JPH11123359A - Slot type fluid applicator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To apply a fluid to be applied uniformly and smoothly even when the fluid is applied on a warped substrate having an uneven surface by providing a correction device for correcting the warpage of the end part of the substrate temporarily in a slot type application head. SOLUTION: A sheet-shaped substrate W is mounted on a substrate mounting table C to be suction-held by a suction hole formed on the surface of the table C. Next, the table C is moved horizontally to a prescribed position, and simultaneously a slot type application head B is brought down to the substrate with a given gap kept. The warpage of the substrate W is corrected temporarily and horizontally to the advance direction by a warpage correcting device set in the head B. Next, while the table C being moved horizontally at a prescribed speed, a fluid L to be applied is sent into the head B by a prescribed pressure and discharged from a slot part Bs on the surface of the width direction of the substrate W through a slot channel 13 at a constant flow rate per unit time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slot-type fluid coating apparatus for uniformly applying a coating fluid on a surface of a sheet-like object to be coated with a predetermined film thickness.

[0002]

2. Description of the Related Art In a slot type fluid coating apparatus, an object to be coated is sucked and held on a table equipped with a vacuum suction mechanism, and the table or the coating head is conveyed. And the application fluid is applied to the object to be applied. FIG. 1 shows an application state in a conventional slot type fluid application apparatus. The coating fluid L discharged from the slot flow channel 13 of the coating head B forms a coating film on the surface of the workpiece while forming a pool M of the coating fluid upstream in the traveling direction of the workpiece W. I do.

However, because of the principle of application, uniform application is performed by maintaining a constant gap between the object W and the slot Bs of the application head portion. In some cases, a certain gap between the object to be coated and the coating head cannot be maintained, and as a result, uniform and flat coating cannot be performed.

[0004] An object to be coated having irregularities on its surface, for example, a conductor layer formed by forming a conductor layer on both surfaces or one surface of an insulation layer, applying an insulation resin liquid on the upper surface thereof, and drying the insulation layer and plating When applying an insulating resin liquid to a multilayer printed wiring board formed by alternately laminating layers, the multilayer printed wiring board and the like are subjected to high temperature treatment in each step of the manufacturing process, so that thermal deformation and stress of the laminated film are caused. Warpage occurs due to the above. When the warpage is large, the surface of the object to be coated cannot be held flat by only holding by vacuum suction.
The gap between the slot portion and the object to be coated changes, and the formation of the liquid pool of the application fluid described above becomes unstable, and as a result, the slot portion scrapes off the coating film and the film thickness becomes uneven. There is.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide an object to be coated which has a sheet-like shape and has warpage having surface irregularities. An object of the present invention is to provide a slot type fluid coating device for uniformly and smoothly applying a coating fluid.

[0006]

According to the present invention, there is provided a slot type fluid coating apparatus for applying a coating fluid to a sheet-like object having irregularities on its surface. , A slot-type fluid coating device comprising a slot-type coating head portion and a warp correcting device for temporarily correcting a warp at an end of an object to be coated.

According to a second aspect of the present invention, the warp straightening device is provided in the non-applying portions on the front and rear sides in the application direction and on the left and right sides in the application width direction across the slot-type application head portion. Of the slot type fluid application device.

According to a third aspect of the present invention, there is provided a slot-type fluid coating device, wherein the warp correcting device comprises a height adjusting mechanism, a resin wheel held rotatably, and the like. It is.

[0009]

According to the present invention, as shown in FIG. 2, a slot-type coating head B is provided with a warp correcting device E for temporarily correcting the warp at the end of the object before and after coating. ,
The object to be coated W just below the slot-type coating head B at the time of coating
Can be forcibly flattened, and the gap between the slot Bs and the workpiece W can be kept constant. As a result, a uniform and smooth coating film can be obtained on the workpiece.

[0010]

FIG. 2 and FIG. 3 show an embodiment of the present invention.
4 and FIG.

The extruding section A includes a storage tank 1 for storing the coating fluid L, a discharge pipe 2 for discharging the fluid L from the storage tank 1, and a slot type coating head for discharging the fluid L discharged from the discharge pipe 2. A pump 3 for pressure-feeding to the part B side, and a pressure-feeding supply pipe 4 for supplying the fluid L pumped by the pump 3 to the coating head part B are provided.

The slot type coating head B is fixed at a fixed position, and has a slot Bs (discharged fluid to be coated) for discharging the fluid L toward the surface of the workpiece W at its lower end. (A T-shaped slit portion) linearly applied in the width direction of the object W).

The slot type coating head section B includes a metal head body block 11, an introduction channel 12 formed in the block 11 for introducing the fluid L fed from the pressure feed pipe 4, In order to discharge the fluid L pumped through the introduction channel 12 from the slot Bs at the tip of the head portion B, the introduction channel 12 and the slot B are used.
and a slot pipe 13 that communicates with the s.

The slot type coating head B is made of a resin (for example, Teflon or the like) which is held by a metal warp straightening device mounting portion 5, a main body supporting portion 6, a micro gauge 7, and a spring 8 so as to be adjustable in height. ) Of the slot-type coating head B with respect to the coating direction, and the left and right sides (left and right non-coating) of the slot type coating head B with respect to the coating direction. Position).

In the warp straightening device E, the table C
The height is adjusted by the micro gauge 7 so that the height of the lowermost end of the wheel from the surface is equal to or less than the height Ha of the lowermost end of the slot portion Bs of the head portion and equal to or greater than the surface height Hb of the workpiece. Further, the wheel 9 is smoothly rotatably held by a Delrin bearing (or an air bearing), and at the time of coating, comes into contact with the surface of the object to be applied and rotates at the same speed as the moving speed of the object.

As shown in FIG. 2, the coating fluid L is pumped at a predetermined pressure by the pump 3 through the pipe 4 into the coating head B, and from the channel 12 through the slot channel 13. The liquid is discharged from the slot Bs onto the surface in the width direction of the workpiece W at a constant flow rate per unit time.

As shown in FIG. 2, one or more than two pieces of the object-to-be-coated table C are set so as to be movable in the horizontal direction. Is mounted and fixed. In FIG. 2, an unapplied object W is applied on the rightmost table C, an applied object W is being applied on the middle table C, and an applied object W is applied on the leftmost table C. W are placed and fixed respectively.

The mounting table C has a horizontal table main body 21 which can be moved in the horizontal direction, and a movement driving means for moving the table main body 21.

The moving drive means includes a drive source (servo motor, pulse motor, or air cylinder);
It is composed of a linear guide part that guides in the movement direction, and a drive transmission part (gear, sprocket, chain, spiral shaft, rack gear & pinion gear, etc.).

As shown in FIG. 2, the mounting table C includes a horizontal table main body 21, a bracket 22 integrally provided at a lower portion (or a side) of the table main body 21, and a horizontal moving direction of the table main body 21. Linear guide 2 installed in
3 is provided.

The linear guide 23 is mounted on the table body 2
1 or a linear guide stay that slides and guides on the side surface of the bracket 22 or a linear guide shaft that fits into a penetrating portion that penetrates the table body 21 or the bracket 22.

The lower part of one or two or more tables 21 is supported by bearing supports 24a, 24a (also serving as an apparatus main body frame) installed at both ends (left and right ends of FIG. 2) of the apparatus main body. A spiral shaft 24 screwed to the bracket 22 in the horizontal movement direction, a servomotor 25 for driving and rotating the spiral shaft 24, and a rotary encoder 25 a ( Or a moving position / moving amount detecting unit by a linear encoder installed in parallel with the linear guide 23).

As shown in FIG. 2, the spiral shaft 24 is rotated in a normal (or reverse) direction at a predetermined rotation speed by a servo motor 25, so that the shaft 24 is rotated.
Is moved forward (or backward), and the work piece mounting table C mounted on the bracket 22 is moved forward (or backward) in the horizontal direction along the linear guide 23, and the coating is performed. The head B is horizontally moved at a predetermined speed with a predetermined height Ha (separation distance) below the head portion B.

The horizontal moving speed of the object placing table C is controlled by a control unit Q. The control unit Q includes an input unit and a central processing control unit (CPU circuit; microprocessor, programmable controller, sequencer, etc.).
, An operation unit, a storage unit such as a program memory, a control memory, a setup memory, an output unit for outputting input data, control data, control processing data, and the like, and a display unit (CRT, LCD) for visually displaying the output data.
Display, printer, etc.) and an external storage unit (recorder).

As the coating conditions known in advance, the size, thickness, coating film thickness, etc. of the object to be coated are determined from an input unit such as a keyboard, a mouse, or a disk drive for downloading input data from a recording medium such as a floppy disk. The setting is input to the processing control unit.

The control section Q calculates and outputs operation control data such as the optimum application moving speed of the mounting table C based on the application conditions, and based on the operation control data,
By controlling the rotation speed and rotation direction of the servo motor 25,
The horizontal movement speed of the application object placing table C is maintained at a predetermined speed, or the speed is changed, or the forward movement (left direction in FIG. 2) and the backward movement (right direction in FIG. 2) are performed.

Alternatively, the size, thickness, and coating thickness of the object to be coated may be input from an input unit such as a keyboard, a mouse, or a disk drive for downloading input data from a recording medium such as a floppy disk. After setting and inputting into the central processing control unit, the application conditions in real time outputted during the operation of the apparatus main body include an element moving device of the apparatus main body, a detection encoder for detecting a moving amount, and a coating object W. The surface state of the object to be coated detected by the measuring unit R such as a displacement meter for measuring the height displacement of the surface to be coated is input from the input unit to the central processing control unit in real time as a control processing data signal.

The control unit Q calculates and outputs operation control data such as the optimum application moving speed of the mounting table C based on the application conditions, and based on the operation control data,
By controlling the rotation speed and rotation direction of the servo motor 25,
The horizontal movement speed of the application object placing table C is maintained at a predetermined speed, or the speed is changed, or the forward movement (left direction in FIG. 2) and the backward movement (right direction in FIG. 2) are performed.

As shown in the front view of FIG. 4, a lifting mechanism D for raising and lowering the slot type coating head portion B with respect to the object-to-be-coated table C is provided. The apparatus includes a support 16 standing vertically on both sides in the width direction and a support frame 17 supported by the support 16 and provided above the application object mounting table C.

The support frame 17 has a plate 18a mounted and supported on a bracket 18 and the plate 18a.
And an elevating rod 18b attached to and supported by.

At the lower end of the elevating rod 18b, a horizontal support plate 19 guided by the column 16 and capable of freely moving in the vertical direction, and a head height adjusting mechanism F fixed to the horizontal support plate 19 are provided. Prepare.

The elevating mechanism D is used for a large range elevating operation, and the head height adjusting mechanism F is used for a small range (for fine adjustment) elevating operation.

The main body block 11 moves up and down by raising and lowering the raising and lowering mechanism D and the head height adjusting mechanism, whereby the slot Bs is maintained in a parallel relationship with the object mounting table C. In this state, the distance (separation height) from each other can be appropriately set apart or approaching.

For accurate control of the separation distance, a detector (rotary encoder) for detecting the amount of vertical movement and the position of vertical movement rather than using an air cylinder or a hydraulic cylinder as the head height adjusting mechanism F. , A linear encoder), and the control is performed by controlling the output of the number of pulses.

In the present invention, first, the object to be coated table C
A sheet-like object W to be coated, for example, a substrate for multilayer printed wiring, is mounted thereon, and is suction-held by suction holes provided on the surface of the object mounting table C. Next, the substrate C is horizontally moved to a predetermined position (forward).
At the same time, the slot-type coating head B is lowered onto the workpiece W while maintaining a constant gap, and the warp of the workpiece W is reduced by the warp straightening device E provided in the slot-type coating head B. It is corrected temporarily (before and after application) in the left-right and front-back directions with respect to the traveling direction.

Next, the application fluid L is moved horizontally (forward) at a predetermined speed while the application object mounting table C is moved at a predetermined speed.
At a predetermined pressure by the pump 3, the pressure is fed into the coating head section B via the pipe 4, and from the flow path 12 through the slot flow path 13 to the slot Bs at a constant flow rate per unit time from the slot Bs. Discharge to the surface in the width direction.

After the coating is completed, the slot type coating head B
Is lifted up, and the substrate C is horizontally moved to a predetermined position to release suction and discharge the substrate W.

[0038]

【Example】

<Embodiment 1> In a slot-type fluid application device equipped with a warp straightening device according to the present invention as shown in FIG.
A concave warpage ratio (percentage of a maximum warp with respect to a length of 1,000 mm by deforming concavely in a direction parallel to the side) having an unevenness formed by a conductor circuit layer having a height of 35 μm and a width of 100 μm or less 0.5 % Of a copper foil laminated printed wiring board (size 340 × 340 mm, thickness 0.8 mm) and an ultraviolet-curable resin obtained by reacting bisphenol A type epoxy acrylate with phthalic anhydride as a coating fluid 20 parts by weight of an alicyclic epoxy resin, 5 parts by weight of an epoxy resin containing an aromatic compound, 10 parts by weight of a fine powder of silica gel, and 5 parts by weight of an additive such as a photopolymerization initiator. Thickness of 40μm ± 1.5μ
A uniform and smooth insulating layer having a thickness of m was formed on the copper foil laminated printed wiring board.

<Embodiment 2> In a slot-type fluid coating apparatus equipped with a warp correcting device according to the present invention as shown in FIG. 2, a conductor circuit layer having a height of 18 μm and a width of 100 μm or less was used as an object to be coated. The concave warpage rate with the formed irregularities (the length is 100 when deformed concavely in the direction parallel to the side).
1.0% copper foil laminated printed wiring board (size 340 × 460 mm, thickness 0. 0 mm).
4 mm), and as a coating fluid, 40 parts by weight of an ultraviolet curable resin obtained by reacting a bisphenol A type epoxy acrylate with phthalic anhydride, 20 parts by weight of an alicyclic epoxy resin, and an epoxy resin 5 containing an aromatic resin. Parts by weight, a mixture of 10 parts by weight of silica gel fine powder, and 5 parts by weight of an additive such as a photopolymerization initiator, were mixed with ethyl cellosolve acetate 2
0 parts by weight as a solvent is used, and the thickness is 3
A uniform and smooth insulating layer of 9 μm ± 1.7 μm could be formed on the copper foil laminated printed wiring board.

[0040]

As described above, according to the slot type fluid coating apparatus of the present invention, the object to be warped is pressed against the object mounting table C by the wheels mounted on the slot type coating head. , Warpage etc. are completely corrected before and after application, and by maintaining a constant gap distance between the slot type coating head and the object to be applied, the liquid pool of the application fluid is stabilized, and as a result, the object to be applied is uniform and uniform. A coating film having a smooth surface can be obtained.

[Brief description of the drawings]

FIG. 1 is a side view illustrating an application state in a conventional slot type fluid application apparatus.

FIG. 2 is an overall side view of the slot type fluid application device of the present invention.

FIG. 3 is a side view illustrating a warp correcting device of the slot type fluid application device according to the present invention.

FIG. 4 is a front view illustrating an elevating mechanism of the slot type fluid application device according to the present invention.

[Explanation of symbols]

 1 fluid storage tank 2 discharge pipe 3 pressure pump 4 supply pipe 5 warp straightening device mounting part 6 warp straightening device main body support part 7 micro gauge 8 spring 9 Wheels 11 ‥‥ Body block 12 ‥‥ Introduction channel 13 ‥‥ Slot channel 16 ‥‥ Post 17 ‥‥ Support frame 18 ‥‥ Bracket 18a ‥‥ Plate 18b ‥‥ Elevating rod 19 ‥‥ Horizontal support plate 21 ‥‥ Table Main body 22 Bracket 23 Linear guide 24 Spiral shaft 24a Bearing support 25 Motor 25a Encoder A Push-out section B Coating head section Bs Slot section C Coating Object loading table D Elevating mechanism E Warpage correcting device F Head height adjustment mechanism Ha Head height Hb Coating surface height L ‥‥ coating fluid M ‥‥ sump Q ‥‥ controller R ‥‥ measuring unit W ‥‥ object to be coated

Claims (3)

[Claims] 1. A slot type fluid application device for applying an application fluid to a sheet-shaped object having irregularities on a surface thereof.
A slot-type fluid coating device, comprising: a slot-type coating head unit; and a warp correcting device for temporarily correcting a warp of an end portion of an object to be coated. 2. The slot-type fluid coating device according to claim 1, wherein the warp straightening device is provided in a non-coating portion on the front and rear sides in the coating direction and on the left and right in the coating width direction across the slot-type coating head portion. . 3. A slot type fluid application device, wherein the warp straightening device comprises a height adjusting mechanism, a resin wheel held rotatably, and the like.