JPH11251779A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH11251779A
JPH11251779A JP10049417A JP4941798A JPH11251779A JP H11251779 A JPH11251779 A JP H11251779A JP 10049417 A JP10049417 A JP 10049417A JP 4941798 A JP4941798 A JP 4941798A JP H11251779 A JPH11251779 A JP H11251779A
Authority
JP
Japan
Prior art keywords
signal
wiring
amplitude
sub
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10049417A
Other languages
Japanese (ja)
Inventor
Takeshi Miyagi
武史 宮城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP10049417A priority Critical patent/JPH11251779A/en
Priority to US09/221,120 priority patent/US6344667B1/en
Publication of JPH11251779A publication Critical patent/JPH11251779A/en
Pending legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Waveguides (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce radiation of undesired electromagnetic wave without sacrifice of reliability by inputting a signal, obtained by inverting the input signal to a first signal wiring, to a second signal wiring and setting the amplitude of the inverted signal between specified times that of the input signal. SOLUTION: A first signal wiring (main wiring) 2 for transmitting a high speed signal, e.g. a clock signal, is formed on an insulating board 1 and a second signal wiring (sub-wiring) 3 is formed on the insulating board 1 along the main wiring 2. Furthermore, rear side of the insulating board 1 is connected with the ground potential through a ground layer. A signal, obtained by inverting the input signal to the first signal wiring 2, is inputted to the second signal wiring 3 and the amplitude of the inverted signal is set between 0.3-0.8 times that of the input signal. Radiation of undesired electromagnetic wave can thereby be reduced without sacrifice of reliability.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、配線基板などにお
ける不要電磁波の放射抑制を図った半導体装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device for suppressing emission of unnecessary electromagnetic waves from a wiring board or the like.

【0002】[0002]

【従来の技術】マルチメディアの発展に伴い、高速デー
タ処理やデータ通信の要求が増している。これらの要求
に対し、ハードウエア、ソフトウエアの両面で研究開発
が活発に行われ、著しい性能の向上がなされている。
2. Description of the Related Art With the development of multimedia, demands for high-speed data processing and data communication are increasing. In response to these demands, research and development are being actively conducted in both hardware and software, and remarkable performance improvements have been made.

【0003】特に、半導体技術の分野では、コンピュー
タの核となるマイクロプロセッサの高速化・高機能化や
メモリセルの高速化・大容量化が進み、安価なパーソナ
ルコンピュータでも高速なデータ処理やデータ通信が可
能となっている。
In particular, in the field of semiconductor technology, the speed and function of microprocessors, which are the core of computers, and the speed and capacity of memory cells are increasing, and high-speed data processing and data communication are possible even with inexpensive personal computers. Is possible.

【0004】ところがLSIの高速化・高機能化によ
り、電子機器から放射される不要電磁波も強度、周波数
とともに増加し、他の電子機器へ悪影響を与えるばかり
でなく、人体への影響も懸念されている。
[0004] However, as the speed and function of LSIs increase, unnecessary electromagnetic waves radiated from electronic devices also increase with intensity and frequency, not only adversely affecting other electronic devices, but also affecting the human body. I have.

【0005】不要電磁波の放射の多くは、配線基板にL
SIや受動部品などの電子部品類を搭載した回路基板
で、信号反射や配線間クロストーク、半導体素子のスイ
ッチングなどにより、信号配線や電源層とグランド層間
に誘起されるノイズが原因である。このノイズにより不
要電磁波が回路基板から放射され、さらに筐体の放熱用
穴などから機器外部に放射される。
[0005] Most of the unnecessary electromagnetic wave radiation
In circuit boards on which electronic components such as SI and passive components are mounted, noise induced between signal wiring, power supply layers, and ground layers due to signal reflection, crosstalk between wirings, switching of semiconductor elements, and the like is caused. Unnecessary electromagnetic waves are radiated from the circuit board due to this noise, and further radiated outside the device through heat dissipation holes or the like of the housing.

