JPH1126415A - Substrate treatment unit and wet treatment apparatus using the unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size of the apparatus, and make process change easy according to a change in specifications and user's setting change easy and desirable. SOLUTION: At a central part, a substrate transfer unit 100, around which a substrate 600 is fed or received, is provided. A first substrate treatment unit 200 for etching, a second substrate treatment unit 200' for rinse and dry, and a both-face cleaning unit 300 are provided around the substrate transfer unit 100. In the substrate treatment units 200 and 200', treatment liquid is spouted out along a radial line of a rotating circle of a rotor for rotating the substrate 600, and thereby the treatment is carried out effectively at a constant position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing unit used for wet processing for forming an electronic circuit on a surface of a liquid crystal substrate or a silicon wafer as a semiconductor substrate, and a wet processing using the substrate processing unit. It relates to a processing device.

[0002]

2. Description of the Related Art Conventionally, in order to form an electronic circuit on a surface of a liquid crystal substrate or a silicon wafer as a semiconductor substrate, a surface treatment called a wet treatment has been performed.
This process generally includes steps of resist coating, exposure, development, etching, and resist removal, and by repeating these steps, a predetermined electronic circuit is formed on the substrate.

Here, the etching and the resist removal are conventionally performed by a series type wet processing apparatus as shown in FIG. This processing device includes a loader unit, a chemical unit, a washing unit, a drying unit,
A plurality of units such as an unloader unit are arranged in the process order, and a substrate transfer method between the units mainly uses a roller transfer method or a two-axis robot method.

[0004] In the chemical treatment in the chemical unit and the pure water treatment in the rinsing unit, the treatment liquid is sprayed from a large number of nozzles provided in each unit or immersed in the treatment liquid to apply the treatment liquid to the substrate. It has a structure that can be spread over the entire surface.

[0005]

Such a series-type wet processing apparatus has reached a level at which the processing itself has no problem due to repeated improvements. However, the following disadvantages have not been solved.

Generally, a plurality of units are arranged in a row, and a plurality of chemical units and a rinsing unit are generally arranged for improving the throughput and stabilizing the process. And usually reaches several tens of meters. Since etching and resist removal are performed in one wet process, at least two rows of the long devices are required. Usually, since the wet processes are repeated, the area occupied by the devices becomes enormous.

Recently, it has been active to improve the processing capacity by replacing an old device with a new one. In such a case, it is expensive to add a clean room. It is the desire of the majority of users to enhance their capabilities. However, despite the state-of-the-art equipment, the length of the equipment is still long, so it is difficult to increase the number of equipment in the same space, so that the processing capacity cannot be drastically increased.

[0008] Because of the throughput system in which the substrate passes through all units, it is difficult to cope with a change in the processing process accompanying a specification change. For example, in the apparatus shown in FIG. 12, it is impossible to change the process such as reducing the number of chemical treatments to one or omitting the chemical treatment and performing only water washing.

[0009] In recent years, the number of cases in which a user designates a substrate processing process has been increasing. However, in a conventional apparatus, since a downstream process is affected by an upstream process, the apparatus is free to change the process. At present, it is not possible to sufficiently meet the needs of the user.

When one of the units breaks down, the substrate on the upstream side cannot be carried out, so that the substrate may be defective depending on the location of the substrate. For example, if the washing unit breaks down, the substrate existing in the chemical unit on the upstream side is left with the chemical attached, and as a result, the substrate becomes defective.

An object of the present invention is to provide a substrate processing unit which solves these problems and a wet processing apparatus using the same.

[0012]

In order to solve the above problems, the present inventor has set various types of substrate processing units for etching, washing and the like around an omnidirectional type substrate transfer unit using a robot. A radiation type layout in which a series of processes are performed by arranging and transferring substrates to and from various peripheral substrate processing units by a central substrate transfer unit is considered.

According to this radial layout, the length of the apparatus is shortened, and the substrate is arbitrarily sent to each processing unit via the central substrate transfer unit. Downstream relationships are also eliminated. For this reason, it is easy to change the processing process in accordance with the specification change and to set a process desired by the user, and it is possible to eliminate the influence of one unit failure on other units. However, on the other hand, since the substrate is processed at a fixed position, it is necessary to increase the processing capacity of the processing unit.

For example, in the conventional series layout, etching is basically a process of moving a substrate (throughput).
Therefore, it is easy to secure a high processing capacity regardless of whether it is a spray method or an immersion method, and the processing capacity can be easily increased by arranging a plurality of units of the same type in series. However, when processing is performed at a fixed position, it is not possible to arrange a series of units of the same kind in series, so it is necessary to increase the capacity of the processing unit.

