JPH11221192A - 光走査型プローブ - Google Patents
光走査型プローブInfo
- Publication number
- JPH11221192A JPH11221192A JP10028688A JP2868898A JPH11221192A JP H11221192 A JPH11221192 A JP H11221192A JP 10028688 A JP10028688 A JP 10028688A JP 2868898 A JP2868898 A JP 2868898A JP H11221192 A JPH11221192 A JP H11221192A
- Authority
- JP
- Japan
- Prior art keywords
- light
- mirror
- optical
- laser
- additional item
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 58
- 230000003287 optical effect Effects 0.000 claims description 127
- 238000003780 insertion Methods 0.000 claims description 20
- 230000037431 insertion Effects 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 abstract description 47
- 125000006850 spacer group Chemical group 0.000 abstract description 15
- 239000010408 film Substances 0.000 description 34
- 238000010586 diagram Methods 0.000 description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 16
- 239000013307 optical fiber Substances 0.000 description 16
- 238000001514 detection method Methods 0.000 description 14
- 238000009826 distribution Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000000835 fiber Substances 0.000 description 8
- 150000004767 nitrides Chemical class 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000013532 laser treatment Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 206010028980 Neoplasm Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000347 anisotropic wet etching Methods 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 210000001035 gastrointestinal tract Anatomy 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Endoscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10028688A JPH11221192A (ja) | 1998-02-10 | 1998-02-10 | 光走査型プローブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10028688A JPH11221192A (ja) | 1998-02-10 | 1998-02-10 | 光走査型プローブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11221192A true JPH11221192A (ja) | 1999-08-17 |
| JPH11221192A5 JPH11221192A5 (enExample) | 2005-08-25 |
Family
ID=12255435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10028688A Pending JPH11221192A (ja) | 1998-02-10 | 1998-02-10 | 光走査型プローブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11221192A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003535659A (ja) * | 2000-06-19 | 2003-12-02 | ユニヴァーシティ オブ ワシントン | 走査型単一光ファイバシステムを用いる医療用画像化、診断および治療 |
| JP2004254786A (ja) * | 2003-02-24 | 2004-09-16 | Pentax Corp | 走査型共焦点プローブ |
| JP2004361889A (ja) * | 2003-06-09 | 2004-12-24 | Pentax Corp | 走査ミラー、ビーム走査型プローブ |
| JP2005514144A (ja) * | 2002-01-09 | 2005-05-19 | ネオガイド システムズ， インコーポレイテッド | 結腸の分光学的試験についての装置および方法 |
| JP2011127924A (ja) * | 2009-12-15 | 2011-06-30 | Sun Tec Kk | イメージングプローブ |
-
1998
- 1998-02-10 JP JP10028688A patent/JPH11221192A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003535659A (ja) * | 2000-06-19 | 2003-12-02 | ユニヴァーシティ オブ ワシントン | 走査型単一光ファイバシステムを用いる医療用画像化、診断および治療 |
| JP2005514144A (ja) * | 2002-01-09 | 2005-05-19 | ネオガイド システムズ， インコーポレイテッド | 結腸の分光学的試験についての装置および方法 |
| JP2004254786A (ja) * | 2003-02-24 | 2004-09-16 | Pentax Corp | 走査型共焦点プローブ |
| JP2004361889A (ja) * | 2003-06-09 | 2004-12-24 | Pentax Corp | 走査ミラー、ビーム走査型プローブ |
| US7236283B2 (en) | 2003-06-09 | 2007-06-26 | Pentax Corporation | Scanning mirror unit and beam scanning probe |
| JP2011127924A (ja) * | 2009-12-15 | 2011-06-30 | Sun Tec Kk | イメージングプローブ |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050210 |
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| A621 | Written request for application examination |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A521 | Written amendment |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080108 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080507 |