JPH1062307A - Photographing device and photographing method - Google Patents

Photographing device and photographing method

Info

Publication number
JPH1062307A
JPH1062307A JP8235781A JP23578196A JPH1062307A JP H1062307 A JPH1062307 A JP H1062307A JP 8235781 A JP8235781 A JP 8235781A JP 23578196 A JP23578196 A JP 23578196A JP H1062307 A JPH1062307 A JP H1062307A
Authority
JP
Japan
Prior art keywords
sample
camera
lens
photographing
photographed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8235781A
Other languages
Japanese (ja)
Inventor
Minoru Nakanishi
稔 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP8235781A priority Critical patent/JPH1062307A/en
Publication of JPH1062307A publication Critical patent/JPH1062307A/en
Pending legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Closed-Circuit Television Systems (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a photographic device and photographic method capable of using the whole area to be photographed as it is as a matter to be inspected (judged) without taking the image of a lens or camera itself. SOLUTION: In a photographing device 100 for photographing a sample 110 by a television camera 120 which is used in an inspection device, the camera 120 and a sample stage 150 are provided in such a manner that the sample surface is parallel to the light receiving surface of the camera 120, and the optical axis of the lens 123 of the camera 120 is vertical. to the sample surface. The lens position for receiving a light of the camera is set on the outside of the area formed by a vertical line vertically raised on the surface of a sample from the whole circumference of the area to be photographed of the sample.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は,ガラス、樹脂、フ
ィルム、LCD用カラーフィルターもしくは、これらを
加工した工業製品の検査、観察に用いる撮影装置、およ
び撮影方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photographing apparatus and a photographing method used for inspection and observation of glass, resin, film, color filters for LCDs or industrial products obtained by processing them.

【0002】[0002]

【従来の技術】従来より、試料の状態をテレビモニター
で観察したり、画像処理で自動検査するためにテレビカ
メラを用いて試料を撮影するが、一般的には図3に示す
ようにして撮影されていた。この方法は、図3に示すよ
うに、試料載置台350上に試料(LCD用カラーフィ
ルター等)を置き、試料面とカメラ320の結像面32
3を平行にし、且つ、カメラ320の光軸が試料面に垂
直になるようにした状態で撮影するものであるが、この
方法の場合、レンズ121やカメラ120自体が試料面
上に置かれていた。即ち、カメラの受光するレンズ位置
が、試料の撮影される領域の全外周から、試料の面に垂
直な方向に立てた垂直線により形成される領域よりも内
側に位置されていた。このため、ガラス等、光沢度の高
い試料を撮影する場合には、レンズやカメラ自身が反射
光により撮影されてしまうことがあった。尚、図3中B
1、B2は試料110の端から試料110に垂直に立て
た垂直線である。図3に示す撮影方法において撮影した
画像中にレンズやカメラが写っている場合、自動検査に
おいては演算処理でこの影響を除去し、画像を目視で観
察する際には写っている部分を固定ノイズとして検査の
判断に含めないような作業とするなど、結果的に、写っ
たレンズやカメラの像の影響が無いようにしていた。し
かし、場合によってはこれでは対応できず、撮影した画
像中にレンズやカメラができるだけ写らないようにする
ために、レンズ面に反射防止膜をコーティングしたり、
カメラ自身を反射率の低いもので覆い、反射を低減させ
る等の処置が施されていた。
2. Description of the Related Art Conventionally, a sample is photographed using a television camera to observe the state of the sample on a television monitor or automatically inspected by image processing. Generally, the specimen is photographed as shown in FIG. It had been. In this method, as shown in FIG. 3, a sample (such as a color filter for LCD) is placed on a sample mounting table 350, and the sample surface and the image forming surface 32 of the camera 320 are placed.
3 is parallel, and the image is taken with the optical axis of the camera 320 being perpendicular to the sample surface. In this method, the lens 121 and the camera 120 themselves are placed on the sample surface. Was. That is, the position of the lens that receives light from the camera is located inside the region formed by a vertical line extending in a direction perpendicular to the surface of the sample from the entire outer periphery of the region where the sample is photographed. For this reason, when photographing a sample with high gloss such as glass, the lens or the camera itself may be photographed by reflected light. In addition, B in FIG.
Reference numerals 1 and B2 denote vertical lines that stand perpendicular to the sample 110 from the end of the sample 110. When a lens or a camera is included in an image captured by the image capturing method shown in FIG. 3, the influence is removed by a calculation process in the automatic inspection, and the captured portion is fixed noise when the image is visually observed. As a result, the work was not included in the judgment of the inspection, and as a result, the influence of the lens and the image of the camera which were photographed was made so as not to be affected. However, in some cases, this is not possible, and to prevent the lens and camera from appearing in the captured image as much as possible, coating the lens surface with an anti-reflective film,
The camera itself is covered with a low-reflectance object to reduce reflections.

