JPH11246110A - Film stripping device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely strip a film stretched on a base plate by a pressing roller of a film stripping device. SOLUTION: In this stripping device, the front edge of a film 20 is pressed by a pressing roller 48A and reciprocated in the direction of a base plate width in a state that a base plate 22 carried in from the base plate inlet side in adhered by suction cups 36. A bearer comprising a rubber sheet and a metal sheet is provided at the side of the suction cups 36, facing to the pressing roller 48, and when the pressing roller 48 is inclined, the metal sheet is then inclined, thereby surely supporting the base plate 22 and the film 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for peeling a protective film attached to a substrate exemplified by a substrate for a printed wiring board, a substrate for a liquid crystal display panel, a substrate for a plasma display and the like.

[0002]

2. Description of the Related Art A printed wiring board as described above is manufactured by the following steps.

First, a laminate comprising a photosensitive resin (photoresist) layer and a light-transmitting resin film (protective film) for protecting the conductive layer on a conductive layer provided on an insulating substrate is heated by a laminating roll. Crimp. Next, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent resin film.

Then, after the light-transmitting resin film is peeled off, the exposed photoresist layer is developed to form an etching mask pattern. Thereafter, unnecessary portions of the conductive layer are removed by etching, and a predetermined wiring is formed. A printed wiring board having a pattern is formed.

Usually, the thickness of the insulating substrate with a conductive layer is 0.0
6-5 mm, the thickness of the photosensitive resin layer is 5-50 μm, and the thickness of the translucent resin film is 15-80 μm.

Various film peeling apparatuses have been proposed for automatically peeling the protective film from the substrate in the process of manufacturing the printed wiring board.

In such a film peeling apparatus, when the film is automatically peeled from the substrate, first, the portion of the film leading edge where peeling is started is pressed obliquely up and down or hooked with a needle-like member. Or wake up.

For example, as disclosed in Japanese Patent Publication No. 6-3550, vibration of a rod of a vibrator is applied to an end of a laminated film composed of a photosensitive resin layer and a translucent resin film attached to a substrate. In some cases, a part of the light-transmitting resin film is floated from the photosensitive resin layer by applying and tapping. Further, for example, Japanese Patent Application Laid-Open No. 62-83974
As disclosed in Japanese Patent Application Laid-Open Publication No. H10-260, by moving the pressing roller along the film edge in a state where the protective film edge is sandwiched together with the substrate by a pressing roller (pressure wheel), the film edge is lifted. Some have been made.

In any case, after the leading edge of the film is floated, the film is flipped up from the trailing edge by blowing a gas such as compressed air, and the flipped-up film edge is sandwiched between rollers and belts. The film is completely peeled off and the film is carried out of the line while advancing the substrate.

In the film peeling method and apparatus disclosed in JP-A-62-83974, since the pressing roller traverses the entire width of the film along the leading end of the film, the processing speed for loosening the adhesion between the leading end of the film and the substrate is low. Also, since the film must be loosened by one traverse of the pressing roller, the pressing force of the film by the pressing roller increases, and therefore, the driving force of the pressing roller must be increased, and the apparatus must be further enlarged. In addition, there is a problem that the substrate is easily damaged.

Furthermore, since the air jet must be blown over the entire width of the film tip after the attachment to the film tip is loosened, the apparatus becomes large, the manufacturing cost increases, and the air pressure is reduced. There is a problem that it must be large and cannot be installed in a narrow space.

On the other hand, for example, Japanese Patent Application Laid-Open No. 7-1016
As disclosed in Japanese Patent Application Publication No. 23, the pressing roller is a knurled roller having irregularities on the outer periphery, and the same portion of the leading end of the film is repeatedly pressed by the knurling roller a plurality of times. In some cases, the tip can be started to be peeled from the substrate.

[0013]

Here, when the rotation center axis of the pressing roller is not in parallel with the substrate surface due to a manufacturing error of the pressing roller driving device, deformation of the rotating shaft during use, and the like. However, there is a problem that the knurled roller makes it impossible to lift the leading end of the film from the substrate.

