape, there is a method in which processing is performed once as shown in the conceptual diagram of FIG. 9A and then shifted by one pitch. 9 (B) and 9 (C) are conceptual diagrams of cross sections taken along the single-dot long chain line A and B in FIG. 9 (A), respectively, and FIGS. 9 (E) and 9 (F) are FIG. 9 (D). It is a conceptual diagram of the cross section in the one-dot long chain line in the inside.

また、本発明の金型の製造方法として、ディンプルアレイ形状に塑性加工する以外にも図10(D)の規則配列形状の概念図のように加工する圧痕と圧痕の間に無加工の領域がない、もしくは無加工の領域が狭く、圧子案内孔4の間隔が狭すぎて加工できない場合がある。その際は、ディンプルアレイ形状に加工する場合と同様に1度、図10(A)の概念図の様に加工して、加工した後に1ピッチずらして加工すれば図10(D)の規則配列形状の概念図の加工を施すことが出来る。なお、図10(B)、(C)はそれぞれ図10(A)中のイ、ロの一点長鎖線における断面の概念図で、図10(E)、(F)はそれぞれ図10(D)中のハ、ニの一点長鎖線における断面の概念図である。   Further, as a method of manufacturing the mold of the present invention, there is an unprocessed region between the indentations to be processed as shown in the conceptual diagram of the regular array shape in FIG. In some cases, the non-processed region is narrow or the indenter guide hole 4 is too narrow to be processed. In that case, once as in the case of processing into a dimple array shape, once processing as shown in the conceptual diagram of FIG. 10 (A), and processing by shifting by one pitch after processing, the regular array of FIG. 10 (D). Processing of the conceptual diagram of the shape can be performed. 10 (B) and 10 (C) are conceptual diagrams of cross sections taken along the single-dot long chain line in FIGS. 10 (A) and 10 (A), respectively, and FIGS. 10 (E) and 10 (F) are FIG. 10 (D). It is a conceptual diagram of the cross section in the one-dot long chain line in the inside.

被加工物3の回転速度又は移動速度とカム6の回転速度の速度比を変化させることにより、形成される圧痕のカム回転方向のピッチを任意に変化させることが出来る。特に、ピッチを正確にNC制御することで、各圧痕を重ねたディンプルアレイ形状等を高速かつ容易に形成することが可能である。   By changing the speed ratio of the rotational speed or movement speed of the workpiece 3 and the rotational speed of the cam 6, the pitch of the formed indentation in the cam rotation direction can be arbitrarily changed. In particular, by accurately NC controlling the pitch, it is possible to easily and quickly form a dimple array shape in which each indentation is superimposed.

本発明の塑性加工装置15を用いて円筒形の被加工物3を加工する場合は、被加工物3の周りに本発明の塑性加工装置15を複数配置してもよい。円筒形の被加工物3を加工する場合の塑性加工装置15と被加工物3の配置の例の概念図を図11,12に示す。なお、以下に言う加工領域とは1ターンで加工する領域のことを意味することとする。   When the cylindrical workpiece 3 is processed using the plastic processing device 15 of the present invention, a plurality of the plastic processing devices 15 of the present invention may be arranged around the workpiece 3. 11 and 12 show conceptual diagrams of examples of the arrangement of the plastic working device 15 and the work piece 3 when the cylindrical work piece 3 is machined. In addition, the processing area | region said below shall mean the area | region processed in 1 turn.

本発明の金型の製造方法で円筒形の被加工物3に対して図9(D)のディンプルアレイ形状を加工して、金型を製造する複数の方法を図13のフローチャートを基に説明する。図13(A)のフローチャートはディンプルアレイ加工を行う基本的な工程である。被加工物3が円筒形の場合は、被加工物3、塑性加工装置15のカム6が回転し、圧痕を形成し、被加工物3が回転することで加工面を移動する。被加工物3の回転方向はカム6の回転方向と同じ又は逆のどちらでも構わない。被加工物3が回転せずに塑性加工を行う場合は塑性加工装置15が被加工物の表面を沿うように移動すれば良く、移動(回転)方向は時計回り、半時計回りのどちらでも構わない。   A plurality of methods for manufacturing the mold by processing the dimple array shape of FIG. 9D on the cylindrical workpiece 3 by the mold manufacturing method of the present invention will be described based on the flowchart of FIG. To do. The flowchart in FIG. 13A is a basic process for performing dimple array processing. When the workpiece 3 is cylindrical, the workpiece 3 and the cam 6 of the plastic working device 15 rotate to form an indentation, and the workpiece 3 rotates to move the machining surface. The rotation direction of the workpiece 3 may be the same as or opposite to the rotation direction of the cam 6. When plastic working is performed without rotating the workpiece 3, the plastic working device 15 may be moved along the surface of the workpiece, and the moving (rotating) direction may be either clockwise or counterclockwise. Absent.

