JPH11121531A - Mounting of electronic component and mounting device thereof - Google Patents

Mounting of electronic component and mounting device thereof

Info

Publication number
JPH11121531A
JPH11121531A JP28654297A JP28654297A JPH11121531A JP H11121531 A JPH11121531 A JP H11121531A JP 28654297 A JP28654297 A JP 28654297A JP 28654297 A JP28654297 A JP 28654297A JP H11121531 A JPH11121531 A JP H11121531A
Authority
JP
Japan
Prior art keywords
electronic component
light
heating
mask
connection terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28654297A
Other languages
Japanese (ja)
Inventor
Koichi Oka
幸一 岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP28654297A priority Critical patent/JPH11121531A/en
Publication of JPH11121531A publication Critical patent/JPH11121531A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7525Means for applying energy, e.g. heating means
    • H01L2224/75252Means for applying energy, e.g. heating means in the upper part of the bonding apparatus, e.g. in the bonding head
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head

Abstract

PROBLEM TO BE SOLVED: To heat only the connection parts of an electronic component with substrate pads, also in the case where the connection parts of the component with the pads are arranged at narrow pitches by a method wherein heating light is made to be irradiated on positions, where gold bumps are placed on the substrate pads, from light sources via a mask to enable the light to pass via a desired region only. SOLUTION: A heater 3 provided in an electronic component suction-heating unit 1 is used to heat metal bumps 11, and at the same time, a pressure is applied to an electronic component 10 from over the component 10. At the some time, light for enabling the temperature of the metal bumps 11 to rise is irradiated from light sources 9, and the contact parts of the bumps 11 with substrate pads 21 are heated with light, which is passed through a mask open parts 5 formed in the mask 4. In this way, since the light is used as a heat feed source, the contact parts only of the bumps 11 with the pads 21 can be reliably heated though the pitch between the bumps 11 regardless of whether the pads 21 is narrow or not. Moreover, as the irradiation positions of the heating light are decided by the opening parts 5 formed in the mask 4, a mounting device can also correspond fully to the minute arrangement of the connection part of the component 10 with a substrate.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品の実装方
法および実装装置に関し、特に、電子部品と基板との接
続部のみを加熱することにより、当該電子部品と当該基
板との熱膨張の差による接続部の位置ずれを防止するこ
とができる電子部品の実装方法および実装装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mounting method and a mounting apparatus for an electronic component, and more particularly, to a method for heating a connection portion between an electronic component and a substrate to thereby obtain a difference in thermal expansion between the electronic component and the substrate. TECHNICAL FIELD The present invention relates to a mounting method and a mounting apparatus for an electronic component, which can prevent a displacement of a connection portion due to the above.

【0002】[0002]

【従来の技術】近年、電子部品の裏面にグリッド状に金
属バンプを配置し、当該金属バンプを電極として使用す
るものが注目されている。この種の電子部品としては、
例えば、BGA(Ball Grid Array)や
CSP(Chip ScalePackage)、ある
いはフリップチップ等が挙げられる。
2. Description of the Related Art In recent years, attention has been paid to an arrangement in which metal bumps are arranged in a grid on the back surface of an electronic component and the metal bumps are used as electrodes. Such electronic components include:
For example, BGA (Ball Grid Array), CSP (Chip Scale Package), or a flip chip is used.

【0003】上記のような金属バンプを具備する電子部
品は、当該金属バンプからなる電極が狭ピッチで配置さ
れているため、チップコンデンサやチップコイル等の他
の一般的な表面実装部品と同時にリフローすることが困
難である。そこで、このような電極を有する電子部品
は、他の一般的な表面実装部品とは別に個別に実装され
る。
[0003] In the electronic parts having the above-mentioned metal bumps, since the electrodes made of the metal bumps are arranged at a narrow pitch, they are reflowed simultaneously with other general surface mount parts such as chip capacitors and chip coils. Is difficult to do. Therefore, electronic components having such electrodes are individually mounted separately from other general surface mount components.

【0004】上記のような個別実装においては、電子部
品を実装する際に、当該電子部品を上方から加圧しなが
ら熱を加え、当該電子部品に設けられた金属バンプを加
熱し、基板側に設けられたパッドに融着させる。
In the individual mounting as described above, when mounting an electronic component, heat is applied while pressing the electronic component from above, and the metal bumps provided on the electronic component are heated and provided on the substrate side. Fused to the pad.

【0005】このとき、基板側に設けられたパッドから
熱が逃げるのを防止するため、基板側からも熱を加えて
いる。
At this time, heat is also applied from the substrate side in order to prevent heat from escaping from the pads provided on the substrate side.

