JPH11157628A - Substrate side-alignment device and substrate side-alignment reversing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure side-alignment of a substrate before the film applied face thereof is reversed downward. SOLUTION: Before a substrate 18 is reversed by a substrate reversing device 16 for a substrate side-alignment reversing device 10, side-alignment of the substrate 18 is performed by a substrate side-alignment device 14. The substrate side-alignment device 14 is formed with a substrate supporting roller group 24 to support the carried substrate 18 at its opposite ends in the cross direction from the lower side and a side-alignment member 26 to push the substrate 18, supported by the substrate supporting roller group 24, at its opposite ends in the cross direction for side-alignment.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate width shifting device for centering a substrate in a width direction in a process prior to film bonding in a film bonding device, and to invert the substrate 180 degrees after centering the substrate. The present invention relates to a substrate width reversing device configured as described above.

[0002]

2. Description of the Related Art A laminate film having a photosensitive resin layer is formed on a substrate for a printed wiring board, a glass substrate for a liquid crystal panel,
There is a film sticking device that sticks to the surface of a substrate exemplified by a substrate for plasma display.

In such a film sticking apparatus, a substrate is transported by a substrate transport apparatus, and the laminated film is adhered on the upper surface thereof such that the photosensitive resin layer faces the laminated film. The film is cut continuously or according to the length of the substrate, and is pasted together with the substrate by passing the film between a pair of rotating laminating rolls.

In recent years, the circuit of a printed wiring board, pixels in a liquid crystal panel or a plasma display have become higher definition,
Even if a small amount of dust adheres to the substrate surface, if the film is pasted and the pattern is baked in a later process, the pixel where the dust adheres may cause defective products. I have.

On the other hand, there has been proposed a film sticking method and apparatus in which a film sticking surface of a substrate faces downward (lower surface) and a film is stuck to the lower surface from below.

In this case, since the film sticking surface cannot be brought into contact with a transport roller or the like, the film sticking surface faces upward and is transported to the vicinity of the laminating roll, where the substrate is placed on the side opposite to the film sticking surface. Is supplied from the laminating roll in a state where it is adsorbed from the surface and turned 180 °.

[0007]

When a substrate is fed between laminating rolls, a centering step called a so-called width-shifting process for matching the center position of the substrate in the width direction with the center line of the laminating roll is performed. Required.

In a conventional substrate width shifting device for centering, a substrate on a transport roller is lifted by a number of rollers rotating in a direction perpendicular to the transport roller, and both ends in the substrate width direction are aligned with a width shift plate or the like. The centering is performed by pushing inward in the width direction of the substrate.

Here, as described above, in the underlay-type film sticking apparatus for sticking the film with the film sticking surface of the substrate facing downward, when the substrate is turned over, it is the side opposite to the film sticking surface. It is necessary to suck the lower surface by the suction means and invert it by 180 °, but it is very difficult to suck the substrate from the lower surface in the vicinity of the substrate transfer roller because the suction plate and the transfer roller interfere with each other. . In particular, in recent years, the size of the substrate has been increased, and the suction plate must be large in order to adsorb the increased size of the substrate, and interference with the transport roller is inevitable.

Further, when the substrate is transported by the transport roller, if the substrate is large, the transport time becomes long, and the efficiency of the apparatus is reduced. Therefore, recently, a substrate is carried in by a robot.

On the other hand, since the film sticking device must be capable of sticking a film to substrates of various widths, the suction plate must be smaller than the smallest substrate. .

Therefore, in the case of a substrate of the maximum size, both ends of the substrate may be drooped drastically in a state of being sucked by the suction plate. It is not possible to use a device for moving a substrate, which is placed in a flat plate shape on a roller, as it is.

Further, it is conceivable that the substrate is placed on a horizontal suction plate and the substrate is shifted to the width. In this case, however, the area of the suction plate cannot be made sufficiently large as described above.
There is an inconvenience that the substrate of the maximum size slides off the suction plate.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a board width shifting device capable of reliably shifting the width of a substrate whose both ends in the width direction are likely to hang down as described above.

In addition, the substrate that can easily hang down at both ends in the width direction can be reliably moved to the side, and can be fed to the laminating roll without being damaged by 180 ° inversion by inverting the substrate. An object of the present invention is to provide a substrate width reversing device.

[0016]

According to the present invention, a substrate is fed in a substantially horizontal state together with a film between a pair of rotating laminating rolls.
In a substrate width shifting device that is arranged on the laminating roll entry side of the film laminating device for laminating a film on the substrate surface and adjusts the width direction position of the substrate with respect to the laminating roll, With respect to the transport path, it is horizontally movable from both outer sides in the width direction to the inner side, and is rotatably supported by an axis in the substrate transport direction. A substrate receiving roller group that protrudes inward, and that can be retracted outward from both ends in the width direction of the substrate on the transport path, and that the substrate on the substrate receiving roller group can advance and retreat from both widthwise outer sides; And a width-adjusting member for adjusting the width-direction position of the substrate by pressing both ends of the substrate in the width-wise direction, and moving the substrate receiving roller group and the width-adjusting member forward and backward in the substrate width direction. In synchronization with the plate receiving roller group drive device and biassing member driving device, or a control means for actuating independently by providing, it is to achieve the above object.