As a processing unit capable of performing an etching process at a fixed position, there is a spin-type processing unit. In a conventional spin-type processing unit, a chemical solution is supplied to a center portion of a rotating substrate and centrifugal force accompanying the rotation is supplied. Due to the configuration that diffuses the chemical solution to the surroundings, the processing capacity is basically low,
In the case of a large-area substrate such as a liquid crystal substrate, there is a possibility that the chemical solution may not sufficiently spread to the peripheral portion. Therefore, even if the conventional spin-type processing unit is used, a radial layout cannot be realized.

A conventional spin processing unit is used in a wet processing apparatus having a serial layout, and the fact is that a plurality of similar units are arranged in series to compensate for the low processing capability of each unit.

An object of the present invention is to provide a substrate processing unit which has a very high processing capability in spite of being a spin type, thereby enabling a radial layout, and a wet processing apparatus employing the radial layout.

A substrate processing unit according to the present invention comprises: a rotor for horizontally supporting and rotating a substrate to be processed; and a whole or a plurality of regions on a surface of the substrate rotated by the rotor at least in a direction along a radial line of a rotating circle. And a processing liquid jetting means for jetting the processing liquid from above.

It is preferable that the processing liquid ejecting means has a swing arm that pivots around the outer peripheral side of the rotor, and a spray nozzle that is attached downward at a plurality of locations in the longitudinal direction of the swing arm. In this device, setting and resetting of the substrate with respect to the rotor can be easily performed by retracting the swing arm.

It is preferable that the swing arms are arranged substantially symmetrically at two positions sandwiching the rotation center of the rotor, and each have a length reaching the rotation center of the rotor from the outer peripheral side of the rotor. By combining two swing arms in a straight line, the processing liquid can be ejected to the entire region or a plurality of positions in the direction along the diameter line of the rotating circle.

[0021] The treatment liquid spraying area is preferably the entire area along the radius line of the rotating circle, and more preferably the entire area along the diameter line.

The wet processing apparatus of the present invention includes an omnidirectional substrate transfer unit for transferring a substrate around the substrate processing unit, and a plurality of substrate processing units disposed around the substrate transfer unit. At least one of the units is the substrate processing unit of the present invention.

According to the substrate processing unit of the present invention, a substantially uniform amount of the processing liquid is supplied to the surface of the rotating substrate over the entire area in the radial direction of the rotating circle, and the supplied processing liquid is sequentially discharged to the outer peripheral side by centrifugal force. You. For this reason, uniform and efficient processing liquid replacement is performed over the entire area in the radial direction of the rotating circle. As a result, efficient substrate processing can be performed even at fixed positions, thereby enabling radial layout.

The substrate processing unit of the present invention can be used not only for chemical treatment such as etching, but also for water washing, and the water washing can be performed efficiently.

[0025]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan view of a wet processing apparatus according to an embodiment of the present invention.

The present wet processing apparatus is an etching processing apparatus for a liquid crystal substrate which functionally corresponds to the wet processing apparatus having the serial layout shown in FIG. This processing equipment
As shown in FIG. 1, a spin-type first substrate processing unit 200 and a second substrate processing unit 200 'are arranged on both sides of a double hand robot type substrate transfer unit 100 as a center, and a near side thereof. The buffer / double-sided cleaning unit 300 is placed in the
The substrate transfer unit 40 is provided on one side of the double-sided cleaning unit 300.
0 and a loader unit 50 also serving as a loader / unloader
A radial layout in which 0s are arranged is adopted. In addition,
The buffer is transferred from the liquid crystal substrate 6 by the substrate transfer unit 100.
It is a temporary table when giving and receiving 00.

The loader unit 500 positions the stocker 700 loaded with the unprocessed liquid crystal substrate 600 and the stocker 800 loaded with the processed liquid crystal substrate 600 at fixed positions. The substrate transfer unit 400 uses a single robot hand to move the unprocessed liquid crystal substrate 600 from the stocker 700.
Is taken out and placed on the buffer section of the buffer / double-sided cleaning unit 300. In addition, buffer / double-sided cleaning unit 3
00 processed liquid crystal substrate 60 placed in
0 is placed on the stocker 800. Then, the substrate transfer unit 100 uses the double-handed robot and appropriately uses the buffer unit of the buffer / double-side cleaning unit 300, while the first substrate processing unit 200, the second substrate processing unit 200 ', and the buffer / double-side Cleaning unit 3
The liquid crystal substrate 600 is transferred to and from the double-sided cleaning unit 00. On the other hand, the first substrate processing unit 200, the second substrate processing unit 200 ', and the double-side cleaning unit of the buffer / double-side cleaning unit 300 perform predetermined processing on the received liquid crystal substrate 600, respectively. As a result, the processed liquid crystal substrate 600 in the stocker 700 is sequentially etched and carried into the stocker 800.

