JPH1045327A - Abrasion resistant guide material and thread guide using this - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve abrasion resistance, and make slidingly moving fiber hard to be damaged by using ceramics or glass as a base material, and constituting an abrasion resistant guide material by covering a surface of this base material in a specific thickness with a diamond like hard carbon film through an intermediate layer. SOLUTION: In a thread guide 1, a first layer 3a composed of either of a Ti film or a Cr film and a second layer 3b composed of an Si film are formed on a surface 2a on the tip side of a bar-shaped base material 2 composed of ceramics or glass, and are formed as an intermediate layer 3, and its upper surface is covered with a diamond-like hard carbon film 5. A surface of the diamond-like hard carbon film 5 is formed as a guide surface 5a, and fiber 6 is guided, and is slidingly moved. A difference in a thermal expansion coefficient between ceramics or glass to form the base material 2 and the Ti film and the Cr film to form the first layer 3a is small, and the Ti film and the Cr film are also large in diffusivity to a substance. Therefore, the first layer 3a is strongly brought into close contact with the base material 2 and the second layer 3b, and separation can be prevented, and the guide surface 5a is hard, and is excellent in lubricating ability, and makes the fiber hard to be damaged.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wear-resistant guide member for guiding various linear members and a thread guide using the same.

[0002]

2. Description of the Related Art Conventionally, a fiber guide member, a fishing line guide, a guide member for guiding a metal wire such as a wire in various fiber machines such as a textile-related loom, a winding machine, a draw false twisting machine, and a spinning machine. In the present invention, these are collectively called a thread guide.

[0003] The properties required of this thread guide are that it has abrasion resistance enough to withstand sliding of the fiber,
The two points of not damaging the fiber itself are raised.

[0004] In order to satisfy the above required characteristics, various materials are used as the material of the thread guide. For example, thread guides made of titania ceramics with relatively low hardness or a chromium coating on the surface of a base metal made of metal and reduced in contact area with fibers by spherical crystallization reduce the friction coefficient. Used.

Also, alumina, zirconia, silicon nitride,
Thread guides having improved wear resistance are used by being formed of various ceramics such as silicon carbide and hard materials such as cermet (Japanese Patent Publication No. 63-41532,
Japanese Patent Publication No. 3-6106, etc.). Furthermore, tungsten carbide,
A thread guide in which abrasion resistance is improved by forming a hard film of titanium carbide, titanium nitride, or the like has also been proposed (see JP-A-60-52658).

[0006]

In the textile-related industry in recent years, the speeding up of machines has been progressing due to the efficiency of production, and the fineness, compounding and irregular shape have been accompanied by the high added value of fibers. Is progressing.

[0007] For example, specific examples of high value-added fibers include triangular or star-shaped fibers in order to impart color and unique luster to the fabric, or weaving glass fibers into the fibers. Is being done.

As a result of the increase in the sliding speed and the specialization of the fibers, the wear of the fiber guide member, which has not been seen in the conventional specifications, has been rapidly generated. As a result, there has been a problem that the maintenance of the equipment and the replacement work of the guide member become frequent, and the efficiency of production cannot be advanced as desired.

Under such circumstances, a guide material having more excellent wear resistance has been demanded, but the above-mentioned thread guide has not been able to satisfy the required characteristics.

For example, a thread guide made of chromium coating or titania-based ceramics has a low hardness, so that the guide itself is easily worn, and it has not been possible to cope with the above-mentioned high sliding speed.

[0011] Further, even a thread guide made of ceramics such as alumina or a thread guide formed with a hard film such as titanium carbide is still insufficient in hardness and is liable to wear. For this reason, there is a problem that a sliding mark is formed on the sliding surface of the thread guide, which damages the fiber or shortens the life of the thread guide itself.

In order to improve the wear resistance, it has been proposed to use sapphire, which is a single crystal of Al ₂ O ₃ , for example (see JP-A-1-321262). However, there is a disadvantage that the device cannot be manufactured in a complicated shape and is very expensive.

Further, the thread guide using the above-mentioned ceramics or hard film has a problem that the guided fiber is easily damaged due to poor sliding property with the fiber and cannot guide the fiber of stable quality at high speed. There was also.

In order to solve the above problem, it is conceivable to directly coat a diamond-like hard carbon film on a thread guide made of ceramics or glass as a base material. There is a problem that the diamond-like hard carbon film is easily peeled.