This problem is particularly caused by a thin substrate (for example,
A laminate comprising a photosensitive resin layer having a thickness of 5 to 50 μm and a light-transmitting resin film having a thickness of 15 to 80 μm for protecting the photosensitive resin layer having a thickness of 0.06 to 0.1 mm. When the light-transmitting resin film was peeled off from the substrate with respect to the body to which the body had been adhered, it was noticeable and inconvenient.

In the case where the knurl roller is reciprocated in the film width direction, if the pressing marks on the leading end of the film by the ridges of the knurl roller overlap in the forward and backward passes of the knurl roller, the leading end of the film cannot be reliably peeled off. There was a problem that there is.

The present invention has been made in view of the above-mentioned conventional problems, and can reliably peel off the leading end of a film even when the rotation center axis of the pressing roller is inclined with respect to the substrate surface. It is an object to provide a film peeling device as described above.

Further, it is an object of the present invention to provide a film peeling device which can prevent the film pressing traces of the knurls on the outward path and the return path from being coincident with each other when the pressing roller including the knurl roller is reciprocated in the film width direction. With the goal.

[0018]

According to the present invention, there is provided a substrate restraining device capable of restraining a substrate on which a film is stuck on a surface, and capable of pressing an edge of the film on the substrate surface restrained by the substrate restraining device. At least one pressing roller, and the pressing roller, along the film edge,
A pressure roller driving device capable of driving the film edge in the film width direction while pressing the film edge, and forming a peeling start portion by floating the film edge from the substrate by driving the pressure roller. In the peeling device, the restraining device includes, at least, a portion of the substrate that is pressed by the pressing roller, and a pedestal that supports the substrate from the back surface against the pressing force.
At least a rigid supporting plane that contacts the back surface of the substrate, and an elastic supporting portion that elastically inclines the rigid supporting plane from the opposite side of the pressing roller in accordance with the inclination of the rotation axis of the pressing roller. The above-mentioned object is achieved by comprising.

The elastic support portion of the pedestal is made of an elastic resin sheet attached to the substrate restraining device, and the hard support plane is made of a thin metal plate adhered to the surface of the elastic resin sheet. Is also good.

The elastic support portion of the pedestal is formed of an elastic resin sheet attached to the substrate restraining device, and the hard support plane is formed of a hard resin layer provided on a surface of the elastic resin sheet. May be.

Further, the substrate restraining device is a suction plate for sucking and holding the back surface of the substrate by a negative pressure, and the pedestal is provided in a concave portion of the suction plate, and the hard support plane is provided on the suction plate. You may arrange | position so that it may become substantially flush with a general surface.

A gap may be provided between the outer peripheral surface of the pedestal and the inner peripheral surface of the concave portion facing the pedestal to allow the rigid support plane to be elastically inclined.

The pressing roller is a knurled roller having a knurled knurled ridge, and moves axially within a certain range with respect to at least one of its rotation center axis and a bearing supporting the rotation center axis. It may be free.

The pressing roller is a knurl roller, and the pressing roller driving device drives the pressing roller at least one reciprocation in the film width direction in one peeling step of the film edge, and In the forward path and the return path, at least one of the end of the forward path and the start end of the return path,
The pressing roller may be separated from the film.

Further, a gas jet nozzle for blowing up a compressed gas toward the peeling start point of the film edge to turn up the film edge may be provided.

According to the present invention, even if the pressing roller is tilted, the elastic support portion of the cradle can be elastically tilted, so that the substrate can be tilted by the rigid support plane supported by the elastic support portion. Correspondingly backed up,
Film peeling can be reliably started.

[0027]

Embodiments of the present invention will be described below in detail with reference to the drawings.

As shown in FIG. 1, a film peeling device 10 according to the present invention is provided with a substrate 22 (see FIG. 2) having a film 20 adhered to a lower surface, which is fed in from the left substrate loading side in FIG. Then, the film 20 is peeled off, and the substrate 22 after the film peeling is carried out from the substrate carrying-out side on the right side in the figure.