The laminating apparatus according to claim 2, wherein the substrate is fed in a substantially horizontal state together with the film between a pair of rotating laminating rolls, and the film is attached to the substrate surface. It is arranged on the roll entry side, with respect to the laminating roll, a substrate width adjuster for adjusting the width direction position of the substrate, and after the width adjustment by the substrate width adjuster, inverts the substrate by 180 °, and A substrate reversing device for transporting the substrate to the laminating roll, wherein the substrate width reversing device is configured such that the substrate width reversing device is horizontally inward from both outer sides in the width direction with respect to a horizontal transport path of the substrate. The substrate is rotatably supported by a shaft in the substrate transport direction, and is rotatably supported by a portion in the vicinity of both ends in the width direction of the substrate from below. A substrate receiving roller group protruding inward in the width direction and capable of being drawn in outside the width direction both ends of the substrate on the transport path; and advancing and retreating from both outer sides in the width direction with respect to the substrate on the substrate receiving roller group. A width-adjusting member for freely adjusting the width-direction position of the substrate by pressing both ends in the width direction of the substrate, a substrate-receiving-roller-group driving device for moving the substrate-receiving-roller group and the width-adjusting member forward and backward in the substrate width direction, and a width adjustment Control means for operating the member driving device synchronously or independently, wherein the substrate reversing device comprises: a suction plate capable of sucking the substrate by negative pressure; A rotating device that rotates 180 ° around the central axis of the substrate, and supports the rotating device so as to be able to move up and down and reciprocate in the substrate feeding direction, and transports the inverted substrate horizontally to the pair of lamination rolls. A suction plate conveying device capable, constitute a, it is to achieve the above object.

According to a third aspect of the present invention, in the second aspect, the substrate reversing device disposes the substrate by the suction plate at the suction start position of the substrate in the substrate feeding direction. It may be characterized in that it can be lifted to a high position.

Further, according to a third aspect of the present invention, in the third aspect of the present invention, the substrate reversing device is configured such that a portion near both ends in the width direction of the substrate is supported by the substrate receiving roller group, and The suction plate may be lowered to a position lower than the height position of the substrate receiving roller group until the apparatus moves toward the width.

In the present invention, the portions in the vicinity of both ends in the substrate width direction, which are hung down by the substrate receiving rollers in the substrate width adjusting device, are supported from below, and in this state, both ends in the substrate width direction are pushed by the width adjusting members, and By moving the substrate in the width direction on the upper side, the width shifting operation can be performed reliably.

In addition, the substrate reversing device adsorbs the substrate after the width adjustment from the side opposite to the film attaching surface, and removes the substrate by 180 degrees.
The film can be fed into the laminating roll by rotating the film by turning the film with the film suction surface facing downward.

[0022]

Embodiments of the present invention will be described below in detail with reference to the drawings.

As shown in FIG. 1, a substrate width shifting reversing device 10 according to the present invention comprises a pair of rotating laminating rolls 1 in a film sticking device (not shown).
A board width shifter 14 and a board reversing device 16 are arranged in this order from 2A and 12B toward the left in FIG.

The substrate reversing device 16 lifts the substrate 18 centered (width-adjusted) with respect to the laminating rolls 12A and 12B in the substrate width-adjusting device 14 and then lifts the substrate 18 and raises the substrate 18 at the raised position. At 1
The substrate 18 is turned by 80 °, and is fed horizontally between the pair of laminating rolls 12A and 12B as it is.

The substrate width shifter 14 pushes the substrate 18 carried in from the left side in FIG. 1 inward from both ends in the width direction by a hand unit 20 of a robot (not shown in the figure), thereby obtaining the width of the substrate. The width of the center line in the direction is adjusted to match the center line of the laminating rolls 12A and 12B.

The board width adjuster 14 can move in and out of the board 18 on the hand section 20 from both outer sides in the width direction and can rotate freely by a shaft 22A (see FIG. 4) in the board conveying direction. A substrate provided with a plurality of (four on each of the right and left) substrate receiving rollers 22 supported in the substrate width direction and capable of supporting the portions near both ends in the width direction of the substrate 18 from below when protruding inward in the substrate width direction. A receiving roller group 24 is provided.

The substrate width shifting device 14 is a substrate 1 supported by the substrate receiving roller group 24 from below.
8, a width-adjusting member 26 is provided which can move forward and backward from both outer sides in the width direction and adjusts the position of the substrate 18 in the width direction by pressing both ends of the substrate 18 in the width direction.

The substrate receiving roller group 24 is advanced and retracted in the substrate width direction by a substrate receiving roller group driving device 28 including an air cylinder 28A.

The width shifting member 26 is advanced and retracted in the substrate width direction by a width shifting member driving device 30 including an air cylinder 30A.

The air cylinders 28A, 30A can be operated synchronously or independently by the control device 32.

As shown in FIG. 1 and FIG. 2, the substrate receiving rollers 22 constituting the substrate receiving roller group 24 Four roller support members 34A and 34B are supported in each of the roller support members 34A and 34B, which are horizontally long in the feeding direction.

More specifically, as shown in FIGS. 3 and 4, each of the roller support members 34A and 34B has four brackets 35 protruding toward the center in the width direction of the substrate transport path. The bracket 35 is attached at a predetermined interval.
, The shaft 22A of the substrate receiving roller 22 is supported.

The substrate receiving roller group driving device 28 includes the air cylinder 28A, the roller support member 34A,
And a guide shaft 28B that supports the base 34B in the horizontal direction and toward the center in the width direction of the substrate transfer path.

As shown in FIG. 1, the upper end of each substrate receiving roller 22 constituting the substrate receiving roller group 24 is loaded with the substrate 18 into the substrate width reversing device 10 by the robot hand unit 20. Is lower than the lower surface of the substrate 18 at the carry-in stop position.

