JP2009023043A - Fine shape cutting device and fine shape cutting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fine shape cutting device and method for performing work for a highly accurate fine shape on the surface of a workpiece. <P>SOLUTION: The fine shape cutting work device comprises: a NC device 21 for outputting a timer count starting command in starting a driving program for controlling the drive of X or Y moving mechanisms 12, 11; an arrival time computing means 22 for computing an arrival time T1 until a cutting tool arrives at a working starting position after the timer count starting command is outputted, in accordance with relative moving speed information for the moving mechanisms and working starting position information for a workpiece W; an elapsed time determining means 23 for determining that an elapsed time T2 after the timer count starting command is outputted corresponds to the arrival time T1 and for outputting a trigger signal when it corresponds thereto; and a reciprocating stage driving means 24 for driving a reciprocating stage so that the cutting tool is moved forward and backward with a predetermined infeed amount, after receiving the trigger signal. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fine shape cutting apparatus and a fine shape cutting method for machining fine irregularities on the surface of a workpiece using a cutting tool.

As a device or method for processing fine irregularities on the surface of a workpiece using a cutting tool, “a fine surface shape cutting device and a fine cutting method” disclosed in Patent Document 1 is known.
This includes a first slide mechanism that carries a workpiece and reciprocates, a second slide mechanism that intermittently moves in a direction perpendicular to the direction of movement of the first slide mechanism, A tool cutting mechanism for controlling the cutting depth of the cutting tool at high speed and finely in directions perpendicular to the movement axis of the second slide mechanism, and a position detector for generating a pulse signal according to the movement of the first slide mechanism. Configured.

  In order to machine a fine surface shape on the surface of the workpiece, the cutting depth of the cutting tool is increased by the tool cutting mechanism in synchronization with the pulse signal generated from the position detector during the forward movement of the first slide mechanism. When the first slide mechanism moves in the reverse direction, the cutting tool is retracted from the workpiece and the second slide mechanism is fed by a certain amount each time the first slide mechanism reciprocates once. Thereby, a fine surface shape can be processed on the surface of the workpiece.

JP 2006-123085 A

  In the processing apparatus and the processing method disclosed in Patent Document 1 described above, the position information of the first slide mechanism is detected by the position detector during the forward movement of the first slide mechanism, Counts the pulse signal, determines whether or not the count value matches the preset value, outputs a trigger signal when both match, and uses this trigger signal to increase the cutting depth of the cutting tool by the tool cutting mechanism To change. For this reason, it is necessary to count the pulse signal from the position detector and determine whether or not it matches the set value. A case where an accurate fine surface shape cannot be processed is considered.

  In particular, when processing a microlens transfer molding roll or transfer mold used to transfer and mold a plurality of microlenses on a sheet, the processed microlens molding portion has an outer diameter of about 10 to 300 μm. Since it is a minute unit lens such as a concave lens or a convex lens having a substantially circular shape and a depth of 0.6 to 50 μm, when the cutting tool moves back and forth, a highly accurate fine surface shape is formed on the surface of the workpiece. It cannot be processed.

  An object of the present invention is to provide a fine shape cutting apparatus and a fine shape cutting method capable of solving such problems and machining a highly accurate fine shape on the surface of a workpiece.

  A micromachining cutting apparatus according to the present invention includes a table and a cutting tool on which a workpiece is placed, an X-axis moving mechanism and a Y-axis movement for relatively moving the table and the cutting tool in the X-axis and Y-axis directions orthogonal to each other. A mechanism, a Z-axis moving mechanism having a cutting axis for moving the cutting tool back and forth in the Z-axis direction orthogonal to the X-axis and Y-axis directions, and the Z-axis moving mechanism provided on the cutting axis in the Z-axis direction. In a fine shape cutting apparatus provided with a reciprocating stage that changes a cutting depth of a cutting tool at high speed, a driving program for controlling driving of each moving mechanism is stored, and driving of each moving mechanism is performed according to this driving program And a relative movement of at least one of the X-axis movement mechanism and the Y-axis movement mechanism, and a control means for outputting a timer count start command at the start of the drive program The arrival time calculation for calculating the arrival time from when the timer count start command is output until the cutting tool reaches the processing start position of the workpiece from the degree information and the processing start position information of the workpiece And an elapsed time after the timer count start command is output from the control means, and it is determined whether or not the elapsed time matches the arrival time calculated by the arrival time calculation means. An elapsed time determination unit that outputs a trigger signal when the operation is performed, and a reciprocation that drives the reciprocating stage to receive the trigger signal from the elapsed time determination unit and to move the cutting tool forward and backward with a preset cutting amount. Moving stage driving means.