【0006】[0006]

【発明が解決しようとする課題】しかし、上記のように
基板に熱を加えると、当該基板がガラスエポキシで形成
されたプリント基板である場合や絶縁性フィルム上に配
線パターンが形成されたフレキシブル基板である場合に
は、当該基板の熱膨張率は、電子部品の熱膨張率よりも
大きいため、基板側の伸びが大きくなる。
However, when heat is applied to the substrate as described above, the substrate may be a printed substrate made of glass epoxy or a flexible substrate having a wiring pattern formed on an insulating film. In this case, the coefficient of thermal expansion of the substrate is larger than the coefficient of thermal expansion of the electronic component.

【0007】その結果、電子部品に設けられた電極のピ
ッチと基板に設けられたパッドのピッチにズレが生じ、
接続不良の原因となっていた。また、たとえ上記のよう
な加熱方法によって電子部品の電極と基板のパッドが正
常に接続された場合でも、熱の供給を停止し実装体を常
温に戻す冷却過程で、基板側が大きく縮むため、接続部
にクラックが生じたり、破断したりするという問題があ
った。
As a result, a gap occurs between the pitch of the electrodes provided on the electronic component and the pitch of the pads provided on the substrate,
This was causing poor connection. Also, even if the electrodes of the electronic component are normally connected to the pads of the board by the heating method described above, the board side shrinks greatly in the cooling process of stopping the supply of heat and returning the mounted body to normal temperature. There was a problem that a crack was generated in the portion or the portion was broken.

【0008】特開平7−312377号公報には、上記
問題を解決する手段として、基板のパッドを局部的に加
熱する棒状の加熱体をパッド近傍に当接し、基板に加え
られる熱を最小限に抑える技術が開示されている。
Japanese Patent Application Laid-Open No. 7-313377 discloses a means for solving the above problem, in which a rod-like heating element for locally heating a pad of a substrate is brought into contact with the vicinity of the pad to minimize the heat applied to the substrate. A suppression technique is disclosed.

【0009】しかし、上記公報に記載された技術では、
電子部品の電極が狭ピッチである場合には、加熱体をパ
ッドに当接するスペースを確保することができないた
め、実施が困難である。また、上記技術は、機械的な方
法によってパッドの加熱を行っているため、加熱体を動
かす機構部の精度を高くする必要がある。
However, in the technology described in the above publication,
When the electrodes of the electronic component have a narrow pitch, it is difficult to secure a space where the heating element is in contact with the pad, so that it is difficult to implement the heating element. Further, in the above technique, since the pad is heated by a mechanical method, it is necessary to increase the accuracy of the mechanism for moving the heating element.

【0010】このように、上記技術では、基板にそりが
発生した場合や機構部の精度が低い場合あるいは加熱体
の形状が大きい場合には、実質的にパッドの周縁部も加
熱されてしまうため、当該部分の熱膨張が避けられない
という問題がある。
As described above, according to the above technique, when the substrate is warped, when the precision of the mechanism is low, or when the shape of the heating body is large, the peripheral portion of the pad is also substantially heated. However, there is a problem that thermal expansion of the portion cannot be avoided.

【0011】そこで、本発明は、電子部品と基板との接
続部が狭ピッチで配置されている場合であっても、当該
接続部のみを加熱することができる電子部品の実装方法
および実装装置を提供することを目的とする。
Accordingly, the present invention provides a mounting method and a mounting apparatus for an electronic component that can heat only the connection portion even when the connection portions between the electronic component and the substrate are arranged at a narrow pitch. The purpose is to provide.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するた
め、請求項1記載の発明は、電子部品に形成された第1
の接続端子と基板上の該第1の接続端子に対応する位置
に形成された第2の接続端子とを接触させる工程と、前
記電子部品に熱を供給することにより前記第1の接続端
子を加熱する第1の加熱工程と、前記第1の接続端子お
よび前記第2の接続端子のすくなくとも一方に局所的に
光を照射し該照射部を加熱する第2の加熱工程とを含む
ことを特徴とする。
In order to achieve the above-mentioned object, the invention according to claim 1 is directed to a first embodiment formed on an electronic component.
Contacting the first connection terminal with a second connection terminal formed at a position corresponding to the first connection terminal on the substrate; and supplying heat to the electronic component to form the first connection terminal. A first heating step of heating, and a second heating step of locally irradiating at least one of the first connection terminal and the second connection terminal with light and heating the irradiated portion. And

【0013】また、請求項2記載の発明は、請求項1記
載の発明において、前記第2の加熱工程は、光を照射す
る部分の大きさに対応した開口部を有するマスクを、該
光を照射する部分に対して位置決めするマスク位置決め
工程と、前記マスク位置決め工程によって位置決めされ
たマスクに光を照射する工程とを含むことを特徴とす
る。
According to a second aspect of the present invention, in the first aspect of the invention, the second heating step includes a step of forming a mask having an opening corresponding to the size of a portion to be irradiated with light. The method includes a mask positioning step of positioning a portion to be irradiated, and a step of irradiating light to the mask positioned in the mask positioning step.

