JPH11259133A - 圧電微動機構 - Google Patents

圧電微動機構

Info

Publication number
JPH11259133A
JPH11259133A JP10062708A JP6270898A JPH11259133A JP H11259133 A JPH11259133 A JP H11259133A JP 10062708 A JP10062708 A JP 10062708A JP 6270898 A JP6270898 A JP 6270898A JP H11259133 A JPH11259133 A JP H11259133A
Authority
JP
Japan
Prior art keywords
axis
piezoelectric
electrode
drive
movement mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10062708A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11259133A5 (enExample
Inventor
Masaya Okazaki
賢哉 岡咲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP10062708A priority Critical patent/JPH11259133A/ja
Priority to US09/265,184 priority patent/US6437343B1/en
Publication of JPH11259133A publication Critical patent/JPH11259133A/ja
Publication of JPH11259133A5 publication Critical patent/JPH11259133A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Control Of Position Or Direction (AREA)
JP10062708A 1998-03-13 1998-03-13 圧電微動機構 Pending JPH11259133A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10062708A JPH11259133A (ja) 1998-03-13 1998-03-13 圧電微動機構
US09/265,184 US6437343B1 (en) 1998-03-13 1999-03-09 Scanner system and piezoelectric micro-inching mechansim used in scanning probe microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10062708A JPH11259133A (ja) 1998-03-13 1998-03-13 圧電微動機構

Publications (2)

Publication Number Publication Date
JPH11259133A true JPH11259133A (ja) 1999-09-24
JPH11259133A5 JPH11259133A5 (enExample) 2005-08-11

Family

ID=13208100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062708A Pending JPH11259133A (ja) 1998-03-13 1998-03-13 圧電微動機構

Country Status (1)

Country Link
JP (1) JPH11259133A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8058780B2 (en) * 2008-02-12 2011-11-15 Sii Nanotechnology Inc. Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
US8115367B2 (en) * 2007-11-26 2012-02-14 Sii Nanotechnology Inc. Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
CN117484291A (zh) * 2023-12-29 2024-02-02 中北大学 一种超声振动辅助抛光装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8115367B2 (en) * 2007-11-26 2012-02-14 Sii Nanotechnology Inc. Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
US8058780B2 (en) * 2008-02-12 2011-11-15 Sii Nanotechnology Inc. Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
CN117484291A (zh) * 2023-12-29 2024-02-02 中北大学 一种超声振动辅助抛光装置
CN117484291B (zh) * 2023-12-29 2024-03-29 中北大学 一种超声振动辅助抛光装置

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