[0015]

Therefore, the present invention uses a ceramic or glass as a base material, and forms a diamond-like hard carbon film on a surface of the base material through an intermediate layer in a thickness of 0.2 to 1..
The wear-resistant guide member is formed by coating with a thickness of 5 μm.

Further, according to the present invention, as the intermediate layer, a first layer made of one of a Ti film and a Cr film from a base material side;
A second layer made of Si is formed.

Further, according to the present invention, the diamond-like hard carbon film is provided with a center line average roughness (Ra) of 0.03-0.
The thread guide is characterized by having a void occupancy of less than 2% at 20 μm.

Further, the present invention is characterized in that the surface of the base material has a center line average roughness (Ra) of 0.4 to 0.6 μm and the thread guide is formed as a round crystal.

[0019]

According to the present invention, since the intermediate layer is provided between the base material made of ceramics or glass and the diamond-like hard carbon film, the diamond-like hard carbon film is peeled off even when the fibers slide at a high speed. Can be prevented. In addition, the lubricating effect of the diamond-like hard carbon film makes it difficult for the sliding fibers to be damaged, and the wear of the thread guide itself can be prevented.

Further, since the diamond-like hard carbon film used in the present invention has electrical conductivity, it is not charged, and adhesion of fiber waste and the like can be eliminated. In addition, since the diamond-like hard carbon film is black, the guiding fibers and the like can be easily recognized.

[0021]

Embodiments of the present invention will be described below.

A thread guide 1 shown in FIG. 1 has a front surface 2 of a rod-shaped base material 2 made of ceramics or glass.
a, a first layer 3a made of either a Ti film or a Cr film
An intermediate layer 3 is formed by forming a second layer 3b made of an i film, and a diamond-like hard carbon film 5 is coated thereon. Using the surface of the diamond-like hard carbon film 5 as a guide surface 5a, the fiber 6 is guided and slid.

At this time, since the guide surface 5a is made of the diamond-like hard carbon film 5 which is hard and has excellent lubricity, even if the fiber 6 slides at high speed, the fiber 6 is hardly damaged and the guide surface 5a The wear of itself 1 can be reduced.

Moreover, the intermediate layer 3 prevents the diamond-like hard carbon film 5 from peeling off even when the fiber 6 is slid at a high speed.

That is, T which forms the first layer 3a of the intermediate layer 3
7. The thermal expansion coefficient of the i-film (40 to 400 ° C., the same applies hereinafter) is 8.
9 × 10 ⁻⁶ / ° C., and the coefficient of thermal expansion of the Cr film is 6.5 × 10
⁻⁶ / ° C., each of which has a small difference from the coefficient of thermal expansion (2.5 to 11.0 × 10 ⁻⁶ / ° C.) of the ceramics and glass forming the base material 2 and further has a Ti film and a Cr film. Has a large diffusion coefficient into the substance. Therefore, the first layer 3a can be firmly adhered to the base material 2 and the second layer 3b composed of the Si film.

Further, the Si film forming the second layer 3b belongs to the group 4a of the periodic table similarly to the carbon (C) forming the diamond-like hard carbon film 5, and the structure and the thermal expansion coefficient (2 .4 × 10 ⁻⁶ / ° C.) is similar to the structure and thermal expansion coefficient (3.2 × 10 ⁻⁶ / ° C.) of the diamond-like hard carbon film 5. Adhesion with the film 5 can be made stronger.

Therefore, the first layer 3a and the second layer 3b
By interposing an intermediate layer 3 made of
The adhesion between the intermediate layer 3 and the diamond-like hard carbon film 5 can be strengthened, and peeling can be prevented even when the fiber is slid at high speed.

In FIG. 1, the rear end 2b of the base material 2 is shown.
Is an attachment portion to a textile machine, and is not covered with the intermediate layer 3 and the diamond-like hard carbon film 5, but this portion may be similarly covered with the intermediate layer 3 and the diamond-like hard carbon film 5.

FIG. 1 shows the rod-shaped thread guide 1, but the thread guide 1 of the present invention can have various other known shapes.

Further, in the above-described example, the guide for guiding fibers is shown. However, the thread guide 1 of the present invention is used for guiding various linear bodies such as guide of fishing line and guide of metal wire such as wire. be able to.