【0003】一方、LCD(Liquid Cryst
al Display Device)用のカラーフィ
ルターは、ますます微細化、且つ高品質化が求められて
おり、ムラ等、微妙な濃淡を判別する必要が出てきた。
しかし、テレビカメラを用いてLCD用カラーフィルタ
ーを撮影して、ムラ等の微妙な濃淡を判別する場合に
は、レンズへの反射防止膜のコートやカメラへの覆いを
施しても、レンズやカメラの反射を必要な強度にまで低
減させることができず、レンズやカメラの写った箇所を
無効領域、即ち無検査の領域にするしかなく、無効領域
に不良がある場合にもそのまま良品として出荷されてし
まい問題となっていた。
On the other hand, LCD (Liquid Crystal)
Al Display Devices) have been required to be increasingly finer and have higher quality, and it has become necessary to distinguish subtle shading such as unevenness.
However, when the color filter for LCD is photographed using a TV camera to determine subtle shading such as unevenness, even if the lens is coated with an antireflection film or the camera is covered, Can not be reduced to the required intensity, and the place where the lens and camera are reflected must be made an invalid area, that is, a non-inspection area, and even if there is a defect in the invalid area, it is shipped as it is as a good product Had become a problem.

【0004】[0004]

【発明が解決しようとする課題】上記のように、テレビ
カメラを用いてLCD用カラーフィルターを撮影して、
LCD用カラーフィルターのムラ等の微妙な濃淡を判別
する場合、レンズやカメラ自身の像の影響を受けず、撮
影される全領域を、そのまま検査(判別)対象として扱
える方法が求められていた。本発明は、このような状況
のもと、テレビカメラを用いてLCD用カラーフィルタ
ーを撮影して、LCD用カラーフィルターのムラ等の微
妙な濃淡を判別する場合においても、レンズやカメラ自
身の像を撮影することなく、撮影される全領域を、その
まま検査(判別)対象として使用できる撮影装置および
撮影方法を提供しようとするものである。
As described above, an image of an LCD color filter is taken using a television camera,
When discriminating subtle shading such as unevenness of an LCD color filter, there has been a demand for a method that can be used as an inspection (discrimination) target without being affected by an image of a lens or a camera itself. Under such circumstances, the present invention can be applied to a case in which a television camera is used to photograph an LCD color filter to determine subtle shading such as unevenness of the LCD color filter. It is an object of the present invention to provide a photographing apparatus and a photographing method that can use the entire region to be photographed as an inspection (discrimination) object without photographing the image.

【0005】[0005]

