JPH10326961A - Formation of bump on wiring board - Google Patents

Formation of bump on wiring board

Info

Publication number
JPH10326961A
JPH10326961A JP14844297A JP14844297A JPH10326961A JP H10326961 A JPH10326961 A JP H10326961A JP 14844297 A JP14844297 A JP 14844297A JP 14844297 A JP14844297 A JP 14844297A JP H10326961 A JPH10326961 A JP H10326961A
Authority
JP
Japan
Prior art keywords
bump
hole
wiring board
rod
electrode pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14844297A
Other languages
Japanese (ja)
Inventor
Ryoji Sugiura
良治 杉浦
Masayuki Sakurai
正幸 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi AIC Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi AIC Inc filed Critical Hitachi AIC Inc
Priority to JP14844297A priority Critical patent/JPH10326961A/en
Publication of JPH10326961A publication Critical patent/JPH10326961A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To form a bump while facilitating correct positioning at an electrode pad by making a through hole in a wiring board, plating the through hole to form a through hole plating layer, press fitting a rod-like bump member therein and connecting the bump member with the through hole by soldering, or the like. SOLUTION: An outer layer conductor 5 is formed on the surface of a wiring board 1 for mounting an electronic device 40, e.g. a semiconductor device, and a plurality of through holes are made and subjected to electroless plating thus forming a through hole plating layer 4 on the inner circumferential surface of the through hole. A conductive paste 8 is then applied to the inside of an electrode pad 6 in the through hole and a rod-like bump, member 45B is fitted and soldered to form a bump. Fitting state can be stabilized by press fitting a prismatic bump member in the through hole of the electrode pad 6 in place of the rod-like bump member 45B. Since a rod-like bump member 45B is fitted fixedly in the through hole of the electrode pad, trouble can be prevented during work or transportation.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、配線基板の電極パ
ッドにバンプ(突出接点)を形成するバンプの形成方法
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a bump (protruding contact) on an electrode pad of a wiring board.

【0002】[0002]

【従来の技術】図3に基づいて、従来の技術を説明す
る。従来は、電子部品40の中でも代表的な半導体素子
やICフラットパッケージ等の高密度電子部品を搭載し
た配線基板31の外部への接続端子として、つまり配線
基板の下面に外部端子として多数の電極パッド36を2
次元の格子上交点に設け、この電極パッド36に、はん
だ等から成る球形状バンプ(突出接点)部材45、例え
ば、はんだボールを加熱圧着やリフローはんだ付けで形
成する方式はBGA(ball・grid・array)パッケージ
方式と呼ばれ、電子部品の高密度化、小型化および、は
んだ付け不良率の低減による品質の向上が望める。
2. Description of the Related Art A conventional technique will be described with reference to FIG. Conventionally, among the electronic components 40, a large number of electrode pads are used as connection terminals to the outside of the wiring board 31 on which high-density electronic components such as semiconductor elements and IC flat packages are mounted, that is, external terminals are provided on the lower surface of the wiring board. 36 to 2
A method of forming a spherical bump (protruding contact) member 45 made of solder or the like, for example, a solder ball on the electrode pad 36 by heat compression bonding or reflow soldering is provided on the electrode pad 36 by a BGA (ball grid grid). An array) package method, which can improve the quality of electronic components by increasing their density and miniaturization, and by reducing the rate of defective soldering.

【0003】まず、従来技術の電子部品搭載用の配線基
板31は、この配線基板31の上面外層導体33と、下
面外層導体35とは、スルーホールめっきで電気的に導
通されている。この下面外層導体35の2次元の格子上
交点の所定箇所には多数の電極パッド36が平面的に形
成され設定配置される。次に、外層導体33,35の必
要な接続ランドや電極パッド36を除いて配線基板31
の両面にソルダーレジスト7を施すことが一般的であ
る。その次に、前記の電極パッド36の表面上に、クリ
ームはんだを塗布し、その上に球形状のバンプ部材4
5、例えば、はんだボールをのせリフローはんだ付けで
球形状バンプを形成する。また、はんだ等から成る球形
状バンプ部材45を直接、電極パッド36へ加熱圧着す
る方法もある。
First, in a conventional wiring board 31 for mounting electronic components, an upper outer conductor 33 and a lower outer conductor 35 of the wiring board 31 are electrically connected by through-hole plating. A large number of electrode pads 36 are planarly formed and set at predetermined positions at intersections of the lower surface outer conductor 35 on the two-dimensional lattice. Next, except for the connection lands and electrode pads 36 necessary for the outer layer conductors 33 and 35, the wiring board 31 is removed.
It is common to apply a solder resist 7 to both sides of the substrate. Next, cream solder is applied on the surface of the electrode pad 36, and a spherical bump member 4 is formed thereon.
5, for example, a solder ball is placed and a spherical bump is formed by reflow soldering. Alternatively, there is a method in which a spherical bump member 45 made of solder or the like is directly heated and pressed to the electrode pad 36.