【0006】これらの不要電磁波の放射は、クロック信
号などの高速信号が伝搬する回路パターンが形成された
基板表面からの放射と、電源層とグランド層との間での
共振現象による基板側面からの放射に分けられる。
[0006] The radiation of these unnecessary electromagnetic waves is radiated from the substrate surface on which a circuit pattern in which a high-speed signal such as a clock signal propagates is formed, and from the side surface of the substrate due to a resonance phenomenon between the power supply layer and the ground layer. Divided into radiation.

【0007】電源層とグランド層との間での共振現象に
よる電磁波放射に関しては、回路実装学会第11回回路
実装技術講演大会講演論文集「プリント配線基板の電源
・グランド層に起因する不要輻射低減手法」に記載され
ているように、電源層の両面に絶縁層を介してグランド
層を形成することで抑制できる。
[0007] Regarding the electromagnetic wave radiation due to the resonance phenomenon between the power supply layer and the ground layer, see the proceedings of the 11th Circuit Packaging Technology Lecture Meeting of the Circuit Packaging Society of Japan, "Reduction of unnecessary radiation caused by the power supply / ground layer of the printed wiring board". As described in “Technique”, it can be suppressed by forming a ground layer on both sides of the power supply layer via an insulating layer.

【0008】一方、回路パターンが形成された基板表面
からの不要電磁波の放射は、例えば特開平8−2280
55号公報に記載されているように、回路パターン表面
上にソルダレジストを介して銅ペーストを塗布し、この
銅ペーストをグランドに接続してシールドする方法が知
られている。
On the other hand, radiation of unnecessary electromagnetic waves from the surface of a substrate on which a circuit pattern is formed is disclosed, for example, in Japanese Patent Laid-Open No.
As described in Japanese Patent Application Laid-Open No. 55-55, there is known a method in which a copper paste is applied on the surface of a circuit pattern via a solder resist, and the copper paste is connected to a ground for shielding.

【0009】また、特開平9−18099号公報に記載
されているように、信号配線をグランド配線で挟んで対
称に配置し、それぞれの信号配線から誘起される電磁波
を相互にキャンセルすることによって不要電磁波の発生
自体を防ぐ方法も知られている。
Further, as described in Japanese Patent Application Laid-Open No. 9-18099, the signal wiring is disposed symmetrically with the ground wiring interposed therebetween, and is unnecessary by mutually canceling out the electromagnetic waves induced from each signal wiring. There is also known a method of preventing the generation of electromagnetic waves.

【0010】しかしながら、これらの方法には信頼性、
性能の面で以下のような問題があった。すなわち、特開
平8−228055号公報に記載されている銅ペースト
によるシールド方法は、銅ペーストとソルダレジストの
密着力が弱いために剥離を生じ、信頼性上問題がある。
However, these methods have reliability,
There were the following problems in terms of performance. In other words, the shielding method using a copper paste described in Japanese Patent Application Laid-Open No. H8-228055 has a problem in reliability because peeling occurs due to weak adhesion between the copper paste and the solder resist.

【0011】一方、特開平9−18099号公報に記載
されている信号配線をグランド線で挟んで対称に配置
し、それぞれの信号配線から誘起される電磁波を相互に
キャンセル方法は、放射される電磁波の低減効果が10
%以下と小さく、性能上問題がある。
On the other hand, the method disclosed in Japanese Patent Application Laid-Open No. Hei 9-18099, in which signal wirings are arranged symmetrically with a ground line interposed therebetween, and the electromagnetic waves induced from the respective signal wirings are mutually canceled. 10 reduction effect
% Or less, and there is a problem in performance.

【0012】[0012]

【発明が解決しようとする課題】上述の如く、特開平8
−228055号公報や特開平9−18099号公報に
開示された、回路基板の信号配線から放射される不要電
磁波の抑制技術は、信頼性や性能の面で十分ではないと
いう問題があった。
SUMMARY OF THE INVENTION As described above, Japanese Patent Application Laid-Open
The technology for suppressing unnecessary electromagnetic waves radiated from the signal wiring of the circuit board disclosed in JP-A-228055 and JP-A-9-18099 has a problem that the reliability and performance are not sufficient.