【課題を解決するための手段】本発明の撮影装置は、検
査装置等に用いられる、試料をテレビカメラで撮影する
撮影装置であって、試料面とカメラの受光面とを平行と
し、且つ、カメラのレンズの光軸が試料面に垂直となる
ように、カメラおよび試料載置台を設けたもので、カメ
ラの受光するレンズ位置が、試料の撮影される領域の全
外周から、試料の面に垂直な方向に立てた垂直線により
形成される領域よりも外側に位置されていることを特徴
とするものである。そして、上記における試料がLCD
(Liquid Crystal Display D
evice)用のカラーフィルターであることを特徴と
するものである。また、本発明の撮影方法は、試料をテ
レビカメラで撮影する撮影方法であって、試料面とカメ
ラの受光面とを平行とし、且つ、カメラのレンズの光軸
が試料面に垂直となるように、カメラおよび試料載置台
を設定し、カメラの受光するレンズ位置を、試料の撮影
される領域の全外周から、試料の面に垂直な方向に立て
た垂直線により形成される領域よりも外側に配置して、
試料を撮影することを特徴とするものである。そして、
上記における試料がLCD(Liquid Cryst
al Display Device)用のカラーフィ
ルターであることを特徴とするものである。尚、上記に
おいては、レンズ位置、試料位置に合わせて、カメラの
受光面(結像面とも言う)を設定する。
SUMMARY OF THE INVENTION An imaging apparatus according to the present invention is an imaging apparatus used for an inspection apparatus or the like for imaging a sample with a television camera, wherein a sample surface and a light receiving surface of the camera are parallel to each other, and The camera and the sample mounting table are provided so that the optical axis of the camera lens is perpendicular to the sample surface. It is characterized by being located outside a region formed by a vertical line standing in a vertical direction. And the sample in the above is LCD
(Liquid Crystal Display D
device) is characterized by being a color filter. Further, the imaging method of the present invention is an imaging method for imaging a sample with a television camera, wherein the sample surface and the light receiving surface of the camera are parallel, and the optical axis of the camera lens is perpendicular to the sample surface. In addition, the camera and the sample mounting table are set, and the lens position where the camera receives light is positioned outside the region formed by a vertical line extending in the direction perpendicular to the surface of the sample from the entire periphery of the region where the sample is captured. And place it in
It is characterized in that a sample is photographed. And
The above sample is an LCD (Liquid Crystal)
al Display Device). In the above description, the light receiving surface (also referred to as an image forming surface) of the camera is set according to the lens position and the sample position.

【0006】[0006]

【作用】本発明の撮影装置は、上記のように構成するこ
とにより、テレビカメラを用いてLCD用カラーフィル
ターを撮影して、LCD用カラーフィルターのムラ等の
微妙な濃淡を判別する場合においても、レンズやカメラ
自身の像の影響を撮影することがなく、撮影される全領
域を、そのまま検査(判別)対象と使用できる撮影装置
の提供を可能としている。詳しくは、試料面とカメラの
受光面とを平行とし、且つ、カメラのレンズの光軸が試
料面に垂直となるように、カメラおよび試料載置台を設
けたもので、カメラの受光するレンズ位置が、試料の撮
影される領域の全外周から、試料の面に垂直な方向に立
てた垂直線により形成される領域よりも外側に位置され
ていることによりこれを達成しており、特に、試料がL
CD用カラーフィルターのように、ムラ等の微妙な濃淡
の区別を必要とする場合には、特に有効である。
With the above configuration, the photographing apparatus of the present invention can be used for photographing an LCD color filter using a television camera and determining subtle shading such as unevenness of the LCD color filter. Therefore, it is possible to provide an imaging device that can use the entire area to be imaged as it is as an inspection (discrimination) target without imaging the influence of an image of a lens or a camera itself. In detail, the camera and the sample mounting table are provided so that the sample surface and the light receiving surface of the camera are parallel and the optical axis of the camera lens is perpendicular to the sample surface. Is achieved by being located outside the region formed by a vertical line perpendicular to the surface of the sample, from the entire outer periphery of the region where the sample is photographed, Is L
This is particularly effective when a delicate distinction such as unevenness is required as in a color filter for CD.

【0007】本発明の撮影方法は、本発明の装置を用い
て撮影することによりなされる方法で、特に、試料がL
CD用カラーフィルターのように、ムラ等の微妙な濃淡
の区別を必要とする場合には、特に有効である。
The photographing method of the present invention is a method performed by photographing using the apparatus of the present invention.
This is particularly effective when a delicate distinction such as unevenness is required as in a color filter for CD.

【0008】[0008]

【実施例】本発明の撮影装置の実施例を図にもとづいて
説明する。図1は本実施例の概略構成を示した概略図で
あり、図2は、図1のA1方向からみた断面図で、必要
な構成の位置関係のみを示してある。図1、図2中、1
00は撮影装置、110は試料(LCD用カラーフィル
ター)、120はCCDテレビカメラ、121は結像面
(受光面とも言う)、123はレンズ、123Aは光
軸、140は照明手段、150は試料載置台、160は
カメラ支持柱、170はカメラ駆動部、171は出力ケ
ーブルである。本実施例の撮影装置100は、LCD
(Liquid Crystal Display D
evice)用のカラーフィルターのムラ等の微妙な濃
淡を判別する検査装置に用いられるもので、レンズやカ
メラ自身の像を撮影することがなく、撮影される試料の
全領域を、そのまま検査(判別)対象と使用できるもの
である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the photographing apparatus according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a schematic configuration of the present embodiment, and FIG. 2 is a cross-sectional view taken along the direction A1 of FIG. 1, showing only a positional relationship of a necessary configuration. 1 and 2, 1
00 is a photographing device, 110 is a sample (LCD color filter), 120 is a CCD television camera, 121 is an imaging surface (also called a light receiving surface), 123 is a lens, 123A is an optical axis, 140 is illumination means, and 150 is a sample. A mounting table, 160 is a camera support column, 170 is a camera driving unit, and 171 is an output cable. The photographing apparatus 100 according to the present embodiment includes an LCD
(Liquid Crystal Display D
device), which is used in an inspection device that determines subtle shading such as unevenness of a color filter for an image, and does not photograph an image of a lens or a camera itself, but directly inspects (determines) the entire region of a photographed sample. ) Can be used with the subject.

