JPH11160244A5 - - Google Patents

Info

Publication number
JPH11160244A5
JPH11160244A5 JP1997329226A JP32922697A JPH11160244A5 JP H11160244 A5 JPH11160244 A5 JP H11160244A5 JP 1997329226 A JP1997329226 A JP 1997329226A JP 32922697 A JP32922697 A JP 32922697A JP H11160244 A5 JPH11160244 A5 JP H11160244A5
Authority
JP
Japan
Prior art keywords
drive shaft
inspection device
macro inspection
coupling means
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997329226A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11160244A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP32922697A priority Critical patent/JPH11160244A/ja
Priority claimed from JP32922697A external-priority patent/JPH11160244A/ja
Publication of JPH11160244A publication Critical patent/JPH11160244A/ja
Publication of JPH11160244A5 publication Critical patent/JPH11160244A5/ja
Pending legal-status Critical Current

Links

JP32922697A 1997-11-28 1997-11-28 マクロ検査装置 Pending JPH11160244A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32922697A JPH11160244A (ja) 1997-11-28 1997-11-28 マクロ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32922697A JPH11160244A (ja) 1997-11-28 1997-11-28 マクロ検査装置

Publications (2)

Publication Number Publication Date
JPH11160244A JPH11160244A (ja) 1999-06-18
JPH11160244A5 true JPH11160244A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-07-21

Family

ID=18219068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32922697A Pending JPH11160244A (ja) 1997-11-28 1997-11-28 マクロ検査装置

Country Status (1)

Country Link
JP (1) JPH11160244A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10121115A1 (de) * 2001-04-28 2002-10-31 Leica Microsystems Haltevorrichtung für Wafer
JP4922334B2 (ja) * 2009-03-31 2012-04-25 株式会社東芝 パターン検査装置およびパターン検査方法

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