The width shifting member 26 has a vertical pressing surface 26A (see FIGS. 1, 4 and 5) that is parallel to the roller supporting members 34A and 34B and faces the center of the substrate conveying path in the width direction. A resin plate-shaped member, and
It is supported by the tip of the guide shaft 30B.

The width shifting member driving device 30 includes the air cylinder 30A and the guide shaft 30B.

The position of the width shifting member 26 above the substrate receiving roller 22 is
An escape groove 30C is formed so as not to interfere with the groove.

As shown in FIGS. 1 to 5, the air cylinders 28A and 30A and the guide shafts 28B and 30B
Are supported by a frame 29 of the apparatus via a support block body 29A so as to be able to advance and retreat horizontally toward the center in the width direction of the substrate transport path.

A replaceable spacer 33 is provided between the base end of the guide shaft 30B and the support block 29A.
Are arranged, and the width shifting member 2 is selected according to the size of the substrate 18.
6 can be restricted.

The substrate receiving roller 2 is located at a position near the substrate receiving roller 22 on the roller supporting member 34A.
An optical sensor 31 (see FIG. 3) for detecting whether or not the substrate 18 is placed on the substrate 2 is disposed.

The detection signal of the optical sensor 31 is output to the control device 32, and the control device 32 drives the air cylinder 30A based on this signal, and
6 is made to protrude (see FIG. 7).

Next, the substrate reversing device 16 will be described.

The substrate reversing device 16 is provided with
0, the suction plate 36 is adapted to approach the substrate 18 which has been carried in horizontally from below, and to be sucked by a negative pressure, and the suction plate 36 is disposed horizontally and perpendicular to the substrate transfer direction. A supporting frame 38 rotatably supported via the rotating shaft 36A, and an elevating device 40 supporting the supporting frame 38 so as to be vertically movable (see FIG. 6).
And a movable base 44 supported movably in the substrate transport direction and horizontally along the rail 42 and supporting the elevating device 40, and a belt 46A connected to the movable base 44. And a moving device 46 for reciprocating the moving table 44 along the rail 42.

Further, a large number of suction holes 36C (see FIG. 1) are provided on a suction surface 36B on the surface (the upper surface in FIG. 6) of the suction plate 36, so that the substrate 18 can be sucked by a negative pressure. .

The suction surface 36B is formed by cutting a fluororesin, and a large number of suction holes 36C are formed in the plate-like suction surface 3C.
6B, it is formed in a funnel shape expanding outward.

In each of the suction holes 36C, a suction board 36D made of fluororesin is disposed with its tip slightly protruding, and a vacuum is applied to the suction board 36D from the vacuum pipe 36E. The substrate 18 can be reliably held by suction (see FIG. 8).

Further, a heating element (not shown) such as a heating wire is built in the suction plate 36. When the substrate 18 is heated in advance, the substrate 18 sucked on the suction surface 36B is partially removed. Not to be cooled down.

The suction plate 36 can be rotated by 180 ° by a rotation device 37 together with a rotation shaft 36A. The rotating device 37 includes a belt wheel 37A, a motor 37B, and a belt 37C.

The left end in FIG. 2 of the rotating shaft 36A for integrally supporting the suction plate 36 projects outward from the support frame 38, and the projecting end thereof is
7A is attached. A belt 37C driven by a motor 37B is wound around the belt wheel 37A, whereby the suction plate 36 is moved by the motor 37B so that the suction surface 36B faces upward as shown in FIG. 6 (B), as shown in FIG.
6B can be in a downward state.

The elevating device 40 is mounted on the movable base 44 so as to guide the support frame 38 in a vertical direction, and a pair of left and right guide shafts 40A is mounted in parallel with the guide shaft 40A. Stand 4
And an air cylinder 40B for vertically moving the support frame 38 relative to the supporting frame 38.

As shown in FIG. 2, the moving device 46 includes a motor 46B mounted on the front surface (the side surface on which the substrate is loaded) of the substrate width reversing device 10, and a belt pulley 46C rotated by the motor 46B. A belt pulley 46D disposed near the entry side of the laminating rolls 12A and 12B;
A belt 46A wound around 46D and having the moving table 44 attached thereto. The belt 46A is driven by a motor 46B, so that the moving table 44 attached thereto is mounted on the moving table 44A. The lifting device 40, the supporting frame 38, and the suction plate 36, which are provided, are connected to the substrate width shifting device 14 and the laminating rolls 12A,
It is designed to reciprocate between a position near the 2B entry side.

Here, as shown in FIG. 6A, in the standby state, the suction plate 36 is positioned slightly lower than the lower surface of the substrate 18 carried by the hand unit 20. Also, as shown in FIG.
When the suction surface 36B is turned down by 0 ° and the suction surface 36B faces downward, the substrate 18 sucked on the suction surface 36B is positioned at a height between the pair of laminating rolls 12A and 12B.

Reference numeral 50 in FIG. 1 indicates a substrate heating device. This substrate heating device 50 is configured to include nine heating panels 51, and as shown in FIG.
The substrate 18 is heated from below while being carried into the laminating roll 12 while being sucked by the suction plate 36 of the substrate reversing device 16, so that the laminating roll 12 adheres the laminated film 52. This is to raise the temperature to an optimum temperature.

Two guide rollers 54 are provided at both outer sides in the width direction of the heating panel 51 for supporting both ends in the width direction of the substrate 18 to be carried in.

