JPH11180549A - Workpiece aligning device, workpiece aligning/stacking method and workpiece aligning/stacking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To automate workpiece alignment efficiently for high quality. SOLUTION: The workpiece aligning device comprises an M0 board transfer part 11 that includes a support part 31 for moving a turntable 30 to revolve an M0 board mount part; a loader-part M0 board feed part 12 for placing M0 boards on the M0 board mount part; a workpiece feed part 13 for feeding a preset number of workpieces to an M0 board, which includes an alignment feeder 80 for feeding workpieces aligned in eight lines; a separation part 81 for separating the workpieces fed thereto from the alignment feeder 80 and a loader part 82 for holding the eight workpieces separated and transferring them onto an M0 board into close alignment; and a control unit 17 for presiding over the M0 board transfer part 11, M0 board feed part 12 and workpiece feed part 13.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work aligning apparatus which separates a predetermined number of parts (work) which have been aligned and discharged, and aligns and arranges them on a plate jig. The present invention relates to a work aligning and stacking method and a work aligning and stacking apparatus for stacking jigs on a stacking column (spacer). The present invention relates to a work aligning apparatus, a work aligning and stacking method, and a work aligning and stacking apparatus capable of efficiently and unmannedly performing a close contact aligning operation and a stacking operation of works while maintaining high quality.

[0002]

2. Description of the Related Art When manufacturing various processed parts to be applied to a desired apparatus by continuously performing various processes such as a coating process of a metal material and a metallizing process on a work having a cylindrical shape or the like, there is, for example, a certain process. The plurality of workpieces after the processing is arranged on a plate-shaped jig, and the plate-shaped jigs are stacked one on top of another via a spacer and stored in a transport unit (boat). In some cases, a work aligning and stacking system that transports the boat on which the plurality of plate-shaped jigs are stacked to the next processing step, a stocker, or the like is used.

In the above-described work aligning and stacking system, conventionally, a work and a spacer are manually arranged and arranged on a plate-shaped jig and the plate-shaped jig is stacked, or as shown in FIG. Then, the work is arranged and arranged manually on a plate-like jig 250 to which a spacer S1 is fixed in advance, and the plate-like jigs are stacked, and the stacked plate-like jigs are stored in a boat.

[0004]

However, since the conventional manual work alignment and stacking operation is a simple operation, performing such a simple operation manually increases the manufacturing cost of the machined part. It is inefficient, and there has been a strong demand for mechanization (automation, line production) of work alignment and stacking operations.

In particular, in the work alignment / stacking method shown in FIG. 15, the plate jig is dedicated because the spacer is fixed to the plate jig, and another plate jig is used for each type of component. Had to be prepared, which was inefficient. In addition, since the spacer is fixed to the plate jig, when only the plate jig (without loading the work) is stacked and stored in a stocker or the like, the space occupied in the stocker increases by the amount of the spacer. , Storage efficiency deteriorated. Furthermore, when the work is placed on the plate-shaped jig, there is a possibility that the fixed spacer and the work may interfere with each other. If this positional interference occurs, the work is placed on the jig. A space that is not placed is generated, and the work loading amount on the jig is reduced, and the component manufacturing efficiency is deteriorated.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and automatically and unmannedly performs a work alignment operation and a work stacking operation while maintaining high quality efficiently, thereby reducing the cost of manufacturing processed parts. Its purpose is to significantly reduce it.

It is another object of the present invention to efficiently and closely align the work on the plate jig without any gap even in the automatic and unmanned work alignment operation described above.

Further, the present invention provides the versatility and storage efficiency of the plate jig itself by performing the above-mentioned automatic and unmanned work alignment and stacking operation without fixing the spacer on the plate jig. To improve

[0009]

In order to achieve the above-mentioned object, according to the work alignment device of the present invention, a plate-like jig for loading a work can be placed as described in claim 1. A table section having a plurality of mounting sections, a table means having a moving section for moving the table sections to circulate and move the plurality of mounting sections, and a plurality of the plate-shaped jigs; Stock means for stocking, and the plate-shaped jigs are taken out one by one at a predetermined timing from the stock means and conveyed, and the conveyed plate-shaped jig is circulated and moved by the table means. A plate-like jig supplying means for placing each of the placing sections, a work aligning / transporting section for arranging a large number of works in a plurality of rows and sequentially transporting the workpieces, Multiple leading A work separating unit that sequentially separates the work from the work aligning and transferring unit for each work, and driving and holding and transferring the plurality of works each time a plurality of works are separated by the work separating unit; A work separation unit for arranging the plurality of works conveyed on the plate jig sent by the table means through the plate jig supply means in a state of being in close contact with each other; A work supply means for supplying a predetermined number of works for each plate jig sent by the operation of the work close alignment section, the table means, the plate jig supply means,
And a supervising control unit that supervises and controls the work supply unit.

According to another aspect of the present invention, there is provided a work aligning and stacking apparatus according to the present invention.
As described in the above, a table portion on which a plurality of mounting portions on which a plate-shaped jig for loading a work can be mounted is installed, and the table portion is moved to circulate the plurality of mounting portions. A table means having a moving part, a stock means for stocking a plurality of the plate-shaped jigs, and taking out the plate-shaped jigs one by one from the stock means at a predetermined timing and conveying the jigs; Plate jig supplying means for placing each of the plate jigs circulated and moved by the table means for each of the placing sections, and work aligning and transporting which arranges a large number of works in a plurality of rows and sequentially transports them. A work separating unit that sequentially separates the sequentially conveyed works from the work aligning and conveying unit for each of a plurality of works positioned at the head of each row in accordance with a predetermined timing; Minute Each time the sheet is driven, the plurality of workpieces are held and transported, and the plurality of transported workpieces are transported by the table means through the planar jig supply means. A work supply means for providing a predetermined number of works for each plate jig sent by the operation of the work separation section and the work close alignment section, comprising a work close alignment section which is arranged in close contact with the tool. A spacer aligning / transporting unit for sequentially transporting a plurality of pre-stocked spacers in a line, a spacer separating unit for sequentially separating a leading spacer in the sequentially transported spacers at a predetermined timing, and a separating unit. Each time the spacer is separated, it is driven to hold and transport the separated spacer, and the transported spacer is sent by the table means. A spacer conveying / supplying unit for supplying the work to a predetermined position on the plate jig to which the work is supplied, and operating a predetermined number of spacers for each plate jig by operation of the spacer separating unit and the spacer conveying / supplying unit The spacer supplying means for supplying the work and the plate-like jig to which the work and the spacer sequentially supplied by the table means are supplied are sequentially separated from the mounting portion and conveyed to a predetermined position, and stacked at the predetermined position. Jig stacking means to be controlled, and control means for controlling the table means, the plate jig supply means, the work supply means, the spacer supply means, and the plate jig stacking means, respectively. And

In particular, the table portion is substantially circular and the plurality of mounting portions are four, and the four mounting portions are symmetrically mounted on the upper surface of the substantially circular table portion with respect to the center. While the stock means, the work supply means, the spacer supply means and the plate jig stacking means are arranged around the table portion,
The moving unit intermittently moves the substantially circular table unit so that each mounting unit reaches a position substantially opposed to the stock unit, the work supply unit, the spacer supply unit, and the plate jig stacking unit. It is made to rotate in the shape.

In particular, the work separating section includes a holding mechanism for holding only a plurality of works positioned at the head of each row of the plurality of works transferred by the work aligning and transferring section in a row. A lifting separation mechanism that raises the holding mechanism to separate the plurality of works from other works, and the work close contact alignment unit includes a plurality of works corresponding to the number of the works separated by the lifting separation mechanism. A first moving support mechanism that movably supports a pitch between adjacent suction mechanisms in the plurality of suction mechanisms along a row direction of the work, and horizontally moving the suction mechanism and the moving support mechanism. And a second moving support mechanism that movably supports the plurality of suction mechanisms via the second moving support mechanism. Adsorbed by holding the workpiece, respectively,
The first movement support mechanism and the plurality of suction mechanisms holding the plurality of works are integrally moved via the second movement support mechanism, and the first movement support mechanism is moved via the first movement support mechanism. The plurality of workpieces held by the suction mechanisms are arranged on the plate jig in a state where the pitch between adjacent suction mechanisms in the plurality of suction mechanisms is minimized.

Further, in order to achieve the above-mentioned object,
According to the work alignment and stacking method of the present invention, as described in claim 8, the table unit on which a plurality of mounting units capable of mounting a plate jig for mounting a work is moved to move the table unit. Circulating a plurality of mounting portions, storing a plurality of the plate-shaped jigs, and taking out and transporting the stocked plate-shaped jigs one by one at a predetermined timing. A plate jig supplying step of laying the conveyed plate jigs for each of the mounting sections moving, and a plurality of works are arranged in a plurality of rows and sequentially conveyed and conveyed. The separated works are sequentially separated into a plurality of works positioned at the head of each row according to a predetermined timing, and the separated works are held and transported, and the transferred plurality of works are The plate is circulated by the table A work supply step of supplying a predetermined number of works for each plate jig sent by arranging the plate jigs sent through the jig supply step in close contact with each other, A plurality of stocked spacers are arranged in one row and sequentially conveyed, and the leading spacers of the sequentially conveyed spacers are sequentially separated according to a predetermined timing, and the separated spacers are held, conveyed, and conveyed. A spacer supply step of supplying a predetermined number of spacers to each plate jig by supplying a spacer to a predetermined position on the plate jig to which the work sent in the table section circulation movement step is supplied; ,
The plate-shaped jigs to which the work and the spacers sequentially fed by the table means are sequentially separated from the mounting portion, transported to a predetermined position, and stacked at the predetermined position. And steps.

According to the present invention, under the control of the general control means, the control of the general control means can be performed on a plurality of mounting sections which are circulated by the moving section of the table means and come to the positions facing the stock supply means. A plurality of plate jigs stocked in the stock means are operated by the corresponding operation of the plate jig supply means.
Each sheet is taken out and placed.