【0014】また、請求項3記載の発明は、請求項1ま
たは請求項2記載の発明において、前記電子部品は、そ
の熱膨張率が前記基板と異なることを特徴とする。
According to a third aspect of the present invention, in the first or second aspect, the electronic component has a different coefficient of thermal expansion from the substrate.

【0015】また、請求項4記載の発明は、請求項1乃
至請求項3のいずれかに記載の発明において、前記電子
部品は、表面実装型の部品であることを特徴とする。
According to a fourth aspect of the present invention, in the first aspect of the present invention, the electronic component is a surface mount type component.

【0016】また、請求項5記載の発明は、電子部品に
形成された第1の接続端子と基板上の該第1の接続端子
に対応する位置に形成された第2の接続端子とを接触さ
せる接触手段と、前記電子部品に熱を供給することによ
り前記第1の接続端子を加熱する第1の加熱手段と、前
記第1の接続端子および前記第2の接続端子のすくなく
とも一方に局所的に光を照射し該照射部を加熱する第2
の加熱手段とを含むことを特徴とする。
According to a fifth aspect of the present invention, the first connection terminal formed on the electronic component is brought into contact with the second connection terminal formed on the substrate at a position corresponding to the first connection terminal. Contacting means, a first heating means for heating the first connection terminal by supplying heat to the electronic component, and a local heating means for at least one of the first connection terminal and the second connection terminal. To irradiate light and heat the irradiated part
And heating means.

【0017】また、請求項6記載の発明は、請求項5記
載の発明において、前記第2の加熱手段は、光を照射す
る部分の大きさに対応した開口部を有するマスクを、該
光を照射する部分に対して位置決めするマスク位置決め
手段と、前記マスク位置決め工程によって位置決めされ
たマスクに光を照射する手段とを具備することを特徴と
する。
According to a sixth aspect of the present invention, in the fifth aspect of the present invention, the second heating means includes a mask having an opening corresponding to the size of a portion to be irradiated with light. It is characterized by comprising mask positioning means for positioning with respect to a portion to be irradiated, and means for irradiating light to the mask positioned in the mask positioning step.

【0018】また、請求項7記載の発明は、請求項6記
載の発明において、前記第2の加熱手段は、前記マスク
の開口部を通過した光の照射方向を変化させる偏向手段
を具備することを特徴とする。
According to a seventh aspect of the present invention, in the sixth aspect of the present invention, the second heating means includes a deflecting means for changing an irradiation direction of the light passing through the opening of the mask. It is characterized by.

【0019】[0019]

【発明の実施の形態】以下、本発明に係る電子部品の実
装方法および実装装置の一実施の形態を添付図面を参照
して詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a method and an apparatus for mounting an electronic component according to the present invention will be described in detail with reference to the accompanying drawings.

【0020】まず、図1を使用して本発明の概要を説明
する。図1は、本発明に係る電子部品実装装置の構造を
示す側面である。
First, an outline of the present invention will be described with reference to FIG. FIG. 1 is a side view showing the structure of the electronic component mounting apparatus according to the present invention.

【0021】本発明は、同図に示すように、電子部品1
0に配設された金属バンプ11を加熱するための加熱光
を発生する光源9と、当該光源9が発生する光を所望の
領域だけ通過させるマスク4とを設け、このマスク4を
介して金属バンプ11が基板パッド21に載置される位
置に加熱光を照射することにより、電子部品と基板との
接続部が狭ピッチで配置されている場合であっても、当
該接続部のみを加熱することができる電子部品の実装方
法および実装装置を提供するものである。
According to the present invention, as shown in FIG.
A light source 9 that generates heating light for heating the metal bumps 11 disposed on the metal bumper 11 and a mask 4 that allows light generated by the light source 9 to pass through only a desired region are provided. By irradiating the position where the bump 11 is placed on the substrate pad 21 with heating light, even if the connection parts between the electronic component and the substrate are arranged at a narrow pitch, only the connection part is heated. It is an object of the present invention to provide a mounting method and a mounting device for an electronic component that can be used.

【0022】以下、本発明の内容をさらに詳細に説明す
る。
Hereinafter, the contents of the present invention will be described in more detail.