The film peeling device 10 includes a substrate transport device 2 in which a plurality of transport rollers 24 are horizontally arranged in parallel.
6 is provided along the substrate transfer surface 26 </ b> A formed by the upper end of the transfer roller 24 until the entire substrate 22 loaded from the left substrate transfer end in FIG. 1 enters the film peeling device 10. It can be transported.

Of the transport rollers constituting the substrate transport device 26, two transport rollers 25 at the forefront in the substrate transport direction
Is moved up and down between a transfer position (a two-dot chain line position in FIG. 4) forming the substrate transfer surface 26A by the cylinder device 28 and a standby position which is greatly lowered from the transfer position as shown by a solid line in FIG. It is free.

A plurality of push-up members 30 are provided at a lower position of the substrate transfer device 26 to push up the substrate 22 on the substrate transfer surface 26A by projecting upward from a gap between the transfer rollers 24. A lifting device 32 is provided.

As shown in FIG. 1, the push-up device 32 is normally in a standby position in which the tip of the push-up member 30 is located below the substrate transfer surface 26A, and pushes up the substrate 22 by the cylinder device 34. It can be driven into position. Reference numeral 34A in FIG. 1 indicates a guide shaft for guiding the lifting member 30 in the vertical direction.

Above the substrate transfer device 26, there is disposed a suction plate 36 which can be reciprocated horizontally.

As shown in FIG. 3, the suction disk 36 has a large number of suction holes 36 to which a negative pressure is applied.
A is provided in the plane direction (see FIG. 6), so that the upper surface (back surface) of the substrate 22 pushed up from below can be sucked over the entire surface.

As shown in the enlarged view of FIG. 4, in the suction holes 36A, negative pressure pipes 36B penetrate through the suction plate 36 and project from the side opposite to the suction surface. A suction boot 36C made of bellows-like rubber or the like is attached to the tip of 36B.

The outer diameter of the suction boot 36C is slightly smaller than the inner diameter of the suction hole 36A, and the tip (the lower end in the figure) is slightly (1 mm) from the suction surface (the lower surface in the figure) of the suction disk 36. Approximately) it is projected so that it can surely come into contact with the upper surface of the substrate 22 and adsorb it. A negative pressure is applied to the negative pressure pipe 36B from a negative pressure source (not shown).

Further, the suction disk 36 is horizontally and in the transport direction,
From a region above the substrate transfer device 26, along a guide bar 38 arranged in the substrate transfer direction over the outside thereof,
It is slidably guided through the guide shoe 38A, and can be reciprocated along the guide bar 38 by the feed screw mechanism 40.

The feed screw mechanism 40 has a motor 40A, a screw feed screw 40B driven by the motor 40A, and a nut portion 40C screwed into the feed screw 40B and advanced and retracted by its rotation. The portion 40C supports the suction disk 36. Suction cup 3 with feed screw mechanism 40
As shown in FIG. 1, the movement range of the position 6 is a position directly above the substrate transfer device 26 in the film peeling device 10,
In addition, the distance between the suction board 36 and the position where the suction board 36 is carried out of the film peeling apparatus 10 is set.

The height of the suction plate 36, that is, the substrate transfer surface 2
The distance from 6A is set such that when the substrate 22 is pushed up by the pushing member 30, the upper surface of the substrate 22 substantially coincides with the lower surface of the suction plate 36.

In the vicinity of the leading end of the substrate transfer device 26, there is provided a peeling start device 48 for peeling off and turning over the leading end of the film 20 at the leading end in the transfer direction with the substrate 22 being sucked by the suction plate 36. ing.

As shown in FIG. 2, the film 20 is attached to the lower surface of the substrate 22 so that the leading end is located slightly behind the leading end of the substrate 22 in the transport direction. .

As shown in FIG. 5 in an enlarged manner, the peeling starter 48 is provided with the substrate 22 adsorbed on the suction disk 36.
And a pressure roller 48A that can freely move up and down to and away from the leading end of the film 20 and that can reciprocate slightly (about 30 mm) in the width direction of the substrate (film) (perpendicular to the paper surface in FIG. 1). By slightly reciprocating in the width direction of the substrate while pressing the pressing roller 48A against the leading end of the film 20, the leading end of the film 20 is raised from the lower surface of the substrate 22.

