JPH1098296A - Device for mounting semiconductor package component - Google Patents
Device for mounting semiconductor package componentInfo
- Publication number
- JPH1098296A JPH1098296A JP8251323A JP25132396A JPH1098296A JP H1098296 A JPH1098296 A JP H1098296A JP 8251323 A JP8251323 A JP 8251323A JP 25132396 A JP25132396 A JP 25132396A JP H1098296 A JPH1098296 A JP H1098296A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- suction head
- semiconductor package
- component
- package component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、TCP(tape car
rier package)部品やQFP(quad flat package )部
品などの周辺にリードを有する半導体パッケージ部品を
基板に実装する装置に関するものである。TECHNICAL FIELD The present invention relates to a TCP (tape car)
The present invention relates to an apparatus for mounting a semiconductor package component having leads around the periphery such as a carrier package (QFP) component and a QFP (quad flat package) component on a substrate.
【0002】[0002]
【従来の技術】半導体パッケージ部品の実装装置は、ロ
ボットの先端に吸着ヘッドを備えており、この吸着ヘッ
ドで、部品供給位置にある半導体パッケージ部品を吸着
して基板上に移送し、所定の位置に載置した後、部品の
リードと基板のパッドとのはんだ付けを行うようになっ
ている。吸着ヘッドは、はんだ付けが終わると、部品の
吸着を解除して、待機位置に戻り、次の部品供給に備え
る。2. Description of the Related Art A semiconductor package component mounting apparatus has a suction head at the tip of a robot. The suction head sucks a semiconductor package component at a component supply position and transfers it to a substrate. Then, the leads of the components are soldered to the pads of the board. When the soldering is completed, the suction head releases the suction of the component, returns to the standby position, and prepares for the next component supply.
【0003】[0003]
【発明が解決しようとする課題】半導体パッケージ部品
を基板に実装するときは、基板は、その表面の高さが一
定となるように、フラットな支持台上に載置されてい
る。しかし基板に反りがあると、基板の一部が支持台か
ら浮き上がり、基板表面の高さが一定しない。このため
吸着ヘッドで半導体パッケージ部品を基板上の所定位置
まで移送してきて、吸着ヘッドを所定の高さまで降下さ
せても、基板に反りがあるときは、部品のリードと基板
のパッド上のはんだとの接触状態が安定せず、良好なは
んだ付けを行うことが難しい。When a semiconductor package component is mounted on a substrate, the substrate is placed on a flat support base so that the surface of the substrate has a constant height. However, if the substrate is warped, a part of the substrate rises from the support, and the height of the substrate surface is not constant. For this reason, even if the semiconductor package component is transported to a predetermined position on the substrate by the suction head and the suction head is lowered to a predetermined height, if the substrate is warped, the lead of the component and the solder on the board pad are removed. Is not stable, and it is difficult to perform good soldering.
【0004】また半導体パッケージ部品を基板に実装す
るときは、基板に導電性(又は熱伝導性)フィラー入り
の接着剤を塗布しておいて、半導体パッケージ部品のチ
ップ下面を基板に接着する必要があるが、このとき吸着
ヘッドをはんだ付けに適する所定の高さまで降下させた
だけでは、接着剤中の導電性フィラー(銀粒子など)を
密接させることが難しく、半導体パッケージ部品と基板
間の十分な導電性(又は熱伝導性)が得られないという
問題がある。When mounting a semiconductor package component on a substrate, it is necessary to apply an adhesive containing a conductive (or thermally conductive) filler to the substrate and then bond the chip lower surface of the semiconductor package component to the substrate. However, at this time, simply lowering the suction head to a predetermined height suitable for soldering makes it difficult to bring the conductive filler (silver particles, etc.) in the adhesive into close contact, and there is not enough space between the semiconductor package component and the substrate. There is a problem that electrical conductivity (or thermal conductivity) cannot be obtained.
【0005】本発明の目的は、以上のような問題点に鑑
み、基板に多少の反りがあっても半導体パッケージ部品
のリードと基板のパッドとのはんだ付けを安定して行う
ことができ、かつ半導体パッケージ部品と基板を両者間
で十分な導電性(又は熱伝導性)が得られるように接着
することが可能な半導体パッケージ部品の実装装置を提
供することにある。SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to stably solder a lead of a semiconductor package component to a pad of a substrate even if the substrate is slightly warped, and An object of the present invention is to provide a semiconductor package component mounting apparatus capable of bonding a semiconductor package component and a substrate so that sufficient electrical conductivity (or thermal conductivity) can be obtained between them.