まず、図13(A)のフローチャートの工程について説明する。塑性加工装置15が被加工物3に対して1周加工すると図9(A)のような規則配列形状の加工が施される(ステップ1)。隣接ディンプルアレイの加工では、1ピッチずらして圧痕の一部を重ねて加工する必要がある。そこで、ステップ1の後に塑性加工装置15をZ軸方向に1ピッチずらす工程(ステップ2)が必要である。ステップ2の後に被加工物3に対して、さらにもう1周加工する(ステップ3)と図9(D)の様なディンプルアレイ形状の加工が施される。この場合はステップ1からステップ3までを1ターンとする。塑性加工装置15を未加工の領域に移動(ステップ4)し、被加工物3の加工面の全てに加工を施し、金型を製造する。
塑性加工装置15を2台以上用い、個々の塑性加工装置15が異なる加工領域を加工する場合は図16(A)のフローチャートと同じである。
First, steps of the flowchart in FIG. 13A will be described. When the plastic processing device 15 processes the workpiece 3 once, processing in a regular array shape as shown in FIG. 9A is performed (step 1). In the processing of the adjacent dimple array, it is necessary to process by overlapping a part of the indentation by shifting by one pitch. Therefore, a step (step 2) of shifting the plastic working device 15 by 1 pitch in the Z-axis direction after step 1 is necessary. After step 2, the workpiece 3 is further processed once (step 3), and the dimple array shape as shown in FIG. 9D is applied. In this case, step 1 to step 3 are one turn. The plastic working device 15 is moved to an unprocessed region (step 4), and all the processed surfaces of the workpiece 3 are processed to manufacture a mold.
When two or more plastic processing apparatuses 15 are used and each plastic processing apparatus 15 processes a different processing area, the process is the same as the flowchart of FIG.

次に、図13(B)のフローチャートの工程について説明する。2台の塑性加工装置15を用いる場合で、2台目の塑性加工装置15を1台目の塑性加工装置15に対してZ軸方向に対して1ピッチずらして加工する場合は図13(B)のフローチャートに示すステップ5のみで1ターンとする方法も挙げられる。この方法であっても、塑性加工装置15を1台のみ用いた場合と比べて加工時間を半分程度にすることが可能となる。   Next, steps in the flowchart of FIG. 13B will be described. When two plastic working apparatuses 15 are used and the second plastic working apparatus 15 is machined by shifting one pitch with respect to the Z-axis direction with respect to the first plastic working apparatus 15 as shown in FIG. There is also a method in which only one step 5 shown in the flowchart of FIG. Even with this method, the machining time can be reduced to about half compared to the case where only one plastic working device 15 is used.

また、加工形状のピッチが圧子径よりも十分に大きく、圧子案内孔間隔14が1ピッチである形状を加工する場合は、図13(B)のフローチャートにおけるステップ5のみで1ターンとなる。この場合は図13(A)のフローチャートにおけるステップ2,3を省略して加工を行う。その他、加工形状が図9(D)のディンプルアレイ形状とは異なっても、図13のフローチャートに記載の工程と同じまたは同様の工程によって加工が可能である。   Further, when machining a shape in which the pitch of the machining shape is sufficiently larger than the indenter diameter and the indenter guide hole interval 14 is 1 pitch, only one step 5 in the flowchart of FIG. In this case, the processing is performed by omitting steps 2 and 3 in the flowchart of FIG. In addition, even if the machining shape is different from the dimple array shape of FIG. 9D, the machining can be performed by the same or similar process as the process described in the flowchart of FIG.