【0004】[0004]

【発明が解決しようとする課題】しかし、従来の平面的
な面実装技術では、球形状、半球形状、山型形状などの
バンプを、所定箇所の電極パッド36に取り付ける場
合、電極パッド36の平面状の表面と球形状のバンプ部
材45の先端面が球面形状となっている球面とが接する
ため位置決めが非常に難しくなっていた。また、球形状
のバンプ部材45を配線基板31に設置されている多数
の電極パッド36に正確に位置決めをし、リフローはん
だ付けや加熱圧着する作業や運搬中に球形状のバンプ部
材45が位置ずれしたり、離脱する不良が発生すること
がある。
However, in the conventional planar surface mounting technology, when bumps having a spherical shape, a hemispherical shape, a mountain shape, or the like are attached to the electrode pads 36 at predetermined positions, the planar shape of the electrode pads 36 is reduced. Since the spherical surface and the spherical surface where the tip surface of the spherical bump member 45 has a spherical shape are in contact with each other, positioning has been extremely difficult. In addition, the spherical bump member 45 is accurately positioned on a large number of electrode pads 36 provided on the wiring board 31, and the spherical bump member 45 is misaligned during reflow soldering, thermocompression work, or transportation. Or detachment failure may occur.

【0005】さらに、球形状のバンプ部材45の大きさ
のバラツキ、配線基板31の反りやねじれ、クリームは
んだの塗布量などにより球形状バンプの先端面の高さの
差Rが生じることにより、このバンプの形成された配線
基板31を親配線基板の接続ランドにリフローはんだ付
けする際に配線基板31の球形状バンプと、親配線基板
の接続ランドとの接続不良が生じて、接続品質が不安定
となり、接続信頼性の確保が課題となっていた。
Further, a difference R in the height of the tip surface of the spherical bump occurs due to variations in the size of the spherical bump member 45, warpage or twist of the wiring board 31, application amount of cream solder, and the like. When the wiring board 31 on which the bumps are formed is reflow-soldered to the connection lands of the parent wiring board, poor connection occurs between the spherical bumps of the wiring board 31 and the connection lands of the parent wiring board, resulting in unstable connection quality. As a result, securing connection reliability has been an issue.

【0006】[0006]

【課題を解決するための手段】上記の課題を解決するた
め本発明においては、電子部品40を搭載する配線基板
31のバンプ接続側にある下面外層導体35上に形成さ
れている平面的な電極パッド36を、図1に示すように
配線基板1の基材に単数または複数の貫通孔を穿設し、
当該貫通孔の内周面にめっきを施しスルーホールめっき
層を形成する。この貫通孔のスルーホールに棒形状のバ
ンプ部材45Bを圧入し、はんだや導電性ペーストによ
り各上記バンプ部材と各上記スルーホールとを接続する
ことにより、正しい電極パッド位置に容易に位置決めを
してバンプを形成することができる。
According to the present invention, there is provided a planar electrode formed on a lower surface outer layer conductor on a bump connection side of a wiring board on which an electronic component is mounted. One or more through holes are formed in the base material of the wiring board 1 as shown in FIG.
Plating is applied to the inner peripheral surface of the through-hole to form a through-hole plating layer. A rod-shaped bump member 45B is press-fitted into the through-hole of this through-hole, and each of the bump members and each of the through-holes are connected by solder or a conductive paste, thereby easily positioning the correct electrode pad position. A bump can be formed.

【0007】さらに、前記の貫通孔の電極パッド6の内
径は、挿入する棒形状のバンプ部材45Bの外径d1
り若干大きくし、挿入時の間隙を少なくして2次元(平
面的)の位置決め精度を高くする。また、棒形状のバン
プ部材45Bの長さLは、配線基板1の板厚より若干長
くしてバンプ接続側の表面5Aから、棒形状のバンプ部
材45Bの先端部分までの高さHが0.20〜0.60
mm突出するように、棒形状のバンプ部材45Bの長さを
選定する。このように、貫通孔の電極パッド6の内に、
棒形状のバンプ45Bをはめ込み、はんだ付けやリフロ
ーはんだ付けなどでバンプを形成するため、接続品質が
安定する。なお、バンプ接続側の表面5Aから突出して
いる棒形状のバンプ部材45Bの先端部分までの高さH
は、高さ方向の位置決め用治具で棒形状のバンプ部材4
5Bの突出する先端面の高さレベルを平坦化することが
でき、このバンプ部材45Bの先端部分と親配線基板の
接続ランドの間隔が一定となり、電子部品搭載用配線基
板1と親配線基板との多数のバンプ接続による実装を、
簡単な構成によって容易に確実に行うことができる。
Further, the inner diameter of the electrode pad 6 in the through hole is made slightly larger than the outer diameter d 1 of the rod-shaped bump member 45B to be inserted, and the gap at the time of insertion is reduced to achieve a two-dimensional (planar). Increase positioning accuracy. The length L of the rod-shaped bump member 45B is slightly longer than the thickness of the wiring board 1 so that the height H from the surface 5A on the bump connection side to the tip of the rod-shaped bump member 45B is equal to 0. 20-0.60
The length of the rod-shaped bump member 45B is selected so as to protrude mm. Thus, in the electrode pad 6 of the through hole,
Since the bar-shaped bump 45B is fitted and the bump is formed by soldering, reflow soldering, or the like, the connection quality is stabilized. The height H from the surface 5A on the bump connection side to the tip of the rod-shaped bump member 45B protruding from the surface 5A.
Is a rod-shaped bump member 4 with a positioning jig in the height direction.
The height level of the protruding front end surface of 5B can be flattened, the distance between the front end portion of the bump member 45B and the connection land of the parent wiring board becomes constant, and the electronic component mounting wiring board 1 and the parent wiring board are Mounting with a large number of bump connections
It can be easily and reliably performed by a simple configuration.