【0023】本発明に係る電子部品実装装置は、図1に
示すように、電子部品10を吸着し加熱する電子部品吸
着加熱装置1と、プリント基板20を加熱する基板加熱
装置2と、電子部品吸着加熱装置1の熱源となるヒータ
ー3と、不要な加熱光を遮断するマスク4と、必要な加
熱光を通過させるマスク開口部5と、加熱光を発生する
光源9と、マスク4を保持し上下自在に移動可能なマス
ク保持部8と、光源9を保持し上下自在に移動可能な光
源保持部7と、マスク保持部8および光源保持部7の支
柱となる支柱6とを具備し、以下のように動作する。
As shown in FIG. 1, the electronic component mounting apparatus according to the present invention includes an electronic component suction heating device 1 for attracting and heating an electronic component 10, a board heating device 2 for heating a printed board 20, and an electronic component mounting device. A heater 3 serving as a heat source of the adsorption heating device 1, a mask 4 for blocking unnecessary heating light, a mask opening 5 for passing necessary heating light, a light source 9 for generating heating light, and a mask 4 It comprises a vertically movable mask holding portion 8, a vertically movable light source holding portion 7 for holding the light source 9, and a support 6 serving as a support for the mask holding portion 8 and the light source holding portion 7. Works like

【0024】電子部品吸着加熱装置1は、その底面に吸
着部を有し電子部品を着脱自在に吸着する。この電子部
品吸着加熱装置1は、上下左右自在に移動可能であり、
電子部品をプリント基板に載置する際には、左右方向に
移動しながら位置決めを行い、位置決めが終了すると、
下方向に移動し金属バンプ11と基板パッド21を接触
させる。
The electronic component suction and heating device 1 has a suction portion on its bottom surface and detachably suctions electronic components. The electronic component adsorption and heating device 1 can move freely up, down, left and right,
When placing electronic components on a printed circuit board, positioning is performed while moving in the left and right direction.
The metal bump 11 is moved downward to bring the metal bump 11 into contact with the substrate pad 21.

【0025】この電子部品吸着加熱装置1には、ヒータ
ー3が内蔵されており、当該ヒーター3は、金属バンプ
融着時に電子部品のパッケージを介して金属バンプ11
に熱を供給する。また、この加熱時には、電子部品に対
して上方からの圧力をかけるように作用する。
The electronic component suction and heating device 1 has a built-in heater 3 which is used to fuse the metal bumps 11 through the electronic component package when the metal bumps are fused.
Supply heat to In addition, at the time of this heating, it acts so as to apply pressure from above to the electronic component.

【0026】基板加熱装置2は、プリント基板の支持台
として作用し電子部品吸着加熱装置1による圧力に対し
て押さえとなるように作用する。
The substrate heating device 2 acts as a support for the printed circuit board and acts so as to hold down the pressure of the electronic component suction / heating device 1.

【0027】マスク保持部8は、マスク4を両端をから
保持し、上下動してマスクの位置決めを行う。この位置
決めはマスク開口部5の形状と、光源9が発生する加熱
光の照射方向および基板パッド21の位置を考慮して行
われる。
The mask holding section 8 holds the mask 4 from both ends, and moves up and down to position the mask. This positioning is performed in consideration of the shape of the mask opening 5, the irradiation direction of the heating light generated by the light source 9, and the position of the substrate pad 21.

【0028】光源保持部7は、光源9を両端から保持
し、上下動して光源9が発生する加熱光の照射方向を決
定する。
The light source holder 7 holds the light source 9 from both ends, and moves up and down to determine the irradiation direction of the heating light generated by the light source 9.

【0029】次に、本発明に係る電子部品実装装置で使
用されるマスク4の構造を図2を使用して説明する。
Next, the structure of the mask 4 used in the electronic component mounting apparatus according to the present invention will be described with reference to FIG.

【0030】図2は、図1に示すマスク4の構造を示す
上面図である。同図に示すようにマスク4は、電子部品
吸着加熱装置1の周縁を囲むような形状を有しており、
電子部品吸着加熱装置1との間には逃げが設けられ、上
下自在に移動できるように構成される。マスク4には、
プリント基板20に配置された基板パッド21の位置に
対応したマスク開口部5を形成し、当該開口部のみを加
熱光が通過する構造とする。
FIG. 2 is a top view showing the structure of the mask 4 shown in FIG. As shown in the figure, the mask 4 has a shape surrounding the periphery of the electronic component suction and heating device 1.
An escape is provided between the electronic component suction and heating device 1 and is configured to be able to move up and down freely. The mask 4
The mask openings 5 corresponding to the positions of the substrate pads 21 arranged on the printed circuit board 20 are formed, and only the openings allow the heating light to pass therethrough.

