JPH1070065A5 - - Google Patents

Info

Publication number
JPH1070065A5
JPH1070065A5 JP1996225474A JP22547496A JPH1070065A5 JP H1070065 A5 JPH1070065 A5 JP H1070065A5 JP 1996225474 A JP1996225474 A JP 1996225474A JP 22547496 A JP22547496 A JP 22547496A JP H1070065 A5 JPH1070065 A5 JP H1070065A5
Authority
JP
Japan
Prior art keywords
photosensitive substrate
exposure apparatus
stage
substrate
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1996225474A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1070065A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8225474A priority Critical patent/JPH1070065A/ja
Priority claimed from JP8225474A external-priority patent/JPH1070065A/ja
Priority to KR1019970041270A priority patent/KR19980019031A/ko
Priority to EP97114842A priority patent/EP0833208A3/en
Publication of JPH1070065A publication Critical patent/JPH1070065A/ja
Priority to US09/419,771 priority patent/US6172373B1/en
Publication of JPH1070065A5 publication Critical patent/JPH1070065A5/ja
Withdrawn legal-status Critical Current

Links

JP8225474A 1996-08-27 1996-08-27 露光装置 Withdrawn JPH1070065A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8225474A JPH1070065A (ja) 1996-08-27 1996-08-27 露光装置
KR1019970041270A KR19980019031A (ko) 1996-08-27 1997-08-26 스테이지 장치(a stage apparatus)
EP97114842A EP0833208A3 (en) 1996-08-27 1997-08-27 A stage apparatus
US09/419,771 US6172373B1 (en) 1996-08-27 1999-10-18 Stage apparatus with improved positioning capability

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8225474A JPH1070065A (ja) 1996-08-27 1996-08-27 露光装置

Publications (2)

Publication Number Publication Date
JPH1070065A JPH1070065A (ja) 1998-03-10
JPH1070065A5 true JPH1070065A5 (enExample) 2005-07-21

Family

ID=16829889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8225474A Withdrawn JPH1070065A (ja) 1996-08-27 1996-08-27 露光装置

Country Status (1)

Country Link
JP (1) JPH1070065A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270305A (ja) * 1997-03-26 1998-10-09 Nikon Corp 露光方法
US6411387B1 (en) 1996-12-16 2002-06-25 Nikon Corporation Stage apparatus, projection optical apparatus and exposure method
US7126668B2 (en) * 2004-04-28 2006-10-24 Litel Instruments Apparatus and process for determination of dynamic scan field curvature
EP2496192B1 (en) 2009-11-06 2017-08-09 Hollister Incorporated Multi-layer film and ostomy product made therefrom
CN118778381B (zh) * 2024-09-13 2025-02-07 上海芯东来半导体科技有限公司 一种高精度的调平装置、调平台以及调平方法

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