Here, the first substrate processing unit 200 and the second substrate processing unit 200 'are basically spin processing units having the same structure, and the former is an etching process due to a difference in processing solution and a slight difference in specifications. The unit, the latter, is used as a finish cleaning / drying unit (rinse dryer).

In an etching apparatus, hydrogen fluoride or the like is used as an etching solution, and extremely corrosive gas is generated from the processing solution. Therefore, measures against corrosion and environmental measures are important. From this viewpoint, the board transfer unit 10
0, first substrate processing unit 200, second substrate processing unit 200 ', and buffer / double-side cleaning unit 300
The inside of each of the first substrate processing unit 200 (etching unit), which uses a processing liquid such as highly corrosive hydrogen fluoride directly, is suctioned to the strongest negative pressure. The inside of the substrate transfer unit 100, which is directly connected to the first substrate processing unit 200 via the opening for the substrate transfer via the opening, is suctioned to a medium extent, and the substrate transfer unit 1
The inside of each of the second substrate processing unit 200 ′ and the buffer / double-side cleaning unit 300, which is indirectly connected to the first substrate processing unit 200 via “00”, is weakly sucked. Thereby, the first substrate processing unit 20
Direct diffusion of corrosive gas generated at 0 (etching unit) is prevented. In addition, measures have been taken for each unit to prevent corrosion in the first substrate processing unit 200 and corrosion in other units due to indirect diffusion via a processing solution or the like attached to the liquid crystal substrate 600. I have.

The substrate transfer unit 100, the first substrate processing unit 200, and the second substrate processing unit 20
Each structure and function of the 0 ′ and the buffer / double-side cleaning unit 300 will be described in detail.

FIG. 2 is a vertical sectional front view of the substrate transfer unit 100, and FIG. 3 is a perspective view of a double hand robot used in the substrate transfer unit 100.

As shown in FIG. 2, the substrate transfer unit 100 includes a double hand robot 110 installed at the center of the housing 130 and a double hand robot 11
And a shield mechanism 120 for isolating 0 from corrosive atmosphere.

As shown in FIG. 3, the double hand robot 110 includes a rotary elevating shaft 112 driven by a rotary elevating drive unit 111, a rotary elevating base 113 attached to the upper end of the rotary elevating shaft 112, Base 11
3 linear drive units 114, 114 attached to both sides
And horizontal robot hands 115 and 116 driven in a horizontal direction by the linear driving units 114 and 114.

The robot hands 115 and 116 are arranged in two upper and lower stages. The upper robot hand 115 handles the liquid crystal substrate 600 before and after processing, and the lower robot hand 116 handles the liquid crystal substrate 600 during processing. When the liquid crystal substrate 600 being processed is handled by the upper robot hand 116 and the liquid crystal substrate 600 before and after processing is handled by the lower robot hand 116, the upper robot hand 11
The processing liquid adhering to 5 and the corrosive gas generated from this processing liquid contaminate the lower robot hand 116 handling the processed liquid crystal substrate 600, leading to contamination of the liquid crystal substrate 600. However, the clean liquid crystal substrate 600 before and after processing is handled by the upper robot hand 116,
The liquid crystal substrate 60 being processed by the lower robot hand 116
Handling 0 does not cause these contaminations.

Each of the robot hands holds the liquid crystal substrate 600 on the tip thereof, and rotates, moves up and down, and moves forward and backward by driving by the rotation elevating drive unit 111 and the linear drive units 114 and 114. The liquid crystal substrate 600 is exchanged with the first substrate processing unit 200, the second substrate processing unit 200 ', and the buffer / double-side cleaning unit 300 by a combination of operations. Further, in order to prevent corrosion, all robot hands are subjected to a surface treatment using a fluororesin or the like.

Shield mechanism 1 of substrate transfer unit 100
As shown in FIG. 2, a cylindrical main cover 124 covering the rotary elevating drive unit 111 and the rotary elevating shaft 112 of the double hand robot 110, and a double hand robot 120 provided on the main cover 124. The sub-cover 125 that covers the hand unit, and the annular water tank 1 that is installed so as to surround the rotary elevating drive unit 111 of the double hand robot 110
21, an annular liquid receiver 122 provided on the outer peripheral side of the water tank 121, and a partition plate 123 provided above the liquid receiver 122 to partition the inside of the housing 130 up and down. In addition,
The liquid receiver 122 also serves as a second partition that partitions the inside of the housing 130 up and down.