According to this configuration, when the driving program is started by the control means, the driving of the X-axis moving mechanism, the Y-axis moving mechanism, and the Z-axis moving mechanism is controlled according to the driving program, and the timer count is started when the driving program starts. A command is output.
Then, the elapsed time determination means measures the elapsed time from the output of the timer count start command from the control means, and determines whether or not this elapsed time matches the arrival time calculated by the arrival time calculation means. . When the elapsed time measured by the elapsed time determination means matches the arrival time calculated by the arrival time calculation means, a trigger signal is output.
The reciprocating stage driving means receives the trigger signal from the elapsed time determining means and drives the reciprocating stage so that the cutting tool advances and retreats by a preset cutting amount. Thereby, since the cutting tool is advanced and retracted by a preset cutting amount, a fine shape is processed on the surface of the workpiece.

In the present invention, the elapsed time after the timer count start command is output at the start of the drive program is measured, and a trigger signal is output that is triggered when the elapsed time coincides with the arrival time calculated in advance by the arrival time calculation means. As the reciprocating stage is driven, it is possible to process a highly accurate fine shape on the surface of the workpiece. That is, as in the past, position information is detected by a position detector, and from this position detector This is a trigger signal when the count value matches the set value, and the trigger value when both match, and the tool cutting mechanism does not change the cutting depth of the cutting tool at high speed. Therefore, a highly accurate fine shape can be processed on the surface of the workpiece.

  In the fine shape cutting apparatus according to the present invention, the control means controls the drive of the X-axis moving mechanism to move the table and the cutting tool relative to each other from the first position in the X-axis direction to the second position. A feed operation; a retreat operation for controlling the Z-axis movement mechanism to move the cutting tool from the second position to a third position in the Z-axis direction and the direction of retreating from the table; and the X-axis movement A return operation for controlling the drive of the mechanism to relatively move the table and the cutting tool from the third position to the fourth position in the X-axis direction and in the direction opposite to the feed operation; and the Z-axis moving mechanism; It is preferable that the reciprocating stage is driven in the feed operation by performing an approaching operation to control and move the cutting tool from the fourth position to the first position.

  According to this configuration, the table and the cutting tool are fed from the first position to the second position, then retracted from the second position to the third position, and then the third position Return operation is performed from the position to the fourth position, and finally, relative movement is performed along a rectangular trajectory that moves from the fourth position to the first position. In the feed operation from the first position to the second position of the relative movement, the driving of the reciprocating stage is controlled, and the cutting tool is advanced and retracted with respect to the surface of the workpiece by a preset cutting amount. As a result, since a highly accurate fine shape is processed on the surface of the workpiece, the movement mechanism can be controlled relatively easily.

In the fine shape cutting apparatus of the present invention, it is preferable that the reciprocating stage is constituted by a piezoelectric element laminate in which a plurality of piezoelectric elements are laminated.
According to this configuration, since the piezoelectric element laminate in which a plurality of piezoelectric elements are laminated is used for the reciprocating stage, the cutting amount of the cutting tool can be controlled at high speed. Therefore, it is possible to process a fine shape on the surface of the workpiece with high accuracy and high finishing accuracy.