【0009】図1に示すように、試料(LCD用カラー
フィルター)110を試料載置台150上に置いた状態
で、試料の裏面側から照明手段140にて試料面を照明
した状態で、試料110の表面側に配置されたCCDテ
レビカメラ120で試料110の所定領域を撮影するも
のである。試料載置台150は中央領域は貫通したもの
で、試料110はその周辺部のみで保持されており、照
明手段140の光は直接試料110に照射され透過光が
CCDテレビカメラ120にて撮影される。照明手段1
40は、拡散板を試料面110側に設け、複数本の蛍光
灯を光源として試料110を照射するものである。CC
Dテレビカメラ120は、カメラ駆動部170で駆動さ
れ、カメラ駆動部170の出力ケーブル171を通じ
て、外部のテレビモニター、画像処理装置へ画像信号を
送るものである。そして、送られた画像信号は、画像処
理装置にて、必要に応じてフィルタ処理等が施されて試
料の欠陥検出がなされる。
As shown in FIG. 1, with a sample (LCD color filter) 110 placed on a sample mounting table 150, the sample surface is illuminated by illumination means 140 from the back side of the sample. A predetermined area of the sample 110 is photographed by the CCD television camera 120 disposed on the front side of the camera. The sample mounting table 150 has a central area penetrating therethrough, and the sample 110 is held only at its peripheral portion. The light of the illumination means 140 is directly applied to the sample 110 and the transmitted light is photographed by the CCD television camera 120. . Lighting means 1
Reference numeral 40 denotes a light source provided with a diffusion plate on the sample surface 110 side and irradiating the sample 110 with a plurality of fluorescent lamps as light sources. CC
The D television camera 120 is driven by a camera driving unit 170, and sends an image signal to an external television monitor and an image processing device via an output cable 171 of the camera driving unit 170. Then, the sent image signal is subjected to a filtering process or the like as necessary by an image processing device, and the defect of the sample is detected.

【0010】次いで、図2にもとづき、試料110、レ
ンズ123、結像面121の位置関係を説明する。試料
面とカメラの結像面121とを平行とし、且つ、カメラ
のレンズ123の光軸123Aが試料面に垂直となるよ
うに、CCDテレビカメラ120および試料載置台15
0を設け、CCDテレビカメラ120の受光するレンズ
123の位置が、試料110の撮影される領域の全外周
から、試料110の面に垂直な方向に立てた垂直線(垂
直線A1やA2等)により形成される領域よりも外側に
位置されている。レンズ123の位置、試料110の位
置に合わせて、カメラの結像面(受光面とも言う)12
1を設定してある。本実施例では、カメラの結像面12
1の中心はレンズ123の光軸123Aからずれた位置
に設けられている。
Next, the positional relationship among the sample 110, the lens 123, and the image plane 121 will be described with reference to FIG. The CCD television camera 120 and the sample mounting table 15 are set so that the sample surface and the image forming surface 121 of the camera are parallel to each other, and the optical axis 123A of the camera lens 123 is perpendicular to the sample surface.
0, and the position of the lens 123 that receives light from the CCD television camera 120 is set to a vertical line (vertical line A1, A2, or the like) that extends perpendicularly to the surface of the sample 110 from the entire outer periphery of the region where the sample 110 is captured. Are located outside the region formed by The imaging surface (also referred to as a light receiving surface) 12 of the camera is adjusted according to the position of the lens 123 and the position of the sample 110.
1 is set. In this embodiment, the imaging plane 12 of the camera
The center of 1 is provided at a position shifted from the optical axis 123A of the lens 123.