The main cover 124 made of a cylindrical skirt
The upper end is connected to the rotary elevating base 113 of the double hand robot 110, and the lower end is inserted into the water in the water tank 121. With this water seal structure, the portion below the hand unit is isolated from the corrosive atmosphere in the housing 130 without hindering the rotation operation and the elevating operation of the hand unit of the double hand robot 110. However, the hand portion is not isolated only by the water seal structure. Therefore, the main cover 1
Although the sub-cover 125 is provided on the top 24 to cover the hand unit, it is impossible to completely cover the hand unit due to the necessity of placing the liquid crystal substrate 600 on the tip of the hand. There is a possibility that the corrosive gas invades into the inside, and eventually the corrosive gas also invades into the main cover 124 via the movable portion (the straight driving portions 114, 114, etc.). As a countermeasure, pressurizing the inside of the main cover 124 can be considered, but this complicates the configuration of the apparatus and increases the scale. For this reason, here, the partition plate 123 is provided on the outer peripheral side of the main cover 124 with a gap 126 therebetween, and the inside of the housing 130 is sucked between the liquid receiver 122 and the partition plate 123.

With this configuration, the space above the partition 123 in the housing 130 is divided by the partition 123 and the main cover 12.
4 is sucked downward of the partition 123 through the gap 126 between them, and as a result, a downflow is formed along the outer peripheral surfaces of the main cover 124 and the sub-cover 125 in the space above the partition 123. Therefore, even if the inside of the main cover 124 is not pressurized, the situation where corrosive gas enters the sub-cover 125 and the main cover 124 is avoided, and the double hand robot 120 is protected from corrosive gas except for the hand part. Is done.

In order to suppress the progress of water contamination in the water tank 121 due to the dissolution of the corrosive gas, the water tank 12
1 is supplied with water. The water overflowing from the water tank 121 is collected in the liquid receiver 122 and is appropriately extracted to the outside.

FIG. 4 is a front view of the first substrate processing unit 200, FIG. 5 is a plan view of the unit, and FIG. 6 is a longitudinal sectional view of a sealing mechanism provided in the unit.

As shown in FIGS. 4 and 5, the first substrate processing unit 200, which is an etching unit, is provided with a rotor 220 provided at a central portion in a processing tank 210 and a rotor 220 provided around the rotor 220. It has three horizontal swing arms 230, 240, 250. Rotor 220
Holds the liquid crystal substrate 600 horizontally and rotates it at a predetermined speed.

The swing arm 230 is supported by a vertical rotating shaft 231 of a lifting type, and performs a lifting operation and a turning operation around the rotating shaft 231 by the lifting operation and the rotating operation of the rotating shaft 231. Other swing arms 240, 250
Also performs a lifting operation and a turning operation by the same mechanism. The length of each swing arm is set such that the tip of the arm is located on the center of rotation when the swing arm is located substantially on the radial line with respect to the rotation circle of the rotor 220.

The swing arm 230 is provided with three spray nozzles 232, 232 and 232 at equal intervals. Each of these spray nozzles sprays the etching solution supplied through the flexible pipe 233 downward, and jointly sprays the etching solution in the longitudinal direction of the swing arm 230 without interruption.
Similarly, three spray nozzles 242, 242, 24 arranged in the longitudinal direction are also provided on the swing arm 240, which is partially supported at a substantially diagonal position across the rotation center of the rotor 220.
2 are attached, whereby the etching processing liquid is sprayed without a break in the longitudinal direction. And
By arranging the two swing arms 230 and 240 in a line along the diameter direction of the rotating circle of the rotor 220, continuous and uniform spraying of the etching processing liquid is performed along the diameter direction.

A gas nozzle 252 is attached to the tip of the remaining swing arm 250 in order to purge the center of the rotating circle with nitrogen gas.

In the first substrate processing unit 200 which is an etching unit, the liquid crystal substrate 600 on the rotor 220
Since the highly corrosive processing liquid is sprayed from above, it is necessary to isolate the rotary drive unit below the rotor 220 from the upper rotor unit. A shield mechanism for this isolation will be described with reference to FIG.

The rotor 220 has a plurality of pins 221 for supporting the liquid crystal substrate 600. The ring-shaped holder 222 that holds the rotor 220 is attached to the upper end of a vertical rotating shaft 223 that is driven to rotate by a motor (not shown). The rotation shaft 223 is a cylindrical post 2.
24 is rotatably supported through a bearing 225. The shield mechanism 260 has a partition plate 261 that partitions the inside of the processing tank 210 up and down. The partition plate 261 is shaped like a truncated cone having an opening at the center in order to discharge the processing solution dropped from above to the surroundings.
24 is hermetically connected to an annular holding member 262 attached to the upper end. An annular water tank 263 is formed on the holding member 262. Fresh water is continuously supplied into the water tank 263, and into the water, an annular convex part 264 protruding from the lower surface of the holder 222 is inserted from above. The inside of the post 224 is pressurized by air supplied through the nipple 265 and the through hole 266.