On the other hand, the works arranged and conveyed in a plurality of rows by the work aligning and conveying section are sequentially operated for each of a plurality of works located at the head of each row by the operation of the work separating section based on the control of the overall control means. The plurality of separated workpieces are separated from the work aligning and transporting unit, and are held and transported by the operation of the workpiece transporting unit under the control of the overall control unit.

That is, a plurality of works positioned at the head of each row in a plurality of rows of works conveyed by the work aligning / conveying section are held in a state of being arranged in a single row by a holding mechanism, and are held by an ascending / separating mechanism. The holding mechanism is raised, and the plurality of works are separated from other works.

Then, the plurality of workpieces lifted and separated by the upward separation mechanism are moved by a plurality of suction mechanisms via the second moving support mechanism, and the plurality of workpieces are respectively suctioned and held. The plurality of suction mechanisms holding the workpiece move integrally with the first movement support mechanism via the second movement support mechanism.

At this time, the state in which the pitch between adjacent suction mechanisms in the plurality of suction mechanisms is minimized by the first moving support mechanism, that is, each work sucked by the plurality of suction mechanisms is in close contact. In this state, the sheet is circulated by the moving unit of the table means and is aligned and supplied onto the plate-shaped jig placed on the placing section reaching the position facing the work supply means. By the operations of the work separating section and the work transfer section, a predetermined number of works are arranged and supplied in close contact with the plate jig which has been sequentially moved.

The spacers which have been aligned and conveyed by the spacer aligning / conveying unit are sequentially separated from the spacer aligning / conveying unit for each of the spacers located at the head by the operation of the spacer separating unit under the control of the overall control means. The separated spacers are held and transported by the operation of the spacer transport unit based on the control of the overall control unit.

The spacer conveyed by the spacer conveying section is circulated and moved by the moving section of the table means, and is supplied onto a plate-like jig to which the work reaching the position facing the spacer supplying means is supplied. A predetermined number of spacers are supplied to the plate-shaped jig that has been sequentially moved by the operation of the unit and the spacer transport unit.

The plate-shaped jig to which the work and the spacer sequentially fed by the table means are supplied is separated from the mounting portion by the general control means and transported to a predetermined position, and is stacked at the predetermined position. Is done.

That is, according to the present invention, the operation means (table means, plate-like jig supply means, work supply means, spacer supply means, and plate-like jig stacking means) based on the general control of the general control means are provided. By continuous operation, a plate-shaped jig having a predetermined number of works arranged in a close contact state and stacked in a predetermined stage can be obtained.

[0023]

Embodiments of the present invention will be described below with reference to the accompanying drawings. In this embodiment, for example, a diameter of 20 mm used for a magnetron is used.
A work aligning and stacking apparatus (also referred to as a stuffing apparatus) used in a magnetron ceramic part manufacturing line when manufacturing a cylindrical ceramic part (work) described above will be described.

FIG. 1 is a perspective view showing a schematic configuration of a production line for a ceramic part for a magnetron according to the present embodiment. According to FIG. 1, a magnetron ceramic part manufacturing line 1 performs a predetermined processing on a ceramic part (work) while conveying the work through a work transfer conveyor 2 and a boat transfer conveyor 3 to process the work for the magnetron. This is a line for manufacturing finished workpieces.

That is, the magnetron production line 1
Is a Mo coating device 4 for applying molybdenum (Mo), which has corrosion resistance and can be kept at a considerably high temperature, to a work conveyed from a stocker or the like via the work transfer conveyor 2, and a coating device 4 for applying molybdenum (Mo). A Mo drying device 5 for drying the Mo, and a plurality of works conveyed through the work conveying conveyor 2 after the Mo drying process in the Mo drying device 5 is completed. A work aligning and stacking device 6 for arranging and aligning a predetermined number of Mo plates in a rectangular jig (Mo plate) and storing the Mo plates in a transfer boat (Mo boat) formed of Mo; After the aligning and stacking process of the aligning and stacking device 6, the Mo transferred through the boat transfer conveyor 3
A metallizing furnace 7 for performing a metallizing process on each work in the boat, and after the metallizing process by the metallizing furnace 7, a pin hooking process is performed on each work on the Mo boat conveyed through the boat conveyor 3. And a pinning device 8 for finally manufacturing a magnetron work. The manufacturing line continuously performs a series of processes from the Mo coating process to the pinning process.

Here, the structure and operation of the work aligning and stacking apparatus 6 will be described in detail with reference to FIGS.

FIG. 2 is an enlarged perspective view showing a schematic configuration of the work aligning and stacking apparatus 6. As shown in FIG. The work aligning and stacking device 6 takes out a plurality of (eg, 10) works sequentially transferred through the work transfer conveyor 2 after the drying process of the Mo drying apparatus 5 is completed, and arranges the work on the Mo plate by a predetermined number. Let it. Then, the spacers are arranged on the Mo plate on which the workpieces are arranged, and the Mo plates on which the workpieces and the spacers are arranged are stacked in a plurality of stages (for example, five stages) and stored in the Mo boat on the boat conveyor 3. The series of operations from the above-described work take-out / alignment operation and Mo plate stacking operation to the storage operation in the Mo boat are automatically and unmanned.

That is, as shown in FIG. 2, the work aligning and stacking device 6 includes a base 10 having a base plate 10a.
Is installed at a substantially central portion of the upper surface of the base plate 10a.
A Mo plate feeding unit 11 for sequentially feeding a plate and a work to each operation unit described later, and each of the operation units disposed around the Mo plate feeding unit 11, that is, an M plate for supplying the Mo plate to the Mo plate feeding unit 11.
o Plate supply unit 12 and work supply unit 1 that aligns and supplies the work to the Mo plate conveyed by Mo plate feed unit 11
3, a spacer supply unit 14 for supplying a spacer to the Mo plate having the work carried by the Mo plate feeding unit 11, and a Mo plate having the work and the spacer carried by the Mo plate sending unit 11 in five stages. Stacked on top of Mo
A work aligning and stacking unit 16 having a Mo stacking and transferring unit 15 for transferring and storing to a boat, and a control unit which is stored inside the base unit 10 and controls each component of the work aligning and stacking unit 16 respectively. 17. In addition, inside the base part 10, each component (11 to 1) of the control unit 17 and the work alignment stacking unit 16 is provided.
5) is also accommodated.

On the other hand, on the front side of the base 10 facing the operation control operator in the work aligning and stacking apparatus 6, a cover 2 having a door part which can be opened and closed from the operator side is provided.
0 is set, and the work alignment stacking unit 16
Are housed in a front cover (not shown) joined to the cover 20. Then, at a predetermined position of the front cover (for example, at the right end as viewed from the operator side),
An operation unit (not shown) of a display interactive type (type in which operation data and the like can be input by designating an element on the display) connected to the control unit 17 is provided, and an operator can input operation data through the operation unit. By inputting the operation data, the operation data is sent to the control unit 17, and each component (Mo plate feeding unit 11, Mo plate feed unit 11, Mo) of the work aligning and stacking device 6 described above is transmitted via the control unit 17.
Plate supply unit 12, work supply unit 13, spacer supply unit 1
4, the Mo board stacking / conveying section 15) is driven and controlled.

In this embodiment, the Mo plate supply unit 12 is installed at the front end of the upper surface of the base plate 10a (hereinafter, also referred to as the base surface 10b), and the work supply unit 13 is located on the base surface 10b when viewed from the front side. It is installed on the left side 10 s side end. The spacer supply unit 14 is installed at an end of the base surface 10b opposite to the installation end of the Mo plate supply unit 12, and the Mo plate stacking / conveying unit 15 is located on the right side 10t side of the base surface 10b when viewed from the front side. Installed at the end.

Hereinafter, each component of the work aligning and stacking unit 16 will be described.

As shown in FIGS. 2 and 3, the Mo plate feeding section 12 includes a rotary table 30 formed of A5052 and having a substantially circular shape as a whole.
0 is supported at a predetermined height with respect to the base plate 10a, and the table 30 is rotated clockwise and at a predetermined angle about an axis perpendicular to the base surface 10b (in the present embodiment, about 9 degrees).
(0 °) intermittently, and the Mo plate placed on the upper surface of the rotary table 30 is connected to each component of the unit 16 (Mo plate supply unit 12 →
It is configured to sequentially convey the workpiece supply unit 13 → spacer supply unit 14 → Mo plate stacking / conveying unit 15).

That is, the rotary table 30 has:
Upper surface of the table 30 (hereinafter, also referred to as table surface) 3
0a at the peripheral portion adjacent to the Mo plate supply portion 12.
An Mo plate placing portion 32a for placing the plate is provided. Further, the rotary table 30 is provided with the Mo plate placed on the Mo plate placing portion 32a and the Mo plate stacking / transporting portion 15a.
Is provided with a notch 33a cut out in a rectangular shape for separating the rotary table 30 from the rotary table 30. Hereinafter, a peripheral portion close to the work supply portion 13 and a peripheral portion close to the spacer supply portion 14 will be described. , And Mo
The Mo plate placing portion 3 is provided on the periphery near the plate stacking portion 15.
2b to 32d and cutouts 33b to 33d are provided, respectively.

In each of the notches 33a to 33d, adjacent notches (for example, the notches 33a and 33d)
b) are disposed so as to form about 90 ° with respect to the rotation axis of the rotary table 30. Also, each Mo
The plate mounting portions 32a to 32d are provided with the notches 33a to 3d.
It is composed of a pair of Mo plate support portions 34k1 and 34k2 arranged on the peripheral portion of the rotary table 30 so as to sandwich the 3d, and each Mo plate support portion 34k1 and 34k2.
Are separated so that the Mo plate can be supported in accordance with the length of the Mo plate in the longitudinal direction.