The peeling starter 48 blows a compressed gas such as compressed air between the front end of the film 20 lifted from the lower surface of the substrate 22 and the lower surface of the substrate 22 by the pressing roller 48A, so that the front end of the film 20 is A gas ejection nozzle 48B that is peeled off and turned down is provided.

The pressing roller 48A is separated by a linear guide 48D into a peeling position where it is pressed against the lower surface of the front end of the substrate 22 in a state of being sucked by the suction board 36, as shown by a solid line in FIG. It can be moved up and down between the substrate transfer surface 26A and a standby position below. Reference numeral 48E in FIGS. 1 and 3 denotes a slide table for slightly reciprocating the pressing roller 48A in the substrate width direction.
An air cylinder for reciprocating the pressing roller 48A is not shown. The transport roller 25, the slide table 48E, and the gas ejection nozzle 48B can be slightly moved up and down as a whole by an air cylinder 48C.

When the pressing roller 48A in the peeling start device 48 is pressed against the lower surface of the substrate 22 in a state where the substrate 22 is being sucked by the suction disk 36, the leading end of the substrate 22 and the film 20 are interposed between the pressing roller 48A and the pressing roller 48A. The receiving stand 14 is disposed at a position where the receiving table 14 is sandwiched from the suction board 36 side.

As shown in FIG. 6, the receiving table 14 is provided at the tip (right end in FIGS. 1 and 5) of the suction disk 36.
And a thick plate-shaped member arranged in a rectangular recess 37 formed at the center of the film 22 in the width direction.

More specifically, as shown in an enlarged manner in FIG. 3, the receiving base 14 is provided with a rubber sheet 16 adhered to the upper surface of the concave portion 37 and attached to the lower surface of the rubber sheet 16. And a thin metal plate 18.

In this case, the rubber sheet used is JIS
Has a rubber hardness of 50 degrees. When a rubber sheet is used in the practice of the present invention, JIS
It is preferable to use a rubber having a rubber hardness of 50 to 70 degrees.

The thin metal plate 18 is made of, for example, stainless steel, copper, etc.
Is made flush with other general lower surfaces.

A gap 15 is formed between the receiving base 14 and the inner peripheral surface 14A constituting the left end face of the recess 37 in FIG. 3, and the rubber sheet 16 is pressed through the substrate 22. When pressed and deformed by the roller 48A, it does not interfere with the inner peripheral surface 14A together with the thin metal plate 18.

As shown in FIG. 6, the suction holes 36A
Are arranged more densely than the other parts along the tip of the suction disk 36 so that the tip of the substrate 22 can be reliably sucked and held.

As shown in FIG. 3, the pressing roller 48A has a beveled knurled ridge 49 and is rotatably supported by a rotation center shaft 50. The rotation center shaft 50 is mounted between a pair of bearings 50A supported by the linear guide 48D.

The rotation center shaft 5 of the pressing roller 48A
The thickness in the zero direction is made smaller than the distance between the opposed inner surfaces of the pair of bearing portions 50A, so that the pressing roller 48A can move within a certain range along the rotation center axis 50. .

Here, the position of the pressing roller 48A in the substrate transfer direction is such that when the substrate 22 is transferred by the substrate transfer device 26 and sucked by the suction plate 36, the leading edge of the film 20 is moved by the pressing roller 48A. It is set in advance so as to substantially coincide with the axial center position of 48A.

As shown in FIG. 5 in an enlarged manner, a guide plate 52 having a function as a push-up member in the push-up device 32 and a guide plate 52 having a function as the push-up member 30 are moved up and down freely. Roller 25
Are arranged in a vertical direction at a position adjacent to.

The substrate transfer device 26 and the lifting device 3
2, the leading end of the film 20 protruding from the guide plate 52 and hanging is captured below the push-up member 30, and the film 20 is pulled downward, so that the film 20 is placed on the substrate 2.
There is provided a tensile peeling device 54 for peeling from the second.