【0011】本発明の撮影方法の実施例として、LCD
用カラーフィルターを上記本発明の実施例の装置を用い
て撮影する例を挙げる。本実施例の撮影方法は、図2に
示すような位置関係にLCD用カラーフィルター110
を試料載置台150に置いた状態で撮影するものであ
る。即ち、試料面とカメラの結像面121とを平行と
し、且つ、カメラのレンズ123の光軸123Aが試料
面に垂直となっており、且つ、CCDテレビカメラ12
0のの受光するレンズ123の位置が、試料(LCD用
カラーフィルター)110の撮影される領域の全外周か
ら、試料110の面に垂直な方向に立てた垂直線(垂直
線A1、A2等)により形成される領域よりも外側に位
置されている状態で撮影する。このため、カメラのレン
ズやカメラ自体が試料(LCD用カラーフィルター)1
10からの反射によりカメラの結像面121に撮影され
ることがなく、撮影により得られる画像品質の良いもの
が得られ、結局、試料のムラ等、微妙な濃度差について
も、画像処理装置でのデータ処理により検出し易いもの
としている。本発明の撮影方法は、表面の反射率が高
く、その位置によってはレンズやカメラ自身が試料から
の反射光により撮影されるような試料に対して有効な方
法であり、撮影する対象としては、特にLCD用カラー
フィルターに限定されない。
As an embodiment of the photographing method of the present invention, an LCD
An example in which a color filter for use is photographed using the apparatus of the embodiment of the present invention will be described. The photographing method according to the present embodiment employs a positional relationship as shown in FIG.
Is photographed in a state where is placed on the sample mounting table 150. That is, the sample surface is parallel to the image forming surface 121 of the camera, the optical axis 123A of the camera lens 123 is perpendicular to the sample surface, and the CCD television camera 12
The position of the lens 123 receiving the light of 0 is a vertical line (vertical lines A1, A2, etc.) standing in a direction perpendicular to the surface of the sample 110 from the entire outer periphery of the image capturing area of the sample (LCD color filter) 110. Is photographed in a state where it is located outside the region formed by For this reason, the lens of the camera and the camera itself are the sample (color filter for LCD) 1
Due to the reflection from 10, the image is not photographed on the image plane 121 of the camera, and a high quality image obtained by photographing can be obtained. The data processing is easy to detect. The imaging method of the present invention has a high surface reflectance, and depending on its position, is an effective method for a sample in which a lens or a camera itself is imaged by reflected light from the sample. It is not particularly limited to LCD color filters.

【0012】[0012]

【効果】本発明は、上記のように、検査等により試料を
テレビカメラを用いて撮影する際、レンズやカメラ自身
の像を撮影することなく、撮影される全領域を、そのま
ま検査(判別)対象として使用できる撮影装置および撮
影方法の提供を可能とした。特に、テレビカメラを用い
てLCD(Liquid Crystal Displ
ay Device)用カラーフィルターを撮影して、
LCD用カラーフィルターのムラ等の微妙な濃淡を判別
する場合においては有効である。
According to the present invention, as described above, when a sample is photographed using a television camera by inspection or the like, the entire region to be photographed is inspected (discriminated) without photographing an image of the lens or the camera itself. An imaging device and an imaging method that can be used as an object can be provided. In particular, an LCD (Liquid Crystal Displ.)
ay Device) color filter
This is effective in determining subtle shading such as unevenness of an LCD color filter.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の撮影装置の実施例の概略構成を示した
概略図
FIG. 1 is a schematic diagram showing a schematic configuration of an embodiment of a photographing apparatus of the present invention.

【図2】試料、レンズ、結像面の位置関係を分かりやす
く示した図
FIG. 2 is a diagram showing the positional relationship between a sample, a lens, and an image forming surface in an easily understandable manner.

【図3】従来の撮影装置のレンズ、結像面の位置関係を
分かりやすく示した図
FIG. 3 is a diagram showing a positional relationship between a lens and an image forming surface of a conventional photographing apparatus in an easily understandable manner.