The Mo plate support portions 34k1 and 34k2 of each pair
Among them, one Mo plate support portion 34k1 is fixed,
The other Mo plate support portion 34k2 is movable relative to the fixed Mo plate support portion 34k1 such that the Mo plate support portion 34k1 can be separated from and approached to the fixed Mo plate support portion 34k1. The other Mo plate support portion 34k2 is configured to be moved via a moving mechanism having a movable roller portion and a link portion, for example, in response to an external lever operation via a rotary cylinder. That is, after the Mo plate is placed on the Mo support portions 34k1 and 34k2 of the rotary table 30, the Mo plate is positioned by the movement of the other Mo plate support portion 34k2.

On the other hand, the support 31 has an index mechanism using a roller gear type index unit. That is, the index unit incorporates a clutch, an electromagnetic brake, for example, a 1/31 speed reducer, and, for example, a 90-watt geared type index motor, and drives the rotary table 30 at a predetermined speed by driving the index motor. At about 90 ° to rotate intermittently.

Therefore, when the index mechanism of the support portion 31 is driven, the Mo plate mounting portion 32a facing the Mo plate supply portion 12 faces the adjacent work supply portion 13 by rotating the rotary table 30 by about 90 °. (Hereinafter, such a movement is performed by the Mo plate mounting portion 32a →
Similarly, the Mo plate mounting portion 32b facing the work supply portion 13 → the spacer supply portion 14, and the Mo plate mounting portion 32c facing the spacer supply portion 14 → Mo.
The plate stacking / conveying unit 15 moves from the Mo plate placing unit 32d to the Mo plate supplying unit 12 facing the Mo plate stacking / conveying unit 15.

That is, the Mo plate feeding section 11 of this configuration is
The rotation of the rotary table 30 based on the driving of the index mechanism of the support portion 31 causes the Mo plate mounting portions 32a to 32d to rotate.
32d is sequentially conveyed while circulating in the order of → Mo plate supply unit 12 → Work supply unit 13 → Spacer supply unit 14 → Mo plate stacking / conveying unit 15 → Mo plate supply unit 12 → In the state, the arrangement relationship shown in FIG. 3 is assumed). The rotary table 30
Is provided with a torque limiter (not shown) for limiting torque transmission when the rotary table 30 is overloaded.

Rotary table 3 of Mo plate feeding section 11
The rotation speed of 0 is predetermined in accordance with the operation speed and operation time of each of the operation units (Mo plate supply unit 12, work supply unit 13, spacer supply unit 14, and Mo plate stacking conveyance unit 15). Continuous operation of each operation unit is enabled.

The Mo plate supply unit 12 includes a stocker unit 40 capable of stocking Mo plates and one Mo plate stocked by the stocker unit 40.
And a loader unit 41 that conveys and supplies the Mo plate to a Mo plate placement unit 32a that is close to and opposes the Mo plate supply unit 12.

The stocker section 40, as shown in FIG.
An L-shaped frame 4 having a base frame part 45 serving as a base provided on the base surface 10b and a side frame part 46 provided upright with respect to the base frame part 45
7, an LM guide 47 provided on the side frame 46 such that the guide line is perpendicular to the upper surface (base surface) 45 a of the base frame portion 45, and a guide line of the LM guide 47 adjacent to the LM guide 47. Ball screw (hereinafter abbreviated as ball screw) 48 having an external thread portion 48a disposed along the LM guide 4
7 and a fork 49 connected to the female threaded portion 48b of the ball screw 48 and a stock surface 49 parallel to the base surface 45a of the fork 49.
For example, 100 Mo plates M (the number of which can be processed by driving the work alignment stacking unit 16 for 1.5 hours) can be stocked in a.

On the other hand, a pair of shafts 50 are formed on the base surface 45a on the same straight line with respect to the rolled ball screw 48 along the longitudinal direction of the base surface 45a and in parallel with the male screw portion 48a of the rolled ball screw 48. , 50 are arranged, and the shafts 50, 50 of the pair are separated by a length corresponding to the longitudinal direction of the Mo plate M. A hole 51 is formed in the stock surface 49a of the fork 49 at the center of the side frame side end to allow the shaft 50 of the side frame 46 to pass therethrough.
Are formed. The through hole 51 is formed so that the fork 49 itself does not hinder the vertical movement of the shaft 5.
It has a diameter that is sufficiently larger than the diameter of zero.

As shown by a two-dot chain line in FIG. 4, the Mo plate M has a semicircular portion m1 for engaging with the shaft 50, 50 at the center of both end surfaces on the short side thereof.
m2 is provided, and the Mo plate M has shafts 50, 5 and
0 is guided.

In this configuration, the center position of the Mo plate M placed on the stock surface 49a and guided by the shafts 50, 50 is the center position of the Mo plate placement portion 32a facing the Mo plate supply portion 12. The installation position of the frame 47 (frame base 45) on the base surface 10b is determined so as to be located on the same straight line as the center position of a certain notch 33a and the rotation axis of the rotary table 30.

On the other hand, the stocker section 40 has a ball screw 4
8 is connected via a winding transmission mechanism such as a pulley, and the ball screw 48 (male screw part 48a) is rotated by the rotation drive via the winding transmission mechanism to thereby rotate the female screw part 48.
Motor 55 with brake for raising and lowering b
And a rising edge detection sensor 56 attached to the upper end of the side frame portion 46 and detecting a maximum reaching point (rising edge) in the upward movement of the female screw portion 48b based on the driving of the motor 55.
And a descending end detection sensor 57 attached to the lower end of the side frame portion 46 and detecting a maximum reaching point (falling end) in the descending movement of the female screw portion 48b based on the driving of the motor 55.
The motor 55, the rising edge detection sensor 56, and the falling edge detection sensor 57 are connected to the control unit 17 shown in FIG.

The rising end detection sensor 56 is provided with a female thread 48 based on the driving of the motor 55 and the rotation of the ball screw 48.
All the Mo plates M stocked in the fork 49 are supplied by the lifting of the b and the fork 49 and the Mo plate transporting / supplying operation of the loader unit 41 described later performed in cooperation with the lifting operation, and the female screw portion 48b is moved. Detecting that it has reached the rising end, the detection data is sent to the control unit 17. The control unit 17 controls the rotational drive of the ball screw 48 via the motor 55 in accordance with the sent detection data to automatically lower the female screw portion 48b and the fork 49.

The descending end detecting sensor 57 detects that the female thread portion 48b has descended and has reached the descending end, and sends this detection data to the control unit 17. The control unit 17 automatically sounds a warning (operator call) via, for example, a display interactive operation unit in response to the sent detection data, that is, a command to cause the operator to stock the Mo plate M in the fork 49. It is designed to output a signal.

As shown in FIG. 5, the loader section 41 includes a square pipe frame (hereinafter, also simply referred to as a frame) 60 installed upright with respect to the base surface 10b, and a vacuum head section 61 for adsorbing a Mo plate. And a support portion 62 attached to the frame 60 and supporting the vacuum head portion 61 movably in the vertical direction and a predetermined horizontal direction. The frame 60 is provided with a vacuum pad support portion of the vacuum head portion 61, which will be described later. Are arranged on the base surface 10b so as to be located above the stock surface 49a of the stocker portion 40 and opposed to each other.

The support portion 62 is provided at the upper end of the frame 60 and connects the center position of the Mo plate M placed on the stock surface 49a to the center position of the notch portion 33a facing the Mo plate supply portion 12. A rodless cylinder 6 having a wide type LM guide 65 having a guide line parallel to a straight line, and a moving mechanism attached to the LM guide 65 and horizontally moving along the guide line of the LM guide 65
6 is provided.

The vacuum head 61 is provided with an air cylinder 7 attached to a moving mechanism of a rodless cylinder 66.
0 and the stock surface 49a with respect to the air cylinder 70.
The air cylinder 70
Pad support 71 which moves up and down by driving
And two vacuum pads 7 attached to the vacuum pad support 71 in a hanging manner and capable of adsorbing the Mo plate M.
2 and 72.

That is, as shown in FIG. 6, the loader section 41 is provided with the air cylinder 7 controlled by the control unit 17.
The vacuum pad supporting portion 71 is lowered by the downward movement of the vacuum pad supporting portion 71, and the stock surface 49a of the stocker portion 40 is moved by the vacuum pads 72, 72 of the vacuum pad supporting portion 71.
Adsorbs the Mo plate M placed on the air cylinder 70,
Then, the vacuum pad supporting portion 71 is moved upward to separate the Mo plate M placed on the stock surface 49a of the stocker portion 40.

When the vacuum pad support 71, which has attracted the Mo plate M by the upward movement of the air cylinder 70, rises to a predetermined height, the rotary cylinder 6 of the loader 41
6 moves the moving mechanism and the vacuum pad supporting portion 71 integrally to the Mo plate mounting portion 32a via the guide line of the LM guide 65 under the control of the control unit 17. When the Mo plate M adsorbed by the vacuum pads 72, 72 of the vacuum pad support unit 71 reaches above the Mo plate mounting unit 32a, the loader unit 41 moves below the air cylinder 70 according to the control of the control unit 17. The vacuum pad supporting portion 71 is lowered by the movement, and the Mo plate M adsorbed on the vacuum pads 72, 72 of the vacuum pad supporting portion 71 is removed from the Mo plate supporting portion 3 of the Mo plate placing portion 32a.
Place on 4k1 and 34k2.

In this way, when the supply of the Mo plate M from the stocker unit 40 to the Mo plate mounting unit 32a by the loader unit 41 is completed, the rotary table 30 of the Mo plate feed unit 11 rotates by about 90 °, and M to which the Mo plate M is supplied
o The plate mounting part 32a rotates to a position facing the work supply part 13.