【0031】このとき、光源9が発生する加熱光は、図
2に示す光照射領域4aに照射されるようにすることが
好ましい。従って、光源9の構造は、この光照射領域4
aに対応した形状がよい。このような形状の光源9を使
用することができない場合は、マスク開口部5ごとに個
別の光源を設ける構成としてもよいし、また、1つの光
源をマスク開口部5ごとに順次移動させ、基板パッド2
1を順番に加熱してゆくように構成してもよい。
At this time, it is preferable that the heating light generated by the light source 9 is applied to the light irradiation area 4a shown in FIG. Therefore, the structure of the light source 9 is
The shape corresponding to a is good. When the light source 9 having such a shape cannot be used, an individual light source may be provided for each mask opening 5, or one light source may be sequentially moved for each mask opening 5, Pad 2
1 may be heated in order.

【0032】マスク開口部5の形状は、その開口部が小
さい方が基板パッド21に対してより局所的に加熱でき
るため、所定の温度上昇が得られるのであれば、可能な
限り小さい方がよい。また、断面形状は、図1に示すよ
うに、光源9から基板パッド21の方向に斜めに形成す
ることが好ましい。
The shape of the mask opening 5 is preferably as small as possible as long as a predetermined temperature rise can be obtained because the smaller the opening, the more locally the substrate pad 21 can be heated. . Further, as shown in FIG. 1, the cross-sectional shape is preferably formed obliquely in the direction from the light source 9 to the substrate pad 21.

【0033】次に、本発明に係る電子部品実装装置の実
装対象となる電子部品10およびプリント基板20の構
造について簡単に説明する。
Next, the structures of the electronic component 10 and the printed circuit board 20 to be mounted by the electronic component mounting apparatus according to the present invention will be briefly described.

【0034】本発明は、半田バンプ等の金属バンプ11
が電子部品10の底面に狭ピッチで配設されたフリップ
チップやチップサイズパッケージ等の電子部品の実装に
特に効果がある。図1には、図示を簡単にするため金属
バンプ11が2つしか示されていないが、多数の金属バ
ンプ11が配設されている電子部品であっても実施可能
である。
According to the present invention, a metal bump 11 such as a solder bump is provided.
Is particularly effective for mounting electronic components such as flip chips and chip size packages arranged at a narrow pitch on the bottom surface of the electronic component 10. Although only two metal bumps 11 are shown in FIG. 1 for simplicity of illustration, the present invention can be applied to an electronic component provided with a large number of metal bumps 11.

【0035】また、金属バンプ11としては、半田バン
プに限らず、金、銀、銅等の融点の高い金属を使用した
ものであっても熱によって電気的に接続するものであれ
ば本発明を適用することができる。また、金属バンプ1
1自体を溶融せずに、半田等の通電用部材を供給する場
合も同様に適用可能である。
The metal bumps 11 are not limited to solder bumps. The present invention is not limited to solder bumps, but may be made of a metal having a high melting point, such as gold, silver or copper, as long as it is electrically connected by heat. Can be applied. Metal bump 1
The present invention is also applicable to a case where a current-carrying member such as solder is supplied without melting itself.

【0036】一方、プリント基板20は、その表面に配
線パターン22が形成されたおり、この配線パターン2
2は、ソルダーレジスト23で被覆される。ここで、基
板パッド21とは、図1に示すように、ソルダーレジス
ト23を被覆して配線パターン22の一部を露呈させた
部分であってもよいし、電子部品接続用の端子を設けた
ものであってもよい。また、本発明は、プリント基板以
外の金属基板やセラミック基板等にも適用できる。
On the other hand, the printed circuit board 20 has a wiring pattern 22 formed on the surface thereof.
2 is covered with a solder resist 23. Here, the substrate pad 21 may be a portion in which a part of the wiring pattern 22 is exposed by covering the solder resist 23 as shown in FIG. 1 or a terminal for connecting an electronic component is provided. It may be something. Further, the present invention can be applied to a metal substrate other than a printed circuit board, a ceramic substrate, and the like.

【0037】次に、上述したように構成される電子部品
実装装置を使用して電子部品の実装を行う場合の例を図
3を使用して説明する。
Next, an example in which an electronic component is mounted using the electronic component mounting apparatus configured as described above will be described with reference to FIG.

【0038】図3は、図1に示す電子部品実装装置で電
子部品とプリント基板との接続部を加熱している状態を
示す側面図である。同図に示すように、電子部品実装装
置は、まず、電子部品吸着加熱装置1の底面に電子部品
10を吸着し、プリント基板20の所定の位置に載置す
る。
FIG. 3 is a side view showing a state in which the connection between the electronic component and the printed circuit board is heated by the electronic component mounting apparatus shown in FIG. As shown in FIG. 1, the electronic component mounting apparatus first sucks the electronic component 10 on the bottom surface of the electronic component suction and heating device 1 and mounts the electronic component 10 at a predetermined position on the printed circuit board 20.

