JP2003311527A - Method and apparatus for producing undulation by cutting - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining method and a machining apparatus, which can accurately and widely produce minute undulations on the surface of a workpiece by cutting. <P>SOLUTION: Minute undulations are formed on the surface of the workpiece by reciprocating a cutting tool fixed to a drive mechanism unit having a drive source, which is able to minutely move at a high speed in the vertical direction of the workpiece surface, while moving the workpiece mounted on a movable body, which can be driven in the definite direction by a constant speed drive control method. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting method and a cutting apparatus for forming a fine concavo-convex shape on a flat plate or a roll surface, and particularly to transfer a pattern of the fine concavo-convex shape to obtain a desired molded product. The present invention relates to a cutting technique of a die material for transfer.

[0002]

2. Description of the Related Art Etching by exposure as disclosed in Japanese Unexamined Patent Publication No. 6-194502 is performed as a method for obtaining a fine uneven shape on a work piece on a flat plate, for example, a method for molding an optical component such as a microlens. There is a photolithography method (hereinafter referred to as a photolithography method). Further, as a method of processing a work material using a mechanical tool, JP-A-9-327860 and JP-A-11-42649 are known.
There is an indentation method found in the publication. Further, as a method of processing a roll-shaped mold for printing, there is a cutting method by an electronic engraving method. The indentation method is a processing method in which an indenter having a desired shape is used at the tip and the indenter is pressed against the surface of a workpiece to obtain a fine uneven shape. In addition, the cutting method by electronic engraving uses a drive unit that makes minute reciprocating movements at high speed, and is equipped with a displacement magnifying mechanism unit that magnifies the amount of movement of the tip of the drive unit, and a fine engraving needle is attached to the tip of the displacement magnifying mechanism unit. It is a method of processing fine irregularities on a roll-shaped surface by using the reciprocating movement of this needle.

[0003]

When the uneven shape is formed by the photolithography method, there is a problem that it is difficult to control the shape of the uneven portion because the process proceeds by a chemical reaction. In particular, when processing a microlens array in which spherical irregularities are arranged at irregular pitches, there is a problem in chemical reaction rate control, etc., because the sizes of adjacent microlenses are different.
Shape control is difficult, and it is difficult to obtain a design shape.

FIG. 16 is a perspective view of an indenter and a mold for explaining the indentation processing method. In the indentation processing method shown in FIG. 16, in order to form the spherically shaped indentation processing portion 42 in the die 43, it is necessary to obtain a tool having the same spherical surface as the designed shape. A diamond indenter 40 is usually used as a tool, but since diamond has anisotropy of polishing efficiency with respect to crystal orientation, it is difficult to finish the tool into a perfect spherical surface, resulting in a tool shape having anisotropy. In particular, when an axially symmetric aspherical shape is desired, it is extremely difficult to obtain a shape contour. In addition, it is possible to obtain the tool by using a cemented carbide material whose tool shape is easy to adjust, but a tool made of a polycrystalline material has a large crystal grain size, which deteriorates the surface roughness of the tip and causes many indentations. There is a defect in durability when forming. Further, the indentation method has a problem that the plastic flow of the material causes wrinkles and collapse of the shape in the adjacent portions due to the unevenness of the arrangement pitch of the uneven portions.

Further, in the processing of a roll die by electronic engraving, the original purpose is that a hole for accommodating the ink material on the roll surface can be machined. There is no need to control. Therefore, the control of the shape of the uneven portion in the cross-sectional direction by this method is not considered. It is difficult to control the shape of the concavo-convex portion for processing the material to be processed by moving the displacement-enlarged engraving needle at high speed. In addition, it is impossible in principle to process irregularly arranged uneven patterns.

[0006]

The present invention solves the above-mentioned problems and is capable of processing irregularly arranged irregular shapes when processing fine irregularities on the surface of a workpiece. A cutting method and a processing apparatus are provided.

In order to achieve the object of the present invention, in the first invention, a cutting method comprises a step of moving a work material in a certain direction at a constant speed, and a step of substantially perpendicular to the work material surface. A step of displacing the drive part of the cutting tool attached in any direction within about 4 μm according to the waveform signal to cut the surface of the work material.

According to a second aspect of the present invention, in the cutting method, a step of attaching a work material to a moving body whose speed can be controlled to be constant and moving the same in a certain direction by driving the moving body; Attaching the cutting tool to a drive mechanism section having a drive source that is minute and can be displaced at a high speed in a direction perpendicular to the surface of the material, and reciprocating the cutting tool by the reciprocating movement of the drive mechanism section. And a step of forming a concavo-convex shape on the surface of the workpiece by moving the moving body in one direction.