As shown in FIG. 2, the work supply unit 13
After the drying step in the Mo drying device 5 is completed, for example, an alignment feeder that receives, for example, 10 pieces (approximately 60 pieces) of works transferred through the work transfer conveyor 2 and arranges them in a predetermined number of rows (eight rows in the present embodiment). 80, a separation unit 81 for separating the works arranged in eight rows by the arrangement feeder 80 into the same number as the arrangement number (eight in this embodiment) or a predetermined number smaller than the arrangement number; 8
1 and takes out the work separated from the work supply unit 13 of the rotary table 30 so as to be close to and opposed to the work supply unit 13.
And a loader unit 82 for supplying the Mo plate placed on the plate placing unit 32b.

As shown in FIGS. 2 and 7, the aligning feeder 80 is connected to the work transport conveyor 2 and receives ten works W transported through the conveyor 2 at a time. The work W is conveyed through the conveyance path 85 while applying vibration to the received work W. A plurality of rows (eight rows, 86a1 to 86a8) of passages (grooves) 86 for linearly aligning in the transport direction are formed in the transport path 85a on the separation section 81 side of the alignment feeder 80. ,
The passage pitch is longer than the diameter of the work W, and each passage 8
6a1 to 86a8 are formed to have the same pitch. That is, the work conveyed to the alignment feeder 80 is conveyed by the vibrating force through the conveyance path 85, and is conveyed through the paths 86a1 to 86a8 as a group of eight rows of work arranged in a straight line.

The separating section 81 is supported by the rectangular casing 90 and the casing 90 so as to be able to move up and down via guide shafts 91, 91, and the passages 86a1 to 86a of the alignment feeder 80.
6a8 end (work transfer part) 86b1 to 86b8
And a work holding block 92 disposed in the vicinity of the work holding block 92. This work holding block 92 is provided with passages 86a1-8
6a8 is a rectangular block arranged along the arrangement direction, and the work W can be sufficiently mounted at a position facing the work transfer portions 86b1 to 86b8 corresponding to the pitch of the work transfer portions 86b1 to 86b8. Semi-elliptical grooves 93b1 to 93b8 each having a size are provided. The bottom surfaces (work placement surfaces) of the semi-elliptical grooves 93b1 to 93b8 are normally close to each other at the same height as the work passing surfaces of the work transfer portions 86b1 to 86b8, and the work transfer portions 86b1 to 86b8. The workpiece W that travels straight through the groove is stopped and held by the grooves 93b1 to 93b8 (the work mounting surfaces of the above-mentioned semi-elliptical grooves 93b1 to 93b8 and the work transfer portions 86b1 to 86b8). The position of the separation section 81 in a state where the work passing surfaces of the separation portions 81 are close to each other at the same height is defined as a reference height position.

In the work holding block 92, a work detection sensor 94 for detecting whether or not a predetermined amount of the work W has arrived and been held at the work holding block 92 has a groove 93b.
The detection data of the work detection sensor 94 is sent to the control unit 17.

The upper ends of the guide shafts 91 are connected to the bottom surfaces of both ends of the work holding block 92, respectively, and the lower ends thereof extend through the upper surface of the housing 90 through rolling bearings 95, 95. ing. Also, the separation unit 81
Has an air cylinder (not shown) connected to the guide shafts 91, 91.
Is moved up and down while being guided by the rolling bearings 95, 95 by driving the air cylinder based on the control of the control unit 17.

Further, the separating section 81 includes, for example, three passages 8.
Stopper 9 capable of stopping work W that is traveling straight through 6a6 to 86a8 and transfer portions 86b6 to 86b8.
6. The stopper 96 is provided for the alignment feeder 8.
0 each work transfer section 86b6 to 86b8 (passage 86
a6 to 86a8) are provided on each of the wall portions 97, and each of the stoppers 96 is moved toward each of the wall portions 97 by a mechanism such as a stopper holder, which will be described later, and stored in the wall portion 97. The transfer portions 86b6 to 86b are respectively moved to the opposite sides of the wall portion 97 by the mechanism.
8 so that it can be positioned above.

Each stopper 96 is, as shown in FIG.
The slide block 99 is held by a stopper holder 98 and a slide block 99, respectively, and each slide block 99 is connected to three guide shafts 100, respectively.

One end of each of the three guide shafts 100 is connected to an air cylinder 102 via a connection block 101, and the air cylinder 102 is connected to the control unit 17. That is, when the air cylinder 102 is driven via the control unit 17, the connecting block 101 moves in the longitudinal direction of the work holding block 92 (the direction indicated by the arrow "a" in FIG. 7), and the stopper holder 98 is moved in accordance with the movement. And slide block 99
Move integrally, so that the stopper 96 moves in a direction indicated by an arrow "b" in FIG. 7 parallel to the longitudinal direction. Therefore, each stopper 9
6 is moved from each wall portion 97 so as to be located on the transfer portions 86b6 to 86b8, the passages 86a6 to 86b
The workpiece W that has traveled straight through a8
And stops at the transfer portions 86b6 to 86b8 and is not held by the separation portion 81. On the other hand, if the respective stoppers 96 are moved toward the respective wall portions 97 and stored in the respective wall portions 97, the work W which has proceeded straight through the passages 86a6 to 86a8 is separated regardless of the stoppers 96. It is held by the unit 81.

Since the operation of each of the stoppers 96 can be individually controlled for each of the stoppers via the control unit 17 and the air cylinder 102, in this embodiment, the number of the workpieces W separated by the separation unit 81 Can be selected from six to eight (in the following description, the number of works W to be separated will be described as eight).

As shown in FIG. 8, the loader section 82 includes a vacuum head section 110 for holding and holding the workpiece, and a supporting section 11 for supporting the vacuum head section 110 so as to be able to move up and down.
1 and an XY robot 112 that movably supports the support section 111 on a horizontal plane (XY plane).

The support section 111 is provided with a rotary actuator 115 installed on the XY robot 112 and a vertical direction via a plate 116 in a state of being opposed to the rotary actuator 115 at a predetermined interval. Two LM guides 117 attached
117.

A connection bar 118 is connected to the rotary actuator 115 via a plate 116.
The connecting bar 118 is provided so as to protrude from the surface of the plate 116. A support plate 119 for supporting the vacuum head 110 is suspended from the connection bar 118 in a hanging manner, and the back surface of the support plate 119 is engaged with guide portions of the LM guides 117 and 117. The support plate 119 moves up and down while being guided by the LM guides 117 and 117 by a linear driving force generated according to the rotational driving force of the rotary actuator 115.

The vacuum head section 110 includes a separating section 81
(In this embodiment, eight) of vacuum pads 120a1 to 120a8 according to the maximum number of workpieces W (eight in this embodiment) separated by the above, and a vacuum pad holder mechanism for holding the vacuum pads 120a1 to 120a8 121 are provided. The vacuum pad holder mechanism 121 has a fixed pad holder 122a1 fixed to one end of the lower portion of the front surface of the support plate 119, and one end fixed to the fixed pad holder 122a1 and disposed in parallel to the longitudinal direction of the separating portion 81. Two shafts 123, 123, and the two shafts 123, 123
Pad holders 12 movably inserted into the movable pad holders 12
2a2 to 122a8, the fixed pad holder 122a1 and the moving pad holders 122a2 to 122a8 are connected to each other, and each of the moving pad holders 122a2 to 122a8 is connected to the fixed pad holder 122a1 with respect to the shaft 123, 1a.
And a link mechanism 124 having a cross connection structure that can be extended and retracted along the link 23.

Vacuum pads 120a1 to 120a8
Are provided at the lower front part of each of the pad holders (fixed pad holder 122a1 and movable pad holders 122a2 to 122a8), and are connected to a vacuum source 125 installed on the XY robot 112 via a hose (not shown). Are linked. This vacuum source 125 is connected to the control unit 17 and is connected to each vacuum pad 120.
The workpieces a1 to 120a8 can suck and hold the workpiece by driving the vacuum source 125 under the control of the control unit 17.

A rodless air cylinder 130 connected to the control unit 17 is provided above the front surface of the support plate 119. The rodless air cylinder 130 has movable pad holders 122a2 to 122a.
8 is configured to be movable along the shafts 123, 123. Therefore, by driving the rodless air cylinder 130 via the control unit 17, the moving pad holders 122a2 to 122a
The horizontal position of a8 can be freely determined, and the pitch between adjacent holders, that is, the pitch between adjacent vacuum pads 120a1 to 120a8 can be freely changed. Before the work suction operation, the pitch of the vacuum pads 120a1 to 120a8 is set to a pitch corresponding to the pitch of the grooves 93b1 to 93b8 of the separating portion 81.

Further, the rodless air cylinder 1 is located adjacent to the rodless air cylinder 130 on the upper side of the fixed pad holder 122a1 on the front surface of the support plate 119.
A shock absorber 131 for stopping the horizontal movement of the shock absorber 30 via a stopper is attached. By setting the stopper position of the shock absorber 131 in advance according to the shape of the work W, the shock absorber 131 moves until it comes into contact with the stopper position. Pad holder 122a2-1
22a8 can be moved to the fixed pad holder 122a1 side so that the pad holders 122a1 to 122a8 can be brought into close contact with each other.

According to the separation unit 81 and the loader unit 82 configured as described above, each passage 86a of the alignment feeder 80 is provided.
The work W conveyed through the passages 86a1 to 86a8 (only the work W conveyed through the passage 86a4 is shown in FIG. 7) is a work transfer section 86b1 to 86b.
8 and are supplied to the grooves 93b1 to 93b8 of the separation section 81 and stopped. At this time, each work detection sensor 94 detects that the work W is held in the corresponding groove 93b1 to 93b8.
7

The control unit 17 drives the air cylinder in accordance with the sent detection signal to raise the guide shaft 91, and moves the work holding block 92 of the separating portion 81 from the reference height position to a predetermined height position ( This position is referred to as a loader transfer position) (see FIG. 8).