The pull-off device 54 is pivotally supported by the push-up device 32 at the base end thereof by a pin 56A (a rocking drive source is not shown). As shown in FIG. A swing arm 56 which is swingable in a range of about 100 ° in a clockwise direction, and a tip of the film 20 which is attached near the tip of the swing arm 56 and protrudes from the lower end of the guide plate 52 and hangs down. And a capturing device 58 that can be captured and released freely.

The catching device 58 has a receiving plate 58A continuously and vertically arranged at the lower end of the guide plate 52, and a free end disposed at a lower position and an outer position of the receiving plate 58A. The air cylinder 58D includes a catch lever 58C swingably supported by a pin 58B and an air cylinder 58D. The air cylinder 58D receives the catch lever 58C when protruding, and the tip thereof receives the lower end of the film 20. In FIG. 4, the film 2A is swung counterclockwise so as to be sandwiched between the plate 58A and the catch lever 58C is swung clockwise in FIG.
0 is released.

As shown in FIG. 6, the negative pressure applied to the substrate transfer device 26, the cylinder device 28, the cylinder device 34 of the push-up device 32, the motor 40A, and the suction disk 36 is turned on and off.
A control device 60 for controlling the off / peeling start device 48 and the tensile peeling device 54 is provided.

Here, the control device 60 operates so that the pressing roller 48A reciprocates in the width direction of the pedestal 14 in the width direction of the film 20 and the substrate 22 while pressing the edge of the film 20 from below. The pressing roller 48A is separated from the film 20 when the forward movement is completed, and is further moved slightly in the film width direction, and then presses the film 20 again to perform the backward movement. The air cylinder 48C and the slide table 48E are controlled.

Next, the step of peeling the film 20 from the substrate 22 by the film peeling apparatus 10 will be described.

First, the substrate 22 having the film 20 stretched on its lower surface is loaded horizontally from the entry side (the left side in FIG. 1) of the substrate transfer device 26. When the leading end of the film 20 reaches the position of the pressing roller 48A of the peeling start device 48, the transport is stopped.

At this time, the transport roller 25 which can be moved up and down is moved by a cylinder device 34 in FIG.
As shown by the dashed line, the substrate 22 is pushed up to the position of the substrate transfer surface 26A to prevent the tip of the substrate 22 from sagging.

Next, the substrate 22 stopped at the predetermined position is pushed upward by the pushing device 32 and the transport roller 25 until it comes into contact with the suction plate 36 set at a position directly above the substrate 22.

If a negative pressure is applied to the suction disk 36 in advance, when the substrate 22 approaches the lower surface of the suction disk 36,
By sucking up and holding the substrate 22 by the negative pressure, the substrate 20 is not excessively pressed against the suction disk 36 and is not damaged.

Next, the lifting device 32 is lowered to the position shown in FIGS. The transport roller 25 is
The substrate 22 is kept pressed. Next, the pressing roller 48A of the peeling starter 48 is raised to a position where the pressing roller 48A is pressed against the film 20 adhered to the lower surface of the substrate 22, and then reciprocated in the substrate width direction. At this time, the substrate 2
There is no rattling of 2.

Accordingly, the leading end of the film 20 is slightly peeled off from the substrate 22 by the pressing roller 48A, and compressed air is blown from the gas ejection nozzle 48B, and the compressed air enters the gap between the film 20 and the substrate 22. As a result, the film 20 is turned down.

At this time, even when the rotation center axis 50 of the pressing roller 48A and the substrate 22 are not parallel, the rubber sheet 16 constituting the receiving table 14 that sandwiches the substrate 22 and the film 20 from the opposite side of the pressing roller 48A is FIG.
As shown in (A) and (B), since the substrate 22 is deformed, the substrate 22 is always parallel to the pressing roller 48A.