【0006】[0006]
【課題を解決するための手段】この目的を達成するため
本発明に係る半導体パッケージ部品の実装装置は、半導
体パッケージ部品を吸着する吸着ヘッドと、この吸着ヘ
ッドの上面から立ち上がる空気吸引用の中空支持軸とを
備え、前記吸着ヘッドの周辺の、その吸着ヘッドが半導
体パッケージ部品を吸着したときに半導体パッケージ部
品のリードと重ならない位置に、その吸着ヘッドを基板
表面から一定の高さに保持するアームを形成すると共
に、前記中空支持軸の中に内軸を上下動可能に設けたこ
とを特徴とするものである。To achieve this object, a semiconductor package component mounting apparatus according to the present invention comprises a suction head for sucking a semiconductor package component, and a hollow support for air suction rising from an upper surface of the suction head. An arm for holding the suction head at a predetermined height from the surface of the substrate at a position around the suction head and not overlapping with the lead of the semiconductor package component when the suction head sucks the semiconductor package component. And an inner shaft is provided in the hollow support shaft so as to be vertically movable.
【0007】[0007]
【発明の実施の形態】以下、本発明の実施形態を図面を
参照して詳細に説明する。図1〜図3は本発明に係る実
装装置の一実施形態を示す。図1はこの装置の吸着ヘッ
ド11の部分がTCP部品13を吸着した状態を示す一
部切開正面図、図2は同じく平面図、図3は吸着ヘッド
11の底面図である。Embodiments of the present invention will be described below in detail with reference to the drawings. 1 to 3 show one embodiment of a mounting apparatus according to the present invention. FIG. 1 is a partially cutaway front view showing a state in which a suction head 11 of the apparatus sucks a TCP component 13, FIG. 2 is a plan view of the same, and FIG. 3 is a bottom view of the suction head 11.
【0008】TCP部品13は、キャリアテープ15に
支持されたリード17の内端に半導体チップ19を接続
し、半導体チップ19の上面をリード17との接続部を
含めて耐熱性樹脂21で封止したものである。The TCP component 13 has a semiconductor chip 19 connected to the inner end of a lead 17 supported by a carrier tape 15, and the upper surface of the semiconductor chip 19 is sealed with a heat-resistant resin 21 including a connection portion with the lead 17. It was done.
【0009】吸着ヘッド11はその上面中央部から立ち
上がる中空支持軸23と一体になっており、中空支持軸
23の中空部23aは吸着ヘッド11の下面で開口して
いる。吸着ヘッド11の下面には図3に示すように、周
壁25と放射状の仕切り壁27が形成され、これらの壁
25、27に囲まれる部分が凹部29となっている。こ
れらの凹部29はそれぞれ中空支持軸23の中空部23
aと連通している。したがって吸着ヘッド11をTCP
部品13上に載せた状態で、中空支持軸23の上部から
その内部の空気を吸引すると、凹部29内が減圧され、
TCP部品13を吸着することができる。以上の構成は
従来と同様である。The suction head 11 is integrated with a hollow support shaft 23 rising from the center of the upper surface, and a hollow portion 23a of the hollow support shaft 23 is opened at the lower surface of the suction head 11. As shown in FIG. 3, a peripheral wall 25 and a radial partition wall 27 are formed on the lower surface of the suction head 11, and a portion surrounded by these walls 25 and 27 is a concave portion 29. These recesses 29 are respectively provided in the hollow portions 23 of the hollow support shaft 23.
a. Therefore, the suction head 11 is
When the air inside the hollow support shaft 23 is sucked from the upper portion of the hollow support shaft 23 while being placed on the component 13, the pressure in the concave portion 29 is reduced,
The TCP component 13 can be sucked. The above configuration is the same as the conventional one.
【0010】この装置の特徴は、吸着ヘッド11の周辺
に、吸着ヘッドを基板表面から一定の高さに保持するア
ーム31を形成したことと、中空支持軸23の中に内軸
33を上下動可能に設けたことにある。The features of this device are that an arm 31 for holding the suction head at a constant height from the substrate surface is formed around the suction head 11 and that the inner shaft 33 is moved up and down in the hollow support shaft 23. It has been made possible.
【0011】アーム31は正方形の吸着ヘッド11の1
つの対角線の延長方向に1対だけ形成されている。これ
は、吸着ヘッド11がTCP部品13を吸着したときに
アーム31がTCP部品13のリード17と重ならない
ように(アーム31がはんだ付けの障害にならないよう
に)するためと、TCP部品13の基準位置マーク(通
常は対角関係にある1組のコーナー部付近に設けられ
る)をアーム31で覆わないようにするためである。こ
のアーム31は先端部に下方に向けて突起31aを有し
ており、この突起31aの高さで基板表面からの吸着ヘ
ッド11の高さが設定できるようになっている。The arm 31 is one of the square suction heads 11.