At this time, under the control of the control unit 17, the XY robot 112 of the loader 82
1 in the XY plane, and each groove 93b of the separation portion 81 is moved.
Each of the vacuum pads 120a1 to 120a8 is positioned above the position on the back side of the work W held at 1 to 93b8.

Subsequently, the vacuum pad supporting section 110 is lowered along the LM guides 117 and 117 by driving the rotary actuator 115 in accordance with the control of the control unit 17, and the respective vacuum pads 120a1 to 120a1
0a8 is brought close to each work W of the corresponding separation section 81.

Then, each work W is sucked and held by driving the vacuum generating source 125 according to the control of the control unit 17 (see FIG. 8).

Next, the air cylinder is driven in accordance with the control of the control unit 17 to lower the guide shaft 91 to lower the separating portion 81 (the positioning block 92) to the reference height position. By driving the Y robot 112 and the rotary actuator 115 to move the support 111 in the horizontal direction and lowering the vacuum head support 110, the vacuum pads 120a1 to 120a8 are moved to the Mo that is currently facing the work supply unit 13. It is transported to the vicinity of the Mo plate M placed on the plate placing portion 32a (Mo plate support portions 34k1, 34k2) (see FIG. 9. In FIG. 9, for simplicity,
One pad holder 122a1 and vacuum pad 1
20a1). At this time, the control unit 17
By driving the rodless air cylinder 130 through the moving pad holders 122a2 to 122a8,
Is fixed pad holder 1 as much as possible according to the shape of work W.
22a1 side. And vacuum pad 1
The workpieces W adsorbed and held by 20a1 to 120a8 and adhered to each other are placed on the Mo plate M, for example, 15 pieces in the first row along the short direction of the Mo board M, and 14 pieces in the second row alternately, for example, 5 pieces. Closely align over the rows (see FIG. 9). It is possible to change the close contact pitch of the workpiece W held by suction by appropriately changing the stopper position. Therefore, the workpiece W can be closely aligned regardless of its outer shape.

The above operation is repeated a predetermined number of times, and when the work W contact supply processing to the Mo plate M by the work supply unit 13 is completed, the rotary table 30 of the Mo plate feed unit 11 is completed.
Is rotated about 90 °, and the work W is supplied to the Mo plate M.
Is mounted on the Mo plate mounting portion 32a.
Rotate to the position facing.

As shown in FIG. 10, the spacer supply unit 14 includes an alignment feeder unit 141 for aligning and transporting the spacers S discharged from the bowl feeder B (see FIG. 2) in a line by a parts feeder (not shown). The separation unit 142 that separates the spacers S conveyed by the alignment feeder unit 141 one by one, and the spacers S separated by the separation unit 142 are taken out.
And a loader unit 143 for supplying the Mo plate (the work has already been supplied) placed on the Mo plate placing unit 32a in close proximity to and facing the 0 spacer supply unit 14.

The alignment feeder section 141 includes an alignment feeder 145 having a horizontal conveyance path 144 connected to the discharge port of the bowl feeder B, and a support 146 provided upright on the base surface 10b. 145 is supported by a support 146 via a support 147 such that the transport path 144 is located at a predetermined height.

The separation section 142 is attached to the support section 147 and has a configuration similar to the separation section 82 of the work supply section 13. That is, the separation unit 142 includes a spacer holding block 150 disposed close to an end (spacer transfer unit) 144 a of the transport path 144, an air cylinder, and the like. The spacer holding block 150 is controlled based on the control of the control unit 17. And a block moving unit 151 that moves up and down along the axial direction of the column 146. Then, the spacer transfer section 144a of the holding block 150
Is provided with a semi-elliptical groove 152 corresponding to the pitch of the spacer transfer portion 144a and having a size capable of sufficiently mounting the spacer S.
The spacer S conveyed via the (spacer transfer section 144a) is stopped and held by the groove 152 (the separating section 142 (spacer holding block 150) capable of separating and holding the spacer S separately). Height position is referred to as a reference height position).

The spacer holding block 150 includes:
A spacer detection sensor 15 for detecting whether or not the spacer S arrives at the spacer holding block 150 and is held there.
The detection data of the spacer detection sensor 155 is sent to the control unit 17. The transport path 144 that contacts the spacer S is
It has a structure that can be partially replaced as a Duracon.

The loader section 143 includes a chucking head section 160 for the spacer chuck, a support section 161 for supporting the chucking head section 160 so as to be able to move up and down, and moving the support section 161 in a horizontal plane (XY plane). And an XY robot 162 that supports it freely.

The supporting section 161 has a thin cylinder 165 installed on the XY robot 162, and is configured to move the chucking head 160 up and down by the driving force of the thin cylinder 165.

The chucking head 160 includes a housing 166 containing an air cylinder and a driving mechanism driven by the air cylinder, and a pair of chucks projecting from the lower surface of the housing 166 and mechanically connected to the driving mechanism. Claw portions 167, 167.

The chuck claws 167 are spaced apart from each other by a predetermined length and arranged in parallel with each other along the vertical direction, and each have an R shape. And
The chuck claws 167, 167 move in directions approaching each other by driving of a driving function according to the power of the air cylinder, chuck and hold the spacer S located between the claws 167, 167, and It is configured to be able to move in the direction away from each other and discharge the chucked spacer S. The chuck claws 167, 1
The separation distance when 67 is most separated is larger than the length of the wall pressure of the spacer S, and the proximity distance when the claw portions 167 and 167 are closest is smaller than the length of the wall pressure. I have. Then, before the spacer S chuck, the claw portions 167, 167 are in the most separated state.

According to the separating section 142 and the loader section 143 configured as described above, the spacer S conveyed through the conveying path 144 of the alignment feeder 145 is transferred to the separating section 142 via the spacer transfer section 144a. It is supplied to the groove 152 of the spacer holding block 150 and stops. At this time, the spacer detection sensor 155 detects that the spacer S is held in the groove 152, and the detection signal is sent to the control unit 17.

The control unit 17 drives the block moving unit 151 in accordance with the sent detection signal to
The spacer holding block 150 is raised from the reference height position to a predetermined height position (this position is referred to as a loader transfer position).

At this time, the XY robot 162 of the loader unit 143 moves the support unit 1 under the control of the control unit 17.
61 is moved in the XY plane, and the groove 15 of the separation portion 142 is moved.
The claw portions 167, 167 of each chucking head unit 160 are positioned above the pressure portion of the spacer S held at the position 2.

Subsequently, the chucking head 160 is lowered by driving the thin cylinder 165 in accordance with the control of the control unit 17, and the wall pressure of the spacer S is reduced by the claw 167.
167. And the control unit 1
By driving the air cylinder and the driving mechanism in accordance with the control of 7, the claw portions 167, 167 are moved in parallel so as to approach each other, and the thinned portion of the spacer S is chucked and held (see FIG. 11).

Next, under the control of the control unit 17, the block moving section 151 is driven to lower the spacer holding block 150 of the separation section 142 to the reference height position, and the XY robot 162 of the loader section 143 and the thin type. By driving the cylinder 165 to move the support 161 in the horizontal direction and lowering the chucking head 160, M
o A chuck claw 167 of the chucking head unit 160 is provided at a predetermined position on the Mo plate M mounted on the plate mounting unit 32a.
The chucked spacer S is placed on 167 (FIG. 11).
reference). The claw portions 167, 167 are driven by the driving of the air cylinder and the driving mechanism according to the control of the control unit 17.
Are moved in parallel so as to separate from each other, and the chucked spacer S is supplied to a predetermined position on the Mo plate M.

The above operation is repeated a predetermined number of times (for example, four spacers are supplied per one Mo plate M). When the spacer supply unit 14 completes the process of supplying the spacer S to the Mo plate M, the Mo plate feed is completed. The rotary table 30 of the unit 11 is rotated by about 90 °, and the Mo plate mounting unit 32a on which the Mo plate M to which the workpiece W and the spacer S are supplied is mounted.
Rotates to a position facing the Mo plate stacking and conveying section 15.

As shown in FIG. 12, the Mo plate stacking / conveying section 15 has a section L provided upright on the base surface 10b.
A frame 170 in the shape of a letter, a take-out portion 171 provided below the frame 170 to take out the Mo plate M from the rotary table 30, and a frame 170
And a loader unit 172 for stacking the Mo plates M taken out by the take-out unit 171 in five stages and storing the Mo plates M in a Mo boat on the boat transport conveyor 3.

The frame 170 is disposed such that the short side surface thereof is parallel to the right side surface 10t of the base surface 10b. It is installed on a flat surface (referred to as an inner surface) on the supply unit 14 side. The loader unit 1
The main part 72 is installed on the inner surface in the upper part of the frame 170. In the frame 170, the Mo plate take-out center position of the take-out unit 171 described later is set to M
o It is arranged on the base surface 110b so as to face and substantially coincide with the center position of the notch of the rotary table 30 which is close to and opposes the stacking / transporting section 15.

The take-out portion 171 is composed of an L-shaped block 176 mounted on the inner surface of the frame 170 via a lifting mechanism 175 so as to be movable up and down so that its rectangular working surface 176a is parallel to the base surface 10b. 17
6a is disposed on the working surface 176a of the
A magnet type rodless cylinder 178 that slides the slide portion 177 along the longitudinal direction of the plate, that is, in the direction approaching and away from the Mo plate feed portion 11.
And a Mo plate push-up portion 17 installed on the upper surface of a slide portion 177 parallel to the operation surface 176a of the L-shaped block 176.
9 is provided.