本発明の塑性加工装置15を用いて平板の被加工物3を加工する場合の塑性加工装置15と被加工物3の配置例の例を図14,15に示す。通常、この構成では塑性加工装置15が上部の支柱に設置され、被加工物3である平板はX−Y軸方向に移動可能な台に固定され、塑性加工装置15がZ軸方向に移動可能である。台の移動は高精度に制御されることが好ましい。   14 and 15 show examples of arrangement of the plastic working device 15 and the work piece 3 when the flat work piece 3 is machined using the plastic working device 15 of the present invention. Usually, in this configuration, the plastic working device 15 is installed on the upper support column, the flat plate as the work piece 3 is fixed to a stage movable in the XY directions, and the plastic working device 15 is movable in the Z directions. It is. The movement of the table is preferably controlled with high accuracy.

本発明の塑性加工方法で平板形の被加工物3に対して図10(D)の規則配列形状に加工して、金型を製造する複数方法を図16のフローチャートを基に説明する。被加工物3が平板形の場合は、被加工物3が移動し、塑性加工装置15のカムが回転し、圧痕を形成し、塑性加工装置15が移動することで加工面を移動する。塑性加工装置15の移動方向はX−Y平面上のどちらでも構わない。塑性加工装置15が移動せずに塑性加工を行う場合は被加工物3が移動すれば良く、移動はX−Y平面上のどの方向でも構わない。   A plurality of methods for manufacturing a die by processing the flat plate-shaped workpiece 3 into the regular array shape of FIG. 10D by the plastic processing method of the present invention will be described based on the flowchart of FIG. When the workpiece 3 is a flat plate, the workpiece 3 moves, the cam of the plastic working device 15 rotates to form an indentation, and the plastic working device 15 moves to move the work surface. The moving direction of the plastic working device 15 may be either on the XY plane. When plastic working is performed without moving the plastic working device 15, the workpiece 3 may be moved, and the movement may be in any direction on the XY plane.

まず、図16(A)のフローチャートの工程について説明する。塑性加工装置15がX軸方向に移動する場合、被加工物3のX軸方向に端から端まで移動すると図10(A)の規則配列形状のような加工が施される(ステップ6)。加工する形状のピッチが狭く、ステップ6のみで意図した形状の加工が出来ない場合は塑性加工装置15をY軸方向に1ピッチずらして加工する必要がある。そこで、ステップ6の後に塑性加工装置をY軸方向に1ピッチずらす(ステップ7)。ステップ7の後に被加工物3に対して、さらにもう一度、X軸方向に端から端まで加工する(ステップ8)と図10(D)の規則配列形状のような加工が施される。この場合はステップ6からステップ8までを1ターンとする。塑性加工装置15を未加工の領域に移動(ステップ9)し、被加工物3の加工面の全てに加工を施し、金型を製造する。
塑性加工装置15を2台以上用い、個々の塑性加工装置15が異なる加工領域を加工する場合は図16(A)のフローチャートと同じである。
First, the steps in the flowchart of FIG. When the plastic working device 15 moves in the X-axis direction, when the workpiece 3 moves from end to end in the X-axis direction, processing like the regular array shape of FIG. 10A is performed (step 6). When the pitch of the shape to be machined is narrow and the intended shape cannot be machined only in step 6, it is necessary to machine the plastic working device 15 by shifting it by one pitch in the Y-axis direction. Therefore, after step 6, the plastic working apparatus is shifted by 1 pitch in the Y-axis direction (step 7). After step 7, the workpiece 3 is processed once more from end to end in the X-axis direction (step 8), and the processing like the regular array shape of FIG. 10D is performed. In this case, step 6 to step 8 are one turn. The plastic working device 15 is moved to an unprocessed area (step 9), and all the processed surfaces of the workpiece 3 are processed to manufacture a mold.
When two or more plastic processing apparatuses 15 are used and each plastic processing apparatus 15 processes a different processing area, the process is the same as the flowchart of FIG.