In a third aspect based on the second aspect, the moving body is a machining table of an NC controller, the drive source is composed of a piezoelectric element, and the drive mechanism section sends a waveform signal to the drive source. It is reciprocated by the supply, and a step of controlling the drive timing of the piezoelectric element by detecting the movement position of the processing table using a table position detection sensor is provided.

According to a fourth aspect of the present invention, in a cutting method, a step of rotating a roll-shaped workpiece at a constant speed by a rotating mechanism, and a minute step in the radial direction of the workpiece surface compared with mechanical driving. And attaching the cutting tool to a drive mechanism section having a drive source capable of high-speed displacement, and reciprocating movement of the cutting tool due to the reciprocating movement of the drive mechanism section and rotation of the rotating mechanism to the surface of the workpiece. Forming a concave-convex shape.

In a fifth aspect based on the fourth aspect, the drive source is composed of a piezoelectric element, and the drive mechanism section is reciprocally moved by supplying a waveform signal to the drive source, so that The method further includes controlling the drive timing of the piezoelectric element that is the drive source by using a rotational position detection sensor that detects a rotational movement position.

According to a sixth invention, in the first, third or fifth invention, the waveform signal is a waveform signal of unequal pitch.

In a seventh aspect based on the first, third or fifth aspect, the waveform signal is a plurality of waveform signals having different phases and pitches, and the piezoelectric element is driven by different waveform signals on the same machining path. The material to be processed is cut.

According to an eighth invention, in the first to seventh inventions, another drive source for slightly reciprocating the work is provided in a direction substantially horizontal to the direction in which the workpiece is horizontally moved or a direction substantially rotationally moved. A step of changing the trajectory of the tool 7 by reciprocating the drive source with the drive source is provided.

In a ninth aspect based on the second or fourth aspect, a piezoelectric element is used as the drive source, a waveform signal is used for driving control of the piezoelectric element, and a change in the shape of the waveform signal and a transmission time are constant. The fine concavo-convex shape is formed at an arbitrary position of the workpiece to be moved or rotated at a constant speed by making it correspond to the moving speed of the processing table or the rotation driving section driven by.

According to a tenth invention, in the ninth invention,
The control unit of the small displacement drive unit is provided with a storage device that stores the shape and oscillation time of the waveform signal, and the machining table that drives at a constant speed or the position information from the position detection sensor of the rotation drive unit is used to By outputting a control signal from the control unit, the fine concavo-convex pattern is repeatedly processed at an arbitrary position on the material to be processed.

An eleventh invention is the invention according to any one of the first to tenth inventions, wherein the cutting tool has a rake angle of -5 to 5.
Using a diamond bite with a clearance angle of 3 degrees or less than 20 degrees,
Oxygen-free copper or electroless nickel plating is applied to the surface of the processed part of the material to be processed, and the plated part is processed with the cutting tool to obtain a fine uneven shape.

According to a twelfth invention, in the eleventh invention, a horizontal direction or a tangential direction of the surface of the work material,
An angle formed by the cutting direction and the clearance angle of the diamond bite is 25 degrees or less.

According to a thirteenth aspect of the invention, the cutting apparatus has a machining table on which a workpiece is mounted and NC control can be performed at a constant speed in the horizontal direction, and a vertical drive capable of moving the machining head in the vertical direction with respect to the machining table. A mechanism unit, a micro-displacement drive mechanism unit provided on the machining head and capable of driving the cutting tool at a higher speed with a micro-displacement compared to mechanical driving, a position detection sensor provided on the machining table, and the position detection sensor. And a control unit that controls the minute displacement drive mechanism unit with a waveform signal in conjunction with the signal from the.

In a fourteenth aspect of the present invention, in a cutting apparatus, a roll-shaped work material is attached and a rotary drive unit capable of rotating and driving at a constant speed, and a machining head parallel to the central axis of the roll-shaped work material. The horizontal drive mechanism that can be moved in any direction, the vertical drive mechanism that can move the machining head in the radial direction of the work material, and the machining head are provided, and the cutting tool can be driven at high speed with a small displacement compared to mechanical drive. A small displacement drive mechanism part, a sensor for detecting a rotational position provided in the rotation drive part, a signal from the position detection sensor and a waveform of the minute displacement drive mechanism part in association with the operation of the rotation drive part. And a control unit controlled by a signal.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings using examples.