The ceramic or glass constituting the base material 2 of the fiber guide member 1 is preferably one having a coefficient of thermal expansion of 2.5 to 11.0 × 10 ⁻⁶ / ° C. This is because if the coefficient of thermal expansion of the base material 2 is in the above range, the difference from the diamond-like hard carbon film 5 is small, and the effect of preventing peeling is enhanced.

Examples of ceramics satisfying such characteristics include ZrO ₂ , an alumina ceramic containing 99% by weight or more of Al ₂ O ₃ as a main component and containing SiO ₂ , MgO, CaO and the like as a sintering aid. Y as main component
Zirconia ceramics containing at least one of ₂ O ₃ , MgO, CeO ₂ , Dy ₂ O ₃ etc. as a stabilizer, Al ₂ O ₃ , Y ₂ O ₃ or B, C as a sintering aid with SiC as a main component Containing silicon carbide ceramics, Si ₃ N ₄
Containing main component and _{Al 2 O 3, Y 2 O} 3 silicon nitride containing as sintering aid such as ceramics, AlN was mainly periodic table group 3a element oxide such as sintering aids Aluminum nitride ceramics or the like is used. In addition,
The thermal expansion coefficients of these ceramics are as shown in Table 1.

As the glass, it is preferable to use, for example, a silicate glass, a phosphate glass, a borate glass, a heat-resistant glass or the like that satisfies the above characteristics.

Further, when the base material 2 is manufactured, it can be obtained by molding a predetermined raw material powder into a predetermined shape by press molding, injection molding or the like and firing it. It can be easily manufactured.

[0035]

[Table 1]

Next, the first layer 3a and the second layer 3 forming the intermediate layer 3
b is preferably formed by a sputtering method, a CVD method, a PVD method or the like, and the thickness of each layer is preferably in the range of 0.15 to 0.8 μm. This is because if the thickness of each layer is less than 0.15 μm, it is too thin to coat a layer having a uniform thickness. On the other hand, if the thickness of each layer exceeds 0.8 μm, the internal stress increases and the This is because it is easy to peel off.

In the above example, the intermediate layer 3 is composed of the first layer 3a of the Ti film or the Cr film and the second layer 3b of the Si film. A layer or a layer made of another material may be present.

The intermediate layer 3 may be of any type as long as it can improve the adhesion between the base material 2 and the diamond-like hard carbon film 5, and is not limited to the above example.
For example, the intermediate layer 3 has a one-layer structure in which amorphous SiC is formed.
A gradient material layer formed with four layers of i, TiN, TiCN, and TiC can also be used.

The presence of the intermediate layer 3 can be detected from the exposed surface obtained by processing the final thread guide 1 by cutting, grinding, or the like. For example, if the surface of the thread guide 1 is ground using a spherical grindstone, the intermediate layer 3 is concentrically exposed, and the exposed surface is subjected to X-ray microanalyzer analysis (EPM).
A), the presence of the intermediate layer 3 and the material thereof can be confirmed using analysis means such as energy dispersive X-ray analysis.

Next, the diamond-like hard carbon film 5 is a kind of carbon film obtained by thin film forming means such as CVD, typified by plasma CVD, sputter, PVD typified by ion plating and the like. Pseudo diamond thin film, DLC film, diamond-like carbon film, i-
It is called a carbon film or the like. The diamond-like hard carbon film 5 has a Vickers hardness (Hv) of 2000 to 50.
00 kg / mm ^{2, which} is very high, and the sheet resistance is 10 ² ~
It is as low as 10 ⁵ Ω / □ and has excellent self-lubricating properties.

Therefore, when the fiber 6 is slid on the surface of the diamond-like hard carbon film 5, the fiber 6 is hard to be worn due to its high hardness, and the fiber 6 is hardly damaged due to its excellent lubricity. Furthermore, since the sheet resistance is low, static electricity hardly accumulates, adhesion of fiber dust and the like can be prevented, and further, since the diamond-like hard carbon film 5 is black, there is an effect that the guiding fiber 6 can be easily recognized.

The thickness t of the diamond-like hard carbon film 5 is in the range of 0.2 to 1.5 μm. If the thickness t is less than 0.2 μm, the base material 2 and the intermediate layer 3 are easily exposed. When the thickness exceeds 1.5 μm, the diamond-like hard carbon film 5 becomes easily peeled off due to internal stress.

Incidentally, this diamond-like hard carbon film 5 is included as carbon (C) together with diamond or the like in terms of element, and is close to graphite or amorphous carbon in terms of specific gravity.
It has characteristics that it is similar to diamond in physical properties such as hardness. Therefore, classification by elemental analysis or measurement of specific gravity, hardness, insulation, refractive index, and the like is considered to be difficult.