The metal thin plate 18 of the receiving base 14, which is the receiving surface of the substrate 22, is inclined corresponding to the inclination of the pressing roller 48A as a whole, but forms a rigid support plane unlike the rubber sheet 16. Therefore, the substrate 22 and the film 20
Does not escape toward the cradle 14 when pressed by the pressing roller 48A. Therefore, the edge of the film 20 can be reliably pressed by the pressing roller 48A.

Further, since the pressing roller 48A has the knurled ridges 49 having a beveled shape, the edge of the film 20 is easily peeled off from the substrate 22. Further, the pressing roller 48A is
The beveled knurled ridges 49 make the film 2
When pressing the zero edge, a component force that moves in the axial direction of the rotation center shaft 50 is generated. The component force in the direction of the rotation center axis 50 acts in opposite directions on the outward path and the return path when the pressing roller 48A reciprocates. At this time, the pressing roller 4
As shown in FIG. 3, a gap in the axial direction of the rotation center shaft 50 is provided between the bearing 8A and the bearing 50A.
As shown in (A) and (B), it reciprocates in a state deviated in the left-right direction (axial direction).

Therefore, even if the position of the edge of the film 20 is slightly shifted in the axial direction of the rotation center shaft 50, the film 20 can be reliably separated by the movement of the pressing roller 48A.

At the same time, the pressing roller 48A has a different axial position along the rotation center axis 50 between the forward path and the backward path.
The upper impression causes a shift in the pitch direction of the knurled mountain portion 49 between the forward path and the backward path.

For this reason, since the knurled ridges 49 do not press the film 20 at the same position when the pressing roller 48A reciprocates, the edge of the film 20 can be more reliably peeled off.

Further, as described above, the control device 60 causes the pressing roller 48A to move the film 2 after the forward movement is completed.
0, is slightly moved in the width direction of the film 20, and then is pressed against the film 20 again to move in the return path. If the pitch is set so as to deviate from the pitch of the knurled ridges 49, the tip of the knurled ridges 49 does not press the same position of the film 20 during the reciprocating movement.

The deviation of the pitch between the outward path and the return path of the impression by the knurled peak 49 is the deviation of the pressing roller 48A in the axial direction and the deviation of the pressing roller 48A in the film width direction controlled by the control device 60. It may be formed by one or both.

After the peeling operation of the leading end of the film 20 is completed, the pressing roller 48A and the transport roller 25 are retracted below the substrate transport surface 26A.

The gas ejection nozzle 48B descends slightly, ejects compressed air again, and completely turns down the portion that could not be turned down by the first ejection.

The leading end (lower end) of the film 20 peeled off from the substrate 22 hangs vertically along the guide plate 52. At this time, when the guide plate 52 is made of metal, the film 20 adheres to the guide plate 52 due to static electricity of the film 20 itself.

The leading end of the film 20 hanging down from the lower end of the guide plate 52 reaches a receiving plate 58A that is vertically continuous below the guide plate 52.

In this state, as shown in FIG.
When the catch lever 58C, which has been swung clockwise, is swung counterclockwise by the air cylinder 58D, the tip of the hanging film 20 is caught (held) between the catch lever 58C and the receiving plate 58A. .

Next, as shown in FIG. 11, while holding the leading end of the film 20, the swing arm 56 is swung clockwise in FIG. 40, outward (FIGS. 1, 11).
To the right).

Therefore, by adjusting the moving speed of the suction board 36 and the pulling speed of the film 20 by the swing arm 56, the film 20 is moved to the substrate 22 while the peeling point of the film 20 is located above the guide plate 52. Can be peeled off smoothly.

At this time, if the moving speed of the suction disk 36 is slightly higher than the pulling speed of the film 20 downward by the pulling-off device 54, the peeling point of the film 20 is shifted to the outside of the guide plate 52. And the film 20 being peeled does not rub against the upper end of the guide plate 52.

As described above, the film 20 is pulled downward while the suction plate 36 is moved, and is peeled. After the peeling is completed, the catch lever 58 is placed below the pull-off device 54.
By releasing C, the film 20 can be dropped and arranged downward.