次に、図16(B)のフローチャートの工程について説明する。塑性加工装置15を2台以上具備する場合は、塑性加工に要する時間を短縮することが出来る。2台の塑性加工装置15を用いる場合は、2台目の塑性加工装置を1台目の塑性加工装置15に対してX軸方向に対して1ピッチずらして、ステップ10のみで1ターンとする場合が挙げられる。塑性加工装置15を2台用いる場合は、塑性加工装置15を1台のみ用いた場合と比べて加工時間を半分程度にすることが可能となる。   Next, the process of the flowchart in FIG. When two or more plastic working apparatuses 15 are provided, the time required for plastic working can be shortened. When two plastic working apparatuses 15 are used, the second plastic working apparatus is shifted by one pitch with respect to the X-axis direction with respect to the first plastic working apparatus 15, and only one step 10 is used for one turn. There are cases. When two plastic working devices 15 are used, the machining time can be reduced to about half compared to the case where only one plastic working device 15 is used.

また、加工形状のピッチが圧子径より大きく、圧子案内孔間隔14が1ピッチである形状を加工する場合は、図16(B)のフローチャートにおいて、上記ステップ10のみで1ターンとなる。この場合は図16(A)のステップ10のみで1ターンの加工を行うことが可能である。その他、加工形状が図10の規則配列とは異なっても、図16のフローチャートに記載の工程と同じ又は同様の工程によって加工が可能である。   Further, when machining a shape in which the pitch of the machining shape is larger than the indenter diameter and the indenter guide hole interval 14 is 1 pitch, only one step 10 is made in the flowchart of FIG. In this case, it is possible to perform one turn of machining only in step 10 of FIG. In addition, even if the processing shape is different from the regular arrangement of FIG. 10, the processing can be performed by the same or similar process as the process described in the flowchart of FIG.

また、被加工物3が円筒形、平板形のいずれの場合において、圧痕の一部が重なった形状の加工をする場合でも、圧子を短冊状圧子とすれば、1台の塑性加工装置15によって1ステップで、1ターンの加工をすることも可能である。   In addition, in the case where the workpiece 3 is either a cylindrical shape or a flat plate shape, even when processing a shape in which a part of the indentation is overlapped, if the indenter is a strip-shaped indenter, one plastic processing device 15 It is also possible to process one turn in one step.

平板形の被加工物3の移動方向はX−Y−Z軸いずれの方向に対しても任意に移動可能であることが好ましい。回転速度、回転方向、移動方向、移動速度を制御することで、螺旋形状や幾何学模様を施すことも可能である。また、カム6及び円筒形の被加工物3の回転速度は一定でも変速のどちらでも良い。   It is preferable that the movement direction of the flat workpiece 3 can be arbitrarily moved with respect to any of the X, Y, and Z axes. By controlling the rotation speed, the rotation direction, the movement direction, and the movement speed, a spiral shape or a geometric pattern can be applied. Further, the rotational speeds of the cam 6 and the cylindrical workpiece 3 may be either constant or variable.

(実施例1)
基本的な実施の形態として、円筒形の被加工物3に対して、ディンプルアレイを塑性加工する方法について説明する。リテーナ2の幅は被加工物3の幅よりも狭いために、複数回に分けて、圧入して圧痕を形成する。
Example 1
As a basic embodiment, a method for plastic working a dimple array on a cylindrical workpiece 3 will be described. Since the width of the retainer 2 is narrower than the width of the workpiece 3, the retainer 2 is pressed into a plurality of times to form indentations.

円筒形の被加工物3に対して、直径が1mmの球形の圧子1を用いて、連続する図9(D)のようなディンプルアレイを塑性加工する方法について説明する。図11は円筒形の金型を作製する際の塑性加工装置15と被加工物3の概念図の斜視図である。被加工物3と塑性加工装置15は平行に配置されている。被加工物3がサーボモータによって回転して、被加工面を逐次変える。被加工物3の回転はサーボ電動機等の回転駆動部を用いカム駆動用サーボモータの回転と同期している。   A method of plastic working a continuous dimple array as shown in FIG. 9D using a spherical indenter 1 having a diameter of 1 mm for a cylindrical workpiece 3 will be described. FIG. 11 is a perspective view of a conceptual diagram of the plastic working device 15 and the workpiece 3 when producing a cylindrical mold. The workpiece 3 and the plastic working device 15 are arranged in parallel. The workpiece 3 is rotated by a servo motor to sequentially change the workpiece surface. The rotation of the workpiece 3 is synchronized with the rotation of the servo motor for driving the cam using a rotation driving unit such as a servo motor.