According to such a shield mechanism 260,
The rotor 220 and the holder 222 are located in a space outside (above) the partition 261. On the other hand, the rotation drive unit including the rotation shaft 223 and the post 224 is located in a space inside (below) the partition 261. Then, both spaces are separated by inserting the convex portion 264 of the holder 222 into the water in the water tank 263. Here, the corrosive gas generated from the processing solution dissolves in the water in the water tank 263 and tries to enter the rotating shaft 223 side beyond the convex part 264.
Due to the fact that fresh water continues to be supplied into the inside 3 and the inside of the post 224 is pressurized, there is a possibility that the corrosive gas may come out of the water in the water tank 263 and enter the rotating shaft 223 side. Absent. Accordingly, the rotary drive unit of the rotor 220 is completely isolated from the upper rotor unit, thereby preventing corrosion of the rotary drive unit by corrosive gas generated on the rotor unit side.

FIG. 7 is a plan view of the second substrate processing unit 200 '.

The second substrate processing unit 200 ′ is a spin processing unit having basically the same structure as the first substrate processing unit 200, which is an etching unit. Used as a finish cleaning / drying unit (rinse dryer).

That is, in the second substrate processing unit 200 ′, which is a finish cleaning / drying unit (rinse dryer), pure water for finish cleaning is supplied from three spray nozzles 232, 232, 232 attached to the swing arm 230. It is injected. The swing arm 240, which is partially supported at a substantially diagonal position across the rotation center of the rotor 220, has three ultrasonic oscillators 2 spaced apart in its longitudinal direction.
43, 243 and 243 are mounted, and perform ultrasonic cleaning in cooperation with pure water injection from spray nozzles 232, 232 and 232. In addition, swing arm 2
A gas nozzle 252 for purging nitrogen gas is attached to the tip of 50.

The other structure is basically the same as that of the first substrate processing unit 200.

FIG. 8 shows a buffer / double-side cleaning unit 300.
9 is a plan view of a double-sided cleaning unit of the unit, and FIG. 10 is a side view of the double-sided cleaning unit.

The buffer / both-side cleaning unit 300 has a two-stage structure in which a buffer unit 320 is provided on the both-side cleaning unit 310. The buffer unit 320 has two upper and lower substrate support bases 321 and 322 for temporarily placing the liquid crystal substrate 600. The upper substrate support 321 is used for the liquid crystal substrate 600 before and after processing, and the lower substrate support 322 is used for the liquid crystal substrate 600 during processing. Such proper use is performed by the robot hands 115 and 11 described above.
As in the case of No. 6, the contamination of the upper substrate support portion 321 by the processing liquid or the like adhering to the liquid crystal substrate 600 during processing is prevented, and the substrate support portion 321 is always kept clean.

The double-sided cleaning unit 310 is a third substrate processing unit. The double-sided cleaning unit 310 includes a rectangular cleaning tank 311, a plurality of fixed pins 312 provided inside the cleaning tank 311 to horizontally support the liquid crystal substrate 600, and the liquid crystal substrate 600. Two sets of front and rear elevating pins 313 and 314 for raising and lowering the water, and two water sprinklers 315 and 31 disposed above and below the substrate support position, respectively.
6 is provided.

The cleaning tank 311 has an opening for loading and unloading substrates at the front, and this opening is opened and closed by a shutter 317. The shutter 317 is driven by a cylinder 317a provided below the cleaning tank 311. Similar openings that are opened and closed by shutters are also provided in the first substrate processing unit 200 and the second substrate processing unit 200 '.

The plurality of fixed pins 312 are connected to the liquid crystal substrate 60.
It is attached to a frame-shaped frame 312a also serving as a zero positioning frame with an interval. Of the two front and rear lifting pins 313 and 314, the lifting pin 313 close to the opening of the cleaning tank 311 is symmetrically attached to the lifting frame 313a, and is provided below the cleaning tank 311. It is driven up and down in two stages by a stepped cylinder 313b. Further, the elevating pin 314 that is separated from the opening of the cleaning tank 311 is symmetrically attached to the elevating frame 314a, and is driven up and down by a one-stage cylinder 314b provided below the cleaning tank 311. The lifting pins 313 and 314 are at the lower limit and have a lower level than the fixed pins 312, and the first raised position of the lifting pins 313 and the upper limit position of the lifting pins 324 are the same and higher than the fixed pins 312. Level, and the ascending position (ascending limit) of the second stage of the elevating pin 313 becomes even higher.