Therefore, there is a problem that it is difficult to specify a film obtained by the CVD method or the like, and it is difficult to control the quality. Therefore, in the present invention, the diamond-like hard carbon film 5 having preferable characteristics is specified by measuring the Raman spectrum using laser Raman spectroscopy.

The measurement conditions of the diamond-like hard carbon film 5 by laser Raman spectroscopy were as follows.

Apparatus: NR1800 laser Raman spectrophotometer manufactured by JASCO Corporation Laser: INNOVA70 manufactured by Coherent Corporation Laser wavelength: 488.0 nm Spectrometer arrangement: F.R. Single detector: Multi-channel detector Center wave number: 1400 cm ^-1 Exposure time: 1.0 sec Integration number: 500 times According to the present invention, the peak of Raman spectrum when analyzed by laser Raman spectroscopy is as follows: What is necessary is just to satisfy the conditions shown.

That is, as shown in FIGS. 2A and 2B, s
The main band (maximum peak) of the diamond-like hard carbon film 5 formed from the p ³ structure and the sp ² structure is 1500 to 1
600 cm ^-1 , shoulder band (second peak) is 12
It is an asymmetric Raman band having an intensity IA of 00 to 1400 cm ^-1 and an intensity IA of 9 at the maximum peak.
When the range of 0% or more is defined as the top, the width d of the top is 10%.
It suffices if the peak is as broad as at least cm ^-1 .

Next, the surface condition of the thread guide of the present invention will be described.

That is, in order to lower the friction coefficient without damaging the fiber 6, the surface condition of the thread guide 1 is important, and as a result of various experiments, the present invention has found that the following two conditions are preferable. Was.

First, in the first state, the surface 2a of the base material 2 is set to have a center line average roughness (Ra) in the range of 0.03 to 0.2 μm, the void occupancy is set to 2% or less, and the Ti film and the Cr
A first layer 3a made of any one of the films and a second layer 3b made of a Si film are respectively formed as an intermediate layer 3 and a diamond-like hard carbon film 5 is coated thereon. Although the surface condition of the base material 2 has been described here, the guide surface 5a on the surface of the diamond-like hard carbon film 5 also has a center line average roughness (Ra) of 0.03 to 0.2 μm in the same manner as described above.
The void occupancy is in the range of 2% or less.

As described above, by making the surface extremely smooth and free from voids, the sliding fiber 6 can be prevented from being caught and the fiber can be hardly damaged.

On the other hand, the second state is that the surface 2a of the base material 2 has a relatively rough center line average roughness (Ra) of 0.4 to 0.6 μm, and its crystals are rounded. Ti
A first layer 3a made of any one of a film and a Cr film, and a second layer 3b made of a Si film to form an intermediate layer 3,
The diamond-like hard carbon film 5 is coated thereon. Although the surface condition of the base material 2 has been described here, the guide surface 5a of the surface of the diamond-like hard carbon film 5 also has a center line average roughness (Ra) of 0.4 to 0.6 μm in the same manner as described above.
This results in a state where moderate rounded irregularities are formed.

As described above, by forming moderate rounded irregularities on the guide surface 5a, the contact area when the fiber 6 slides can be reduced, and the friction coefficient can be reduced.

In order to make the crystal of the base material 2 round as described above, for example, after the ceramics forming the base material 2 is fired once, heat treatment (annealing) is performed again at a temperature substantially equal to the firing temperature. Thus, the particles may be softened together with the grain growth and rounded.

When the first surface state and the second surface state are compared, the friction coefficient of the second surface state can be lower, but the fiber 6 tends to be slightly damaged. is there. Therefore, the surface condition may be set to any preferable state depending on the type of the fiber 6 to be used, the conditions for guiding, and the like.

The thread guide 1 of the present invention as described above
Can be used for various fiber machines such as a fiber-related loom, a winding machine, a draw false twisting machine, and a spinning machine, and can also be suitably used for guiding a metal wire such as a fishing line guide and a wire.