  The fine shape cutting method of the present invention includes a table and a cutting tool on which a workpiece is placed, an X-axis moving mechanism and a Y-axis that move the table and the cutting tool in the X-axis and Y-axis directions orthogonal to each other. A moving mechanism, a Z-axis moving mechanism having a cutting axis for moving the cutting tool back and forth in the Z-axis direction orthogonal to the X-axis and Y-axis directions, and provided in the cutting shaft in the Z-axis direction. Using a fine shape cutting device provided with a reciprocating stage that changes the cutting amount of the cutting tool at high speed, a fine shape cutting method for cutting a fine shape on the surface of the workpiece, Controlling the driving of each moving mechanism in accordance with a driving program for controlling the driving of each moving mechanism, and outputting a timer count start command at the start of the driving program; After the timer count start command is output from the relative movement speed information of at least one of the structure and the Y-axis moving mechanism and the processing start position information of the workpiece, the cutting tool is set to the processing start position of the workpiece. An arrival time calculating step for calculating an arrival time until reaching and an elapsed time from the output of the timer count start command are measured, and this elapsed time coincides with the arrival time calculated in the arrival time calculating step. An elapsed time determination step of outputting a trigger signal when both coincide with each other, and when the trigger signal is output, the reciprocation is performed so that the cutting tool advances and retreats by a preset cutting amount. And a reciprocating stage driving step for driving the moving stage.

  According to this configuration, an effect similar to the effect described in the fine shape cutting apparatus described above can be expected.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<Description of FIG. 1>
FIG. 1 is a front view showing an embodiment of a fine shape cutting apparatus of the present invention. The fine shape cutting apparatus is provided with a base 1 and a top surface of the base 1 so as to be movable in the Y-axis direction (a direction orthogonal to the paper surface of FIG. 1). Table 2 placed on both sides of the base 1, a cross rail 4 spanned between the upper ends of the column 3, and a cross rail 4 that is movable in the X-axis direction. The slider 5 is provided, a cutting shaft 6 provided on the slider 5 so as to be movable in the Z-axis direction, and a cutting tool 8 attached to the cutting shaft 6 via a reciprocating stage 7.

  Between the base 1 and the table 2, a Y-axis drive mechanism 11 that moves the table 2 in the Y-axis direction is provided. An X-axis drive mechanism 12 that moves the slider 5 in the X-axis direction is provided between the cross rail 4 and the slider 5. Between the slider 5 and the cutting shaft 6, a Z-axis drive mechanism 13 that includes the cutting shaft 6 and moves the cutting shaft 6 in the Z-axis direction is provided. That is, the X-axis moving mechanism 12 and the Y-axis moving mechanism 11 that relatively move the table 2 on which the workpiece W is placed and the cutting tool 8 in the X-axis and Y-axis directions orthogonal to each other, and the cutting tool 8 as the X-axis and Y-axis. And a Z-axis moving mechanism 13 that moves back and forth in the Z-axis direction orthogonal to the direction. In addition, although these drive mechanisms 11, 12, and 13 are comprised by the ball screw feed mechanism etc., it is not restricted to this.

  The reciprocating stage 7 is provided between the cutting shaft 6 and the cutting tool 8, and any reciprocating stage 7 can change the cutting amount of the cutting tool 8, that is, the amount of advance / retreat in the Z-axis direction at high speed. Good. For example, it can be constituted by a piezoelectric element laminate in which a plurality of piezoelectric elements are laminated. In addition, a linear motor or a voice coil can be used.

<Description of FIG. 2>
FIG. 2 shows a control system of the fine shape cutting apparatus. The system includes an NC device 21 as control means for controlling the X-axis drive mechanism 12, Y-axis drive mechanism 11, Z-axis drive mechanism 13, etc., arrival time calculation means 22, elapsed time determination means 23, and reciprocation. Moving stage driving means 24.

  The NC device 21 stores a drive program for controlling the drive of the X-axis drive mechanism 12, the Y-axis drive mechanism 11, and the Z-axis drive mechanism 13, and according to this drive program, the X-axis drive mechanism 12, the Y-axis drive mechanism 11, Z While controlling the drive of the shaft drive mechanism 13, a timer count start command (for example, M80 code) is output at the start of the drive program based on this drive program.