The water sprinkler 315 in the upper stage is provided above the substrate support position by each of the pins with a space in front and rear. Each is a horizontal water supply pipe 315 extending left and right.
a, and a plurality of downward nozzles 315b attached to the water supply pipe 315a at intervals.
When the water supply pipe 315a rotates at a predetermined angle in a state in which the pure water is sprayed from above, the pure water is sprayed downward, and also in a wide range in the front-rear direction and the left-right direction. on the other hand,
The lower sprinklers 316 are provided below the substrate support position of each of the pins with an interval in front and rear. Each has a horizontal water supply pipe 316a extending left and right, and a plurality of upward nozzles 316b attached to the water supply pipe 316a at intervals, and the water supply pipe 316a is in a state where pure water is jetted from the nozzle 316b. By rotating at an angle, the pure water is sprayed upward, and over a wide range in the front-rear direction and the left-right direction.

When the liquid crystal substrate 600 is horizontally supported and cleaned on both sides at a fixed position, since the liquid crystal substrate 600 needs to be supported from below, there is a problem that the cleaning is not performed at the support point on the back surface (lower surface). In addition, there is a problem that cleaning performance is deteriorated due to poor water sweep on the surface (upper surface). In order to solve these problems, in the double-sided cleaning section 310, two sets of front and rear lift pins 313, 3
14 were provided.

That is, the liquid crystal substrate 600 carried into the cleaning tank 311 by the robot hand while these pins 313 are fixed at the first raised position and the lift pins 314 are fixed at the upper limit position. Elevating pins 313, 314
It is placed on. Then, the elevating pins 313 and 314
Is lowered to the lower limit position, whereby the liquid crystal substrate 600 is transferred onto the fixed pins 312. In this state, water sprinkler 3
By spraying pure water from 15, 316, both surfaces of the liquid crystal substrate 600 supported on the fixed pins 312 are cleaned. After the washing is performed in this state for a predetermined time, the liftable pin 313 is moved up to the second stage ascending position (upper limit) while continuing the pure water injection. As a result, the liquid crystal substrate 600 is separated from the fixed pins 312, and the contact portions of the rear surface with the fixed pins 312 are also cleaned. Further, when the liquid crystal substrate 600 is tilted, the position of spraying pure water on the front surface and the back surface changes, and the pure water sprayed on each surface flows along each surface. Therefore, cleaning without unevenness is performed on each surface. Further, particularly on the surface (upper surface), the replacement of pure water is promoted. Thus, both sides of the liquid crystal substrate 600 are efficiently cleaned at fixed positions.

Next, the etching operation using the present wet processing apparatus will be described focusing on one specific liquid crystal substrate 600.

The unprocessed liquid crystal substrate 600 is taken out from the stocker 700 fixed to the loader unit 500 by the substrate transfer unit 400, and is carried into the buffer unit 320 of the buffer / double-side cleaning unit 300. At this time, the liquid crystal substrate 600 is placed on the upper substrate support 321 in the buffer unit 320.

Thereafter, the liquid crystal substrate 600 is taken out of the buffer section 320 by the double hand robot 110 of the substrate transfer unit 100, carried into the first substrate processing unit 200 which is an etching unit, and placed on its rotor 220. Is done. At this time, in the double hand robot 110, the upper robot hand 115 is used. Further, in the first substrate processing unit 200, all three swing arms 230, 240, and 250 are at the retracted positions around the rotor 220.

When the liquid crystal substrate 600 is placed on the rotor 220, the swing arms 230 and 240 rotate, and are aligned in a direction along the diameter line of the rotating circle of the rotor 220. In this state, while the rotor 220 rotates at a low speed,
Etching liquid is sprayed from the spray nozzles 232. Here, the spray nozzle 232
, 242... Are arranged in a row in a direction along the diameter line of the rotating circle of the rotor 220, and continuously and uniformly spray the etching processing liquid in that direction. Therefore, on the surface of the liquid crystal substrate 600, the etching treatment liquid is supplied uniformly in the direction along the diameter line of the rotating circle without depending on the centrifugal force due to the rotation, and the etching treatment liquid is efficiently replaced with a new liquid over the entire surface. By being replaced, an efficient etching process is performed on the entire surface.

As described above, even though a highly corrosive processing solution is used, the rotary drive of the rotor 220 is isolated from the corrosive atmosphere by the seal mechanism 260 and protected from corrosion. is there.