【0039】その後、マスク保持部8および光源保持部
7を上下動させてマスク4および光源9の位置決めを行
う。
Thereafter, the mask holder 8 and the light source 9 are moved up and down to position the mask 4 and the light source 9.

【0040】次に、電子部品吸着加熱装置1内に設けら
れたヒーター3を使用して金属バンプ11を加熱すると
ともに、電子部品10に上方から圧力をかける。それと
同時に、光源9から赤外線やレーザ等の金属の温度を上
昇させることができる光を照射し、マスク開口部5から
通過する光で金属バンプ11と基板パッド21の接触部
を加熱する。この加熱光にによる加熱は、電子部品吸着
加熱装置1からの熱が基板に逃げることを防止するため
の予備的なものであるため、電子部品吸着加熱装置1に
よって供給される熱の温度よりもやや低めに設定する。
Next, the metal bumps 11 are heated using the heater 3 provided in the electronic component suction and heating device 1, and pressure is applied to the electronic component 10 from above. At the same time, light that can raise the temperature of the metal, such as infrared light or laser, is emitted from the light source 9, and the light passing through the mask opening 5 heats the contact portion between the metal bump 11 and the substrate pad 21. Since the heating by the heating light is preliminary for preventing the heat from the electronic component suction heating device 1 from escaping to the substrate, the heating by the heating light is performed at a temperature lower than the temperature of the heat supplied by the electronic component suction heating device 1. Set a little lower.

【0041】尚、この加熱光による加熱は、金属バンプ
11と基板パッドを接触させる前に行ってもよく、この
場合には、加熱光を所定の時間基板パッドに照射し、そ
の後、電子部品吸着加熱装置を作用させるようにすれば
よい。このような順序で加熱を行えば金属バンプがグリ
ッド状で配置されている場合であっても、加熱光の照射
を遮るものはないので、すべての基板パッドを加熱でき
る。
The heating by the heating light may be performed before the metal bump 11 and the substrate pad are brought into contact with each other. In this case, the heating light is applied to the substrate pad for a predetermined time, and then the electronic component is attracted. What is necessary is just to make a heating apparatus act. If heating is performed in this order, even if the metal bumps are arranged in a grid, there is nothing to block the irradiation of the heating light, so that all the substrate pads can be heated.

【0042】また、図3に示す構成であっても、基板パ
ッド21のみに加熱光を照射し、基板パッド21を加熱
するように構成してもよいし、金属バンプ11のみに加
熱光を照射し、金属バンプ11のみを加熱するように構
成してもよい。
In addition, even with the configuration shown in FIG. 3, only the substrate pad 21 may be irradiated with heating light to heat the substrate pad 21 or only the metal bump 11 may be irradiated with heating light. Alternatively, only the metal bumps 11 may be heated.

【0043】このように、本発明では、光を熱供給源と
して使用しているため、狭ピッチであるかないかに拘わ
らず、金属バンプ11と基板パッド21の接触部のみを
確実に加熱することができる。
As described above, in the present invention, since light is used as a heat supply source, it is possible to reliably heat only the contact portions between the metal bumps 11 and the substrate pads 21 regardless of whether the pitch is narrow or not. it can.

【0044】また、加熱光の照射位置をマスク4に形成
した開口部で決定しているため、微細な配置に対しても
十分適応できる。
Further, since the irradiation position of the heating light is determined by the opening formed in the mask 4, it can be sufficiently applied to a fine arrangement.

【0045】次に、図4を使用して本発明の第2の実施
形態を説明する。
Next, a second embodiment of the present invention will be described with reference to FIG.

【0046】図4は、本発明に係る電子部品実装装置の
第2の実施形態を示す側面図である。第2の実施形態
は、同図に示すように、加熱光をマスク4の上方から鉛
直方向に照射し、マスク保持部8に設けた偏向器30で
加熱光の進路を変化させるものである。
FIG. 4 is a side view showing a second embodiment of the electronic component mounting apparatus according to the present invention. In the second embodiment, as shown in the figure, heating light is irradiated vertically from above the mask 4 and the path of the heating light is changed by the deflector 30 provided in the mask holding unit 8.

【0047】この偏向器30は、ミラー等の光を反射す
る物質で形成する。偏向器30は、マスク4に取り付け
てもよいし、また、マスク開口部5の中に形成してもよ
い。
The deflector 30 is made of a material such as a mirror that reflects light. The deflector 30 may be attached to the mask 4 or may be formed in the mask opening 5.