  The arrival time calculation means 22 is based on the relative movement speed information (feed speed information and acceleration information) of at least one of the X-axis movement mechanism 12 and the Y-axis movement mechanism 11 in advance and the machining shape of the workpiece W, that is, the machining start position information. An arrival time T1 from when the timer count start command is output until the cutting tool 8 reaches the machining start position of the workpiece W is calculated.

  The elapsed time determination means 23 has a counter, and measures the elapsed time T2 after the timer count start command is output from the NC device 21 with the counter. Then, it is determined whether or not this elapsed time T2 coincides with the arrival time T1 calculated by the arrival time calculating means 22, and a trigger signal is output when both coincide.

  The reciprocating stage driving means 24 receives the trigger signal from the elapsed time determining means 23 and drives the reciprocating stage 7 so that the cutting tool 8 advances and retreats by a preset cutting amount. Specifically, the drive data of the reciprocating stage 7 for processing the surface processed shape of the workpiece W is stored, and when the trigger signal is received from the elapsed time determination means 23, the stored drive data is converted into an analog voltage. To the reciprocating stage 7.

<Description of FIG. 3>
FIG. 3 shows a relative movement locus between the cutting tool 8 and the workpiece W controlled by the NC device 21.
When the driving program is started by the NC device 21, the driving of the X-axis moving mechanism 12, the Y-axis moving mechanism 11, and the Z-axis moving mechanism 13 is controlled according to this driving program, and a timer count start command is issued when the driving program starts. Is output.

First, the cutting tool 8 is relatively moved from the first position P1 in the X-axis direction to the second position P2 by the drive control of the X-axis moving mechanism 12 (feed operation). Next, the cutting tool 8 is moved from the second position P2 to the third position P3 in the Z-axis direction and in the direction in which the cutting tool 8 is retracted from the table 2 by the drive control of the Z-axis moving mechanism 13 (retraction operation). Next, by the drive control of the X-axis moving mechanism 12, the cutting tool 8 is moved from the third position P3 to the fourth position P4 in the X-axis direction and in the direction opposite to the feed operation (return operation). Finally, the cutting tool 8 is moved from the fourth position P4 to the first position P1 by the drive control of the Z-axis moving mechanism 13 (approach operation). That is, the cutting tool 8 performs a traverse motion with respect to the workpiece W.
Further, at the start of this drive program, that is, at the start of the feed operation, the NC device 21 outputs a timer count start command.

<Description of FIGS. 4 and 5>
4 and 5 show a process in which the cutting tool 8 performs the cutting process on the workpiece W after the drive program is started by the NC device 21. FIG.
First, before the drive program by the NC device 21 is started, the arrival time calculation means 22 issues a timer count start command from the NC device 21 based on the relative movement speed information of the X-axis moving mechanism 12 and the machining start position information of the workpiece W. An arrival time T <b> 1 until the cutting tool 8 reaches the machining start position of the workpiece W after the output is calculated. That is, as shown in FIG. 4, the distance in the X-axis direction from the position of the cutting tool 8 when the timer count start command is output from the NC device 21 to the machining start position of the workpiece W, feed speed, acceleration information, etc. Based on this, an arrival time T1 from when the timer count start command is output from the NC device 21 until the cutting tool 8 reaches the machining start position of the workpiece W is calculated.

  When the drive program is started by the NC device 21, the elapsed time T2 until the cutting tool 8 reaches the machining start position of the workpiece W after the timer count start command is output from the NC device 21 in the arrival time determination means 23. Is measured, and it is determined whether or not the elapsed time T2 coincides with the arrival time T1 calculated by the arrival time calculation means 22. When the elapsed time T2 measured by the arrival time determination means 23 and the arrival time T1 calculated by the arrival time calculation means 22 match, a trigger signal is output.

  The reciprocating stage driving unit 24 receives the trigger signal from the elapsed time determining unit 23 and drives the reciprocating stage 7 so that the cutting tool 8 advances and retreats by a preset cutting amount. For example, as shown in FIG. 5, the control is performed so that the cutting amount of the cutting tool 8 gradually increases and decreases after every predetermined period, and then is maintained constant. Thereby, the recessed part 31 of the depth h is processed on the surface of the workpiece | work W with a fixed pitch space | interval. That is, a fine uneven shape is processed on the surface of the workpiece W.