When the spraying of the etching solution from the spray nozzles 232, 242,... Is completed, the swing arms 230, 240 return to their original positions. Instead, the swing arm 250 advances to a position along the radius line of the rotation circle of the rotor 220, and the gas nozzle 252 moves the liquid crystal substrate 600.
Opposes the center of rotation from above. In this state, the rotor 220 rotates at high speed, and nitrogen gas is injected from the gas nozzle 252. By the high speed rotation of the rotor 220, the processing liquid remaining on the surface of the liquid crystal substrate 600 or the like is removed by centrifugal force. In addition, the processing liquid remaining on the central portion of the liquid crystal substrate 600 where centrifugal force does not work moves to the periphery where centrifugal force works and is removed by the nitrogen gas purge from the gas nozzle 252.

When the liquid removal of the liquid crystal substrate 600 is completed, the liquid crystal substrate 600 is moved by the double hand robot 110 of the substrate transfer unit 100 to the first substrate processing unit 20.
From 0, it is carried into the double-sided cleaning unit 310 of the buffer / double-sided cleaning unit 300. At this time, in the double hand robot 110, the lower robot hand 116 is used. In addition, depending on the relationship with another liquid crystal substrate 600, the liquid crystal substrate 600 is conveyed via the buffer unit 320 of the buffer / double-side cleaning unit 300, and the lower substrate support 322 is used in the buffer unit 320. You.

In the double-sided cleaning section 310, as described above, pure water is sprayed from the water sprayers 315 and 316 in a state where the liquid crystal substrate 600 is horizontally supported on the fixed pins 312, so that both sides of the liquid crystal substrate 600 are Is roughly washed. Subsequently, the liquid crystal substrate 500 is transferred onto the elevating pins 313 by raising the elevating pins 313 while pure injection is continued, and the back surface (lower surface) of the uncleaned portion (contact of the fixed pins 312) Location) is also cleaned. Further, the liquid crystal substrate 600 is tilted by the operation of the elevating pins 313 and 314, and pure water is sprayed on both surfaces in this state, so that the replacement of pure water on the surface (upper surface) is promoted, and there is no unevenness. Efficient rough cleaning is performed.

After the rough cleaning of the liquid crystal substrate 600 is completed, the liquid crystal substrate 600 is transferred from the double-side cleaning unit 310 to the second substrate processing unit 200 'by the double hand robot 110 of the substrate transfer unit 100. Again,
In the double hand robot 110, a lower robot hand 116 is used. In addition, depending on the relationship with another liquid crystal substrate 600, the liquid crystal substrate 600 is transferred via the buffer unit 320 of the buffer / double-side cleaning unit 300, and the lower substrate support 32
2 are used.

In the second substrate processing unit 200 ′, after the liquid crystal substrate 600 is placed on the rotor 220, the swing arms 230, 240 are turned, and are moved in the direction along the diameter line of the rotating circle of the rotor 220. Align straight. In this state, pure water is sprayed from the spray nozzles 232 while rotating the rotor 220 at a low speed. Also, the ultrasonic oscillator 243 attached to the swing arm 240 operates. Thus, the surface of the liquid crystal substrate 600 is ultrasonically cleaned.

When this is completed, the swing arm 230,
240 returns to the original position. Instead, swing arm 2
50 advances to a position along the radius line of the rotation circle of the rotor 220, and the gas nozzle 252 faces the rotation center of the liquid crystal substrate 600 from above. In this state, the rotor 220 rotates at high speed, and nitrogen gas is injected from the gas nozzle 252. By the high-speed rotation of the rotor 220, pure water remaining on the surface of the liquid crystal substrate 600 or the like is removed by centrifugal force. Also,
Pure water remaining on the central portion of the liquid crystal substrate 600 where centrifugal force does not work moves to the periphery where centrifugal force works and is removed by the nitrogen gas purge from the gas nozzle 252.

When the finish cleaning and drying are completed in this manner, the liquid crystal substrate 600 is moved from the second substrate processing unit 200 ′ into the buffer section 320 of the buffer / double-sided cleaning unit 300 by the double hand robot 110 of the substrate transfer unit 100. It is carried in. At this time, in the double hand robot 110, the upper robot hand 115 is used. In the buffer unit 320, the liquid crystal substrate 6
00 is placed on the upper substrate support 321.

Finally, the liquid crystal substrate 600 in the buffer section 320 is transported to the loader unit 500 by the substrate transfer unit 400 and stored in the stocker 800 fixed in the loader unit 500.

As described above, a specific liquid crystal substrate 600 is processed. In an actual process, the liquid crystal substrates 600 in the stocker 700 are sequentially and continuously processed and return to the stocker 800.

The above processing is a regular etching processing. However, in the present wet processing apparatus, processing that does not use the first substrate processing unit 200 which is an etching unit.
For example, only the finish cleaning using the second substrate processing unit 200 'can be performed.