実施例1の塑性加工装置15の圧子1は50個、カム1の回転は1000rpm、カムの突出部は等間隔に6部とし、圧痕径は0.1mm、ピッチは0.0866mm、圧痕深さは4μmの圧痕を形成する態様で説明する。また、被加工物3は直径300mm、胴長800mmの円筒形のものとする。   The indenter 1 of the plastic working apparatus 15 of Example 1 is 50, the rotation of the cam 1 is 1000 rpm, the protrusions of the cam are 6 parts at equal intervals, the indentation diameter is 0.1 mm, the pitch is 0.0866 mm, and the indentation depth Will be described in the form of forming an indentation of 4 μm. The workpiece 3 has a cylindrical shape with a diameter of 300 mm and a trunk length of 800 mm.

カム6及び被加工物3が回転し被加工物3が1回転すると、被加工物3には図9(A)のような圧痕が形成される。次に、被加工物3をZ軸方向に1ピッチ分ずらし、再び、被加工物に圧痕を形成する。2回転目の圧入が終了すると加工物には図9(D)の圧痕が形成された。   When the cam 6 and the workpiece 3 rotate and the workpiece 3 rotates once, an indentation as shown in FIG. 9A is formed on the workpiece 3. Next, the workpiece 3 is shifted by one pitch in the Z-axis direction, and an indentation is formed on the workpiece again. When the press-fitting for the second rotation was completed, the indentation shown in FIG. 9D was formed on the workpiece.

加工を繰り返し、全体に圧痕を圧入すると被加工物3の表面には連続する図9(D)の微細形状圧痕が施されて、金型が製造された。現行のFTS法では500個/秒程度しか加工が出来ないため、実施例1の被加工物3の加工には約100時間もかかる。本発明の方法及び装置では実施例1の形態では5000個/秒の加工が可能となり、全体の加工は10時間程度で終了する。実施例1の形態では現行のFTS法の1/10程度の時間で加工が可能となる。   When the process was repeated and an indentation was press-fitted throughout, the surface of the workpiece 3 was given a continuous fine shape indent in FIG. 9 (D), and a mold was manufactured. Since the current FTS method can process only about 500 pieces / second, it takes about 100 hours to process the workpiece 3 of the first embodiment. In the method and apparatus of the present invention, processing of 5000 pieces / second is possible in the form of Example 1, and the entire processing is completed in about 10 hours. In the form of Example 1, processing can be performed in about 1/10 of the time of the current FTS method.

さらに、塑性加工装置15を図12の概念図ように被加工物3を囲むように2台以上設置することや、圧子1の数を増やすことで、作業効率をさらに上げることが容易でるため、実施例1の被加工物3を数時間以内に加工することが出来る。   Furthermore, since it is easy to further increase the working efficiency by installing two or more plastic processing devices 15 so as to surround the workpiece 3 as shown in the conceptual diagram of FIG. 12 and increasing the number of indenters 1, The workpiece 3 of Example 1 can be processed within a few hours.

(実施例2)
平板形の被加工物3に対して、圧子1の先端形状が凸形の1辺が1mmの正四角錐の四角柱状圧子を用いて、塑性加工する方法について説明する。
この実施例においても、実施例1と同様にリテーナ2の幅は被加工物3の幅よりも狭いために、一列の微細パターンの形成を複数回に分けて行う。
(Example 2)
A method of plastic working a flat workpiece 3 by using a square columnar indenter with a regular quadrangular pyramid whose one side is 1 mm and whose tip 1 is convex will be described.
Also in this embodiment, since the width of the retainer 2 is narrower than the width of the workpiece 3 as in the first embodiment, one row of fine patterns is formed in a plurality of times.