Only one pair is formed in the extension direction of one diagonal line. This is because the arm 31 does not overlap with the lead 17 of the TCP component 13 when the suction head 11 sucks the TCP component 13 (to prevent the arm 31 from obstructing soldering), and This is to prevent the reference position mark (usually provided near a pair of corners having a diagonal relationship) from being covered with the arm 31. The arm 31 has a projection 31a directed downward at the distal end, and the height of the suction head 11 from the surface of the substrate can be set by the height of the projection 31a.
【0012】一方、内軸33はその上端をエアシリンダ
などに支持され、上下動可能となっている。なお中空支
持軸15は通常、サーボモーターとボールねじによって
上下方向の位置を精密に制御できるようになっている。On the other hand, the upper end of the inner shaft 33 is supported by an air cylinder or the like, and can be moved up and down. In addition, the position of the hollow support shaft 15 in the vertical direction can usually be precisely controlled by a servomotor and a ball screw.
【0013】図1は吸着ヘッド11で吸着したTCP部
品13を基板35に載置する直前の状態を示している。
基板35のパッドにははんだ37がプリコートされてお
り、かつ基板35のTCP部品の半導体チップ19が載
置される領域には導電性接着剤39が塗布されている。
基板35はフラットな支持台41上に載置されている。
基板35は反りがなければ図示のように支持台41との
間に隙間ができることはないが、反りがあると支持台4
1との間に隙間ができる。FIG. 1 shows a state immediately before the TCP component 13 sucked by the suction head 11 is placed on the substrate 35.
The solder 37 is pre-coated on the pads of the substrate 35, and a conductive adhesive 39 is applied to a region of the substrate 35 where the semiconductor chip 19 of the TCP component is mounted.
The substrate 35 is placed on a flat support 41.
If there is no warp, there is no gap between the substrate 35 and the support table 41 as shown in the figure.
There is a gap between the two.
【0014】図1の状態から吸着ヘッド11を所定の高
さまで降下させると、図4のようにアーム31の突起3
1aが基板35の表面に突き当たり、吸着ヘッド11は
基板35の表面から一定の高さに保たれる。これは基板
35に反りがある場合でも同じである。したがって吸着
ヘッド11に吸着されたTCP部品13のリード17と
基板35上のプリコートはんだ37との接触状態がほぼ
一定になる。When the suction head 11 is lowered from the state shown in FIG. 1 to a predetermined height, as shown in FIG.
1a strikes the surface of the substrate 35, and the suction head 11 is kept at a certain height from the surface of the substrate 35. This is the same even when the substrate 35 is warped. Therefore, the contact state between the lead 17 of the TCP component 13 sucked by the suction head 11 and the pre-coated solder 37 on the substrate 35 becomes substantially constant.
【0015】このあと図5に示すように、はんだ付け用
の熱風加熱器43を降下させ、リード17の上から熱風
を吹き付けてプリコートはんだ37を溶融させ、はんだ
付けを行う。熱風加熱器43の代わりにヒートツールを
用いることもできる。このはんだ付けでは、予めリード
17とプリコートはんだ37との接触状態がほぼ一定に
保たれているので、良好なはんだ付けを行うことができ
る。また基板35上のはんだ37が溶融した時点で、内
軸33を降下させ、半導体チップ19を接着剤39上に
押しつける。これにより接着剤39が加圧され、内部の
導電性フィラーが密接するので、半導体チップ19と基
板35を導電性(又は熱伝導性)の良好な状態で接着す
ることができる。Thereafter, as shown in FIG. 5, the hot air heater 43 for soldering is lowered, and hot air is blown from above the leads 17 to melt the pre-coated solder 37 and perform soldering. A heat tool can be used instead of the hot air heater 43. In this soldering, since the contact state between the lead 17 and the precoat solder 37 is kept substantially constant in advance, good soldering can be performed. When the solder 37 on the substrate 35 is melted, the inner shaft 33 is lowered, and the semiconductor chip 19 is pressed on the adhesive 39. As a result, the adhesive 39 is pressurized, and the conductive filler inside is brought into close contact, so that the semiconductor chip 19 and the substrate 35 can be bonded with good conductivity (or heat conductivity).
【0016】なお、上記の実施形態ではTCP部品を実
装する場合を説明したが、本発明の装置で実装する部品
はこれに限られるものではなく、例えばQFP部品など
も同様に実装することが可能である。In the above embodiment, the case where the TCP component is mounted is described. However, the component mounted by the apparatus of the present invention is not limited to this. For example, a QFP component can be mounted similarly. It is.