【符号の説明】[Explanation of symbols]

100 撮影装置 110 試料(LCD用カラーフィル
ター) 120 CCDテレビカメラ 121 結像面 123 レンズ 123A 光軸 140 照明手段 150 試料載置台 160 カメラ支持柱 170 カメラ駆動部 171 出力ケーブル 300 撮影装置 310 試料(LCD用カラーフィル
ター) 320 CCDテレビカメラ 321 結像面 323 レンズ 323A 光軸 340 照明手段 350 試料載置台
REFERENCE SIGNS LIST 100 imaging device 110 sample (LCD color filter) 120 CCD television camera 121 imaging surface 123 lens 123A optical axis 140 illumination means 150 sample mounting table 160 camera support column 170 camera driving unit 171 output cable 300 imaging device 310 sample (for LCD) Color filter) 320 CCD TV camera 321 Image plane 323 Lens 323A Optical axis 340 Illumination means 350 Sample stage

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 検査装置等に用いられる、試料をテレビ
カメラで撮影する撮影装置であって、試料面とカメラの
受光面とを平行とし、且つ、カメラのレンズの光軸が試
料面に垂直となるように、カメラおよび試料載置台を設
けたもので、カメラの受光するレンズ位置が、試料の撮
影される領域の全外周から、試料の面に垂直な方向に立
てた垂直線により形成される領域よりも外側に位置され
ていることを特徴とする撮影装置。
An imaging device used for an inspection device or the like, which captures a sample with a television camera, wherein a sample surface and a light receiving surface of the camera are parallel to each other, and an optical axis of a lens of the camera is perpendicular to the sample surface. The camera and the sample mounting table are provided so that the position of the lens receiving the camera is formed by a vertical line extending in a direction perpendicular to the surface of the sample from the entire outer periphery of the region where the sample is captured. A photographing apparatus, which is located outside a region to be photographed.
【請求項2】 請求項1における試料がLCD(Liq
uid Crystal Display Devic
e)用のカラーフィルターであることを特徴とする撮影
装置。
2. The method according to claim 1, wherein the sample is an LCD (Liq
uid Crystal Display Device
An imaging device, which is a color filter for e).
【請求項3】 試料をテレビカメラで撮影する撮影方法
であって、試料面とカメラの受光面とを平行とし、且
つ、カメラのレンズの光軸が試料面に垂直となるよう
に、カメラおよび試料載置台を設定し、カメラの受光す
るレンズ位置を、試料の撮影される領域の全外周から、
試料の面に垂直な方向に立てた垂直線により形成される
領域よりも外側に配置して、試料を撮影することを特徴
とする撮影方法。
3. A photographing method for photographing a sample with a television camera, wherein the camera and the light receiving surface of the camera are parallel to each other, and the optical axis of the camera lens is perpendicular to the sample surface. Set the sample table, and adjust the position of the lens that receives light from the camera from the entire outer periphery of the area where the sample is captured.
An imaging method comprising: arranging a sample outside a region formed by a vertical line extending in a direction perpendicular to a surface of the sample, and imaging the sample.
【請求項4】 請求項3における試料がLCD(Liq
uid Crystal Display Devic
e)用のカラーフィルターであることを特徴とする撮影
方法。
4. The method according to claim 3, wherein the sample is an LCD (Liq
uid Crystal Display Device
e) a photographing method characterized by being a color filter for e).
JP8235781A 1996-08-20 1996-08-20 Photographing device and photographing method Pending JPH1062307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8235781A JPH1062307A (en) 1996-08-20 1996-08-20 Photographing device and photographing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8235781A JPH1062307A (en) 1996-08-20 1996-08-20 Photographing device and photographing method

Publications (1)

Publication Number Publication Date
JPH1062307A true JPH1062307A (en) 1998-03-06

Family

ID=16991155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8235781A Pending JPH1062307A (en) 1996-08-20 1996-08-20 Photographing device and photographing method

Country Status (1)

Country Link
JP (1) JPH1062307A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108982075A (en) * 2018-06-08 2018-12-11 云谷(固安)科技有限公司 Quantify the method for flexible screen body folding s tress
CN109665321A (en) * 2018-12-29 2019-04-23 重庆荣成玻璃制品有限公司 Glass microdefect detection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108982075A (en) * 2018-06-08 2018-12-11 云谷(固安)科技有限公司 Quantify the method for flexible screen body folding s tress
CN109665321A (en) * 2018-12-29 2019-04-23 重庆荣成玻璃制品有限公司 Glass microdefect detection device

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