FIG. 1 is a front view and a side view showing an embodiment of a processing apparatus according to the present invention, and FIG. 1 (a) is a front view.
(B) shows a side view. In the figure, a processing device 1 is a C-frame type NC control processing device, 2 is a processing device frame, and a frame 2 is provided with an XY table 3 which is linearly movable in both XY directions. ing. A Z moving table 4 attached to the frame 2 and linearly movable in the Z direction is arranged above the XY table 3. Movement of the XY table 3 and the Z movement table 4 of the processing apparatus 1 is controlled by the NC control unit 6. A die 8 as a material to be processed is placed on the XY table 3 and can be moved in the XY directions by moving the XY table 3. A micro-driving head 5 is attached to the lower part of the Z moving table 4 and an upper part of the die 8, and the micro-driving head 5 is composed of a piezoelectric element, a moving coil, a magnetostrictive element, an ultrasonic transmitter and the like. A drive unit 12 is provided. Drive unit 12 composed of these
Is smaller than a mechanical drive unit and can be displaced at a high speed, and is therefore called a drive unit that is minute and can be displaced at a high speed.
Further, the minute means a movement of about 4 μ. The tool 7 attached to the tip of the micro-driving head 5 can be linearly moved in the Z direction by a displacement amount by driving the driving unit 12. That is,
The tool 7 can be linearly moved in the Z direction by moving both the Z moving table 4 and the minute driving head 5. Hereinafter, description will be made using an example in which a piezoelectric element is used as a driving unit. Also, X-
A target 10a is attached to the Y table 3, a detection sensor 10b is attached to the frame 2, and the target 10a and the detection sensor 10b constitute a table position detector 10. The target 1 of the XY table 3 which moves in the X direction by the table position detector 10.
When 0a is located within the detection range of the detection sensor 10b, a detection signal is emitted. The movement of the drive unit 12 of the piezoelectric element of the minute drive head 5 is controlled by the minute displacement control unit 9, and the minute displacement control unit 9 takes in the detection signal emitted from the detection sensor 10b. A drive signal to the drive unit 12 of the piezoelectric element is generated based on the detection signal of the detection sensor 10b, and thereby the XY table 3 and the minute drive head 5 are interlocked and controlled.

Next, a method of moving the tool 7 and the mold 8 will be described with reference to FIG. FIG. 2 is a partial side cross-sectional view of the mold and the tool showing a processing procedure for processing a concave curved surface portion having a fine concavo-convex shape on the surface of the mold by relatively moving the mold and the tool. . First, FIG. 2A is a diagram of the mold and the tool when the mold and the tool are positioned at the processing start position,
FIG. 2B is a diagram of the mold and the tool when the mold is moved in the direction of the arrow X and the tool is positioned on the surface of the mold, FIG. 2C.
Is a diagram of the mold and the tool in the case where a plurality of concave curved surface portions are formed on the surface of the mold by the movement of the mold in the X direction and the small displacement movement of the tool, and FIG. 2D shows the mold in the X direction. The move is over,
Diagram when concave curved surface is formed on mold surface, FIG. 2 (e)
FIG. 7A is a diagram showing a case where the tool is moved to the start position while stopping the microdisplacement movement of the tool.

As shown in FIG. 2A, the mold 8 and the tool 7
Position and at the machining start position. The tip position of the cutting edge of the tool 7 is set at a position higher than the surface portion 8a of the mold 8 by a predetermined amount. Next, as shown in FIG. 2B, the mold 8 is moved to the arrow X direction.
The tool 7 is moved to the cutting direction starting position on the upper surface of the die surface 8a. This positioning is shown in FIG.
When the mold 8 moves to the position of (b), the detection sensor 10b detects the target 10a, and the detection sensor 10b
The detection sensor 10b is installed on the XY table 3 so that a detection signal is generated from the sensor. As a result, a detection signal is emitted from the sensor 10b in the state of FIG. 2B, and the micro displacement control unit 9 detects the detection signal. As a result, a drive signal is output from the micro displacement control unit 9 to the micro drive head 5, so that a predetermined micro displacement movement of the predetermined tool 7 is started as shown in FIG. 2C. X direction movement of die 8 and tool 7
Of the plurality of concave curved surface portions 2 on the mold surface 8a by the minute displacement movement of
1 is formed. By moving the die 8 in the X direction and slightly moving the tool 7, the concave curved surface portion 2 shown in FIG.
1 is formed on the mold surface 8a. When the machining shown in FIG. 2D is finished, the minute displacement movement of the tool 7 is stopped, and the mold 8 is returned to the starting position in the -X direction. By repeating the above operation, it becomes possible to process a desired concavo-convex shape on the die surface 8a.