The guide roller 54 is made of heat-resistant resin. As shown in FIG. 1, the laminating roll 1 is mounted on a pair of left and right horizontal support bars 56 in the width direction of the substrate.
It is rotatably supported by a rotating shaft parallel to 2A and 12B.

The support bar 56 is made of metal, and is attached to and supported by the pair of left and right support plates 58 at the inner ends in the substrate width direction at both outer positions in the substrate width direction (see FIGS. 1 and 10).

As shown in FIGS. 10 and 11, the support plate 58 can be moved vertically by an air cylinder 62 while being guided vertically by a pair of guide shafts 60, respectively.

As shown in FIG. 10, the substrate 18 is sucked and inverted by the suction plate 36, and is horizontally conveyed at a height between the pair of laminating rolls 12A and 12B. The roller 54 stands by the air cylinder 62 at a position lower than the height of the substrate 18 via the support plate 58 and the support bar 56, and
As shown in FIG. 11, the substrate 18 can be raised to the level of the lower surface.

A gas blowing member 64 is arranged at a position adjacent to the tip of the support bar 56 on the laminating roll 12B side and between the supporting bar 56 and the laminating roll 12.

The gas spraying member 64 is made movable in the direction of the laminating roll 12B from the position shown in FIG. 10 to the position shown in FIG. 11 by an air cylinder 68 along a horizontal rail 66. A concave curved surface 64A having a curvature substantially equal to that of the laminating roll 12B is formed.
A gas such as compressed air is blown toward the laminated film 52 wound around 2B to bring the laminated film 52 into close contact with the laminating roll 12 and cool it uniformly in the width direction.

At the rear end (the left end in FIG. 9) of the gas blowing member 64 opposite to the laminating roll 12, a guide roller 64B is provided at the same position as the guide roll 54 in the substrate width direction. It is arranged to rotate in parallel with the roller 54. The guide roller 64B can be freely adjusted in the substrate width direction along the shaft 64C.

The height of the upper end of the guide roller 64B in the gas blowing member 64 is slightly lower (for example, about 5 mm) than the height of the upper end of the guide roller 54.

The support plate 58 can be replaced with one having a different length in the board width direction, and by this replacement, the position of the guide roller 54 in the board width direction can be changed.

As shown in FIGS. 1 and 10, the guide rollers 54 are supported on the support bar 56 at intervals in the substrate feeding direction, two on each of the right and left guide rollers. And a guide roller 5 between the guide roller 54 on the laminating rolls 12A and 12B side and the guide roller 64B of the gas blowing member 64.
A horizontal support plate 55 slightly lower (about 5 mm) than the upper end of 4 is provided so that the tip of the moving substrate 18 does not enter the lower side of the guide rollers 54 and 64B.

Reference numeral 69 in FIG. 10 indicates a truck of the substrate heating device 50. The carriage 69 is movable in the width direction of the substrate, and is used for a work space such as when the laminated film 52 is set between the laminating rolls 12A and 12B or when required for maintenance. The whole can be pulled out.

From both ends in the board width direction of the carriage 69,
A pair of side plates 69 sandwich the entire substrate heating device 50 therebetween.
A is provided upright, and a horizontal shielding plate 69B is provided at a position higher than the upper end of the substrate reversing device 16 with the left and right side plates 69B.
A and 69A are provided so as to be stretched. The shielding plate 69B prevents the substrate 18 from being cooled by the downward airflow from above.

Reference numeral 70 in FIGS. 10 and 11 denotes a film guide roll. This film guide roll 70
Is arranged near the entry side of the lower laminating roll 12 and is stacked on the laminating rolls 12A and 12B when it is rocked to a position shown by a solid line in FIG. 10 by a driving device (not shown). Body film 5
2 is guided so as to be in non-contact, and when it is rocked to the position shown in FIG. 11, the laminated film 52 is wound around the lower laminating roll 12B. .

As shown in FIG. 12, the laminate film 52 is formed by laminating a photosensitive resin layer 52B on a translucent support film 52A and further covering the same with a cover film 52C. As shown in FIG. 5, a tension roll group 74 from the film roll 72,
The sheet is wound around the lower laminating roll 12B via a half cutter 76, a cover film peeling device 78, a suction roll 80, and a guide roll 82, and supplied.

The suction roll 80 has a large number of suction holes (not shown) to which a negative pressure is applied on the surface thereof, and suctions the laminated film 52 wound around the outer periphery by an appropriate negative pressure. While being sent, the laminating rolls 12A and 12B and the suction roll 82, and the suction roll 80 and the tension roll group 7
4, the tension of the laminate film 52 can be optimally controlled.

The half cutter 76 includes a pair of disk cutters 76A and 76B separated in the film feeding direction.
And a cutter table 76C which is disposed above the disk cutters 76A and 76B, supports the laminated film 52 pushed upward by the disk cutters 76A and 76B, and cuts the laminated film 52.

Here, the disk cutters 76A, 76B
The cutter base 76C is reciprocally movable in the film feed direction by a running device (not shown). When cutting the cover film 52C, the cutter base 76C runs in the film feed direction in synchronization with the laminated film 52, and Cutter 7
6A and 76B are moved in the film width direction to perform a flying cut (cut between runs) for cutting the cover film 52C.

The interval between the pair of disk cutters 76A and 76B in the film feeding direction in the half cutter 76 is substantially equal to the interval between the substrates 18 fed between the laminating rolls 12A and 12B.