【0013】本発明は、上記事情を考慮してなされたも
ので、その目的とするところは、信頼性の低下を招かず
に不要電磁波の放射の低減化を図れる半導体装置を提供
することにある。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a semiconductor device capable of reducing emission of unnecessary electromagnetic waves without lowering reliability. .

【0014】[0014]

【課題を解決するための手段】[構成]上記目的を達成
するために、本発明に係る半導体装置は、基板上に形成
された第1の信号配線と、前記基板上に前記第1の信号
配線の両側に沿って形成された1対の第2の信号配線と
を備え、前記第2の信号配線には前記第1の信号配線に
入力する入力信号の反転信号が入力され、かつ前記入力
信号の振幅をV1、前記反転信号の振幅をV2とした場
合に、0.3V1≦V2≦0.8V1の関係を満たすこ
とを特徴とする。
Means for Solving the Problems To achieve the above object, a semiconductor device according to the present invention comprises a first signal wiring formed on a substrate and a first signal wiring formed on the substrate. A pair of second signal wirings formed along both sides of the wiring, wherein an inverted signal of an input signal input to the first signal wiring is input to the second signal wiring; When the amplitude of the signal is V1 and the amplitude of the inverted signal is V2, the relationship of 0.3V1 ≦ V2 ≦ 0.8V1 is satisfied.

【0015】[作用]本発明者の研究によれば、基板上
に第1の信号配線およびその両側に沿って第2の信号配
線を形成し、さらに第2の信号配線に第1の信号配線に
入力する入力信号の反転信号を入力し、かつ反転信号の
振幅を入力信号の振幅の0.3倍以上0.8倍以下に設
定することにより、不要電磁波の放射を十分に抑制でき
ることが分かった。
According to the study of the present inventor, the first signal wiring and the second signal wiring are formed on the substrate along both sides thereof, and the first signal wiring is further formed on the second signal wiring. By inputting an inverted signal of the input signal to be input to the input signal and setting the amplitude of the inverted signal to be 0.3 times or more and 0.8 times or less the amplitude of the input signal, it can be understood that the emission of unnecessary electromagnetic waves can be sufficiently suppressed. Was.

【0016】また、このような不要電磁波の放射抑制技
術であれば、基本的には反転信号用の配線および信号源
の追加だけで済み、銅ペーストが不要であるので、特開
平8−228055号公報に記載されている銅ペースト
によるシールド方法とは異なり、銅ペーストとソルダレ
ジストとの剥離によって信頼性が低下するなどの問題も
ない。したがって、本発明によれば、信頼性の低下を招
かずに、不要電磁波の放射の低減化を図れる半導体装置
を実現できるようになる。
In addition, with such a technique for suppressing the emission of unnecessary electromagnetic waves, it is basically only necessary to add a wiring for an inverted signal and a signal source, and no copper paste is required. Unlike the shielding method using a copper paste described in the gazette, there is no problem that the reliability is reduced due to the peeling of the copper paste and the solder resist. Therefore, according to the present invention, it is possible to realize a semiconductor device capable of reducing unnecessary electromagnetic wave radiation without reducing reliability.

【0017】[0017]

【発明の実施の形態】以下、図面を参照しながら本発明
の実施の形態(以下、実施形態という)を説明する。 (第1の実施形態)図1は、本発明の第1の実施形態に
係る配線基板を示す断面図である。配線基板はプリント
配線基板などのように多層化されているのが一般的であ
るが、ここでは説明を容易にするために、マイクロスト
リップ線路構造の配線基板について説明する。
Embodiments of the present invention (hereinafter, referred to as embodiments) will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a sectional view showing a wiring board according to a first embodiment of the present invention. The wiring board is generally multilayered like a printed wiring board, but here, for ease of explanation, a wiring board having a microstrip line structure will be described.