A waveform signal is used as a drive signal to the minute drive head 5 issued from the minute displacement control section 9, and a desired uneven shape is obtained by using a waveform signal corresponding to the moving speed of the XY table 3. You can FIG. 3 is a signal waveform diagram to be supplied to the driving portion of the piezoelectric element and a cross-sectional view showing a first embodiment of a mold provided with a concave curved surface portion, and FIG. 3 (a) is a first signal waveform diagram, FIG. 3B is a cross-sectional view showing a processed state of the concave curved surface portion of the mold using the first waveform signal, FIG.
Is a second signal waveform diagram, and FIG. 3D is a cross-sectional view showing a state where the mold is further processed by the second waveform signal from the processing state of FIG. 3B. When the die 8 is cut by the movement of the die 8 in the X direction and the small displacement movement of the tool 7,
When the first waveform signal 20a shown in FIG. 3A is used as the drive signal for the piezoelectric element, the concave curved surface portion 21a can be formed on the mold surface 8a as shown in FIG. 3B. Then, move the XY table 3 to the processing start position,
When the second waveform signal 20b shown in FIG. 3C is used as the drive signal for the piezoelectric element, a concave curved surface portion 21b is further formed on the die surface 8a as shown in FIG. 3D. That is, the piezoelectric element is driven on the same path with different waveforms,
1a and 21b are formed. In this way, the waveform signal 2
By using 0a and 20b, as shown in FIG. 3 (d), the concave and convex shapes of the concave curved surface portions 21a and 21b become the mold surface 8a.
Can be formed into

FIG. 4 is a waveform diagram of a signal supplied to the drive portion of the piezoelectric element and a sectional view showing a second embodiment of a mold having a concave curved surface portion, and FIG. 4 (a) is a third waveform. The signal is shown in Figure 4.
4B is a sectional view of the mold, and FIG. 4C is a top view of the mold. Third waveform signal 2 of unequal pitch shown in FIG.
By supplying 0c to the driving unit 12 of the piezoelectric element,
As shown in FIGS. 4B and 4C, the concave curved surface portions 21c having unequal pitches can be formed. In this way, in the one-way feeding of the die 8 once, the concave curved surface portions 2 of unequal pitch are
When forming 1c, the waveform signal 20c is used.

2 (e) to 2 (a), (b)
2C, the mold 8 is moved in the Y direction by using the movement of the XY table 3 in the Y direction.
By repeating the process of (d), the process shown in FIG.
It is possible to form an uneven shape in which a plurality of concave curved surface portions 21 are arranged on the mold surface 8a as shown in FIG. 5A and 5B are a perspective view and a sectional view taken along line AA of a third embodiment of a metal mold that has been subjected to fine concavo-convex processing using the processing method according to the present invention. FIG. 5A is a perspective view and FIG. ) Shows an AA cross-sectional view. The die 8 of FIG. 5 has a cutting direction in the X direction and a pitch index in the Y direction.
The concave curved surface portions 21 are processed so as to be aligned and arranged in the XY direction on the mold surface 8a. In this case, the pitch feed t in the Y direction is set to a constant value, and after one X-direction movement is completed, it is moved by t in the Y-direction at the stage before the start of the next X-direction movement. The curved surface portion 21 can be formed in a wide range of the die surface 8a. At this time, the waveform signal 20a or 20b shown in FIG. 3 is used as the drive signal for the minute drive head unit 14. By alternately using the waveform signal 20a and the waveform signal 20b,
The concave curved surface portions 21a arranged in a staggered manner can be formed on the mold surface 8a.

FIG. 6 is a perspective view and A- showing a fourth embodiment of a die in which fine concavo-convex processing is performed by using the processing method according to the present invention.
6A is a sectional view, FIG. 6A is a perspective view, and FIG. 6B is an AA sectional view. The metal mold 8 of FIG. 6 has a cutting direction in the X direction, pitch indexing in the Y direction, and concave curved surface portions 21 are irregularly arranged in the XY direction of the metal surface 8a for processing. In this case, the pitch feed in the Y direction is not constant,
By changing the shape irregularly, the concave curved surface portion 21 can be arranged irregularly in the Y direction as shown in the figure. In the X direction, the waveform signal shown in FIG. 4 is used at the time of cutting, and the shape of the waveform signal is changed for each cutting. Thereby, the concave curved surface portion 2 is formed in the X-Y direction of the mold surface 8a.
It is possible to form a concavo-convex shape in which 1 is irregularly arranged.

