JPH1051262A - 圧電振動子とその製造方法 - Google Patents

圧電振動子とその製造方法

Info

Publication number
JPH1051262A
JPH1051262A JP9098972A JP9897297A JPH1051262A JP H1051262 A JPH1051262 A JP H1051262A JP 9098972 A JP9098972 A JP 9098972A JP 9897297 A JP9897297 A JP 9897297A JP H1051262 A JPH1051262 A JP H1051262A
Authority
JP
Japan
Prior art keywords
piezoelectric
single crystal
thickness
vibrator
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9098972A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1051262A5 (enExample
Inventor
Masahito Sugimoto
雅人 杉本
Katsu Takeda
克 武田
Yoshihiro Tomita
佳宏 冨田
Osamu Kawasaki
修 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9098972A priority Critical patent/JPH1051262A/ja
Publication of JPH1051262A publication Critical patent/JPH1051262A/ja
Publication of JPH1051262A5 publication Critical patent/JPH1051262A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP9098972A 1996-04-16 1997-04-16 圧電振動子とその製造方法 Withdrawn JPH1051262A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9098972A JPH1051262A (ja) 1996-04-16 1997-04-16 圧電振動子とその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-94000 1996-04-16
JP9400096 1996-04-16
JP9098972A JPH1051262A (ja) 1996-04-16 1997-04-16 圧電振動子とその製造方法

Publications (2)

Publication Number Publication Date
JPH1051262A true JPH1051262A (ja) 1998-02-20
JPH1051262A5 JPH1051262A5 (enExample) 2005-03-10

Family

ID=26435262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9098972A Withdrawn JPH1051262A (ja) 1996-04-16 1997-04-16 圧電振動子とその製造方法

Country Status (1)

Country Link
JP (1) JPH1051262A (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010021135A (ko) * 1999-08-05 2001-03-15 사토 히로시 압전공진자 및 압전공진부
JP2007036915A (ja) * 2005-07-29 2007-02-08 Doshisha 高次モード薄膜共振器
JP2007067125A (ja) * 2005-08-31 2007-03-15 Toko Inc 単板型圧電バイモルフ素子
JP2007243361A (ja) * 2006-03-06 2007-09-20 Doshisha 薄膜共振器
US10855252B2 (en) 2017-11-16 2020-12-01 Taiyo Yuden Co., Ltd. Acoustic wave device and method of fabricating the same, filter, and multiplexer
JPWO2024106543A1 (enExample) * 2022-11-18 2024-05-23
WO2024247530A1 (ja) * 2023-05-29 2024-12-05 株式会社村田製作所 弾性波装置
WO2025182618A1 (ja) * 2024-02-27 2025-09-04 株式会社村田製作所 弾性波共振子、弾性波フィルタ、フロントエンドモジュール及び通信装置
US12413204B2 (en) 2022-02-25 2025-09-09 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
WO2025220528A1 (ja) * 2024-04-19 2025-10-23 株式会社村田製作所 弾性波装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010021135A (ko) * 1999-08-05 2001-03-15 사토 히로시 압전공진자 및 압전공진부
JP2007036915A (ja) * 2005-07-29 2007-02-08 Doshisha 高次モード薄膜共振器
JP2007067125A (ja) * 2005-08-31 2007-03-15 Toko Inc 単板型圧電バイモルフ素子
JP2007243361A (ja) * 2006-03-06 2007-09-20 Doshisha 薄膜共振器
US10855252B2 (en) 2017-11-16 2020-12-01 Taiyo Yuden Co., Ltd. Acoustic wave device and method of fabricating the same, filter, and multiplexer
US12413204B2 (en) 2022-02-25 2025-09-09 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
JPWO2024106543A1 (enExample) * 2022-11-18 2024-05-23
WO2024247530A1 (ja) * 2023-05-29 2024-12-05 株式会社村田製作所 弾性波装置
WO2025182618A1 (ja) * 2024-02-27 2025-09-04 株式会社村田製作所 弾性波共振子、弾性波フィルタ、フロントエンドモジュール及び通信装置
WO2025220528A1 (ja) * 2024-04-19 2025-10-23 株式会社村田製作所 弾性波装置

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