[0057]

EXAMPLE 1 As a base material 2, an alumina ceramic having an Al ₂ O ₃ content of 99.7% or more was used. The characteristics of this alumina ceramics are that the average crystal grain size is 2-3 μm, the density is 3.95 g /
cm ³ or more, the average void occupancy rate of less than 2%, a Vickers hardness 1700~1800kg / mm2, thermal expansion coefficient 40
6.8 × 10 ⁻⁶ / ° C. at −400 ° C. was used. The shape is the pin shape shown in FIG. 1 and the diameter is 6 mm and the length is 40 mm
And

The surface 2a of the base material 2 has a center line average roughness (Ra) of 0.3 to 0.4 μm in a state after firing, and is subjected to a surface treatment by a fluid polishing method to obtain a center line average roughness (Ra). 0.2
The first surface state described above was defined as less than μm.

A first layer 3a made of a Ti film or a Cr film and a second layer 3b made of a Si film are formed on the base material 2 by RF (high frequency) sputtering to form an intermediate layer 3, and then a plasma is formed. A diamond-like hard carbon film 5 was deposited by a CVD method. The thickness t of the diamond-like hard carbon film 5 was 0.3 μm as a result of observing and measuring the thread guide 1 with a scanning electron microscope. The guide surface 5a also had a center line average roughness (Ra) of less than 0.2 μm and an average void occupancy of less than 2%.

With respect to the thread guide 1 obtained through the above steps, the fiber 6 was guided, the friction coefficient was measured by a dynamic friction coefficient measuring machine, and the state of the fiber 6 side and the thread guide 1 side was observed.

The fibers 6 used for the evaluation were polyester (SD
75-36) was used. In the friction coefficient measurement, the sliding speed was 100 m / min, and the dynamic friction coefficient μ was determined by the input side tension T _IN (= 20 g), the output side tension T _OUT , and the winding angle θ of the fiber 6 to the thread guide 1. , Μ = {ln (T _OUT / T _IN )} / θ ... Calculated by Amonton's law. The wear of the fiber 6 and the thread guide 1 was evaluated by observing the state after sliding for 1 hour at a sliding speed of 2000 m / min.

On the other hand, as a comparative example, a thread guide consisting of only the same base material 2 as described above and a thread guide in which only the diamond-like hard carbon film 5 is coated on the base material 2 without an intermediate layer are prepared. The same measurements were made.

The results are as shown in Table 2. From this result, there was almost no difference in the dynamic friction coefficient,
In Comparative Examples (Nos. 3 and 4), fluff was generated in the fibers 6, whereas in the inventive examples (Nos. 1 and 2), the fibers 6 did not change at all. This is because in the embodiment of the present invention, the diamond-like hard carbon film 5 is excellent in slidability, so that the sliding fiber 6 is hardly damaged.

In addition, in the comparative example No. In No. 3, a streak-like mark was formed on the surface of the alumina ceramic forming the thread guide due to sliding with the fiber 6, and in No. 3 of the comparative example. In No. 4, the diamond-like hard carbon film 5 was peeled off. In Nos. 1 and 2, there is no change at all because the presence of the intermediate layer 3 prevents peeling and increases the Vickers hardness, and it can be seen that wear on the thread guide 1 side is extremely small.

The reason why there was no difference in the friction coefficient between the present invention and the comparative example is considered to be that the friction coefficient is dominated by the surface roughness of the thread guide 1.

[0066]

[Table 2]

Example 2 As a base material 2, alumina ceramics having an Al ₂ O ₃ content of 99.7% or more was used. The characteristics of this alumina ceramics are that the average crystal grain size is 2-3 μm, the density is 3.95 g /
cm3 or more, the average void occupancy rate of less than 2%, a Vickers hardness 1700~1800kg / mm ^2, the thermal expansion coefficient of 40
6.8 × 10 ⁻⁶ / ° C. at −400 ° C. was used. The shape is the pin shape shown in FIG. 1 and the diameter is 6 mm and the length is 40 mm
And

The surface 2a of the base material 2 has a center line average roughness (Ra) of 0.3 to 0.4 μm in a state after firing, and is subjected to a surface treatment by a fluid polishing method to obtain a center line average roughness (Ra). 0.2
It was less than μm. Thereafter, the heat treatment was performed again at a temperature 200 ° C. higher than the firing temperature. By this heat treatment, the crystal is softened and spheroidized along with the grain growth to become a rounded crystal, and the center line roughness (Ra) of the surface 2a is 0.5.
To 0.6 μm, which was the second surface state described above.