Here, at the time of cutting in the X direction, FIG.
In the processing methods shown in (a) to (d), the concave curved surface portion irregularly arranged in the XY direction is also formed by using the waveform signal in which the starting position of the waveform signal is shifted for each number of times of cutting. Is possible. An example will be described with reference to FIG. 7. FIG. 7 is a signal waveform diagram to be supplied to the driving portion of the piezoelectric element and a cross-sectional view showing a fifth embodiment of a mold provided with a concave curved surface portion, and FIG. 7A is a first signal waveform diagram. 7B is a cross-sectional view showing a processed state of the concave curved surface portion of the mold using the first waveform signal, FIG. 7C is a second signal waveform diagram, and FIG. 7D.
FIG. 8 is a cross-sectional view showing a state in which the die has been further processed by the second waveform signal from the processing state of FIG. 7B. Figure 7
By first setting the arrangement in the X direction so that the phases of the first waveform signal shown in FIG. 7A and the second waveform signal shown in FIG. The concave curved surface portion 21a shown in FIG. 7 is obtained, and further, an uneven shape in which the concave curved surface portions 21a and 21b are mixed as shown in FIG. 7D can be formed. Further, by combining this with irregular pitch feed in the Y direction, the uneven shape shown in FIG. 6 can be formed.

FIG. 8 is a front view of a cutting tool and a side sectional view of a cutting tool and a mold used for forming a fine uneven shape according to the present invention. FIG. 8A is a front view of the tool.
(B) is a side sectional view of the tool and the mold. In this embodiment, the concave curved surface portion is formed by a cutting method using a diamond cutting tool. In the figure, the tip of the tool 7 is provided with a diamond tip 7a. The cutting edge contour 7b at the tip of the diamond tip 7a has a cross-sectional shape in the Y direction when the concave curved surface portion 21 is formed. By slightly moving the tool 7 in the Z direction with respect to the mold surface 8a and moving the mold 8 in the X direction, the cutting edge contour 7a moves with respect to the mold surface 8a as shown by a movement trajectory 22. By this movement, the concave curved surface portion 21 is formed on the die surface 8a.

FIG. 9 is a side view of the tool and a sectional view of the die for explaining the relationship of the rake surface of the tool with respect to the die surface. FIG. 9 (a) shows the rake surface of the diamond tip with respect to the die surface. Side view in a state where it is erected vertically, FIG. 9 (b)
Is the rake face of the diamond tip relative to the die surface θ
FIG. 9C is a cross-sectional view of the mold for showing the tangent angle with respect to the mold surface of the concave curved surface portion in a state of being inclined by 3.
Now, as shown in FIG. 9A, the flank surface 7 of the diamond tip 7a when the rake surface 7c of the diamond tip 7a of the tool 7 is erected perpendicularly to the die surface 8a.
The angle formed by d and the mold surface 8a is θ2. On the other hand, FIG. 9B shows a state in which the tool 7 is further tilted by θ3. Further, as shown in FIG. 9C, the tangent angle θ1 at the portion where the concave curved surface portion 21 intersects with the mold surface 8a.
And In this embodiment, the tangent line angle θ1 is specified to be 23 degrees or less. This value is a value defined by θ2 determined by the relationship between the rake face 7c and the flank face 7d of the diamond tip 7a. The reason will be described below.

Considering the crystal orientation of the material and the life of the diamond tip 7a, it is necessary to set θ2 to 20 degrees or less. Further, at the time of processing, as shown in FIG. 9B, the tool 7 can be rotated in the cutting direction and tilted by θ3 for use. However, the proper cutting condition for the magnitude of θ3 is from minus 3 degrees to plus 3 degrees according to the cutting conditions. Therefore, the tool 7 during machining can be tilted by θ2 + θ3 with respect to the horizontal plane,
This angle is 23 degrees. When a tangent angle of θ2 + θ3 or more with respect to the die surface 8a is required, the flank surface 7d of the diamond tip 7a comes into contact with the concave curved surface portion 21.
The tangent angle θ1 is defined to be 23 degrees or less in order to destroy the shape.

10A and 10B are a front view and a side view showing another embodiment of the minute driving head of the processing apparatus according to the present invention. FIG. 10A is a front view of the minute driving head, and FIG. It is a side view of a drive head. In the present embodiment, the minute displacement driving section 5 of the minute driving head section 5 is provided with two sets of piezoelectric element driving sections that are displaced and moved in directions orthogonal to each other. As shown in FIG. 10A, the minute driving head 5a is XY.
A drive unit 12 for a first piezoelectric element that drives perpendicularly to the moving direction of the table 3 and a drive unit 13 for a second piezoelectric element that drives parallel to the Y direction of the XY table 3 are provided. . The vertical drive unit including the drive unit 12 for the first piezoelectric element and moving in the Z direction is attached to the micro displacement drive unit 14 including the drive unit 13 for the second piezoelectric element that moves in the Y direction. The movement of the displacement driving unit 14 causes the driving unit 12 of the first piezoelectric element and the tool 7 to move integrally in the Y direction. The Y direction is the pitch indexing direction during cutting. By using the minute driving head 5a shown in FIG. 10, the cutting tool 7 can be minutely driven at high speed in the Z and Y directions at the time of cutting to perform the processing.