図15は平板形の金型を作製する際の塑性加工装置15と被加工物3の配置の一例を示す概念図である。被加工物3と塑性加工装置15は平行に配置されている。塑性加工装置15は2台有り、被加工物4がX−Y平面を移動して、被加工面を移動する。被加工物の移動はNC制御により精密に制御する。塑性加工装置の配置は図11の様に隣接した形態である。2台の塑性加工装置はY軸方向に1ピッチずれた位置に配置してある。Y軸方向に1ピッチずれた位置に配置すると、X軸方向に被加工物3を1度、端から端まで加工するだけで、1ターンの加工が行える。   FIG. 15 is a conceptual diagram showing an example of the arrangement of the plastic working device 15 and the workpiece 3 when producing a flat plate mold. The workpiece 3 and the plastic working device 15 are arranged in parallel. There are two plastic working devices 15, and the workpiece 4 moves on the XY plane and moves on the workpiece surface. The movement of the workpiece is precisely controlled by NC control. The arrangement of the plastic working apparatus is an adjacent form as shown in FIG. The two plastic working apparatuses are arranged at a position shifted by 1 pitch in the Y-axis direction. If it arrange | positions in the position shifted | deviated 1 pitch in the Y-axis direction, the process of 1 turn can be performed only by processing the to-be-processed object 3 once to the X-axis direction from end to end.

実施例2の塑性加工装置15の圧子1は50個、カム6の回転は1000rpm、カム6の突出部は6条とし、圧痕径は0.1mm、ピッチは0.1mm、圧痕深さは4μmの圧痕を形成する態様で説明する。また、被加工物1は1500mm×850mmの平板形のものとする。   The indenter 1 of the plastic working apparatus 15 of Example 2 is 50 pieces, the rotation of the cam 6 is 1000 rpm, the protrusions of the cam 6 are 6 strips, the indentation diameter is 0.1 mm, the pitch is 0.1 mm, and the indentation depth is 4 μm. This will be described in the form of forming the indentation. The workpiece 1 is assumed to be a flat plate of 1500 mm × 850 mm.

カムが回転し被加工物3がX軸方向に端から端まで移動して加工すると、被加工物3には図10(D)の形状が連続する圧痕が形成され、1ターンが終了する。
次に、加工領域を非加工領域にずらして、同様に加工し、被加工物表面の全ての加工領域に図10(D)の微細形状圧痕を形成し金形を製造した。
When the workpiece rotates and the workpiece 3 moves from end to end in the X-axis direction, an indentation having a continuous shape as shown in FIG. 10D is formed on the workpiece 3, and one turn is completed.
Next, the processing region was shifted to the non-processing region and processed in the same manner, and a fine shape indentation shown in FIG. 10D was formed in all the processing regions on the surface of the workpiece to manufacture a die.

その結果、平板形の被加工物3を用いた場合においても、FTS法に比べ、加工時間の大幅な短縮が可能となった。また、実施例2においては1つの被加工物に対して2つの塑性加工装置15を用いたため、実施例1よりも半分程度の時間で金型の加工が可能であった。   As a result, even when the flat workpiece 3 is used, the machining time can be greatly reduced as compared with the FTS method. Further, in Example 2, since two plastic working devices 15 were used for one workpiece, the mold could be machined in about half the time compared to Example 1.

1…圧子
2…リテーナ
3…被加工物
4…圧子案内孔
5…突起
6…カム
7…突出部
8…回転軸
9…仮想線
10…軸受
11…継手
12…回転駆動部
13…ハウジング
14…圧子案内孔間隔
15…塑性加工装置
16…支柱
17…被加工物
18…台
DESCRIPTION OF SYMBOLS 1 ... Indenter 2 ... Retainer 3 ... Workpiece 4 ... Indenter guide hole 5 ... Protrusion 6 ... Cam 7 ... Projection part 8 ... Rotating shaft 9 ... Virtual wire 10 ... Bearing 11 ... Joint 12 ... Rotation drive part 13 ... Housing 14 ... Indenter guide hole spacing 15 ... Plastic working device 16 ... Prop 17 ... Workpiece 18 ... Stand

Claims (8)