  In this way, after processing a fine uneven shape on the surface of the workpiece W along the X-axis direction, the Y-axis drive mechanism 11 is moved by a predetermined pitch and positioned, and the above operation is repeated at this position. A fine uneven shape can be processed over the entire surface of the workpiece W.

<Effect of embodiment>
In this embodiment, the elapsed time T2 from when the timer count start command is output at the start of the drive program is measured, and output when this elapsed time T2 coincides with the arrival time T1 calculated in advance by the arrival time calculating means 22. Since the reciprocating stage 7 is driven using the triggered signal as a trigger, a highly accurate fine shape can be processed on the surface of the workpiece W.
That is, when the position information is detected by the position detector, the pulse signal from the position detector is counted, and it is determined whether or not the count value matches the set value as in the conventional case. With this trigger signal, the cutting depth of the cutting tool is not changed at high speed by the tool cutting mechanism, so that a highly accurate fine shape can be machined on the surface of the workpiece. For example, it is possible to process a microlens molding die or the like in which fine spherical concave portions are arranged at a constant pitch interval on the surface of the workpiece.

  Further, the cutting tool 8 is fed from the first position P1 to the second position P1, and then retracted from the second position P2 to the third position P3, and then the third position P3. From the fourth position P4 to the first position P1. Among the relative movement operations of the rectangle, in the feed operation from the first position P1 to the second position P2, the drive of the reciprocating stage 7 is controlled, and the cutting tool 8 sets the workpiece W at a preset cutting amount. As a result, the surface of the workpiece W is processed with a fine shape with high accuracy, so that the movement mechanism can be controlled relatively easily.

  Moreover, since the piezoelectric element laminated body which laminated | stacked the several piezoelectric element was used for the reciprocating stage 7, the cutting amount of the cutting tool 8 can be controlled at high speed. Therefore, a fine shape can be processed on the surface of the workpiece W with high accuracy and high finishing accuracy.

<Modification>
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the above embodiment, the table 2 is configured to be movable in the Y-axis direction and the cutting tool 8 is configured to be movable in the X-axis direction. However, a configuration opposite to this may be used. That is, the table 2 may be configured to be movable in the X-axis direction, and the cutting tool 8 may be configured to be movable in the Y-axis direction. Alternatively, any one of the table 2 and the cutting tool 8 may be configured to be movable in the X-axis direction and the Y-axis direction.

In the above embodiment, while the cutting tool 8 is moved in the X-axis direction by the X-axis drive mechanism 12, the reciprocating stage 7 is driven to control the cutting amount of the cutting tool 8. 11, the reciprocating stage 7 may be driven while the cutting tool 8 is moved in the Y-axis direction to control the cutting amount of the cutting tool 8.
Alternatively, the cutting amount of the cutting tool 8 is controlled by driving the reciprocating stage 7 while simultaneously moving the cutting tool 8 in the X and Y axis directions by the X axis driving mechanism 12 and the Y axis driving mechanism 11. May be.

  Although the said embodiment demonstrated the processing method which processes the recessed part 31 on the surface of the workpiece | work W with a fixed pitch space | interval, it is not restricted to this. For example, the present invention can be applied to a case where recesses and grooves are irregularly processed on the surface of the workpiece W.

  The present invention can be used, for example, for processing a microlens molding die in which fine spherical concave portions are arranged at a constant pitch interval on the surface of a workpiece.

The front view which shows one Embodiment of the fine shape cutting processing apparatus of this invention. The block diagram which shows the control system of embodiment same as the above. The figure which shows the movement locus | trajectory of a cutting tool in embodiment same as the above. The figure which shows the relationship between a cutting tool and a workpiece | work in embodiment same as the above. The figure which shows the state which the cutting tool is processing the workpiece | work in embodiment same as the above.