FIG. 11 is a perspective view showing a sixth embodiment of a mold in which a concave curved surface portion is processed by using the minute driving head shown in FIG. 10, and FIG. 11A shows the concave curved surface portion regularly. FIG. 11 shows a perspective view of the dies arranged in a staggered manner, and FIG. 11B shows a perspective view of the dies in which the concave curved surface portions are arranged irregularly. Figure 11
In (a), by moving the movement of the cutting tool 7 by the minute driving head 5a in both the Z and Y directions, the tool locus of the cutting tool 7 with respect to the die surface 8a is moved in line symmetry as shown by a dotted line 23. Can be made.
Further, as shown in FIG. 11B, by irregularly changing the trajectory of the tool 7, as shown by the tool trajectory 24, it is possible to form the concave curved surface portion 21 having an irregular arrangement. Here, the fine displacement control of the tool 7 is based on the detection signal from the detection sensor 10b attached to the processing device, and the waveform signal causes the tool to move to a predetermined position in both the Z and Y directions in accordance with the movement distance of the die 8 in the X direction. Control to reach. This is 1
Since many concave curved surface portions scattered at different Y-direction positions can be processed by cutting the path, the processing efficiency is improved.

As the material of the mold 8 to be processed by using the present invention, it is preferable to use a brass material, an aluminum material or the like which can be processed by a diamond bite, but especially oxygen-free copper or electroless nickel plating is used. The material applied to the die surface 8a may be used as a processing material. The material of the die 8 for plating the surface is not particularly specified and may be an iron-based material. A desired mold can be obtained by forming fine irregularities on the plated portion. By using a plated material, it is possible to obtain a uniform work material over a large area, reduce the shape accuracy of the processed shape, and reduce the variation in surface roughness, and obtain a good mold. Becomes The specific dimensions in this embodiment are brass materials as the mold material,
Oxygen-free copper was applied to the surface to a thickness of 0.1 mm. This was fixed on the XY table 3 of the processing apparatus. The machining moves in the X direction at a constant speed, and the tool 7 is moved by the minute driving head 5.
Was driven by a minute displacement to perform processing. The moving speed in the X direction was set to 50 to 4500 mm / min, and the tool having a fine concavo-convex shape was obtained by displacing and driving the tool at a predetermined timing. Small displacement is 0.001-0.0
It is 2 mm.

FIG. 12 is a front view and a side view showing another embodiment of the processing apparatus according to the present invention. FIG. 12 (a) is a front view of the processing apparatus and FIG. 12 (b) is a side view of the processing apparatus. is there. Further, FIG. 13 is a cross-sectional view taken along the line CC of FIG. 12 and 13, the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted. In this embodiment,
The example of the processing apparatus which processes a roll metal mold | die is shown. Processing device 1
a includes a rotary drive unit 30 for a roll die 33 on the XY table 3, and the rotary drive unit 30
Is composed of a frame 35 fixed to the XY table 3, a rotation driving motor 31 mounted on the frame 35, and a mold supporting part 32 which is a rotation supporting and chucking part, and is processed by the mold supporting part 32. It supports the roll die 33 for performing. The control of the rotary drive unit 30 is N
This is performed by the C control unit 6. In addition, by detecting the target 10a with the detection sensor 10b, the roll mold 3
Positioning 3 is performed.

Next, a method of processing the roll die 33 in the present processing apparatus shown in FIGS. 12 and 13 will be described with reference to FIG.

FIG. 14 is an enlarged view of a part of the processing apparatus and the roll die, and is a view for explaining the minute displacement driving head 5 and the roll die 33. The XY table 3 of the processing apparatus is positioned so that the rake face 7c of the tool 7 is located at substantially the same position with respect to the center of the cylinder of the roll die 33. At this position, the roll die 33 is rotationally driven under a constant speed condition, and at the same time, the minute drive head 5 also minutely drives the tool 7 in the Z direction, whereby a fine uneven portion can be formed on the roll die 33. The rotation drive unit 30 can detect the rotational position of the roll mold by detecting the target 10a fixed to the roll mold 33 with the detection sensor 10b fixed to the frame 35. By detecting the rotational position of the roll die 33 based on the signal from the detection sensor 10b, the uneven portion can be formed at a desired position.

FIG. 15 is a sectional view and a front view showing an embodiment of a roll mold having a concave curved surface portion.
FIG. 15A is a cross-sectional view of the roll mold when forming the concave curved surface portion, FIG.
(B) is the front view. As shown in the figure, the concave curved surface portion 34 is formed by the rotational movement of the roll die 33 and the minute displacement movement of the tool 7. XY table 3 of processing equipment
By moving in the Y direction, it is possible to form a fine concavo-convex shape in the axial direction of the roll die 33.

