JPH11259133A5 - - Google Patents

Info

Publication number
JPH11259133A5
JPH11259133A5 JP1998062708A JP6270898A JPH11259133A5 JP H11259133 A5 JPH11259133 A5 JP H11259133A5 JP 1998062708 A JP1998062708 A JP 1998062708A JP 6270898 A JP6270898 A JP 6270898A JP H11259133 A5 JPH11259133 A5 JP H11259133A5
Authority
JP
Japan
Prior art keywords
piezoelectric
driving unit
axis
piezoelectric driving
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998062708A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11259133A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10062708A priority Critical patent/JPH11259133A/ja
Priority claimed from JP10062708A external-priority patent/JPH11259133A/ja
Priority to US09/265,184 priority patent/US6437343B1/en
Publication of JPH11259133A publication Critical patent/JPH11259133A/ja
Publication of JPH11259133A5 publication Critical patent/JPH11259133A5/ja
Pending legal-status Critical Current

Links

JP10062708A 1998-03-13 1998-03-13 圧電微動機構 Pending JPH11259133A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10062708A JPH11259133A (ja) 1998-03-13 1998-03-13 圧電微動機構
US09/265,184 US6437343B1 (en) 1998-03-13 1999-03-09 Scanner system and piezoelectric micro-inching mechansim used in scanning probe microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10062708A JPH11259133A (ja) 1998-03-13 1998-03-13 圧電微動機構

Publications (2)

Publication Number Publication Date
JPH11259133A JPH11259133A (ja) 1999-09-24
JPH11259133A5 true JPH11259133A5 (enExample) 2005-08-11

Family

ID=13208100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062708A Pending JPH11259133A (ja) 1998-03-13 1998-03-13 圧電微動機構

Country Status (1)

Country Link
JP (1) JPH11259133A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8115367B2 (en) * 2007-11-26 2012-02-14 Sii Nanotechnology Inc. Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
JP5032359B2 (ja) * 2008-02-12 2012-09-26 エスアイアイ・ナノテクノロジー株式会社 円筒型圧電アクチュエータおよび圧電素子ならびにそれを用いた走査型プローブ顕微鏡
CN117484291B (zh) * 2023-12-29 2024-03-29 中北大学 一种超声振动辅助抛光装置

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