Explanation of symbols

6 ... Infeed shaft,
7 ... reciprocating stage,
8 ... Cutting tools,
11 ... Y-axis drive mechanism,
12 ... X-axis drive mechanism,
13 ... Z-axis drive mechanism,
21 ... NC device (control means),
22 ... Arrival time calculation means,
23. Elapsed time determination means,
24. Reciprocating stage driving means,
31 ... recess,
P1 ... first position,
P2 ... second position,
P3 ... third position,
P4 ... Fourth position,
T1 ... arrival time,
T2: Elapsed time,
W: Workpiece (workpiece).

Claims (4)

A table and a cutting tool on which a workpiece is placed, an X-axis moving mechanism and a Y-axis moving mechanism for moving the table and the cutting tool in the X-axis and Y-axis directions orthogonal to each other, and the cutting tool for the X A Z-axis moving mechanism having a cutting axis for moving back and forth in the Z-axis direction perpendicular to the axis and the Y-axis direction, and a cutting amount of the cutting tool in the Z-axis direction provided on the cutting axis at high speed In a fine shape cutting apparatus equipped with a reciprocating stage to be changed,
Control means for storing a driving program for controlling the driving of each moving mechanism, controlling the driving of each moving mechanism according to the driving program, and outputting a timer count start command at the start of the driving program;
From the relative movement speed information of at least one of the X-axis movement mechanism and the Y-axis movement mechanism and the processing start position information of the workpiece, the cutting tool is moved to the workpiece after the timer count start command is output. An arrival time calculating means for calculating an arrival time until reaching the machining start position;
The elapsed time after the timer count start command is output from the control means is measured, and it is determined whether or not this elapsed time matches the arrival time calculated by the arrival time calculating means. An elapsed time judging means for outputting a trigger signal;
Reciprocating stage driving means for receiving the trigger signal from the elapsed time judging means and driving the reciprocating stage so that the cutting tool advances and retreats by a preset cutting amount. Cutting device. In the fine shape cutting apparatus according to claim 1,
The control means controls the drive of the X-axis movement mechanism to move the table and the cutting tool relative to each other from the first position in the X-axis direction to the second position, and the Z-axis movement mechanism. Controlling the retraction operation to move the cutting tool from the second position to the third position in the Z-axis direction and retreating from the table; and controlling the drive of the X-axis movement mechanism to control the table and A return operation for relatively moving the cutting tool from the third position to the fourth position in the X-axis direction and in the direction opposite to the feed operation, and the Z-axis moving mechanism to control the cutting tool to the fourth position. And an approaching operation for moving from the position to the first position,
In the feed operation, the reciprocating stage is driven. In the fine shape cutting apparatus according to claim 1 or 2,
The reciprocating stage is constituted by a piezoelectric element laminate in which a plurality of piezoelectric elements are laminated. A table and a cutting tool on which a workpiece is placed, an X-axis moving mechanism and a Y-axis moving mechanism for moving the table and the cutting tool in the X-axis and Y-axis directions orthogonal to each other, and the cutting tool for the X A Z-axis moving mechanism having a cutting axis for moving back and forth in the Z-axis direction perpendicular to the axis and the Y-axis direction, and a cutting amount of the cutting tool in the Z-axis direction provided on the cutting axis at high speed Using a fine shape cutting apparatus equipped with a reciprocating stage to be changed, a fine shape cutting method for cutting a fine shape on the surface of the workpiece,
Controlling the driving of each moving mechanism according to a driving program for controlling the driving of each moving mechanism, and outputting a timer count start command at the start of the driving program;
From the relative movement speed information of at least one of the X-axis movement mechanism and the Y-axis movement mechanism and the processing start position information of the workpiece, the cutting tool is moved to the workpiece after the timer count start command is output. An arrival time calculating step for calculating an arrival time until reaching the machining start position;
Measure the elapsed time from the output of the timer count start command, determine whether this elapsed time coincides with the arrival time calculated in the arrival time calculation step, trigger signal when both match An elapsed time determination step for outputting,
And a reciprocating stage driving step of driving the reciprocating stage so that the cutting tool advances and retreats by a preset cutting amount when the trigger signal is output.

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