Although the C-frame type apparatus is used as the processing apparatus in the above-described embodiments, the present invention is not limited to this, and the tool and the tool can be moved relative to each other. Good. Further, the moving direction is not limited to X and Y, and may be appropriately selected according to the moving stroke, the die, and the installation state of the drive unit in the processing apparatus configuration.

As described above, according to the present invention, it is possible to form a highly precise fine concave-convex shape on the surface of a work material for a large working area. Further, since it is possible to process an arbitrarily arranged pattern such as an irregular array, it is possible to obtain a shape accuracy extremely close to a design shape even for a product transfer-molded from a mold using this processing. Therefore, an excellent molded part having product performance based on design values can be obtained.

[0042]

As described above, according to the present invention, it is possible to form a highly precise fine concave-convex shape on a surface of a work material for a large working area. In addition, the shape accuracy extremely close to the designed shape can be obtained even for the product transfer-molded from the mold using the processing method of the present invention.

[Brief description of drawings]

FIG. 1 is a front view and a side view showing an embodiment of a processing apparatus according to the present invention.

FIG. 2 is a partial side cross-sectional view of the mold and the tool showing a processing procedure for processing a concave curved surface portion having a fine uneven shape on the surface of the mold by relatively moving the mold and the tool. is there.

FIG. 3 is a cross-sectional view showing a waveform of a signal supplied to a driving portion of a piezoelectric element and a first embodiment of a mold provided with a concave curved surface portion.

FIG. 4 is a cross-sectional view showing a waveform of a signal supplied to a driving portion of a piezoelectric element and a second embodiment of a mold provided with a concave curved surface portion.

5A and 5B are a perspective view and an AA cross-sectional view showing a third embodiment of a mold that has been subjected to fine concavo-convex processing using the processing method according to the present invention.

6A and 6B are a perspective view and an AA cross-sectional view showing a fourth embodiment of a mold that has been subjected to fine concavo-convex processing using the processing method according to the present invention.

FIG. 7 is a sectional view showing a waveform of a signal supplied to a driving portion of a piezoelectric element and a mold having a concave curved surface portion according to a fifth embodiment.

FIG. 8 is a front view of a cutting tool used when forming a fine concavo-convex shape according to the present invention, and a side sectional view of a cutting tool and a mold.

FIG. 9 is a side view of a tool and a cross-sectional view of the mold for explaining the relationship between the rake face of the tool and the surface of the mold.

FIG. 10 is a front view and a side view showing another embodiment of the minute drive head of the processing apparatus according to the present invention.

11 is a perspective view showing a sixth embodiment of a mold in which a concave curved surface portion is processed by using the minute driving head shown in FIG.

FIG. 12 is a front view and a side view showing another embodiment of the processing apparatus according to the present invention.

FIG. 13 is a sectional view taken along line CC of FIG.

FIG. 14 is an enlarged view of a part of a processing device and a roll die.

15A and 15B are a cross-sectional view and a front view showing an embodiment of a roll die having a concave curved surface portion.

FIG. 16 is a perspective view of an indenter and a mold for explaining an indentation processing method.

[Explanation of symbols]

1 ... Machining device, 2 ... Device frame, 3 ... XY table, 4 ... Z moving table, 5 ... Micro drive head, 6 ... N
C control unit, 7 ... Tool, 7a ... Diamond tip, 7b
... Cutting edge contour, 7c ... Rake surface, 7d ... Flank surface, 8 ... Mold, 9 ... Micro drive head controller, 10a ... Target,
10b ... Detection sensor, 12 ... Piezoelectric element drive unit, 13 ...
Piezoelectric element drive section, 14 ... Micro drive moving section, 20 ... Waveform signal, 21 ... Concave curved surface section, 22 ... Blade edge locus, 30 ... Rotational drive unit, 31 ... Drive motor, 32 ... Mold support section,
33 ... Roll mold, 34 ... Concave curved surface portion, 35 ... Frame,
40 ... Indenter, 42 ... Indentation processing part, 43 ... Mold.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yukio Maeda             292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa             Inside the Hitachi, Ltd. production technology laboratory (72) Inventor Masato Taya             Hitachi 1-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo             Kasei Industry Co., Ltd. (72) Kyohisa Ota             Hitachi 1-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo             Kasei Industry Co., Ltd. F-term (reference) 3C050 AB07 AC03

Claims (14)