The cover film peeling device 78 comprises an adhesive tape roll 78A, a swing roll 78B, and a cover film take-up roll 78C. After being wound upward and outward on the swing roll 78B, it is wound by a cover film take-up roll 78C, and the swing roll 78B is inserted into the suction roll 80 by a swing mechanism 78D controlled by the control device 32. At the side position, the adhesive surface of the adhesive tape 79 is pressed against the receiving roll 78E via the laminate film 52 to the cover film 52C.

The adhesive tape 79 is made of the cover film 52C.
Cover film take-up roll 78C
The cover film 52C is peeled off from the photosensitive resin layer 52B by the
At the same time, it is taken up by a cover film take-up roll 78C.

The range in which the adhesive tape 79 is pressed against the cover film 52C by the swing mechanism 78D is other than the portion between the cutting lines formed by the pair of disk cutters 76A and 76B of the half cutter 76, thereby cutting the tape. The cover film 52C is peeled off, leaving a portion between the lines.

The laminate film 52 is separated from the substrates 18 by the cover film peeling device 78 as described above.
The photosensitive resin layer 52 </ b> B is peeled while leaving the intervening portion, and is fed to the lower laminating roll 12 </ b> B with the photosensitive resin layer 52 </ b> B exposed.

The upper laminating roll 12A
As shown in FIG. 14, the lower lever laminating roll 12B is instructed by a swing lever 84 so as to be able to freely move toward and away from the fixed laminating roll 12B.
, Is swingably supported by a side frame 86 of the apparatus, and is connected to an air cylinder 88 at an end opposite to the laminating roll 12A, and is swung by the expansion and contraction of the air cylinder 88.

The laminating rolls 12A, 12
A first nip roll 90, a transport roll 92, a second nip roll 94, and a rotary cutter 96 are arranged in this order from the laminating rolls 12A and 12B side in the downstream direction of the substrate B and the laminate film feeding direction.

The first nip roll 90 comprises an upper roll 90A and a lower roll 90B, between which the substrate 18 and the laminated film 52 attached thereto are attached.
Is sandwiched between them.

The upper roll 90A is attached to the tip of a substantially L-shaped swingable lever 91A.
By swinging the lever 91A by 1B, the lower roll 90B can be freely attached to and detached from the lower roll 90B.

The second nip roll 94 comprises an upper roll 94A and a lower roll 94B. The upper roll 94A is a free roll rotatably supported at the tip of a lever 95B rotatably supported by a shaft 95A. The upper roll 94A holds the substrate 18 and the laminated film 52 between itself and the lower roll 94B by its own weight. It is so sandwiched.

Here, the upper roll 90A of the first nip roll 90 is driven by a belt 98A, and the transport roll 92 and the lower roll 94B of the second nip roll 94 are driven by a belt 98B by a motor (not shown). ) Is transmitted, and can be rotated in synchronization with the feed speed of the laminating rolls 12A and 12B.

The rotary cutter 96 has a rotary blade 9
6A and a straight blade 96B. Rotary blade 96
A is a cylindrical member 96C arranged horizontally and in the substrate width direction.
The cutting blade 96D is wound spirally or obliquely straight on the outside of the cylindrical member 96B, and the straight blade 96B is arranged in a straight line extending in the substrate width direction in parallel with the central axis of the cylindrical member 96C. However, the rotation trajectory of the rotary blade 96A can be brought into contact with the rotation trajectory of the cutting blade on the passage trajectory of the laminated film 52 attached to the substrate 18.

The cutting edge 96D of the cylindrical member 96C is the same as that shown in FIG.
As shown in FIG. 4, when the laminated film 52 is located below the passing surface of the laminated film 52, the laminated film 52 passes above the cylindrical member 96C and inside the circular path of the cutting edge 96D. It has been like that.

Therefore, when the cylindrical member 96C is rotated from this state, the laminated film 52 is cut between the cutting blade 96D and the straight blade 96B.

Reference numeral 99 in FIG. 14 is disposed between the second nip roll 94 and the rotary cutter 96.
The laminated film 52 that has passed through the second nip roll 94
Or, the substrate 18 to which the laminate film 52 is attached,
A horizontal guide plate that guides the rotary cutter 96 to be surely passed horizontally is shown.

The laminated film 52 and the substrate 18 pass above the horizontal guide plate 99. The guide plate 99
Alternatively, the laminated film 52 and the substrate 18 may be advanced in a horizontal state by blowing compressed air or the like from below.

The straight blade 96B is attached to the tip of a swing lever 97 as shown in FIG.
14, when it is rocked counterclockwise in FIG. 14, it becomes a position where the laminated film 52 can be cut, and when it is rocked clockwise, the laminated film 5
2 and a standby position that does not interfere with the substrate 18.

The swing lever 97 is swingable by being driven vertically by an air cylinder 97B at the end opposite to the straight blade 96B.

Here, the swing lever 97 is formed to be long in the width direction of the substrate. An air blowing tube 100 is disposed above the swing lever 97, and the swing lever 97 is appropriately spaced in the width direction of the substrate. The compressed air can be blown in the direction of the rotary blade 96A through the blow-through hole 97C formed by the above.

Therefore, the laminated film 52 cut by the rotary blade 96A and the straight blade 96B is pushed downward by the compressed air blown from the air blowing pipe 100 through the blow-through hole 97C, or Blown away.

A cut piece receiver 102 that is long in the width direction of the substrate is disposed on the exit side and below the rotary blade 96A.

[0093] The cutting tray 102 is
2A, it is possible to receive the cut pieces of the laminated film 52 that have fallen and to pull the cut pieces of the laminated film 52 out of the outer guide 102B, thereby taking out the cut pieces of the laminated film 52 accumulated in the tray 102A. Have been able to.