The elevating mechanism 175 is provided with LM guides 180, 180 which are opposed to the inner surface of the frame 170 at a predetermined interval and which are arranged perpendicular to the base surface 10b. Guide 18
A rolled ball screw (hereinafter abbreviated as a ball screw) 181 having an external thread portion 181a arranged in parallel with the guidelines 0 and 180, and connected to the ball screw 181 via a winding transmission mechanism such as a pulley. And a motor 182 with a brake for rotating the male screw portion 181a of the ball screw 181 through the wrapping transmission mechanism by the rotation drive to raise and lower the female screw portion 181b. The L-shaped block 176 includes LM guide 180, 180
The female screw portion 181 of the ball screw 181 is engaged with
b.

The Mo plate push-up portion 179 is provided on the slide portion 1.
The substantially L-shaped and substantially inverted L-shaped support pieces 185, 185, which are disposed opposite to the end of the frame 170 on the upper surface of the frame 77 at a predetermined interval and are viewed from the side facing the inner surface of the frame 170.
Similarly, the frame 17 on the upper surface of the slide portion 177
A substantially L-shaped and a substantially inverted L-shaped support piece 186, 186 is provided at an end opposite to the zero side and at a predetermined interval, and the support pieces 185, 185 and 186, 186 have a base. Surface 10b (the operating surface 17 of the L-shaped block 176)
Columns 187 of the same height on the upper surface parallel to 6a)
Is provided.

As shown in FIG. 12, the support pieces 185, 18
5 and the supporting pieces 186, 186 are disposed so that the portions 185a, 186a projecting upward are located along the side surface of the sliding portion 177 on the sliding direction side, and the supporting pieces 185, 185 Part 185a
And the protruding portions 186 of the support pieces 186, 186
The Mo is arranged so that the facing distance a is longer than the length of the Mo plate M in the lateral direction. In addition, four pillars 185, 1
The intersection formed by connecting the centers of the upper surfaces of the plates 85, 186, and 186 in a cross shape is defined as the Mo plate take-out center position.

On the other hand, as shown in FIG. 12, the loader section 172 has a chucking head section 190 for the Mo plate chuck.
And the chucking head 190 is moved to the slide 17
7 and a supporting portion 191 that supports the movable portion 191 in the horizontal direction along the sliding direction. The supporting portion 191 is attached to the upper portion of the frame 170.

The supporting portion 191 has an LM guide 192 installed on the upper portion of the inner surface of the frame 170 so as to have a guide line parallel to the sliding direction of the sliding portion 177, and is attached to the LM guide 192.
Moving mechanism 19 that moves horizontally according to 92 guidelines
3 having a rodless cylinder 194 having the same.

The chucking head 190 includes a pair of chucking poles 195 and 195 which are spaced apart from each other by a predetermined length and arranged in a hanging manner.
95, a rotary cylinder 197 and a wrapping transmission mechanism 198 mechanically connected to the support plate 196.
A swing mechanism 199 that swings the support plate 196 by about 90 degrees about the axis passing through the center of the support plate 196 and along the central axis of the pole 195 by driving the wrapping transmission mechanism 198 in accordance with the rotational power of the pole 97.
And a holding unit 200 that holds the swing mechanism 199. The holding unit 200 is attached to the moving mechanism 193.

The diameters of the chuck poles 195 and 195 are slightly smaller than the diameters of the semicircular portions m1 and m2 of the Mo plate M. Further, Mo plate supporting pieces 201, 201 protruding toward the opposite direction are mounted on the lower ends of the chuck poles 195, 195 to support the Mo plate M.

A moving mechanism 202 having a plurality of pulleys and link mechanisms is attached to the support plate 196.
7 according to the rotational power of the chuck 7
Of the chucks 195 and 195 and the Mo plate supporting pieces 201 and 20 of the poles 195 and 195.
It is possible to rotate the projecting direction of 1 with its central axis as a rotation axis. In the initial state before the Mo plate M is chucked, the chuck poles 195, 1
95 is the most distant, and the Mo plate support piece 201,
The projecting directions of 201 are opposite to each other.

The holding unit 200 is provided with a moving mechanism 20 having two guide shafts 205, 205 and the like arranged opposite to each other and parallel to the central axis of the chuck poles 195, 195.
The chucking poles 195 and 195, the support plate 196, and the swing mechanism 199 can be integrally moved up and down by driving the moving mechanism 206.

According to the Mo board stacking / transporting section 15 configured as described above, the Mo board M to which the work W and the spacer S are supplied to a position facing the Mo board stacking / transporting section 15.
(Hereinafter, simply referred to as a Mo plate M), that is, the Mo plate push-up portion 1 of the take-out portion 171
When the Mo plate M is positioned above the control unit 79, the control unit 1
7, the motor with brake 182 and the ball screw 181 of the elevating mechanism 175 are driven to
Raise 81b and L-shaped block 176.

At this time, the support pieces 185 to 186 of the Mo plate push-up portion 179 and the columns 187 provided on the support pieces 185 to 186 rise with the rise of the L-shaped block 176, and rise above the Mo plate push-up portion 179. The Mo plate M placed on the Mo plate placing portion 32a after passing through the notch portion 33a located at
5A and 186a, the Mo plate M is pushed up by the support column 187 to support the Mo plate M on the rotary table 30.
o Separated from the plate mounting part 32a (see arrow A in FIG. 13).

With the Mo plate M separated from the Mo plate mounting portion 32a, the rodless cylinder 178 is driven under the control of the control unit 17 to slide the slide portion 177 away from the rotary table 30. As a result, the Mo plate push-up portion 179 on the slide portion 177
Also slides away from the rotary table 30 together with the slide portion 177, and separates from the position above the notch 33a (see arrow B in FIG. 13).

Notch 33 of rotary table 30
a in a state where the holding unit 2 is slid to a position completely separated from the position above the holding unit 2 under the control of the control unit 17.
00 for the chuck pole 1
95, 195, the support plate 196, and the swing mechanism 199 are integrally lowered, and the swing mechanism 199 is driven via the rotary cylinder 197 and the winding transmission mechanism 198, so that the support plate 196 is moved by the chucking pole 195 to Mo. The Mo plate M is moved until it reaches a position facing the semicircular portions m1 and m2 of the Mo plate M on the plate push-up portion 179.

Then, the moving mechanism 202 is driven in accordance with the control of the control unit 17, and the chuck pole 195,
195 in a direction approaching each other, and the pole 1
95, 195 are respectively engaged with the semicircular portions m1, m2 of the Mo plate M (see arrow B in FIG. 13).

In a state where the poles 195 and 195 are engaged with the semicircular portions m1 and m2 of the Mo plate M, the moving mechanism 206 of the loader 172 is driven under the control of the control unit 17, and the chucking poles 195 and 195 are driven. , Support plate 19
6, and the swing mechanism 199 are raised integrally.
At this time, the Mo plate M is attached to the chuck poles 195, 19
5 is supported by the Mo plate support pieces 201, 201, and integrally rises together with the support plate 196 and the like and separates from the Mo plate push-up portion 179 (see arrow C in FIG. 13).

In a state where the support plate 196 and the Mo plate M have been raised to predetermined positions, the rotary cylinder 194 is driven according to the control of the control unit 17 to slide the moving mechanism 193 to the predetermined position. At this time,
The holding unit 200 attached to the moving mechanism 193 slides to a predetermined position together with the sliding of the moving mechanism 193 in a state where the Mo plate M is chucked by the chuck poles 195 and 195.

In a state where the slide has been performed to a predetermined position,
By driving the moving mechanism 206 of the holding unit 200, the chuck poles 195 and 195, the support plate 196, and the swing mechanism 199 are integrated to form the chuck pole 19.
5, 195 are lowered until the lower end portion thereof reaches the vicinity of the predetermined Mo plate mounting position. Then, the moving mechanism 202 is driven in accordance with the control of the control unit 17, and the chuck pawls 195 and 195 (that is, the pawls 195 and 195) are driven.
By rotating the Mo plate supporting pieces 201, 201), the Mo plate M chucked by the Mo plate supporting pieces 201, 201 is placed at the Mo plate placing position.

Subsequently, the above operation is performed next. The Mo plate M2 which has been rotationally moved to a position facing the Mo plate stacking / conveying section 15 next.
The Mo plate M is placed on the first Mo plate M1 placed at the Mo plate placing position.
The sheets are stacked one on another via the spacer S supplied to the plate M1.

Thus, a predetermined number of steps (5 steps) Mo plate M
In the state where 1 to M5 are stacked, each of the moving mechanisms described above is driven by the same control in accordance with the control of the control unit 17, whereby the chuck pole 195,
195 are engaged with the semicircular portions m1 and m2 of the lowermost Mo plate M1, respectively, and the chucking poles 195 and 195 are raised, whereby the stacked Mo plates M1 to M5 are raised.
Is transported above a predetermined Mo boat and stored in the Mo boat.

Next, the overall operation of the work aligning and stacking apparatus 6 will be described.

When the magnetron production line 1 is operated, the workpieces W that have been subjected to the Mo plate application step and the Mo plate drying step are sent to the work aligning and stacking device 6 via the work transfer conveyor 2 by 10 pieces. .

At this time, the rotary table 30 is moved from the stocker unit 40 to the rotary table 30 by the above-described suction and transfer operation of the loader unit 41 of the Mo plate supply unit 12 at a predetermined timing in accordance with the work W transfer timing after the end of the Mo plate drying process. The Mo plate M automatically supplied to the Mo plate mounting portion 32a of the second position opposes the work supply portion 13 by the rotation of the rotary table 30 based on the operation of the Mo plate feeding portion 11 (the rotation time is tr). Move to the position you want.

When the Mo plate M1 moves to a position facing the work supply unit 13, the work supply unit 13 performs the above-described alignment, separation, and transfer operations of the work W under the control of the control unit 17, and the work W Is supplied in close contact with the Mo plate M1 (see FIG. 9).

On the other hand, the rotation of the rotary table 30 causes the Mo plate mounting portion 32d to move to a position facing the Mo plate supply portion 12, so that the second Mo plate M2 is simultaneously moved with the work W supply operation described above. The supply operation of the Mo plate mounting portion 32b is also performed (the work supply operation time tw is longer than the Mo plate supply operation tm).