【0048】このように、偏向器を設ければ、照射の自
由度が上がり、より狭ピッチの電子部品に対応させるこ
とができる。
As described above, by providing the deflector, the degree of freedom of irradiation is increased, and it is possible to cope with electronic components having a narrower pitch.

【0049】尚、本発明は、熱応力緩和作用を持たない
スモール・アウトライン・ノンリーディッド・パッケー
ジやクワッド・フラット・ノンリーディッドパッケージ
等のリードレス部品に対しても適用できる。
The present invention can be applied to leadless components such as a small outline non-leaded package and a quad flat non-leaded package which do not have a thermal stress relaxing action.

【0050】[0050]

【発明の効果】以上説明したように、本発明によれば、
電子部品と基板との接続部が狭ピッチで配置されている
場合であっても、当該接続部のみを加熱することができ
る電子部品の実装方法および実装装置を提供することが
できる。
As described above, according to the present invention,
It is possible to provide a mounting method and a mounting apparatus for an electronic component that can heat only the connection portion even when the connection portions between the electronic component and the substrate are arranged at a narrow pitch.

【0051】また、本発明では、光を熱供給源として使
用しているため、狭ピッチであるかないかに拘わらず、
金属バンプ11と基板パッド21の接触部のみを確実に
加熱することができる。
In the present invention, since light is used as a heat source, regardless of whether the pitch is narrow or not.
Only the contact portion between the metal bump 11 and the substrate pad 21 can be reliably heated.

【0052】また、加熱光の照射位置をマスク4に形成
した開口部で決定しているため、微細な配置に対しても
十分適応できる。
Further, since the irradiation position of the heating light is determined by the opening formed in the mask 4, it can be sufficiently applied to a fine arrangement.

【0053】また、偏向器を設ければ、照射の自由度が
上がり、より狭ピッチの電子部品に対応させることがで
きる。
Further, by providing a deflector, the degree of freedom of irradiation is increased, and it is possible to cope with electronic components having a narrower pitch.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る電子部品実装装置の構造を示す側
面。
FIG. 1 is a side view showing the structure of an electronic component mounting apparatus according to the present invention.

【図2】図1に示すマスク4の構造を示す上面図。FIG. 2 is a top view showing the structure of a mask 4 shown in FIG.

【図3】図1に示す電子部品実装装置で電子部品とプリ
ント基板との接続部を加熱している状態を示す側面図。
FIG. 3 is a side view showing a state in which the connection between the electronic component and the printed board is heated by the electronic component mounting apparatus shown in FIG. 1;

【図4】本発明に係る電子部品実装装置の第2の実施形
態を示す側面図。
FIG. 4 is a side view showing a second embodiment of the electronic component mounting apparatus according to the present invention.

【符号の説明】[Explanation of symbols]