That is, the film 20 is transferred to the substrate transfer device 26
Then, it is peeled off while being pulled downward through a gap between the end portion on the subsequent device side and discharged.

The substrate 22 is further moved by the suction disk 36 and stopped when it comes to a position directly above an external transfer device or the like (not shown). The suction plate 36 releases the negative pressure when the transfer device or the like approaches from below, and the substrate 22
6 to a transfer device or the like. After this delivery,
The suction disk 36 is returned into the film peeling area 12 as shown in FIG.

The above-mentioned film peeling device was used for the substrate 22
It is a case where the film is stuck only on one side of the present invention, but the present invention is not limited to this, a film peeling device for peeling the film from the substrate on which the film is stuck on both front and back surfaces Is also applicable.

In this case, as described above, after the film 20 attached to the lower surface is peeled from the substrate 22, the film 20 is turned over and the film on the other surface is peeled off by the same film peeling device. Alternatively, a peeling mechanism similar to that of the film peeling device 10 may be provided above the substrate transport surface, and after the film on the lower surface of the substrate is peeled, the film on the upper surface may be peeled.

In the above embodiment, the pedestal 14 is composed of the rubber sheet 16 and the thin metal plate 18, but the present invention is not limited to this. It is sufficient that the rigid support plane received from the side opposite to the roller 48A can be inclinedly deformed in accordance with the inclination of the pressing roller 48A.

Therefore, for example, as shown in FIG.
Folded plate member 17 obtained by bending a metal spring plate into a double U-shape
May be formed and mounted in the recess 37 so that one outer side constitutes a rigid support plane 19 which replaces the metal sheet 18.

The rubber sheet 16 may be made of an elastic resin other than rubber. The pedestal 14 is formed entirely of an elastic resin such as rubber, and the hard support plane is formed by hardening the surface of the elastic resin or other hard resin. It may be composed of a resin bonded together.

In the film peeling device 10,
The substrate 22 carried into the substrate transfer device 26 is pushed up to the position of the suction plate 36 by the push-up device 32. However, the present invention is not limited to this. The substrate 22 may be lowered and sucked without damaging the substrate 22.

The peeling starter 48 peels off the tip of the film floated from the substrate 22 by the pressing roller.
The present invention is not limited to this, and the present invention is not limited to this. For example, the floating film tip may be captured by an adhesive tape, a roller, or the like and peeled off.

The transfer roller 25 at the tip end of the substrate transfer device is movable up and down by a cylinder device 28. This is necessary when the substrate 22 is thin and easily sags. Is thick enough so that the tip does not hang down, the transport roller 25 is unnecessary.

Further, as shown in FIG. 2, the film 20 is stuck on the lower surface of the substrate 22 so that the leading end is located at a position slightly behind the leading end of the substrate 22 in the transport direction. This may coincide with the tip of the substrate 22.

The suction disk 36 is moved by a feed screw mechanism 40, which is used because of its high positioning accuracy. Therefore, other moving means such as a rodless cylinder may be used as long as positioning accuracy can be ensured. Especially,
A photosensitive resin layer having a thickness of 5 to 50 μm and a light-transmitting resin film having a thickness of 15 to 80 μm for protecting the photosensitive resin layer on a thin substrate (for example, a substrate having a thickness of 0.06 to 0.1 mm). The effect is particularly remarkable when the present invention is applied to the case where the light-transmitting resin film is peeled off from the substrate with respect to the one to which the laminate made of is adhered.

[0097]

According to the present invention, as described above, the area of the film peeling device can be greatly reduced, and the film can be peeled efficiently and reliably in a short time. Has excellent effects.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a film peeling device according to an embodiment of the present invention.

FIG. 2 is an enlarged sectional view showing a substrate on which a film to be peeled is stretched;

FIG. 3 is an enlarged sectional view showing a main part of the apparatus.

FIG. 4 is an enlarged cross-sectional view showing the vicinity of a suction hole in a suction board of the apparatus.

FIG. 5 is an enlarged side view showing the vicinity of a tension peeling device in the film peeling device.

FIG. 6 is a bottom view showing the vicinity of the tip of the suction cup in the apparatus.