【0017】[0017]
【発明の効果】以上説明したように本発明によれば、吸
着ヘッドにそれを基板表面から一定の高さに保持するア
ームを形成したので、半導体パッケージ部品を基板に載
置したときに部品のリードと基板のパッド上のはんだと
の接触状態が安定し、良好なはんだ付けを行うことがで
きる。また吸着ヘッドを支持する中空支持軸の中に上下
動可能な内軸を設けたことにより、半導体パッケージ部
品を基板に載置した後で、その内軸により半導体パッケ
ージ部品を上から加圧することができるので、半導体パ
ッケージ部品と基板を導電性(又は熱伝導性)接着剤に
より導電性(又は熱伝導性)の良好な状態で接着するこ
とができる。As described above, according to the present invention, an arm for holding the suction head at a predetermined height from the substrate surface is formed on the suction head, so that when the semiconductor package component is mounted on the substrate, the component can be removed. The contact state between the lead and the solder on the pad of the substrate is stabilized, and good soldering can be performed. In addition, since the vertically movable inner shaft is provided in the hollow support shaft that supports the suction head, after the semiconductor package component is mounted on the substrate, the semiconductor package component can be pressed from above by the inner shaft. Therefore, the semiconductor package component and the substrate can be bonded to each other with a conductive (or heat conductive) adhesive in a state of good conductivity (or heat conductivity).
【図1】 本発明の一実施形態に係る半導体パッケージ
部品実装装置の吸着ヘッド部分を示す一部切開正面図。FIG. 1 is a partially cutaway front view showing a suction head portion of a semiconductor package component mounting apparatus according to an embodiment of the present invention.
【図2】 図1の装置の吸着ヘッド部分の平面図。FIG. 2 is a plan view of a suction head portion of the apparatus of FIG.
【図3】 図1の装置の吸着ヘッドの底面図。FIG. 3 is a bottom view of the suction head of the apparatus shown in FIG. 1;
【図4】 図1の装置で半導体パッケージ部品を基板に
載置した状態を示す一部切開正面図。FIG. 4 is a partially cutaway front view showing a state where a semiconductor package component is mounted on a substrate in the apparatus shown in FIG. 1;
【図5】 図1の装置で半導体パッケージ部品を基板に
はんだ付けしている状態を示す一部切開正面図。5 is a partially cutaway front view showing a state where a semiconductor package component is soldered to a substrate in the apparatus of FIG. 1;
11:吸着ヘッド 13:TCP部品 17:リード 19:半導体チップ 23:中空支持軸 23a:中空部 31:アーム 31a:突起 33:内軸 35:基板 37:はんだ 39:導電性接着剤 41:支持台 11: Suction head 13: TCP component 17: Lead 19: Semiconductor chip 23: Hollow support shaft 23a: Hollow portion 31: Arm 31a: Projection 33: Inner shaft 35: Substrate 37: Solder 39: Conductive adhesive 41: Support base
Claims (1)
ドと、この吸着ヘッドの上面から立ち上がる空気吸引用
の中空支持軸とを備え、前記吸着ヘッドの周辺の、その
吸着ヘッドが半導体パッケージ部品を吸着したときに半
導体パッケージ部品のリードと重ならない位置に、その
吸着ヘッドを基板表面から一定の高さに保持するアーム
を形成すると共に、前記中空支持軸の中に内軸を上下動
可能に設けたことを特徴とする半導体パッケージ部品の
実装装置。1. A suction head for sucking a semiconductor package component, and a hollow support shaft for sucking air rising from an upper surface of the suction head, wherein the suction head around the suction head sucks the semiconductor package component. An arm for holding the suction head at a certain height from the substrate surface is formed at a position where the lead does not overlap with the lead of the semiconductor package component, and an inner shaft is provided in the hollow support shaft so as to be vertically movable. A semiconductor package component mounting apparatus, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8251323A JPH1098296A (en) | 1996-09-24 | 1996-09-24 | Device for mounting semiconductor package component |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8251323A JPH1098296A (en) | 1996-09-24 | 1996-09-24 | Device for mounting semiconductor package component |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1098296A true JPH1098296A (en) | 1998-04-14 |
Family
ID=17221116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8251323A Pending JPH1098296A (en) | 1996-09-24 | 1996-09-24 | Device for mounting semiconductor package component |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1098296A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012054394A (en) * | 2010-09-01 | 2012-03-15 | Hitachi Ltd | Soldering device and soldering method |
-
1996
- 1996-09-24 JP JP8251323A patent/JPH1098296A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012054394A (en) * | 2010-09-01 | 2012-03-15 | Hitachi Ltd | Soldering device and soldering method |
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