内部にカムを収容する空間を有するハウジングと、前記ハウジング内に配置され、側面に1条以上の突出部を有する円筒形又は円柱形のカムと、前記ハウジングに固定され、内部に被加工物を塑性加工する圧子を収容する圧子案内孔を有するリテーナと、前記リテーナ内に配置された前記圧子と、前記カムを回転駆動させる駆動装置を備えた塑性加工装置を用い、
前記塑性加工装置に対向して被加工物を配置し、
前記駆動装置を駆動して前記カムを回転させて、前記カム表面に形成されている前記突出部と、前記圧子とを間欠的に接触させることにより前記圧子を前記被加工物側に圧出させ、
圧出された前記圧子が被加工物に圧入することによって被加工物に圧痕を形成することを特徴とする塑性加工方法。
A housing having a space for accommodating a cam therein, a cylindrical or columnar cam disposed in the housing and having one or more protrusions on a side surface, and a work piece fixed to the housing. Using a retainer having an indenter guide hole that accommodates an indenter to be plastically worked, the indenter disposed in the retainer, and a plastic working device provided with a drive device that rotationally drives the cam,
Arrange the work piece facing the plastic working device,
The driving device is driven to rotate the cam, and the indenter is intermittently brought into contact with the protrusion formed on the cam surface to cause the indenter to be pressed out to the workpiece side. ,
An indentation is formed in a work piece by press-fitting the pressed indenter into the work piece.
前記圧子および/又は前記リテーナが、前記圧子の前記リテーナの案内孔内の移動を制限する突起を備えたことを特徴とする請求項1に記載の塑性加工装置。   The plastic working apparatus according to claim 1, wherein the indenter and / or the retainer includes a protrusion that restricts movement of the indenter in a guide hole of the retainer. 前記被加工物が円筒形又は平板形であることを特徴とする請求項1又は2に記載の塑性加工方法。   The plastic working method according to claim 1, wherein the workpiece is cylindrical or flat. 前記被加工物と前記カムの回転をNC同期して、回転比率を制御することで任意のピッチの圧痕を形成することを特徴とする請求項1乃至3のいずれかに記載の塑性加工方法。   4. The plastic working method according to claim 1, wherein an indentation having an arbitrary pitch is formed by controlling the rotation ratio in NC synchronization with the rotation of the workpiece and the cam. 5. 請求項1記載の塑性加工方法によって金型の母材である被加工物に対して塑性加工を行うことを特徴とする金型の製造方法。   A method for producing a mold, comprising performing plastic working on a workpiece which is a base material of a mold by the plastic working method according to claim 1. 内部にカムを収容する空間を有するハウジングと、
前記ハウジング内に配置され、側面に1条以上の突出部を有する円筒形のカムと、
前記ハウジングに固定され、内部に被加工物を塑性加工する圧子を収容する圧子案内孔を有するリテーナと、
前記リテーナ内に配置された前記圧子と、
前記カムを回転駆動させる駆動装置を備えたことを特徴とする塑性加工装置。
A housing having a space for accommodating a cam therein;
A cylindrical cam disposed in the housing and having one or more protrusions on a side surface;
A retainer having an indenter guide hole that is fixed to the housing and accommodates an indenter that plastically processes a workpiece;
The indenter disposed in the retainer;
A plastic working device comprising a drive device for rotationally driving the cam.
圧子の材質がセラミックス、超硬合金、ルビー又はダイヤモンドであることを特徴とする請求項6に記載の塑性加工装置。   The plastic working apparatus according to claim 6, wherein the material of the indenter is ceramics, cemented carbide, ruby or diamond. 前記突出部と前記カムの回転軸と平行なカム表面の仮想線とのなす角度(θ)が一定であり、かつ、0°≦θ<180°(90°を除く)の範囲内であることを特徴とする請求項6又は7に記載の塑性加工装置。
The angle (θ) formed between the protrusion and the imaginary line on the cam surface parallel to the rotation axis of the cam is constant and within a range of 0 ° ≦ θ <180 ° (excluding 90 °). The plastic working apparatus according to claim 6 or 7, characterized in that:
JP2009056966A 2009-03-10 2009-03-10 Plastic working method and apparatus therefor, and method for manufacturing die Pending JP2010207865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009056966A JP2010207865A (en) 2009-03-10 2009-03-10 Plastic working method and apparatus therefor, and method for manufacturing die