[Claims] 1. A step of moving a workpiece in a constant direction at a constant speed, and a driving unit of a cutting tool attached in a direction substantially perpendicular to the surface of the workpiece in accordance with a waveform signal of about 4 μm. A step of displacing the material within the range and cutting the surface of the material to be processed. 2. A step of mounting a workpiece on a movable body capable of driving and controlling the speed at a constant rate, and moving the workpiece in a constant direction by driving the movable body, and a machine for the direction perpendicular to the surface of the workpiece. Attaching the cutting tool to a drive mechanism section having a drive source that is smaller than the drive and can be displaced at a high speed; reciprocating movement of the cutting tool due to reciprocating movement of the drive mechanism section and movement of the moving body in one direction. And a step of forming a concave-convex shape on the surface of the material to be processed. 3. The cutting method according to claim 2, wherein the movable body is a machining table of an NC controller, the drive source is composed of a piezoelectric element, and the drive mechanism section applies a waveform signal to the drive source. A cutting method comprising the steps of reciprocating by being supplied, and detecting a moving position of the processing table using a table position detection sensor to control a drive timing of the piezoelectric element. 4. A step of rotationally driving a roll-shaped workpiece at a constant speed by a rotating mechanism, and a drive source capable of displacing in a radial direction of the surface of the workpiece at a speed smaller and smaller than mechanical driving. Attaching a cutting tool to the drive mechanism section having the step of: forming a concave-convex shape on the surface of the workpiece by the reciprocating movement of the cutting tool by the reciprocating movement of the driving mechanism section and the rotation of the rotating mechanism. A cutting method characterized by the above. 5. The cutting method according to claim 4, wherein the drive source is composed of a piezoelectric element, and the drive mechanism section is reciprocally moved by supplying a waveform signal to the drive source, A cutting method comprising the step of controlling the drive timing of the piezoelectric element that is the drive source using a rotational position detection sensor that detects a rotational movement position. 6. The cutting method according to claim 1, 3 or 5, wherein the waveform signal is a waveform signal of unequal pitch. 7. The cutting method according to claim 1, 3 or 5, wherein the waveform signal is a plurality of waveform signals having different phases and pitches, and the piezoelectric element is driven through different waveform signals on the same processing path. And then cutting the material to be processed. 8. The cutting method according to any one of claims 1 to 7, further comprising: another drive source for performing a minute reciprocating motion in a direction in which a workpiece is horizontally moved or a direction substantially orthogonal to a rotational movement direction. And a step of reciprocating the drive source with the other drive source to change the trajectory of the tool. 9. The cutting method according to claim 2 or 4, wherein a piezoelectric element is used as the drive source, a waveform signal is used for drive control of the piezoelectric element, and a change in the shape of the waveform signal and a transmission time are constant. A cutting method characterized by forming a fine concavo-convex shape at an arbitrary position of the workpiece to be moved or rotated at a constant speed by making it correspond to the moving speed of the processing table or the rotation driving section driven by. 10. The cutting method according to claim 9, wherein the control unit of the small displacement driving unit is provided with a storage device for storing the shape and oscillation time of the waveform signal, and the machining table for driving at a constant speed or Cutting characterized by repeatedly processing a fine concavo-convex shape pattern at an arbitrary position of the workpiece by outputting a control signal from the control unit based on position information from a position detection sensor of the rotation drive unit. Processing method. 11. The cutting method according to claim 1, wherein the cutting tool has a rake angle of −5 to −3.
And a clearance angle of 20 degrees or less are used, oxygen-free copper or electroless nickel plating is applied to the surface of the processed part of the workpiece, and the plated part is processed with the cutting tool to obtain a fine uneven shape. Cutting method. 12. The cutting method according to claim 11, wherein a horizontal direction or a tangential direction of the surface of the work material,
An angle formed by the relief angle of the diamond bite in the cutting direction is 25 degrees or less. 13. A processing table provided with a processing table on which a material to be processed is mounted and NC control is possible at a constant speed in the horizontal direction, a vertical drive mechanism section capable of moving the processing head in a vertical direction with respect to the processing table. , A minute displacement drive mechanism section capable of driving a cutting tool at a high speed with a minute displacement as compared with mechanical driving, a position detection sensor provided on the machining table, and the minute movement in association with a signal from the position detection sensor. A cutting apparatus, comprising: a control unit that controls a displacement driving mechanism unit with a waveform signal. 14. A rotary drive unit to which a roll-shaped workpiece is attached and can be driven to rotate at a constant speed, and a horizontal drive mechanism unit which can move a machining head in a direction parallel to the central axis of the roll-shaped workpiece. A vertical drive mechanism unit capable of moving the machining head in the radial direction of the workpiece, a fine displacement drive mechanism unit provided on the machining head and capable of driving the cutting tool at a high speed with a minute displacement compared to mechanical driving, A rotation position detection sensor provided in the rotation drive unit, and a control unit that controls the minute displacement drive mechanism unit with a waveform signal in association with a signal from the position detection sensor and an operation of the rotation drive unit. A cutting device characterized by: