JPH11108997A - Electronic circuit-inspecting apparatus - Google Patents
Electronic circuit-inspecting apparatusInfo
- Publication number
- JPH11108997A JPH11108997A JP9266827A JP26682797A JPH11108997A JP H11108997 A JPH11108997 A JP H11108997A JP 9266827 A JP9266827 A JP 9266827A JP 26682797 A JP26682797 A JP 26682797A JP H11108997 A JPH11108997 A JP H11108997A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- waveform
- under test
- transient response
- response signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、一般に電子回路検
査装置に関し、特に並列接続された低インピーダンス素
子の接続不良を検査するのに適用した検査装置に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to an electronic circuit inspection apparatus, and more particularly to an inspection apparatus applied to inspect a connection failure of a low impedance element connected in parallel.
【0002】[0002]
【従来の技術】電子回路を搭載する電化製品の製造工程
において、実際の製品レベルで実動検査を行うと、電子
回路を破壊するおそれのある場合や早期不良発見を目的
として、基板単体レベルでの検査が行われている。従
来、基板単体レベルでの自動検査装置としては、インサ
ーキットテスタがある。2. Description of the Related Art In a manufacturing process of an electric appliance on which an electronic circuit is mounted, if an actual inspection is performed at an actual product level, the electronic circuit may be destroyed or an early failure may be detected at a substrate single level. Has been tested. 2. Description of the Related Art Conventionally, there is an in-circuit tester as an automatic inspection apparatus at a single substrate level.
【0003】その検査方法は、被検査対象素子あるいは
回路上に直流、または交流の微弱信号を供給し、定常状
態でのインピーダンス値を計測し、予め設定されている
良品データとの比較によって、プリント基板上の電子部
品結線不良を検査する方法である。In the inspection method, a weak DC or AC signal is supplied to an element or a circuit to be inspected, an impedance value in a steady state is measured, and the printed value is compared with preset non-defective data. This is a method for inspecting a connection failure of an electronic component on a substrate.
【0004】[0004]
【発明が解決しようとする課題】図1に示す回路におい
て、被検査ダイオード2の結線開放不良を検査しようと
した場合、従来、インサーキットテスタが行っている直
流、または交流の微弱信号を供給し、定常状態でのイン
ピーダンス値を計測する方法では、被検査ダイオード2
と並列に結線されたNPNトランジスタ1のベース、エ
ミッタ間特性(ベースからエミッタ方向に電流を通しや
すく、逆方向には電流を通さない特性)と重なり合うた
め、定常状態でのインピーダンス値を計測してもその変
化を捕らえることができない。In the circuit shown in FIG. 1, when an attempt is made to check for an open circuit failure of the diode under test 2, a weak DC or AC signal conventionally provided by an in-circuit tester is supplied. In the method of measuring the impedance value in the steady state, the diode under test 2
Because the characteristic between the base and the emitter of the NPN transistor 1 connected in parallel with the characteristic (the characteristic that the current easily flows from the base to the emitter and the current does not flow in the reverse direction) overlaps, the impedance value in the steady state is measured. Cannot capture that change.
【0005】NPNトランジスタの代わりに、PNPト
ランジスタの場合は、ベース、コレクタ間にダイオード
が順方向に並列接続される場合も同様である。In the case of a PNP transistor instead of an NPN transistor, the same applies when a diode is connected in parallel between the base and the collector in the forward direction.
【0006】本発明の目的は、前記課題を解決し、順方
向に並列接続されたダイオードの自動検査装置を提供す
ることにある。An object of the present invention is to solve the above-mentioned problems and to provide an automatic inspection device for diodes connected in parallel in a forward direction.
【0007】[0007]
【課題を解決するための手段】本発明の第1の構成によ
る電子回路検査装置は、被検査回路にパルス信号を印加
するパルス信号源と、前記被検査回路の前記パルス信号
に対する過渡応答信号をアナログデジタル変換するアナ
ログデジタル変換器と、前記デジタル変換された過渡応
答信号を演算処理し、正常回路の過渡応答信号にもとづ
いて設定した判定値と比較して前記被検査回路の異常を
判定するマイクロプロセッサと、前記被検査回路または
正常回路の過渡応答信号波形および被検査回路の検査結
果を表示する表示装置とを備えたものである。According to a first aspect of the present invention, there is provided an electronic circuit inspection apparatus comprising: a pulse signal source for applying a pulse signal to a circuit under test; and a transient response signal of the circuit under test to the pulse signal. An analog-to-digital converter for performing analog-to-digital conversion; and a micro-processor for performing arithmetic processing on the digitally-converted transient response signal and comparing it with a determination value set based on a transient response signal of a normal circuit to determine an abnormality of the circuit under test. And a display device for displaying a transient response signal waveform of the circuit under test or the normal circuit and a test result of the circuit under test.
【0008】本発明の第2の構成による電子回路検査装
置は、前記パルス信号源がステップパルス波形または矩
形パルスまたは矩形パルス波形を発生するものである。In an electronic circuit inspection apparatus according to a second configuration of the present invention, the pulse signal source generates a step pulse waveform, a rectangular pulse, or a rectangular pulse waveform.
【0009】本発明の第3の構成による電子回路検査装
置は、前記マイクロプロセッサが前記被検査回路の過渡
応答信号の振動波形の継続時間を算出するものである。In a third aspect of the present invention, in the electronic circuit inspection device, the microprocessor calculates a duration of an oscillation waveform of a transient response signal of the circuit under test.
【0010】本発明の第4の構成による電子回路検査装
置は、前記マイクロプロセッサが前記被検査回路の過渡
応答信号波形の実効値または整流値の積分値を算出し、
これを過渡応答信号の信号波形の継続時間の指標とする
ものである。According to a fourth aspect of the invention, there is provided an electronic circuit inspection apparatus, wherein the microprocessor calculates an integral value of an effective value or a rectified value of a transient response signal waveform of the circuit under test.
This is used as an index of the duration of the signal waveform of the transient response signal.
【0011】本発明の第5の構成による電子回路検査装
置は、前記マイクロプロセッサが前記被検査回路の過渡
応答信号波形の包絡線が正常回路の応答波形にもとづい
て予め設定した範囲内にあるかどうかを判定するもので
ある。According to a fifth aspect of the present invention, there is provided the electronic circuit testing apparatus according to the first aspect of the present invention, wherein the microprocessor is configured such that an envelope of a transient response signal waveform of the circuit under test is within a preset range based on a response waveform of a normal circuit. It is to determine whether or not.
【0012】本発明の第6の構成による電子回路検査装
置は、前記マイクロプロセッサが前記被検査回路の過渡
応答信号波形のピーク時刻またはゼロクロス時刻にもと
づいて振動波形の周波数を抽出し、正常回路の振動周波
数と比較判定するものである。According to a sixth aspect of the present invention, in the electronic circuit inspection apparatus, the microprocessor extracts the frequency of the vibration waveform based on the peak time or the zero crossing time of the transient response signal waveform of the circuit under test, and This is to make a comparison with the vibration frequency.
【0013】本発明の第7の構成による電子回路検査装
置は、被検査回路にパルス信号を印加するパルス信号源
と、前記被検査回路の前記パルス信号に対する過渡応答
信号の実効値または整流値を演算する実効値回路または
整流回路の出力信号をアナログデジタル変換するアナロ
グデジタル変換器と、前記アナログデジタル変換器の出
力信号を演算処理し、正常回路の過渡応答信号にもとづ
いて設定した判定値と比較して前記被検査回路の異常を
判定するマイクロプロセッサと、前記被検査回路または
正常回路の過渡応答信号波形および被検査回路の検査結
果を表示する表示装置とを備えたものである。According to a seventh aspect of the present invention, there is provided an electronic circuit inspection apparatus comprising: a pulse signal source for applying a pulse signal to a circuit under test; and an effective value or a rectified value of a transient response signal of the circuit under test with respect to the pulse signal. An analog-to-digital converter for performing an analog-to-digital conversion of an output signal of an effective value circuit or a rectifier circuit for performing an arithmetic operation, and comparing an output signal of the analog-to-digital converter with a determination value set based on a transient response signal of a normal circuit; And a display device for displaying a transient response signal waveform of the circuit under test or the normal circuit and a test result of the circuit under test.
【0014】[0014]
実施の形態1.図1は本発明の実施の形態1における自
動電子回路検査装置の計測回路図、図2はパルス信号源
15から出力されるステップ信号波形を示す図、図3は
パルス信号源15から出力される矩形波信号波形を示す
図、図4および図5はトランス3の2次側3bで測定さ
れる出力過渡応答波形を示す図である。図1に示す被検
査回路は、具体的にはチョークコイル電流制御型一石自
励インバータ回路のうち、本発明の検査方法に関連する
電子回路素子を抜粋したものである。パルス信号源15
は、検査を行うために被検査回路にパルス信号を供給す
るためのもので、被検査回路の過渡応答は、トランス2
次側3bの両端から電圧波形変化として測定するもので
ある。Embodiment 1 FIG. FIG. 1 is a measurement circuit diagram of the automatic electronic circuit inspection device according to the first embodiment of the present invention, FIG. 2 is a diagram showing a step signal waveform output from a pulse signal source 15, and FIG. FIGS. 4 and 5 are diagrams showing a rectangular signal waveform, and FIGS. 4 and 5 are diagrams showing output transient response waveforms measured on the secondary side 3b of the transformer 3. FIG. The circuit under test shown in FIG. 1 is, specifically, an electronic circuit element related to the inspection method of the present invention extracted from a choke coil current control type self-excited inverter circuit. Pulse signal source 15
Is for supplying a pulse signal to the circuit under test in order to perform the test, and the transient response of the circuit under test is
It is measured as a voltage waveform change from both ends of the secondary side 3b.
【0015】回路動作は、まずパルス信号源15から図
2に示すステップパルス波形を供給すると、電圧ステッ
プ変化に応答して、トランス3の1次側3aを流れる電
流に過渡現象変化が生じる。ここで、ダイオード2のア
ノードには正極性の信号を印加する。この電流変化は、
トランス誘起現象によって、トランスの2次側3bに電
流変化を生じ、トランスの2次側3bの両端から電圧波
形として計測する。In the circuit operation, first, when the step pulse waveform shown in FIG. 2 is supplied from the pulse signal source 15, a transient phenomenon occurs in the current flowing through the primary side 3a of the transformer 3 in response to the voltage step change. Here, a positive signal is applied to the anode of the diode 2. This current change is
Due to the transformer induced phenomenon, a current change occurs on the secondary side 3b of the transformer, and a voltage waveform is measured from both ends of the secondary side 3b of the transformer.
【0016】トランスの2次側3bの両端から計測され
る過渡応答波形は、被検査ダイオード2が接続されてい
る場合、図4に示すとおり波形の振動が短時間のうちに
減衰する。一方、被検査ダイオード2が接続されていな
い場合、図5に示すおとり波形の振動が図4に比べ明か
に長時間継続する。したがって、被検査回路の状態変化
をトランスの2次側3bの両端から計測される過渡現象
波形によって判別できる。In the transient response waveform measured from both ends of the secondary side 3b of the transformer, when the diode under test 2 is connected, the vibration of the waveform attenuates in a short time as shown in FIG. On the other hand, when the diode under test 2 is not connected, the vibration of the decoy waveform shown in FIG. 5 continues for a clearly longer time than in FIG. Therefore, the change in the state of the circuit under test can be determined from the transient phenomenon waveform measured from both ends of the secondary side 3b of the transformer.
【0017】判別方法は、図1の検査装置の計測回路図
に示すとおり、トランスの2次側3bの両端から計測さ
れる過渡応答波形をアナログデジタル変換器11を通じ
て入力し、マイクロプロセッサ12にて演算処理後、メ
モリ13上に予め設定されている判定値と比較すること
によって、被検査ダイオード2の電気的接続不良を判別
するものである。判定結果は、表示装置14上に表示す
る。As shown in the measurement circuit diagram of the inspection apparatus in FIG. 1, a transient response waveform measured from both ends of the secondary side 3b of the transformer is input through the analog-to-digital converter 11 and the microprocessor 12 After the arithmetic processing, the electrical connection failure of the diode 2 to be inspected is determined by comparing with a determination value preset in the memory 13. The determination result is displayed on the display device 14.
【0018】前記判定値の設定方法は、正常な回路によ
る波形を計測し、表示装置14上に表示された波形にも
とづいて設定を行う。また、設定値は検査対象に応じて
複数登録でき、容易に選択できるので、汎用性を持たせ
ることができる。In the method of setting the judgment value, a waveform by a normal circuit is measured, and the setting is performed based on the waveform displayed on the display device 14. Further, a plurality of set values can be registered according to the inspection object and can be easily selected, so that versatility can be provided.
【0019】本実施の形態は、ダイオードの接続の良否
判定を例として説明したが、検査対象はこれに限られる
ことなく、異常によって過渡応答波形に違いの現れる電
子回路に広く適用できるものである。特に、並列接続さ
れた低インピーダンス素子のように直流や交流の微小信
号の印加で判別の困難な検査対象にも適用できる。ま
た、被検査回路に実電流電圧を印加する必要がないの
で、検査時に回路基板を破壊する恐れがない。Although the present embodiment has been described by taking as an example the determination of the quality of the connection of the diode, the object to be inspected is not limited to this, but can be widely applied to electronic circuits in which a transient response waveform differs due to an abnormality. . In particular, the present invention can be applied to an inspection target such as a low-impedance element connected in parallel, which is difficult to determine by applying a small DC or AC signal. Further, since there is no need to apply the actual current voltage to the circuit to be inspected, there is no possibility that the circuit board will be broken during the inspection.
【0020】実施の形態2.本実施の形態は、マイクロ
プロセッサ12による過渡応答波形の演算処理と判定の
具体的方法を説明するものである。実施の形態1にあげ
たダイオードの接続不良の例では、正常波形と異常波形
の違いが主として振動波形の継続時間の違いとして現れ
る。このような場合には、過渡応答波形の実効値あるい
は整流値を積分し、その積分値の大小によって振動波形
の継続時間の違いを判定する方法が適している。また、
実効値回路、整流回路、積分回路等のアナログ演算処理
回路をアナログデジタル変換器11の前に設けて、マイ
クロプロセッサ12による演算の替りにアナログ信号処
理として行うようにすれば、マイクロプロセッサ12の
演算処理を軽減することができ、判定処理時間を短縮す
ることができる。また、マイクロプロセッサによる演算
処理に比べて、より高速な応答波形の演算処理が可能と
なる。Embodiment 2 In the present embodiment, a specific method of calculating and determining a transient response waveform by the microprocessor 12 will be described. In the example of the diode connection failure described in the first embodiment, the difference between the normal waveform and the abnormal waveform mainly appears as the difference in the duration of the vibration waveform. In such a case, it is suitable to integrate the effective value or the rectified value of the transient response waveform and determine the difference in the duration of the vibration waveform based on the magnitude of the integrated value. Also,
If an analog operation processing circuit such as an effective value circuit, a rectifier circuit, and an integration circuit is provided in front of the analog-to-digital converter 11 and is performed as analog signal processing instead of the operation by the microprocessor 12, the operation of the microprocessor 12 The processing can be reduced, and the determination processing time can be reduced. Further, the processing of the response waveform can be performed at a higher speed than the processing performed by the microprocessor.
【0021】過渡応答波形の演算処理と判定の他の方法
としては、応答波形の包絡線が正常回路の応答波形にも
とづいて予め設定した範囲内にあるかどうかを判定する
方法も適用できる。この方法によれば、検査対象波形
の、より一般的な特徴を検査することができるので、汎
用性の高い検査装置が実現できる。As another method of calculating and determining the transient response waveform, a method of determining whether the envelope of the response waveform is within a preset range based on the response waveform of the normal circuit can also be applied. According to this method, a more general characteristic of the inspection target waveform can be inspected, so that a highly versatile inspection apparatus can be realized.
【0022】更に、他の方法としては、応答波形のピー
クの時間間隔や、ゼロクロス時刻の間隔を抽出し、振動
波形の周波数を検査する方法も適用できる。回路接続の
異常は、多くの場合共振周波数の変化を伴うものである
から、正常な回路の振動周波数と比較、判定することに
より、汎用性の高い異常検査が可能である。Further, as another method, a method of extracting the time interval of the peak of the response waveform or the interval of the zero crossing time and inspecting the frequency of the vibration waveform can be applied. An abnormality in circuit connection is often accompanied by a change in resonance frequency. Therefore, by comparing and judging a vibration frequency of a normal circuit, a highly versatile abnormality inspection can be performed.
【0023】[0023]
【発明の効果】本発明の第1および第2の構成に係る電
子回路検査装置によれば、被検査回路にパルス信号を印
加し、それによる過渡応答信号波形にもとづいて検査す
るので、直流や交流の微小信号の印加による検査で判定
の困難な並列接続された低インピーダンス回路の検査が
可能である。According to the electronic circuit inspection apparatus according to the first and second configurations of the present invention, a pulse signal is applied to the circuit to be inspected, and the inspection is performed based on the resulting transient response signal waveform. Inspection of low-impedance circuits connected in parallel, which is difficult to judge by inspection by applying an AC small signal, is possible.
【0024】本発明の第3および第4の構成に係る電子
回路検査装置によれば、被検査回路の過渡応答信号の振
動波形の継続時間によって異常を判定しているので、汎
用性のある電子回路検査装置が提供できる。According to the electronic circuit inspection apparatus according to the third and fourth configurations of the present invention, the abnormality is determined by the duration of the vibration waveform of the transient response signal of the circuit under test, so that the versatile electronic A circuit inspection device can be provided.
【0025】本発明の第5および第6の構成に係る電子
回路検査装置によれば、被検査回路の異常によって一般
的に発生する変化を指標として異常を判定しているの
で、汎用性のある電子回路検査装置が提供できる。According to the electronic circuit inspection apparatus according to the fifth and sixth configurations of the present invention, the abnormality is determined using the change generally occurring due to the abnormality of the circuit to be inspected as an index. An electronic circuit inspection device can be provided.
【0026】本発明の第7の構成に係る電子回路検査装
置によれば、被検査回路の過渡応答信号波形の演算処理
をアナログ演算処理回路によって行うので、マイクロプ
ロセッサの演算を軽減できて判定処理時間を短縮でき
る。また、マイクロプロセッサによる波形演算処理に比
べて、より高速な応答波形の演算処理が可能となる。According to the electronic circuit inspection apparatus of the seventh aspect of the present invention, the arithmetic processing of the transient response signal waveform of the circuit under test is performed by the analog arithmetic processing circuit. You can save time. In addition, it is possible to perform a higher-speed response waveform calculation process as compared with a waveform calculation process by a microprocessor.
【図1】 本発明の実施の形態1における自動電子回路
検査装置の計測回路図である。FIG. 1 is a measurement circuit diagram of an automatic electronic circuit inspection device according to a first embodiment of the present invention.
【図2】 パルス信号源15から出力されるステップ信
号波形を示す図である。FIG. 2 is a diagram showing a waveform of a step signal output from a pulse signal source 15;
【図3】 パルス信号源15から出力される矩形波信号
波形を示す図である。FIG. 3 is a diagram showing a waveform of a rectangular wave signal output from a pulse signal source 15;
【図4】 トランス3の2次側3bで測定される出力過
渡応答波形を示す図である。FIG. 4 is a diagram showing an output transient response waveform measured on a secondary side 3b of a transformer 3;
【図5】 トランス3の2次側3bで測定される出力過
渡応答波形を示す図である。FIG. 5 is a diagram showing an output transient response waveform measured on the secondary side 3b of the transformer 3.
1 NPNトランジスタ、2 被検査ダイオード、3a
トランス1次側、3b トランス2次側、4 コンデ
ンサ、5 低抵抗、10 検査装置、11 アナログー
デジタル変換器(ADC)、12 マイクロプロセッ
サ、13 メモリ、14 表示、15 信号源。1 NPN transistor, 2 diode under test, 3a
Transformer primary side, 3b Transformer secondary side, 4 capacitors, 5 low resistance, 10 test equipment, 11 analog-digital converter (ADC), 12 microprocessor, 13 memory, 14 display, 15 signal source.
Claims (7)
ス信号源と、前記被検査回路の前記パルス信号に対する
過渡応答信号をアナログデジタル変換するアナログデジ
タル変換器と、前記デジタル変換された過渡応答信号を
演算処理し、正常回路の過渡応答信号にもとづいて設定
した判定値と比較して前記被検査回路の異常を判定する
マイクロプロセッサと、前記被検査回路または正常回路
の過渡応答信号波形および被検査回路の検査結果を表示
する表示装置とを備えた電子回路検査装置。1. A pulse signal source for applying a pulse signal to a circuit under test, an analog-to-digital converter for converting a transient response signal of the circuit under test to the pulse signal from analog to digital, and the digitally converted transient response signal And a microprocessor for comparing the determined value based on the transient response signal of the normal circuit with the determined value to determine the abnormality of the circuit under test. An electronic circuit inspection device comprising: a display device for displaying a circuit inspection result.
形または矩形パルス波形を発生する請求項1記載の電子
回路検査装置。2. The electronic circuit inspection apparatus according to claim 1, wherein said pulse signal source generates a step pulse waveform or a rectangular pulse waveform.
回路の過渡応答信号の振動波形の継続時間を算出する請
求項1記載の電子回路検査装置。3. The electronic circuit inspection device according to claim 1, wherein the microprocessor calculates a duration of a vibration waveform of a transient response signal of the circuit under test.
回路の過渡応答信号波形の実効値または整流値の積分値
を算出し、これを過渡応答信号の信号波形の継続時間の
指標とする請求項3記載の電子回路検査装置。4. The microprocessor according to claim 3, wherein the microprocessor calculates an effective value or an integrated value of a rectified value of a transient response signal waveform of the circuit under test, and uses the integrated value as an index of a duration of the signal waveform of the transient response signal. The electronic circuit inspection device according to the above.
回路の過渡応答信号波形の包絡線が正常回路の応答波形
にもとづいて予め設定した範囲内にあるかどうかを判定
する請求項1記載の電子回路検査装置。5. The electronic circuit according to claim 1, wherein the microprocessor determines whether an envelope of a transient response signal waveform of the circuit under test falls within a preset range based on a response waveform of a normal circuit. Inspection equipment.
回路の過渡応答信号波形のピーク時刻またはゼロクロス
時刻にもとづいて振動波形の周波数を抽出し、正常回路
の振動周波数と比較判定する請求項1記載の電子回路検
査装置。6. The microprocessor according to claim 1, wherein the microprocessor extracts a frequency of the vibration waveform based on a peak time or a zero-cross time of a transient response signal waveform of the circuit under test, and compares the frequency with a vibration frequency of a normal circuit. Electronic circuit inspection equipment.
ス信号源と、前記被検査回路の前記パルス信号に対する
過渡応答信号の実効値または整流値を演算する実効値回
路または整流回路の出力信号をアナログデジタル変換す
るアナログデジタル変換器と、前記アナログデジタル変
換器の出力信号を演算処理し、正常回路の過渡応答信号
にもとづいて設定した判定値と比較して前記被検査回路
の異常を判定するマイクロプロセッサと、前記被検査回
路または正常回路の過渡応答信号波形および被検査回路
の検査結果を表示する表示装置とを備えた電子回路検査
装置。7. A pulse signal source for applying a pulse signal to a circuit under test, and an output signal of an effective value circuit or a rectifier circuit for calculating an effective value or a rectified value of a transient response signal of the circuit under test with respect to the pulse signal. An analog-to-digital converter for performing an analog-to-digital conversion; An electronic circuit inspection apparatus comprising: a processor; and a display device for displaying a transient response signal waveform of the circuit under test or a normal circuit and a test result of the circuit under test.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26682797A JP3577912B2 (en) | 1997-09-30 | 1997-09-30 | Electronic circuit inspection equipment |
JP2004159754A JP3818299B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
JP2004159755A JP3856013B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26682797A JP3577912B2 (en) | 1997-09-30 | 1997-09-30 | Electronic circuit inspection equipment |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004159755A Division JP3856013B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
JP2004159754A Division JP3818299B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH11108997A true JPH11108997A (en) | 1999-04-23 |
JP3577912B2 JP3577912B2 (en) | 2004-10-20 |
Family
ID=17436212
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26682797A Expired - Fee Related JP3577912B2 (en) | 1997-09-30 | 1997-09-30 | Electronic circuit inspection equipment |
JP2004159754A Expired - Fee Related JP3818299B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
JP2004159755A Expired - Fee Related JP3856013B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004159754A Expired - Fee Related JP3818299B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
JP2004159755A Expired - Fee Related JP3856013B2 (en) | 1997-09-30 | 2004-05-28 | Electronic circuit inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (3) | JP3577912B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001264398A (en) * | 1999-11-22 | 2001-09-26 | Fujitsu Ten Ltd | Inspection device and method for electronic component |
JP2006023138A (en) * | 2004-07-07 | 2006-01-26 | Hioki Ee Corp | Electronic circuit inspection apparatus and electronic circuit inspection method |
KR20160131709A (en) * | 2015-05-08 | 2016-11-16 | 전자부품연구원 | Diagnostic apparatus of semiconductor device |
CN108693464A (en) * | 2017-04-01 | 2018-10-23 | 亚德诺半导体集团 | Analog input circuit for fault detect senses |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56155862A (en) * | 1980-05-07 | 1981-12-02 | Komatsu Ltd | Frequency measuring method |
JPS5879169A (en) * | 1981-11-05 | 1983-05-12 | Nippon Telegr & Teleph Corp <Ntt> | Evaluation of semiconductor |
JPS608760A (en) * | 1983-06-29 | 1985-01-17 | Yuniki Eng:Kk | Deciding device of various coils |
JPS63200079A (en) * | 1987-02-16 | 1988-08-18 | Canon Inc | System for measuring characteristic of semiconductive element |
-
1997
- 1997-09-30 JP JP26682797A patent/JP3577912B2/en not_active Expired - Fee Related
-
2004
- 2004-05-28 JP JP2004159754A patent/JP3818299B2/en not_active Expired - Fee Related
- 2004-05-28 JP JP2004159755A patent/JP3856013B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001264398A (en) * | 1999-11-22 | 2001-09-26 | Fujitsu Ten Ltd | Inspection device and method for electronic component |
JP2006023138A (en) * | 2004-07-07 | 2006-01-26 | Hioki Ee Corp | Electronic circuit inspection apparatus and electronic circuit inspection method |
JP4596834B2 (en) * | 2004-07-07 | 2010-12-15 | 日置電機株式会社 | Electronic circuit inspection apparatus and electronic circuit inspection method |
KR20160131709A (en) * | 2015-05-08 | 2016-11-16 | 전자부품연구원 | Diagnostic apparatus of semiconductor device |
CN108693464A (en) * | 2017-04-01 | 2018-10-23 | 亚德诺半导体集团 | Analog input circuit for fault detect senses |
US10852360B2 (en) | 2017-04-01 | 2020-12-01 | Analog Devices International Unlimited Company | ADC input circuit sensing for fault detection |
Also Published As
Publication number | Publication date |
---|---|
JP3577912B2 (en) | 2004-10-20 |
JP3818299B2 (en) | 2006-09-06 |
JP3856013B2 (en) | 2006-12-13 |
JP2004271538A (en) | 2004-09-30 |
JP2004239925A (en) | 2004-08-26 |
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