As shown in FIGS. 1 and 9, four optical sensors 50A to 50D are provided near the substrate heating device 50.
Is arranged.

The optical sensor 50A is arranged on the entrance side of the heating panel 51, and detects the front end and the rear end of the substrate 18 conveyed by the suction plate 36.

As shown in FIG. 9, when the substrate 18 reaches the vicinity of the end of the heating panel 51 on the laminating rolls 12A and 12B side, the optical sensor 50B detects this. The optical sensor 50C is located at a position outside the support plate 58 for supporting the guide roll 54 in the substrate width direction and substantially at the same position as the optical sensor 50B in the substrate feed direction. Is detected.

Further, the optical sensor 50D is arranged above the entry side of the laminating rolls 12A and 12B and at the center position in the substrate width direction, and detects the front end of the substrate 18 being conveyed.

The output signals of the optical sensors 50A to 50D are input to the control device 32, and the control device 32 receives the output signals from the substrate reversing device 16 and the air cylinder 6 based on the signals.
2, 68, 88, and 91B are controlled, and details thereof will be described later.

Next, the operation of the substrate width reversing device 10 will be described.

The substrate 18 is moved by the hand 20 of the robot.
To the substrate width shifting device 14 in the substrate width shifting reverse device 10
At the time of carrying the wafer, the suction plate 36 of the substrate reversing device 16 is used.
1 as shown in FIG.
And the lifting device 4
By 0, it is set lower than the position of the substrate 18 as shown in FIG.

Further, as shown by a two-dot chain line in FIG.
A and 34B are driven so that the substrate receiving rollers 22 in the substrate receiving roller group 24 can support both ends of the loaded substrate 18 in the width direction from below. In this state,
The substrate 18 is transferred to the substrate receiving roller group 24 by the
, And then lowered, so that both ends in the width direction of the substrate 18 are supported from below by the substrate receiving roller group 24, and the hand unit 20 is further lowered to move the substrate 18 to the substrate receiving roller group 24. Transfer.

When the substrate 18 is conveyed by the hand unit 20, the central portion in the width direction of the substrate 18 may hang down.
When the substrate 8 is carried into the position of the substrate width shifting device 14, the substrate 1
8, the sag is lifted by the suction plate 36 and corrected immediately before being supported by the substrate receiving roller group 24.

When the optical sensor 31 detects the substrate 18, the control unit 32 causes the hand unit 20 to exit, and
The width adjustment member 26 is driven inward in the substrate width direction by the air cylinder 30A, and the width of the substrate 18 supported by the substrate receiving roller group 24 from below is adjusted.

At this time, since the rotating surface of the substrate receiving roller 22 coincides with the projecting direction of the width shifting member 26, the substrate 18 is moved toward the width without resistance.

The protrusion amount of the width shifting member 26 is regulated by the length of the spacer 33. When the width shifting member 26 moves, a clearance groove 30 is provided below the width shifting member 26.
Since C is formed, it does not interfere with the substrate receiving roller 22.

After the width adjustment by the substrate width adjustment device 14,
Immediately, the substrate receiving roller group 24 and the width shifting member 26 are retracted to the outside of the frame 29 by the air cylinders 28A and 30A. After these retreats, the suction plate 36 of the substrate reversing device 16 is raised by the lifting device 40.

At this time, a negative pressure is applied in advance to the suction hole 36C of the suction surface, which is the upper surface of the suction plate 36, so that when the suction surface 36B comes into contact with the lower surface of the substrate 18, this can be sucked.

When the suction plate 36 is raised by the lifting device 40 to the position indicated by the two-dot chain line shown in FIGS. 2 and 6A, the lifting is stopped, and at the same time, the rotating shaft 37A is rotated by the rotating device 37. And rotate the suction plate 36 by 180 °,
The suction surface 36B of the suction plate 36 faces downward. In this state, as shown in FIG. 6B, the moving table 44 is moved by the moving device 46 in the laminating roll 12 direction.

When the suction surface 36B of the suction plate 36 is turned downward, the suction plate 36 is located at a position between the pair of laminating rolls 12 and 12, so that the moving table 44 is moved in the direction of the laminating roll 12 toward the laminating roll 12. The substrate 18 adsorbed on the adsorbing surface 36B is directly transferred to the pair of upper and lower laminating rolls 12A, 12B.
In the meantime, it is bitten together with the laminated film 52.

However, since the substrate 18 adsorbed on the suction plate 36 is thinner and larger than the suction plate 36, its outer peripheral portion hangs down and, as it is, is caught between the pair of laminating rolls 12A and 12B. Can not be.

For this reason, when the leading end of the substrate 18 is detected by the optical sensor 50A, the moving table 44 is stopped, and in this state, the support bar 56 is moved by the air cylinder 62.
And the guide roller 54 supported by this, FIG.
As shown in FIG. 10, the movable base 44 is made to stand by at a position below the passing surface of the substrate 18, and the moving table 44 is advanced in the direction of the laminating rolls 12A and 12B. When the leading end of the substrate 18 is detected by the optical sensor 50B, the movable table 44 is stopped, and then the guide roller 54 is raised, so that both ends in the width direction of the substrate 18 are raised between the pair of laminating rolls 12A and 12B. Lift to the position and straighten.