FIG. 7 is a block diagram showing a control system of the film peeling device.

FIG. 8 is a sectional view showing the operation of the cradle in the apparatus.

FIG. 9 is a cross-sectional view illustrating a state in which the pressing roller is driven in the apparatus.

FIG. 10 is an enlarged side view showing a process of capturing a film by the tensile peeling device.

FIG. 11 is an enlarged side view showing a process of pulling the lower film by the pull-off device.

FIG. 12 is a cross-sectional view showing another embodiment of the cradle;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Film peeling apparatus 14 ... Receiving stand 15 ... Gap 16 ... Rubber sheet 17 ... Folded plate member 18 ... Metal thin plate 19 ... Hard support plane 20 ... Film 22 ... Substrate 24, 25 ... Conveying roller 26 ... Substrate conveying apparatus 26A ... Substrate transfer surface 36 ... Suction plate 37 ... Recess 48 ... Peeling starter 48A ... Pressing roller 48B ... Gas ejection nozzle 49 ... Knurl ridge 50 ... Rotation center shaft 50A ... Bearing part 52 ... Guide plate 54 ... Tension peeling device 60 ... Control apparatus

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[Procedure amendment]

[Submission date] March 17, 1998

[Procedure amendment 1]

[Document name to be amended] Drawing

[Correction target item name] Fig. 4

[Correction method] Change

[Correction contents]

FIG. 4

Claims (8)

[Claims] 1. A substrate restraining device capable of restraining a substrate having a film adhered to a surface thereof, and at least one pressing roller capable of pressing an edge of the film on the substrate surface restrained by the substrate restraining device. A pressing roller driving device capable of driving the pressing roller in the film width direction while pressing the film edge along the film edge. In a film peeling device that forms a peeling start portion by lifting an edge from the substrate, the restraining device supports at least a portion of the substrate pressed by the pressing roller from a back surface against the pressing force. A supporting base that contacts at least the back surface of the substrate, and presses the hard supporting plane from the opposite side of a pressing roller to the hard supporting plane. A film peeling device comprising: an elastic support portion that elastically supports the roller so as to be able to incline in accordance with the inclination of the rotation axis of the roller. 2. The elastic support portion according to claim 1, wherein the elastic support portion of the pedestal comprises an elastic resin sheet attached to the substrate restraining device, and the hard support plane is attached to a surface of the elastic resin sheet. A film peeling device comprising a thin metal plate. 3. The elastic support portion according to claim 1, wherein the elastic support portion of the pedestal is formed of an elastic resin sheet attached to the substrate restraining device, and the hard support plane is provided on a surface of the elastic resin sheet. A film peeling device comprising a hard resin layer. 4. The suction device according to claim 1, wherein the substrate restraining device is a suction plate that suctions and holds the back surface of the substrate by negative pressure, and the receiving base is provided in a concave portion of the suction plate. A film peeling device, wherein a hard supporting plane is disposed so as to be substantially flush with a general surface of a suction cup. 5. The device according to claim 4, wherein a gap is provided between the outer peripheral surface of the receiving base and the inner peripheral surface of the concave portion facing the outer peripheral surface to allow the rigid support plane to be elastically inclined. Characteristic film peeling device. 6. The pressing roller according to claim 1, wherein the pressing roller is a knurled roller having a knurled knurled portion, and has a rotation center axis and a bearing for supporting the rotation center axis. A film peeling device characterized in that the film can be moved axially within a certain range with respect to at least one of the films. 7. The method according to claim 1, wherein the pressing roller is a knurled roller, and the pressing roller driving device performs one peeling step of the film edge.
The pressing roller is driven at least one reciprocation in the film width direction, and at least one of the end of the forward path and the start end of the return path is pressed so that the pressing mark of the film by the knurled portion is shifted between the forward path and the backward path. A film peeling device wherein a roller is separated from a film. 8. The film according to claim 1, further comprising a gas jet nozzle for blowing a compressed gas toward a peeling start point of the film edge to turn up the film edge. Stripping device.