【0018】図中1は、ガラスエポキシ材などの絶縁材
料からなる絶縁基板を示しており、この絶縁基板1上に
はクロック信号等の高速信号が伝搬する第1の信号配線
( 以下、メイン配線という) 2が形成されている。ま
た、絶縁基板1上にはメイン配線2の両側に沿って1対
の第2の信号配線( 以下、サブ配線という) 3が形成さ
れている。そして、絶縁基板1の裏面にはグランド層を
介して接地電位に繋がっている。
In FIG. 1, reference numeral 1 denotes an insulating substrate made of an insulating material such as a glass epoxy material, and a first signal wiring on which a high-speed signal such as a clock signal propagates.
(Hereinafter referred to as main wiring) 2 are formed. A pair of second signal wirings (hereinafter referred to as sub-wirings) 3 are formed on the insulating substrate 1 along both sides of the main wiring 2. The back surface of the insulating substrate 1 is connected to a ground potential via a ground layer.

【0019】ここで、一般的な高速信号伝送方式とし
て、メイン配線の片側に高速信号の反転信号が伝搬する
サブ配線を形成する方法があるが、本実施形態ではメイ
ン配線2の両側にサブ配線3を形成している。
Here, as a general high-speed signal transmission method, there is a method of forming a sub-wiring on one side of the main wiring through which an inverted signal of the high-speed signal propagates. In the present embodiment, a sub-wiring is provided on both sides of the main wiring 2. 3 is formed.

【0020】これはメイン配線2の両側にサブ配線3を
形成し、メイン配線2に後述するような反転信号を印加
した場合には、メイン配線の片側に形成された1本のサ
ブ配線に反転信号を印加した場合よりも放射ノイズを1
0dBμV以上低くできるからである。
In this case, when a sub-wiring 3 is formed on both sides of the main wiring 2 and an inversion signal to be described later is applied to the main wiring 2, the sub-wiring 3 is formed on one side of the main wiring. Radiation noise is 1 less than when a signal is applied.
This is because it can be reduced by 0 dBμV or more.

【0021】本実施形態では、図2に示すように、メイ
ン配線2に印加する高速信号と位相が180度ずれ、か
つ電圧振幅が上記高速信号の電圧振幅V1の0.3以上
0.8以下の反転信号をサブ配線3に印加する。
In this embodiment, as shown in FIG. 2, the phase of the high-speed signal applied to the main wiring 2 is shifted by 180 degrees, and the voltage amplitude is 0.3 or more and 0.8 or less of the voltage amplitude V1 of the high-speed signal. Is applied to the sub-wiring 3.

【0022】なお、上述したメイン配線の片側に形成さ
れた1本のサブ配線に反転信号を印加する方式では、高
速信号と位相が180度ずれた反転信号を印加するがそ
の振幅は高速信号と同じである。
In the above-described method of applying an inverted signal to one sub-wiring formed on one side of the main wiring, an inverted signal whose phase is shifted by 180 degrees from that of the high-speed signal is applied. Is the same.

【0023】図3には、メイン配線2の配線幅が125
μm、サブ配線3の配線幅が125μm、250μm、
375μm、500μmの場合のそれぞれについて、メ
イン配線2に印加する高速信号の電圧振幅を5Vとし、
サブ配線3に印加する反転信号の電圧振幅( 以下、反転
信号振幅という) を0.0〜6.0Vの範囲で変化させ
た場合の実測結果を示す。
In FIG. 3, the wiring width of the main wiring 2 is 125
μm, the wiring width of the sub wiring 3 is 125 μm, 250 μm,
For each of 375 μm and 500 μm, the voltage amplitude of the high-speed signal applied to the main wiring 2 is 5 V,
The measurement results when the voltage amplitude of the inverted signal applied to the sub-wiring 3 (hereinafter referred to as the inverted signal amplitude) is changed in the range of 0.0 to 6.0 V are shown.

【0024】図3から、放射ノイズレベルはどの配線幅
においても最初は反転信号振幅の増加に伴って低下し、
そして反転信号振幅がある値を超えると今度は反転信号
振幅の増加に伴って増加することが分かる。すなわち、
図3から、放射ノイズレベルは反転信号振幅に対して極
小値を持つことが分かる。
From FIG. 3, it can be seen that the radiation noise level initially decreases with increasing inversion signal amplitude for any wiring width,
It can be seen that when the inverted signal amplitude exceeds a certain value, the inverted signal amplitude increases with the increase of the inverted signal amplitude. That is,
From FIG. 3, it can be seen that the radiation noise level has a minimum value with respect to the inverted signal amplitude.