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009056966A JP2010207865A (en) 2009-03-10 2009-03-10 Plastic working method and apparatus therefor, and method for manufacturing die

Publications (1)

Publication Number Publication Date
JP2010207865A true JP2010207865A (en) 2010-09-24

Family

ID=42968625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009056966A Pending JP2010207865A (en) 2009-03-10 2009-03-10 Plastic working method and apparatus therefor, and method for manufacturing die

Country Status (1)

Country Link
JP (1) JP2010207865A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06210360A (en) * 1992-11-24 1994-08-02 Nagumo Seisakusho:Kk Continuous press working device for strip material
JPH09325385A (en) * 1996-06-06 1997-12-16 Nikon Corp Reticle and its manufacture
JPH1024337A (en) * 1996-05-09 1998-01-27 Nakamura Jikou:Kk Heat exchanger tube, its manufacturing method and device
JPH11290959A (en) * 1998-04-15 1999-10-26 Alps Electric Co Ltd Reflection body, manufacture of reflection body and tool for working plastic deformation of the same
JP2006508817A (en) * 2002-07-26 2006-03-16 アプレラ コーポレイション Actuator and method for a deformable valve in a microfluidic device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06210360A (en) * 1992-11-24 1994-08-02 Nagumo Seisakusho:Kk Continuous press working device for strip material
JPH1024337A (en) * 1996-05-09 1998-01-27 Nakamura Jikou:Kk Heat exchanger tube, its manufacturing method and device
JPH09325385A (en) * 1996-06-06 1997-12-16 Nikon Corp Reticle and its manufacture
JPH11290959A (en) * 1998-04-15 1999-10-26 Alps Electric Co Ltd Reflection body, manufacture of reflection body and tool for working plastic deformation of the same
JP2006508817A (en) * 2002-07-26 2006-03-16 アプレラ コーポレイション Actuator and method for a deformable valve in a microfluidic device

Similar Documents

Publication Publication Date Title
JP5953198B2 (en) Multidimensional pattern forming apparatus and forming method using ultrashort pulse laser
JP3787900B2 (en) Sequential stretch forming equipment for metal plates
US20110007400A1 (en) Microlens transcription molding roller, manufacturing method thereof, manufacturing apparatus thereof, and microlens optical sheet
JP2004223836A (en) Method and apparatus for manufacturing pattern roll and method for making optical sheet
JP5478296B2 (en) Fresnel lens, Fresnel lens mold, Fresnel lens manufacturing method, and Fresnel lens mold manufacturing method
CN105195901A (en) Method and device for engraving three-dimensional image on glass with regular cambered surface
Kim et al. Effects of hinge design of horizontal-swing fast tool servo (HFTS) for micro-patterning on a roll
JP2010207865A (en) Plastic working method and apparatus therefor, and method for manufacturing die
JP4525547B2 (en) Sheet metal product manufacturing method
Nawaz et al. Micro ECDM scanning process with feedback control of flexible contact force
JP3464666B2 (en) Pipe material dent processing method and apparatus
JP2012045581A (en) Laser processing method
CN205043352U (en) Sculpture three -dimensional image&#39;s device in having glass of regular cambered surface
JP2669682B2 (en) Equipment for manufacturing electrodes for fine shape processing
JP2003311527A (en) Method and apparatus for producing undulation by cutting
US8030591B2 (en) Microreplication on a complex surface
JP5908367B2 (en) Manufacturing method of mold for optical member manufacturing
CN113165127B (en) Machining method and machining device
JP2010099760A (en) Cutting method and machining device
JP2005144475A (en) Forming apparatus and method for oil pit on peripheral surface inside bore of cylinder block
KR100375848B1 (en) Method for manufacturing field emission device and display device
JP2008142926A (en) Film manufacturing method, film manufacturing apparatus and cutting and processing method
JP4298381B2 (en) Manufacturing method of rotating structural parts
JPH11300757A (en) Method and apparatus for molding toric recessed shape
Patowari et al. Proficiency of electrical discharge machining in fabrication of microstructures

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20111117

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130129

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20130611