Prior to this, the film guide roll 70 was driven counterclockwise from the position shown by the solid line in FIG. 10 to the position shown by the two-dot chain line or the position shown in FIG. Laminating roll 12 on the side
B, and at the same time, the gas blowing member 64 is advanced by the air cylinder 68 from the state of FIG. 10 to the position shown in FIG. A gas is blown out to bring the laminated film 52 into close contact with the laminating roll 12B and to cool it uniformly in the width direction.

At this time, as shown in FIG. 11, the guide rollers 64B attached to the gas blowing member 64 are positioned at the same pitch as the guide rollers 54.
The position is slightly lower than the upper end surface of the guide roller 54.

The substrate 18 whose both ends in the width direction are horizontally lifted by the guide roller 64B is re-driven to move the laminating roll 12A,
It is transported horizontally in the 12B direction.

At this time, the leading end of the substrate 18 in the traveling direction slightly hangs down, but the guide roller 64B attached to the gas blowing member 64 is located at a position slightly lower than the guide roller 54, so that the substrate 18 is conveyed. The leading end of the substrate 18 to be smoothly run on the guide roller 64B and is fed between the pair of laminating rolls 12A and 12B while keeping the horizontal state.

The traveling speed of the moving table 44 in the direction of the laminating roll 12 depends on the laminating roll 12.
A is synchronized with the feed speed of the substrate 18 by A and 12B.

The laminating roll 12
A and 12B are constantly rotating in a heated state, and the upper laminating roll 12A is separated from the lower laminating roll 12B by the swing lever 84 while the substrate 18 is not being conveyed. Although it is in the “open” state, after the leading end of the conveyed substrate 18 is detected by the optical sensor 50D, at the timing when the leading end of the substrate 18 reaches the contact position of the laminating rolls 12A and 12B, The swing lever 84 is driven by the control device 32 via the air cylinder 88 so that the upper laminating roll 12A sandwiches the leading end of the loaded substrate 18 between the laminating roll 12B. .

The substrate 18 is adsorbed by the adsorbing surface 36B of the adsorbing plate 36 when the laminating roll 1
2A and 12B, the centering of the substrate 18 is ensured. When the optical sensor 50C detects the movable base 44, the suction surface 36
The negative pressure of B is released.

After the substrate 18 is released, the suction plate 36 returns to the position shown by the solid line in FIG. 6A by the moving device 46, is again inverted, and the next substrate is loaded with the suction surface 36B facing upward. Waited until

Next, the substrate 18 carried in by the hand part 20 of the robot is immediately shifted in width as described above, and then is sucked and inverted by the suction plate 36, and stands by before the substrate heating device 50. Let it.

The preceding substrate 18 is sandwiched and transported by the laminating rolls 12A and 12B.
When the rear end of the substrate 18 is detected by the optical sensor 50,
Substrate heating device 50 for next substrate 18 by moving device 46
Loading to the position is started.

The laminated film 52 fed between the laminating rolls 12A and 12B together with the substrate 18 and adhered to the substrate 18 is unwound from the film roll 72 as described above,
6A and 76B, the cover film 52C is cut at a predetermined position in the width direction, and then the cover film 52C is peeled off by the cover film peeling device 78 in a range where the cover film 52C is stuck to the substrate 18, exposing the photosensitive resin layer 52B. In this state, it is supplied to the laminating roll 12B.

The leading end of the laminated film 52 is moved before the leading substrate 18 is fed between the laminating rolls 12A and 12B.
0, rotating laminating rolls 12A, 1
2B, the first and the second
Is set between the nip rolls 90 and 94.

Since the laminated film 52 is not required until the leading substrate 18 of the sequentially loaded substrates 18 reaches the position of the rotary cutter 96,
It is cut into a plurality of pieces by a rotary cutter 96 to a predetermined length and processed.

More specifically, the laminated film until the leading end of the first substrate 18 with the laminated film 52 stuck thereon reaches the position of the rotary cutter 96 is moved together with the substrate 18 in FIG. When the rotary blade 96A of the rotary cutter 96 is rotated clockwise at a constant speed while feeding the laminated film 52, the laminated film 52 is moved from the distal end thereof to a predetermined position each time the cutting edge 96D at the distal end of the rotary blade 96A comes into contact with the linear blade 96B. It will be cut off by length.

The cut end of the laminated film 52 is conveyed rightward in FIG. 13 by the cutting blade 96D, and is rotated by the compressed air flow blown from the air blowing pipe 100 through the blow-through hole 97C. It is shaken off from the blade 96A and sequentially falls on the tray 102A of the cut piece receiver 102 to be collected.

The rotary cutter 96 causes the linear blade 96B to swing through the swing lever 97 by the air cylinder 97B every time the laminated film 52 reaches between the substrates after the leading substrate 18 and between the substrates. 14, and after the cutting, the straight blade 96B is swung clockwise in FIG. 14 so as not to interfere with the substrate 18, and is on standby for the next cutting.

As described above, the robot hand 2
0 is transferred to the substrate width shifting device 1
4, the width is shifted, and the substrate is reversed by the substrate reversing device 16,
In addition, the photosensitive resin layer 52B of the laminated film 52, which is exposed by exfoliating the cover film 52C, is stuck to the substrate 18 between the laminating rolls 12A and 12B together with the laminated film 52. Thereafter, the rotary cutter 96 is used. Laminated film 5 between each substrate
By cutting the substrate 2, the substrate 18 with the laminated film 52 stuck thereon is formed.

The suction plate 36 in the board width reversing device 10 is configured to be able to be turned 180 ° about the rotation axis 36A. However, the present invention is not limited to this. The suction plate may be attached to the tip of the reversing arm, and the substrate may be reversed by rotating the reversing arm by 180 °.