When the operation of the work supply unit 13 is repeated a predetermined number of times and the work supply unit 13 completes the process of closely supplying the work W to the Mo plate M1, the Mo plate M1 to which the work W has been supplied is removed from the Mo plate M1. The rotation of the rotary table 30 based on the operation of the plate feed unit 11 causes the rotary plate 30 to move to a position facing the spacer supply unit 14, and the Mo plate M2 moves to a position facing the work supply unit 13.

At the position facing the spacer supply section 14, Mo
When the plate M1 moves, the above-described separation and transport operation of the spacer S is executed by the spacer supply unit 14 under the control of the control unit 17, and the spacer S is supplied to a predetermined position of the Mo plate M1 (see FIG. 11). .

The work supply unit 1 is also provided for the Mo plate M2.
Work contact supply processing is performed by the operation of 3,
Further, the M that has moved to a position facing the Mo plate supply unit 12
The third Mo plate M3 is also supplied to the plate mounting portion 32c (spacer supply time ts>tw> tm).

When the operation of the spacer supply unit 14 is repeated a predetermined number of times and the spacer supply unit 14 completes the operation of supplying the spacer S to the Mo plate M1, the Mo plate M1 to which the workpiece W and the spacer S have been supplied is removed from the Mo plate M1. The rotation of the rotary table 30 based on the operation of the feeding unit 11 causes Mo to rotate.
It is rotated to a position facing the plate aligning / stacking / conveying unit 15, and similarly, the Mo plate M2 → the spacer supply unit 14, the Mo plate M
3 → Rotate and move with the work supply unit 13.

Subsequently, when the Mo plate M1 moves to a position opposing the Mo plate stacking / transporting unit 15, the Mo plate stacking / conveying unit 15 is controlled by the control unit 17 to stack the Mo plate M1. A transport operation is performed.

The spacer supply process is also performed on the Mo plate M2 by the operation of the spacer supply unit 14, and the work close contact supply process is performed on the Mo plate M3 by the operation of the work supply unit 13. Further, the Mo plate supply unit 12
The fourth Mo plate M4 is also supplied to the Mo plate mounting portion 32d which has moved to a position opposite to the above (note that the Mo plate stacking transfer processing time tc>ts>tw>tm> tm).

When the transfer operation for stacking is completed, the Mo plate M
1 is separated from the Mo plate mounting portion 32a.
The rotary table 30 is rotated based on the operation 1 to move to a position facing the Mo plate supply unit 12, and similarly,
The Mo plate M2 → Mo plate stacking / conveying unit 15, Mo plate M3 → spacer supply unit 14, Mo plate M4 → Work supply unit 13, and the following operations are sequentially supplied to the Mo plate M5. M6,... Are continuously performed.

The control timing of the Mo plate feeder 11 of the control unit 17 and the Mo plate feeder 12
FIG. 14 is a time chart showing an outline of the control timing of the work supply unit 13, the control timing of the spacer supply unit 14, and the control timing of the Mo plate stacking and conveying unit 15.

As shown in FIG. 14, the operation time (control time) of each operation unit (Mo plate supply unit 12, work supply unit 13, spacer supply unit 14, and Mo plate stacking / conveying unit 15) is set. Since the control timing (rotational movement timing of the rotary table 30) of the Mo plate feeding unit 11 is determined, each operation unit (the Mo plate supply unit 12, the work supply unit 1).
3. Spacer supply unit 14 and Mo plate stacking / conveying unit 1
By the operation 5) corresponding to the rotational movement of the rotary table 30, the continuous work close contact alignment processing and the stacking / transportation processing of the Mo plates on which the work is aligned and closely contacted can be performed automatically and unattended. In the present embodiment, in the Mo plates M5, M10,... Which are multiples of 5 which is the number of stacks in the present embodiment, for example, the Mo plate M5 is formed by stacking Mo1 to M4.
After further stacking on the plates M1 to M4, it takes a processing time tc1 to transport and store the Mo plates M1 to M5 stacked in the predetermined stage (five stages) to the Mo boat. Is the same as the other Mo plates.

As described above in detail, according to the work aligning and stacking apparatus 6 of the present embodiment, the close contact aligning process of the work and the stacking process of the Mo plate on which the work is closely aligned are automatically and unmannedly performed. Alternatively, since the operation is performed mechanically by an operation monitoring operator or the like), the efficiency of the close alignment processing and the stacking processing can be improved, and the work manufacturing cost can be dramatically increased.

Further, according to the work aligning and stacking apparatus 6 of the present embodiment, the work W transport / supply portion of the loader section 82 for aligning and supplying the work W to the Mo plate M is constituted by using the vacuum pads 120a1 to 120a8. Since the pitch of the vacuum pads 120a1 to 120a8 can be freely changed, the workpieces can be closely aligned even in an automatic and unmanned mechanical workpiece alignment process, and the efficiency of supplying the workpiece to the Mo plate M is improved. be able to.

Further, according to the work aligning and stacking apparatus 6 of the present embodiment, the spacer S for the Mo plate M to which the work W is supplied in close contact is automatically transferred by the transfer operation of the loader unit 143, and furthermore, the desired movement of the Mo plate M is achieved. Can be supplied to the location. That is, since it is not necessary to fix the spacer to the Mo plate in advance, the Mo plate can be used for any work without specializing the Mo plate, and the versatility of the Mo plate can be improved.

Also, when only Mo plates are stacked and stored in a stocker or the like, the storage space is increased by the amount that the spacer is not fixed.

Further, when the work is placed on the Mo plate, there is no positional interference with the spacer, so that the work can be placed on the Mo plate with maximum contact, and the work on the Mo plate can be placed on the Mo plate. The load capacity can be increased. As a result, the work production efficiency can be improved.

In the present embodiment, a work aligning and stacking apparatus used in a magnetron ceramic parts manufacturing line using, for example, a cylindrical ceramic part having a diameter of 20 mm used in a magnetron as a part (work) will be described. However, the present invention is not limited to this, and can be applied to a line for processing and manufacturing another work.

In the present embodiment, the plate jig is M
o Although a plate is used, the present invention is not limited to this, and a plate jig made of another material (for example, determined according to the type of work) may be used.

Further, in this embodiment, the work aligning and stacking apparatus for stacking the Mo plates to which the workpieces are supplied in close contact with one another through the spacer supply operation has been described. Naturally, the present invention can also be applied to a work aligning apparatus that aligns and supplies a number of works that are sequentially conveyed in close contact with the Mo plate.

[0135]

As described above, according to the work aligning apparatus, the work aligning and stacking method and the work aligning and stacking apparatus according to the present invention, the work is arranged in close contact alignment and / or.
Each operation means (table means, table means,
Since the plate jig supply means, the work supply means, the spacer supply means and the plate jig stacking means) can be automatically and unmanned mechanically by continuous operation, the close alignment processing and / or the step It is possible to improve the efficiency of the stacking process and dramatically increase the work manufacturing cost.

In particular, according to the present invention, the state in which the pitch between adjacent suction mechanisms in the plurality of suction mechanisms is minimized by the first moving support mechanism, that is, the state in which the plurality of suction mechanisms are sucked. Since the workpieces can be aligned and supplied on the plate jig in a state where the respective workpieces are in close contact with each other, the workpieces can be aligned and supplied in a state where the workpieces are in close contact with each other, thereby improving the work supply efficiency to the plate jig. be able to.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a schematic configuration of a magnetron ceramic parts manufacturing line using a work alignment and stacking apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged perspective view showing a schematic configuration of a work aligning and stacking apparatus.

FIG. 3 is a top view illustrating a configuration of a rotary table.

FIG. 4 is an enlarged perspective view showing a schematic configuration of a stocker unit.

FIG. 5 is an enlarged perspective view showing a schematic configuration of a loader unit.

FIG. 6 is a diagram for explaining the Mo plate supply operation of the loader unit.

FIG. 7 is an enlarged perspective view showing a schematic configuration of an alignment feeder unit and a separation unit.

FIG. 8 is an enlarged perspective view showing a schematic configuration of a loader unit.

FIG. 9 is a diagram for explaining a work supply operation of the loader unit.

FIG. 10 is an enlarged perspective view showing a schematic configuration of a spacer supply unit.

FIG. 11 is a diagram for explaining a spacer supply operation of the loader unit.

FIG. 12 is an enlarged perspective view showing a schematic configuration of a Mo plate stacking / conveying unit.

FIG. 13 is a view of a reservoir for explaining the operation of separating the Mo plate from the rotary table of the Mo plate stacking / conveying unit.

FIG. 14 is a time chart showing an outline of control timings of a Mo plate feeding section, a Mo plate supply section, a work supply section, a spacer supply section, and a Mo plate stacking / conveying section of the control unit.

FIG. 15 is a perspective view showing a work alignment step using a conventional plate jig to which a spacer is fixed.