A first layer 3a made of either a Ti film or a Cr film is formed on the base material 2 by RF (high frequency) sputtering.
After forming the second layer 3b made of a Si film to form the intermediate layer 3, the diamond-like hard carbon film 5 is formed by a plasma CVD method.
Was deposited. Thickness t of diamond-like hard carbon film 5
As a result of breaking the thread guide 1 and observing and measuring it with a scanning electron microscope, the average thickness was 0.3 μm. The center line roughness (Ra) of the guide surface 5a was also 0.5 to 0.6 μm.

On the other hand, as a comparative example, a thread guide made of only the same base material 2 as described above and a thread guide in which only the diamond-like hard carbon film 5 was coated on the base material 2 without forming the intermediate layer 3 were prepared. The same measurements were made as in.

For these thread guides, the friction coefficient was measured in the same manner as in Example 1, and the state of the fibers 6 and the thread guide 1 after the sliding test was observed.

The results are as shown in Table 3. From this result, there was almost no difference in the dynamic friction coefficient,
In the comparative examples (Nos. 7 and 8), the fibers 6 slightly fuzzed, whereas in the examples of the present invention (Nos. 5 and 6), the fibers 6
Did not change at all. This is because in the embodiment of the present invention, the diamond-like hard carbon film 5 is excellent in slidability, so that the sliding fiber 6 is hardly damaged.

Further, in the comparative examples No. In No. 7, a streak-like mark was generated due to sliding with the fiber 6 on the surface of the alumina ceramic forming the thread guide. In No. 8, the diamond-like hard carbon film 5 was peeled off. In Nos. 5 and 6, peeling was prevented by the provision of the intermediate layer 3, and since the Vickers hardness was increased, the abrasion on the thread guide 1 side was found to be extremely small.

The reason why there was no difference in the friction coefficient between the present invention and the comparative example is considered to be that the influence of the surface roughness of the thread guide 1 is dominant in the friction coefficient. Further, in Example 2, the coefficient of friction could be significantly reduced as compared with Example 1, because the surface condition was rounded and moderately uneven.

[0075]

[Table 3]

[0076]

As described above, according to the present invention, a ceramic or glass is used as a base material, and a diamond-like hard carbon film having a thickness of 0.2 to 1.5 μm is formed on the surface of the base material via an intermediate layer.
By forming a wear-resistant guide material by coating with a thickness of m, not only the wear resistance of the guide material itself can be improved, but also it is hard to damage when guiding fibers etc. due to its excellent slidability. And the peeling of the diamond-like hard carbon film can be prevented by the presence of the intermediate layer.

Further, according to the present invention, the intermediate layer comprises a first layer made of either Ti or Cr from the base material side,
By forming the second carbon layer from the second layer, the adhesion strength of the diamond-like hard carbon film can be further increased, and peeling can be prevented even when fibers and the like are guided at high speed.

As a result, if a thread guide is formed using the wear-resistant guide material of the present invention, it is possible to guide and slide at a high speed while maintaining the quality of various fibers, thereby reducing the productivity of the textile machine. Can be improved.

[Brief description of the drawings]

1A is a perspective view showing a thread guide of the present invention, FIG. 1B is a sectional view taken along line XX in FIG. 1A, and FIG. 1C is an enlarged view of a Y part in FIG. .

FIG. 2 is a peak chart of a diamond-like hard carbon film used for a thread guide according to the present invention by Raman spectroscopy.

[Explanation of symbols]

 1: thread guide 2: base material 2a: surface 2b: rear end 3: intermediate layer 3a: first layer 3b: second layer 5: diamond-like hard carbon film 5a: guide surface 6: fiber

Claims (4)

[Claims] An abrasion resistance characterized in that a ceramic or glass is used as a base material, and the surface of the base material is coated with a diamond-like hard carbon film with a thickness of 0.2 to 1.5 μm via an intermediate layer. Sex guide material. 2. The intermediate layer comprises a Ti film, a Cr film,
The wear-resistant guide material according to claim 1, wherein the guide member is formed by a first layer made of any one of the films and a second layer made of a Si film. 3. The surface of the diamond-like hard carbon film in the wear-resistant guide material according to claim 1 has a center line average roughness (Ra) of 0.03 to 0.2 μm and a void occupancy of less than 2%. A thread guide characterized by that. 4. The surface of the diamond-like hard carbon film in the wear-resistant guide material according to claim 1 having a centerline average roughness (Ra) of 0.4 to 0.6 μm and a crystal having roundness. Thread guide.