The present wet processing apparatus performs an etching process on the liquid crystal substrate 600. The resist removing process subsequent to the etching process can be similarly performed by changing the processing liquid. In addition, the process can be easily changed by increasing or decreasing the number of units and changing the type. Further, a substrate other than the liquid crystal substrate, for example, a wafer can be processed.

FIG. 11 is an equipment configuration diagram showing an example of use of the wet processing apparatus according to the present invention. Here, wet processing apparatuses A to D are combined with a substrate transfer robot traveling section 900 having a loader 500a and an unloader 500b on both sides, respectively. Here, the buffer / double-side cleaning unit 300 is disposed separately from the buffer unit 300a and the double-side cleaning unit 300 here. Until now, semiconductor manufacturing maker's substrate manufacturing factories have established a line for each chemical solution to achieve the required process. However, by using different chemical solutions in the wet processing devices A to D, even if the type of chemical solution increases, The required processes are achieved in the line.

[0078]

As described above, the substrate processing unit of the present invention performs uniform and efficient processing liquid replacement in the direction along the radius line of the rotating circle of the rotating substrate.
This enables efficient substrate processing at a fixed position, thereby realizing a wet processing apparatus having a highly efficient radial layout.

The wet processing apparatus of the present invention realizes a radial layout by using the substrate processing unit of the present invention, and has the following advantages as compared with the conventional serial layout. Have.

The device length is short and the number of lines is greatly reduced. As a result, the floor area of the apparatus is, for example, 1/3 to 1/4.
To be reduced. In other words, it is very small in comparison with its capacity. Therefore, the processing capacity can be dramatically improved within the same floor area.

Since the substrate is arbitrarily sent to the surrounding processing units via the central substrate transfer unit, the path of the substrate is not limited, and the relationship between the upstream and downstream of the process is also eliminated.
Therefore, it is easy to change the processing process due to the specification change and to set the process desired by the user. That is, the degree of freedom for the processing process is very large.

Even if one unit breaks down, the substrate remaining in another unit can be discharged.

[Brief description of the drawings]

FIG. 1 is a plan view of a wet processing apparatus according to an embodiment of the present invention.

FIG. 2 is a vertical sectional front view of a substrate transfer unit used in the wet processing apparatus.

FIG. 3 is a perspective view of a double hand robot used in the board transfer unit.

FIG. 4 is a front view of a first substrate processing unit used in the wet processing apparatus.

FIG. 5 is a plan view of the substrate processing unit.

FIG. 6 is a longitudinal sectional view of a sealing mechanism provided in the substrate processing unit.

FIG. 7 is a plan view of a second substrate processing unit used in the wet processing apparatus.

FIG. 8 is a front view of a buffer / double-side cleaning unit used in the wet processing apparatus.

FIG. 9 is a plan view of a double-sided cleaning unit of the buffer / double-sided cleaning unit.

FIG. 10 is a side view of the double-sided cleaning unit.

FIG. 11 is a configuration diagram of equipment using a wet processing apparatus according to the present invention.

FIG. 12 is a configuration diagram of a conventional wet processing apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 Substrate transfer unit 110 Double hand robot 115, 116 Robot hand 120 Shield mechanism 200 First substrate processing unit 220 Rotor 230, 240, 250 Swing arm 232, 242 Spray nozzle 252 Gas nozzle 260 Shield mechanism 200 'Second substrate processing unit 243 Ultrasonic oscillator 300 Buffer / double-side cleaning unit 310 Double-side cleaning unit 312 Fixed pin 313, 314 Elevating pin 315, 316 Sprinkler 320 Buffer unit 400 Substrate transfer unit 500 Loader unit 600 Liquid crystal substrate 700, 800 Stocker

Claims (4)

[Claims] 1. A rotor for horizontally supporting and rotating a substrate to be processed, and processing from above on a whole or at least a plurality of locations on a surface of the substrate rotated by the rotor in a direction along at least a radius line of a rotating circle. A processing liquid ejecting unit for injecting a liquid. 2. The substrate processing apparatus according to claim 1, wherein the processing liquid ejecting unit has a swing arm that pivots around an outer peripheral side of the rotor, and a spray nozzle that is attached downward at a plurality of longitudinal positions of the swing arm. unit. 3. The swing arm according to claim 2, wherein the swing arms are arranged substantially symmetrically at two positions sandwiching the rotation center of the rotor, and each has a length extending from the outer peripheral side of the rotor to the rotation center of the rotor. Substrate processing unit. 4. An omnidirectional substrate transfer unit for transferring a substrate around the substrate, and a plurality of substrate processing units disposed around the substrate transfer unit, wherein at least one of the plurality of substrate processing units is provided. A wet processing apparatus comprising the substrate processing unit according to claim 1.