JPH11238456A - 基板製造ラインおよび基板製造方法 - Google Patents
基板製造ラインおよび基板製造方法Info
- Publication number
- JPH11238456A JPH11238456A JP3921298A JP3921298A JPH11238456A JP H11238456 A JPH11238456 A JP H11238456A JP 3921298 A JP3921298 A JP 3921298A JP 3921298 A JP3921298 A JP 3921298A JP H11238456 A JPH11238456 A JP H11238456A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing
- robot device
- chamber
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 43
- 238000012545 processing Methods 0.000 claims abstract description 127
- 238000001035 drying Methods 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 35
- 230000008569 process Effects 0.000 claims abstract description 29
- 230000003028 elevating effect Effects 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims description 372
- 238000001816 cooling Methods 0.000 claims description 48
- 238000004140 cleaning Methods 0.000 claims description 26
- 238000011068 loading method Methods 0.000 claims description 21
- 238000011161 development Methods 0.000 claims description 20
- 239000012530 fluid Substances 0.000 claims description 13
- 239000003623 enhancer Substances 0.000 claims description 9
- 230000032258 transport Effects 0.000 claims description 8
- 238000005406 washing Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 abstract description 63
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 32
- 239000011248 coating agent Substances 0.000 description 31
- 239000007788 liquid Substances 0.000 description 16
- 230000018109 developmental process Effects 0.000 description 14
- 238000007689 inspection Methods 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 10
- 210000000078 claw Anatomy 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 8
- 230000002950 deficient Effects 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000005507 spraying Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910017435 S2 In Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010130 dispersion processing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921298A JPH11238456A (ja) | 1998-02-20 | 1998-02-20 | 基板製造ラインおよび基板製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921298A JPH11238456A (ja) | 1998-02-20 | 1998-02-20 | 基板製造ラインおよび基板製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11238456A true JPH11238456A (ja) | 1999-08-31 |
| JPH11238456A5 JPH11238456A5 (enExample) | 2005-08-25 |
Family
ID=12546843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3921298A Pending JPH11238456A (ja) | 1998-02-20 | 1998-02-20 | 基板製造ラインおよび基板製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11238456A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007076918A (ja) * | 2005-08-16 | 2007-03-29 | Daifuku Co Ltd | フローティングユニット及び物品支持装置 |
| CN102497937A (zh) * | 2009-08-31 | 2012-06-13 | 武藏工业株式会社 | 作业装置 |
| CN102688725A (zh) * | 2012-07-02 | 2012-09-26 | 西南石油大学 | 一种热板式反应器 |
| KR20240102137A (ko) * | 2022-12-26 | 2024-07-03 | 세메스 주식회사 | 주행 시스템 및 그 운용방법 |
| WO2024257460A1 (ja) * | 2023-06-12 | 2024-12-19 | 株式会社シンク・ラボラトリー | グラビアシリンダ用全自動検査システム及びグラビアシリンダ用検査方法 |
-
1998
- 1998-02-20 JP JP3921298A patent/JPH11238456A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007076918A (ja) * | 2005-08-16 | 2007-03-29 | Daifuku Co Ltd | フローティングユニット及び物品支持装置 |
| CN102497937A (zh) * | 2009-08-31 | 2012-06-13 | 武藏工业株式会社 | 作业装置 |
| CN102688725A (zh) * | 2012-07-02 | 2012-09-26 | 西南石油大学 | 一种热板式反应器 |
| KR20240102137A (ko) * | 2022-12-26 | 2024-07-03 | 세메스 주식회사 | 주행 시스템 및 그 운용방법 |
| US12474711B2 (en) | 2022-12-26 | 2025-11-18 | Semes Co., Ltd. | Driving apparatus and operating method thereof |
| WO2024257460A1 (ja) * | 2023-06-12 | 2024-12-19 | 株式会社シンク・ラボラトリー | グラビアシリンダ用全自動検査システム及びグラビアシリンダ用検査方法 |
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Legal Events
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