1…電子部品吸着加熱装置、2…基板加熱装置、3…ヒ
ーター、4…マスク、4a…光照射領域、5…マスク開
口部、6…支柱、7…光源保持部、8…マスク保持部、
9…光源、10…電子部品、11…金属バンプ、20…
プリント基板、21…基板パッド、22…配線パター
ン、23…ソルダーレジスト、30…偏向器。
DESCRIPTION OF SYMBOLS 1 ... Electronic component adsorption | suction heating apparatus, 2 ... Substrate heating apparatus, 3 ... Heater, 4 ... Mask, 4a ... Light irradiation area, 5 ... Mask opening part, 6 ... Prop, 7 ... Light source holding part, 8 ... Mask holding part,
9 ... light source, 10 ... electronic parts, 11 ... metal bumps, 20 ...
Printed circuit board, 21: board pad, 22: wiring pattern, 23: solder resist, 30: deflector.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 電子部品に形成された第1の接続端子と
基板上の該第1の接続端子に対応する位置に形成された
第2の接続端子とを接触させる工程と、 前記電子部品に熱を供給することにより前記第1の接続
端子を加熱する第1の加熱工程と、 前記第1の接続端子および前記第2の接続端子のすくな
くとも一方に局所的に光を照射し該照射部を加熱する第
2の加熱工程とを含むことを特徴とする電子部品の実装
方法。
A step of bringing a first connection terminal formed on an electronic component into contact with a second connection terminal formed on a substrate at a position corresponding to the first connection terminal; A first heating step of heating the first connection terminal by supplying heat, and locally irradiating light to at least one of the first connection terminal and the second connection terminal, And a second heating step of heating.
【請求項2】 前記第2の加熱工程は、 光を照射する部分の大きさに対応した開口部を有するマ
スクを、該光を照射する部分に対して位置決めするマス
ク位置決め工程と、 前記マスク位置決め工程によって位置決めされたマスク
に光を照射する工程とを含むことを特徴とする請求項1
記載の電子部品の実装方法。
2. The second heating step includes: a mask positioning step of positioning a mask having an opening corresponding to a size of a part to be irradiated with light with respect to the part to be irradiated with light; Irradiating the mask positioned by the step with light.
The mounting method of the described electronic component.
【請求項3】 前記電子部品は、 その熱膨張率が前記基板と異なることを特徴とする請求
項1または請求項2記載の電子部品の実装方法。
3. The electronic component mounting method according to claim 1, wherein the electronic component has a different coefficient of thermal expansion from the substrate.
【請求項4】 前記電子部品は、 表面実装型の部品であることを特徴とする請求項1乃至
請求項3のいずれかに記載の電子部品の実装方法。
4. The electronic component mounting method according to claim 1, wherein the electronic component is a surface mount type component.
【請求項5】 電子部品に形成された第1の接続端子と
基板上の該第1の接続端子に対応する位置に形成された
第2の接続端子とを接触させる接触手段と、 前記電子部品に熱を供給することにより前記第1の接続
端子を加熱する第1の加熱手段と、 前記第1の接続端子および前記第2の接続端子のすくな
くとも一方に局所的に光を照射し該照射部を加熱する第
2の加熱手段とを含むことを特徴とする電子部品の実装
装置。
5. A contact means for bringing a first connection terminal formed on an electronic component into contact with a second connection terminal formed on a substrate at a position corresponding to the first connection terminal, and the electronic component. A first heating means for heating the first connection terminal by supplying heat to the first connection terminal; and irradiating at least one of the first connection terminal and the second connection terminal with light locally. And a second heating means for heating the electronic component.
【請求項6】 前記第2の加熱手段は、 光を照射する部分の大きさに対応した開口部を有するマ
スクを、該光を照射する部分に対して位置決めするマス
ク位置決め手段と、 前記マスク位置決め工程によって位置決めされたマスク
に光を照射する手段とを具備することを特徴とする請求
項5記載の電子部品の実装装置。
6. The mask positioning means for positioning a mask having an opening corresponding to the size of a part to be irradiated with light with respect to the part to be irradiated with light, the second heating means comprising: 6. The electronic component mounting apparatus according to claim 5, further comprising: means for irradiating light to the mask positioned in the step.
【請求項7】 前記第2の加熱手段は、 前記マスクの開口部を通過した光の照射方向を変化させ
る偏向手段を具備することを特徴とする請求項6記載の
電子部品の実装装置。
7. The electronic component mounting apparatus according to claim 6, wherein said second heating means includes a deflecting means for changing an irradiation direction of light passing through the opening of said mask.
JP28654297A 1997-10-20 1997-10-20 Mounting of electronic component and mounting device thereof Pending JPH11121531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28654297A JPH11121531A (en) 1997-10-20 1997-10-20 Mounting of electronic component and mounting device thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28654297A JPH11121531A (en) 1997-10-20 1997-10-20 Mounting of electronic component and mounting device thereof

Publications (1)

Publication Number Publication Date
JPH11121531A true JPH11121531A (en) 1999-04-30

Family

ID=17705770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28654297A Pending JPH11121531A (en) 1997-10-20 1997-10-20 Mounting of electronic component and mounting device thereof

Country Status (1)

Country Link
JP (1) JPH11121531A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6905945B1 (en) * 1999-04-22 2005-06-14 California Institute Of Technology Microwave bonding of MEMS component
US7238919B2 (en) 2005-03-15 2007-07-03 Kabushiki Kaisha Toshiba Heating element movement bonding method for semiconductor components
JP2008244255A (en) * 2007-03-28 2008-10-09 Casio Comput Co Ltd Thermocompression bonding tool and thermocompression bonding device using the same
JPWO2018143222A1 (en) * 2017-01-31 2019-06-27 株式会社新川 Semiconductor chip mounting apparatus and mounting method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6905945B1 (en) * 1999-04-22 2005-06-14 California Institute Of Technology Microwave bonding of MEMS component
US7238919B2 (en) 2005-03-15 2007-07-03 Kabushiki Kaisha Toshiba Heating element movement bonding method for semiconductor components
JP2008244255A (en) * 2007-03-28 2008-10-09 Casio Comput Co Ltd Thermocompression bonding tool and thermocompression bonding device using the same
JPWO2018143222A1 (en) * 2017-01-31 2019-06-27 株式会社新川 Semiconductor chip mounting apparatus and mounting method

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