【0025】そして、どの配線幅についても極小値が得
られるためには、メイン配線2に印加する高速信号の電
圧振幅の0.3以上0.8以下の反転信号をサブ配線3
に印加すれば良いことが分かる。
In order to obtain a minimum value for any wiring width, an inverted signal having a voltage amplitude of 0.3 or more and 0.8 or less of the high-speed signal applied to the main wiring 2 is applied to the sub wiring 3.
It can be seen that it is sufficient to apply

【0026】また、最も効果のあるケースでは、つまり
配線幅を125μmとし、反転信号振幅を3.5Vとし
た場合には、ノイズレベルを30dBμV以上低減でき
ることが分かる。
Also, in the most effective case, that is, when the wiring width is 125 μm and the inverted signal amplitude is 3.5 V, the noise level can be reduced by 30 dB μV or more.

【0027】このように本実施形態によれば、メイン配
線2の両側に沿ってサブ配線3を形成し、さらにサブ配
線3にメイン配線2に入力する入力信号の反転信号を入
力し、かつその反転信号の電圧振幅を入力信号の電圧振
幅の0.3倍以上0.8V以下に設定することにより、
不要電磁波の放射を十分に抑制できるようになる。
As described above, according to the present embodiment, the sub-wiring 3 is formed along both sides of the main wiring 2, and an inverted signal of the input signal input to the main wiring 2 is input to the sub-wiring 3. By setting the voltage amplitude of the inverted signal to be 0.3 times or more and 0.8 V or less of the voltage amplitude of the input signal,
The emission of unnecessary electromagnetic waves can be sufficiently suppressed.

【0028】しかも、このような不要電磁波の放射抑制
技術であれば、基本的にはサブ配線3および反転信号源
の追加だけ済み、銅ペーストを必要とする従来技術(特
開平8−228055号公報)の場合とは異なり、銅ペ
ーストとソルダレジストとの剥離によって信頼性が低下
するなどの問題もない。また、反転信号振幅は高速信号
の振幅よりも小さくて済むので、消費電力の増加も抑制
できるようになる。
In addition, in the case of such a technique for suppressing the emission of unnecessary electromagnetic waves, basically only the addition of the sub-wiring 3 and the inversion signal source is required, and a conventional technique requiring copper paste (Japanese Patent Laid-Open No. Hei 8-228505). Unlike the case (2), there is no problem that the reliability is lowered due to the peeling of the copper paste and the solder resist. Further, since the inverted signal amplitude may be smaller than the amplitude of the high-speed signal, an increase in power consumption can be suppressed.

【0029】かくして本実施形態によれば、信頼性の低
下や消費電力の増加を招かずに、人体や電子機器に多大
な影響を与える不要電磁波の放射の低減化を図れる配線
基板を実現でき、これにより近年世界的に問題となって
いる環境電磁問題に貢献することができるようになる。 (第2の実施形態)図4は、本発明の第2の実施形態に
係る配線基板を示す断面図である。ここでは本発明を一
般的なプリント配線基板に適用した例について説明す
る。なお、図1と対応する部分には図1と同一符号を付
してあり、詳細な説明は省略する。
Thus, according to the present embodiment, it is possible to realize a wiring board capable of reducing the radiation of unnecessary electromagnetic waves that have a great effect on the human body and electronic equipment without causing a decrease in reliability and an increase in power consumption. As a result, it is possible to contribute to environmental electromagnetic problems, which have recently become a problem worldwide. (Second Embodiment) FIG. 4 is a sectional view showing a wiring board according to a second embodiment of the present invention. Here, an example in which the present invention is applied to a general printed wiring board will be described. 1 are given the same reference numerals as in FIG. 1, and detailed description is omitted.