[0130]

Since the present invention is constructed as described above, the present invention has an excellent effect that the substrate can be surely shifted when the substrate is inverted.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a substrate width reversing device according to the present invention;

FIG. 2 is a front view of the substrate width reversing device.

FIG. 3 is an enlarged plan view showing a substrate width shifting device in the substrate width shifting reversing device.

FIG. 4 is a front view of the same.

FIG. 5 is a side view of the same.

FIG. 6 is a side view showing the substrate reversing device in the substrate width reversing device.

FIG. 7 is a block diagram showing a control system of the substrate width reversing device.

FIG. 8 is an enlarged cross-sectional view showing a suction plate in the substrate reversing device.

9 is an enlarged view along line IX-IX in FIG.

FIG. 10 is an enlarged view of a portion corresponding to line XX in FIG. 1;

FIG. 11 is an enlarged view similar to FIG. 10, showing a state in which a substrate and a laminate film are fed into a laminating roll.

FIG. 12 is an enlarged cross-sectional view showing a laminated film.

FIG. 13 is a schematic side view showing a film supply system for supplying a laminated film to a laminating roll.

FIG. 14 is a schematic cross-sectional view showing a laminating roll and a substrate transport system on the exit side thereof.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Substrate width reversing device 12A, 12B ... Laminating roll 14 ... Substrate width reversing device 16 ... Substrate reversing device 18 ... Substrate 20 ... Hand part 22 ... Substrate receiving roller 22A ... Shaft 24 ... Substrate receiving roller group 26 ... Member 26A: Vertical pressing surface 28: Substrate receiving roller group driving device 28A: Air cylinder 28B: Guide shaft 30: Width shifting member driving device 30A: Air cylinder 30B: Guide shaft 30C: Escape groove 32: Control device 34A, 34B: Roller Supporting member 36 ... Suction plate 36B ... Suction surface 36C ... Suction hole 37 ... Rotating device 40 ... Elevating device 44 ... Moving table 46 ... Moving device 52 ... Laminate film

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[Submission date] December 1, 1997

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Claims (4)

[Claims] An apparatus for feeding a substrate in a substantially horizontal state together with a film between a pair of rotating laminating rolls, and disposing the substrate on a laminating roll entry side of a film sticking apparatus for sticking a film on a substrate surface;
In the substrate width shifting device for adjusting the position of the substrate in the width direction with respect to the laminating roll, the substrate is horizontally movable from both outer sides in the width direction to the inner side with respect to the horizontal transport path of the substrate, and the substrate is transported. Is rotatably supported by a shaft in the direction, protrudes inward in the substrate width direction to a position where the vicinity of both ends in the width direction of the substrate is supported from below, and can be retracted outward from both ends in the width direction of the substrate on the transport path. A group of substrate receiving rollers, and a width shifting member for adjusting the position of the substrate in the width direction by pushing both ends of the substrate in the width direction with respect to the substrate on the group of substrate receiving rollers. Control means for operating the substrate receiving roller group driving device and the width moving member driving device for moving the substrate receiving roller group and the width moving member back and forth in the substrate width direction, synchronously or independently. A substrate width shifting device, characterized by being radiated. 2. A film sticking device for feeding a substrate together with a film between a pair of rotating laminating rolls in a substantially horizontal state and attaching the film to a surface of the substrate, wherein the substrate is disposed on the laminating roll entry side.
A substrate width adjuster that adjusts the width direction position of the substrate with respect to the laminating roll, and after the substrate is adjusted by the substrate width adjuster, inverts the substrate by 180 ° and conveys the substrate to the laminating roll. A substrate reversing device, comprising: a substrate reversing device, wherein the substrate reversing device is capable of moving horizontally inward from both widthwise outer sides to the horizontal transport path of the substrate,
The substrate is rotatably supported by an axis in the substrate transport direction, protrudes inward in the substrate width direction to a position where the vicinity of both ends in the width direction of the substrate is supported from below, and further outward than both ends in the width direction of the substrate on the transport path. A retractable substrate receiving roller group, and a width adjuster that is capable of moving forward and backward from both outer sides in the width direction with respect to the substrate on the substrate receiving roller group, and pressing both ends in the width direction of the substrate to adjust the position in the width direction of the substrate. A member, and control means for operating the substrate receiving roller group driving device and the width moving member driving device for moving the substrate receiving roller group and the width moving member back and forth in the substrate width direction, or controlling them to operate independently. The substrate reversing device comprises a suction plate capable of adsorbing the substrate by a negative pressure, a rotating device for inverting the suction plate by 180 ° about a central axis in the substrate width direction, and moving the rotating device up and down and the substrate. And a suction plate transfer device capable of transferring the inverted substrate in a horizontal state to the pair of laminating rolls while supporting the substrate in a reciprocating manner. . 3. The apparatus according to claim 2, wherein the substrate reversing device comprises:
A substrate width reversing device, wherein the substrate is freely lifted to a position higher than the substrate receiving roller group by the suction plate at a suction start position of the substrate in a substrate feeding direction. 4. The apparatus according to claim 3, wherein the substrate reversing device comprises:
When the portions in the vicinity of both ends in the width direction of the substrate are supported by the substrate receiving roller group, and during a period until the width shifting operation by the substrate width shifting device, the suction plate is moved to the height position of the substrate receiving roller group. A substrate width reversing device, characterized in that the substrate width lowering device is lowered below the lower limit.