[Explanation of symbols]

Reference Signs List 6 Work alignment stacking device 11 Mo plate feeding unit 12 Mo plate supply unit 13 Work supply unit 14 Spacer supply unit 15 Mo plate stacking transfer unit 16 Work alignment stacking unit 17 Control unit 30 Rotary table 31, 62, 71, 111 , 147, 161, 191
Support portions 32a to 32d Mo plate mounting portions 33a to 33d Notch portions 40 Stocker portions 47, 60, 170 Frames 48, 181 Rolled ball screws 49 Forks 50 Shafts 55, 182 Motors with brakes 56 Rising end detection sensor 57 Falling end Detection sensor 61, 110, 117 Vacuum head 65, 180, 192 LM guide 66, 194 Rodless cylinder 70 Air cylinder 72, 120a1 to 120a8 Vacuum pad 80, 145 Alignment feeder 81, 142 Separation unit 82, 143, 172 Loader unit 85, 144 Conveyance path 86 (86a1 to 86a8) Passage 86b1 to 86b8 Work transfer section 91, 205 Guide shaft 92 Work holding block 93b1 to 93b8, 152 Groove 94 Work detection sensor 110 Vacuum Head support 112, 162 XY robot 115 Rotary actuator 121 Vacuum pad holder mechanism 122a1 Fixed pad holder 122a2 to 122a8 Moving pad holder 123 Shaft 124 Link mechanism 125 Vacuum generation source 130 Rodless air cylinder 131 Shock absorber 141 Alignment feeder 144a Spacer transfer section 146, 187 Support 150 Spacer holding block 151 Block moving section 155 Spacer detection sensor 160, 190 Chucking head section 165 Thin cylinder 167 Chuck section 171 Take-out section 175 Lifting mechanism 176 L-shaped block 177 Slide section 178 Magnet Rodless cylinder 179 Mo Plate push-up portion 185, 186 Supporting pieces 193, 202, 206 Moving mechanism 195 Chuck pawl 196 Support plate 197 Rotary cylinder 198 Winding transmission mechanism 199 Swing mechanism 200 Holder 201 Mo Plate support piece

Continued on the front page (72) Inventor Toshiyuki Akimoto 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside Toshiba Yokohama Office

Claims (8)

[Claims] 1. A table on which a plurality of mounting portions on which a plate-like jig for mounting a work can be mounted is installed, and the table portion is moved to circulate and move the plurality of mounting portions. A table unit having a moving unit for moving the plate jig, a stock unit for stocking a plurality of the plate jigs, and taking out and transporting the plate jigs one by one from the stock unit at a predetermined timing. Plate jig supply means for placing each of the plate jigs having been circulated by the table means for each of the placement sections moving, and work alignment for arranging a large number of works in a plurality of rows and sequentially transporting them. A conveying unit, a work separating unit for sequentially separating the sequentially conveyed works from the work aligning and conveying unit for each of a plurality of works positioned at the head of each row in accordance with a predetermined timing, and a plurality of work separating units; Work is minute Each time it is released, it is driven to hold and convey the plurality of works, and the plate-like jig supplied by the table means through the plate-like jig supply means by the table means. A work supply unit for providing a predetermined number of works for each plate jig sent by the operation of the work separation unit and the work close alignment unit, comprising a work close alignment unit arranged and arranged in close contact with each other on the fixture; A work aligning apparatus, comprising: a table means, a plate-like jig supply means, and a control means for controlling the work supply means. 2. A table section on which a plurality of mounting sections on which a plate-like jig for mounting a work can be mounted is installed, and a movement for moving the table section to circulate the plurality of mounting sections. Table means having a portion, a stock means for stocking a plurality of the plate-shaped jigs, and taking out and transporting the plate-shaped jigs one by one from the stock means at a predetermined timing, and transporting the jigs Plate jig supply means for placing the plate jigs for each of the placing sections circulating and moving by the table means, and a work aligning / transporting section for aligning a large number of works in a plurality of rows and sequentially transporting them. A work separating unit for sequentially separating the sequentially conveyed works from the work aligning and conveying unit for each of a plurality of works positioned at the head of each row according to a predetermined timing; and separating the plurality of works by the work separating unit. Is The plate-shaped jig which is driven every time to hold and convey the plurality of works, and the plurality of conveyed works are sent by the table means through the plate-shaped jig supply means. Work supply means for providing a predetermined number of works for each plate jig sent by the operation of the work separation unit and the work close alignment unit, comprising a work close alignment unit arranged and arranged in close contact with each other, A spacer aligning / transporting unit for sequentially transporting a plurality of pre-stocked spacers in a line, a spacer separating unit for sequentially separating a leading spacer of the sequentially transported spacers at a predetermined timing, and a spacer by the separating unit. Is driven each time it is separated, the separated spacer is held and transported, and the transported spacer is moved before being sent by the table means. A spacer transport / supply unit is provided for supplying a work to a predetermined position on the plate jig to which the workpiece is supplied, and a predetermined number of spacers are supplied to each plate jig by the operation of the spacer separating unit and the spacer transport / supply unit. A spacer supply means, and a plate for sequentially separating the workpiece and the plate-like jig to which the work and the spacer sequentially supplied by the table means are supplied from the mounting portion, transporting the separated jig to a predetermined position, and stacking them at the predetermined position. Jig stacking means;
A work comprising: a table controller, the plate jig supply unit, the work supply unit, the spacer supply unit, and a control unit that controls and controls the plate jig stacking unit. Alignment stacking device. 3. The table portion is substantially circular and the plurality of mounting portions are four, and the four mounting portions are symmetrically mounted on the upper surface of the substantially circular table portion with respect to the center. The stock means, the work supply means, the spacer supply means, and the plate jig stacking means are arranged around the table section, and the moving section has the substantially circular shape. The table part is intermittently rotated so that each of the mounting parts reaches a position substantially opposed to the stock means, the work supply means, the spacer supply means, and the plate jig stacking means. Item 2. A work alignment / stacking device according to Item 2. 4. The stock means has a mounting portion for mounting the plurality of plate-shaped jigs, and a support portion for supporting the mounting portion so as to be able to move up and down in accordance with the predetermined timing. The plate-like jig supply means has a hanging mechanism supported in a hanging manner, and a moving supporting mechanism that supports the sucking mechanism movably in a horizontal direction and a vertical direction. The suction mechanism is moved through to hold the uppermost plate jig of the plurality of plate jigs placed on the mounting portion, and the suction mechanism is moved via the moving support mechanism. 4. The apparatus according to claim 2, wherein the plate jig held by the suction mechanism is placed on the plate jig. 5. A holding mechanism for holding only a plurality of works positioned at the head of each of a plurality of rows of works conveyed by the work aligning and conveying section in a row, the work separating section comprising: A lifting mechanism that raises a holding mechanism to separate the plurality of works from other works, and the work close contact alignment unit includes a plurality of works corresponding to the number of works lifted and separated by the rising separation mechanism. A first mechanism that supports a suction mechanism and a pitch between adjacent suction mechanisms of the plurality of suction mechanisms so as to be movable in a row direction of the work.
And a second movement support mechanism that supports the suction mechanism and the movement support mechanism so as to be movable in a horizontal direction and a vertical direction. The plurality of movement support mechanisms are provided via the second movement support mechanism. The suction mechanism is moved to suck and hold the plurality of works, respectively, and the first movement support mechanism and the plurality of works holding the plurality of works are held via the second movement support mechanism. A plurality of workpieces held by the suction mechanism while moving the suction mechanism integrally and minimizing a pitch between adjacent suction mechanisms in the plurality of suction mechanisms via the first movement support mechanism. Are arranged on the plate-shaped jig.
5. The work aligning and stacking device according to 3 or 4. 6. A spacer separating unit, comprising: a holding mechanism for holding only a spacer positioned at the head of the spacers conveyed by the spacer aligning / conveying unit; and raising the holding mechanism to separate the spacer from other spacers. The spacer supply unit includes a chuck mechanism for chucking the spacer that has been lifted and separated by the lift separation mechanism, a support mechanism that supports the chuck mechanism, the chuck mechanism, and a support. A moving support mechanism that supports the mechanism so as to be movable in a horizontal direction and a vertical direction. The chuck mechanism is moved through the moving support mechanism to chuck and hold the spacer. The support mechanism and the chuck mechanism holding the spacer are integrally moved through a mechanism to Pacer has to be disposed at a predetermined position on the supplied sheet-shaped jig according to claim 2
6. The work aligning and stacking apparatus according to any one of claims 5 to 5. 7. A plate-like jig stacking means, comprising: a plate-like jig to which the work and the spacer are supplied; A separation unit that slides the jig in a predetermined direction to separate the jig from above the table unit, a chuck mechanism for chucking the plate jig separated from the table unit, and a rotation that rotatably supports the chuck mechanism. A supporting mechanism, and a moving supporting mechanism that supports the supporting mechanism movably in a vertical direction and a horizontal direction, and moves the chuck mechanism via the moving supporting mechanism and the rotating supporting mechanism to thereby move the table. The plate jig separated from the part is chucked and held, and the rotation support mechanism and the chuck mechanism holding the plate jig are integrally transferred via the moving support mechanism. The work aligning and stacking device according to any one of claims 2 to 6, wherein the work aligning and stacking device is moved to be placed at the predetermined position. 8. A step of moving a table on which a plurality of mounting portions on which a plate-shaped jig for mounting a work can be mounted is mounted to circulate and move the plurality of mounting portions; A step of stocking a plurality of jigs, taking out the stocked plate-shaped jigs one by one according to a predetermined timing, conveying the jigs, and circulating and moving the conveyed plate-shaped jigs. A plate-like jig supply step for placing each of the loading sections; a plurality of works arranged in a plurality of rows and sequentially transported; and a plurality of workpieces positioned at the top of each row according to a predetermined timing. The workpieces are sequentially separated from each other, the separated workpieces are held and transported, and the transported workpieces are moved through the plate-shaped jig supply step by the table section circulating movement step. Put it on the plate jig A work supply step of supplying a predetermined number of works for each plate jig to be sent by arranging them in close contact with each other, and a plurality of pre-stocked spacers arranged in a line and sequentially conveyed. Then, the leading spacer in the sequentially transported spacer is sequentially separated according to a predetermined timing, the separated spacer is held and transported, and the transported spacer is transported by the table section circulating movement step. A spacer supplying step of supplying a predetermined number of spacers for each plate jig by supplying the plate jig to a predetermined position on the supplied plate jig;
The plate-shaped jigs to which the work and the spacers sequentially fed by the table means are sequentially separated from the mounting portion, transported to a predetermined position, and stacked at the predetermined position. And a step of stacking works.