【0030】絶縁基板1上には第1の実施形態と同様に
メイン配線2およびサブ配線3が形成されている。ま
た、絶縁基板1上にはグランド配線4がサブ配線3の外
側に形成されている。絶縁基板1の内部にはグランド層
5および電源層6が形成されている。
The main wiring 2 and the sub wiring 3 are formed on the insulating substrate 1 as in the first embodiment. The ground wiring 4 is formed on the insulating substrate 1 outside the sub wiring 3. A ground layer 5 and a power supply layer 6 are formed inside the insulating substrate 1.

【0031】なお、図中、7はメイン配線2(例えばク
ロック信号配線)以外の他のメイン配線、つまり不要電
磁波の放射抑制の対象となっていない信号配線を示して
いる。
In the drawing, reference numeral 7 denotes a main wiring other than the main wiring 2 (for example, a clock signal wiring), that is, a signal wiring which is not a target of suppressing unnecessary electromagnetic wave radiation.

【0032】このように多くの信号配線が形成される場
合でも、メイン配線2の両側に反転信号が伝搬するサブ
配線3を形成するだけ良いが、好ましくは本実施形態の
ようにサブ配線2と隣接する他のメイン配線(信号配
線)2との間にグランド配線4を形成すれば、つまりグ
ランド電位などの定電圧に固定された配線を形成すれ
ば、隣接メイン配線との相互干渉が抑制され、回路の誤
動作を防止することができるようになる。
Even when a large number of signal wirings are formed as described above, it is only necessary to form the sub-wirings 3 on both sides of the main wirings 2 through which the inverted signal propagates. If the ground wiring 4 is formed between the adjacent main wiring (signal wiring) 2, that is, if a wiring fixed to a constant voltage such as the ground potential is formed, mutual interference with the adjacent main wiring is suppressed. Thus, malfunction of the circuit can be prevented.

【0033】本実施形態でも、第1の実施形と同様に、
サブ配線3に反転信号を入力し、かつ反転信号の振幅を
入力信号の電圧振幅の0.3倍以上0.8V以下に設定
することにより、不要電磁波を十分に抑制できるように
なり、また信頼性が低下するなどの問題も起こらない。
In this embodiment, as in the first embodiment,
By inputting the inverted signal to the sub-wiring 3 and setting the amplitude of the inverted signal to 0.3 times or more and 0.8 V or less of the voltage amplitude of the input signal, unnecessary electromagnetic waves can be sufficiently suppressed, and the reliability can be improved. There is no problem such as deterioration in performance.

【0034】なお、多くのプリント基板は、図4に示し
たように、グランド層5および電源層6が絶縁基板1内
に形成され、メイン配線2等が基板表面に形成された構
造になっているが、本発明はメイン配線2等が絶縁基板
1内に形成されている場合でも有効である。
As shown in FIG. 4, many printed circuit boards have a structure in which a ground layer 5 and a power supply layer 6 are formed in an insulating substrate 1, and main wirings 2 and the like are formed on the surface of the substrate. However, the present invention is effective even when the main wiring 2 and the like are formed in the insulating substrate 1.

【0035】なお、本発明は種々の基板に適用でき、上
記実施形態で述べた基板以外にも、例えばマルチチップ
モジュール用の薄膜基板や厚膜多層配線基板、ビルドア
ップ型プリント基板、セラミック多層配線基板、樹脂基
板またはセラミック基板で構成される半導体パッケージ
などの基板にも適用できる。さらに基板の種類や搭載す
る半導体などの種類によって、最適化して使用すること
もできる。その他、本発明の要旨を逸脱しない範囲で、
種々変形して実施できる。
The present invention can be applied to various substrates. In addition to the substrates described in the above embodiment, for example, a thin film substrate for a multi-chip module, a thick film multilayer wiring substrate, a build-up type printed circuit board, a ceramic multilayer wiring The present invention can also be applied to a substrate such as a semiconductor package including a substrate, a resin substrate, or a ceramic substrate. Further, it can be optimized and used depending on the type of the substrate and the type of the semiconductor to be mounted. In addition, without departing from the gist of the present invention,
Various modifications can be made.

【0036】[0036]

【発明の効果】以上詳説したように本発明によれば、基
板上に第1の信号配線およびその両側に沿って第2の信
号配線を形成し、さらに第2の信号配線に第1の信号配
線に入力する入力信号の反転信号を入力し、かつ反転信
号の振幅を入力信号の振幅の0.3倍以上0.8以下に
設定することにより、信頼性の低下を招かずに、不要電
磁波の放射の低減化を図れる半導体装置を実現できるよ
うになる。
As described above in detail, according to the present invention, a first signal wiring and a second signal wiring are formed along both sides of the first signal wiring on a substrate, and the first signal wiring is further formed on the second signal wiring. By inputting the inverted signal of the input signal input to the wiring and setting the amplitude of the inverted signal to be 0.3 times or more and 0.8 or less of the amplitude of the input signal, unnecessary electromagnetic waves can be obtained without lowering the reliability. It is possible to realize a semiconductor device capable of reducing the emission of light.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施形態に係る配線基板を示す
断面図
FIG. 1 is a sectional view showing a wiring board according to a first embodiment of the present invention;

【図2】図1の配線基板のメイン配線およびサブ配線3
に印加する電圧信号の波形を示す図
2 shows a main wiring and a sub wiring 3 of the wiring board of FIG. 1;
Diagram showing the waveform of the voltage signal applied to

【図3】図1の配線基板のメイン配線の放射ノイズとサ
ブ配線に印加する反転信号の電圧振幅との関係を示す特
性図
FIG. 3 is a characteristic diagram showing a relationship between radiation noise of a main wiring of the wiring board of FIG. 1 and voltage amplitude of an inverted signal applied to a sub wiring.

【図4】本発明の第2の実施形態に係る配線基板を示す
断面図
FIG. 4 is a sectional view showing a wiring board according to a second embodiment of the present invention;

【符号の説明】[Explanation of symbols]

1…絶縁基板 2…メイン配線(第1の信号配線) 3…サブ配線(第2の信号配線) 4…グランド配線 5…グランド層 6…電源層 7…メイン配線 DESCRIPTION OF SYMBOLS 1 ... Insulating board 2 ... Main wiring (1st signal wiring) 3 ... Sub wiring (2nd signal wiring) 4 ... Ground wiring 5 ... Ground layer 6 ... Power supply layer 7 ... Main wiring

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】基板上に形成された第1の信号配線と、 前記基板上に前記第1の信号配線の両側に沿って形成さ
れた1対の第2の信号配線とを具備してなり、 前記第2の信号配線には前記第1の信号配線に入力され
る入力信号の反転信号が入力され、かつ前記入力信号の
振幅をV1、前記反転信号の振幅をV2とした場合に、
0.3V1≦V2≦0.8V1の関係を満たすことを特
徴とする半導体装置。
A first signal line formed on a substrate; and a pair of second signal lines formed on the substrate along both sides of the first signal line. When an inverted signal of the input signal input to the first signal wiring is input to the second signal wiring, and the amplitude of the input signal is V1 and the amplitude of the inverted signal is V2,
A semiconductor device satisfying a relationship of 0.3V1 ≦ V2 ≦ 0.8V1.
JP10049417A 1998-03-02 1998-03-02 Semiconductor device Pending JPH11251779A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10049417A JPH11251779A (en) 1998-03-02 1998-03-02 Semiconductor device
US09/221,120 US6344667B1 (en) 1998-03-02 1998-12-28 Wiring board with reduced radiation of undesired electromagnetic waves

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10049417A JPH11251779A (en) 1998-03-02 1998-03-02 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH11251779A true JPH11251779A (en) 1999-09-17

Family

ID=12830505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10049417A Pending JPH11251779A (en) 1998-03-02 1998-03-02 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH11251779A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7372438B2 (en) 2003-11-19 2008-05-13 Samsung Sdi Co., Ltd. Electroluminescent display
JP2009081378A (en) * 2007-09-27 2009-04-16 Nec Corp Signal transmission substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7372438B2 (en) 2003-11-19 2008-05-13 Samsung Sdi Co., Ltd. Electroluminescent display
JP2009081378A (en) * 2007-09-27 2009-04-16 Nec Corp Signal transmission substrate

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