【0008】前記貫通孔であるスルーホールの孔径は、
棒形状バンプ部材45Bの一つである角柱形状のバンプ
部材45Dを圧入する場合は多角形の角に接する外接径
2より若干小さくして、貫通孔の内に角柱形状バンプ
部材45Dを圧入し、固定するようにする。
The diameter of the through hole, which is the through hole, is
Rod-shaped case of press-fitting the bumps member 45D of the prism shape, which is one of the bumps member 45B is slightly smaller than the circumscribed diameter d 2 which is in contact with the corners of the polygon, the prismatic bumps member 45D is press-fitted within the through hole , To be fixed.

【0009】[0009]

【発明の実施の形態】まず、図1に基づいて実施の形態
を説明する。半導体素子やICフラットパッケージ等の
電子部品40を搭載する配線基板1の電子部品搭載面の
表面外層導体3と、バンプ接続側の表面外層導体5を印
刷法や写真法により、所定箇所に所定の導体を形成し、
次いで、NC穴あけ加工により単数または複数の貫通孔
を穿設し、無電解めっき、電解めっきを施し当該貫通孔
内周面にスルーホールめっき層4を形成する。このよう
にして、配線基板1の外部への接続端子として使用する
単数または複数の貫通孔の電極パッド6を、2次元の格
子上交点の所定箇所に、立体的(3次元的)に形成し、
設定配置する。次に、電子部品搭載面の表面外層導体3
と、バンプ接続側の表面外層体5の必要な接続ランドや
貫通孔の電極パッド6を除いて配線基板1の両面にソル
ダーレジスト7を施こす。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an embodiment will be described with reference to FIG. The surface outer layer conductor 3 on the electronic component mounting surface of the wiring board 1 on which the electronic component 40 such as a semiconductor element or an IC flat package is mounted, and the surface outer layer conductor 5 on the bump connection side are fixed at predetermined positions by printing or photography. Form a conductor,
Next, one or more through holes are formed by NC drilling, and electroless plating and electrolytic plating are performed to form a through hole plating layer 4 on the inner peripheral surface of the through hole. In this way, one or more through-hole electrode pads 6 used as connection terminals to the outside of the wiring board 1 are formed three-dimensionally (three-dimensionally) at predetermined positions of intersections on a two-dimensional lattice. ,
Set and arrange. Next, the surface outer layer conductor 3 on the electronic component mounting surface
Then, solder resists 7 are applied to both surfaces of the wiring board 1 except for necessary connection lands of the outer surface layer body 5 on the bump connection side and the electrode pads 6 of through holes.

【0010】その次に、配線基板1のバンプ接続側に形
成した貫通孔の電極パッド6の内部に、導電性ペースト
8を塗布あるいは充填し、そこに、棒形状のバンプ部材
45Bをはめ込み、リフローはんだ付けをするか、また
は貫通孔の電極パッド6の内に、はんだ付用フラックス
を塗布し、棒形状のバンプ部材45Bをはめ込み通常の
はんだ付けでバンプを形成する。導電性ペースト8とし
ては、銀ペースト,銅ペースト,はんだペースト,クリ
ームはんだ,銀−銅合金系ペースト,銀パラジウム合金
ペースト,カーボンペーストなどがある。また、貫通孔
の電極パッド6の表面上に電子部品40を搭載する場合
は、配線基板1と電子部品40との間に絶縁フィルムや
絶縁シート,絶縁被膜を設ける。
Next, a conductive paste 8 is applied or filled into the electrode pads 6 of the through holes formed on the bump connection side of the wiring board 1, and a rod-shaped bump member 45B is fitted therein, and reflow is performed. Soldering is performed, or a flux for soldering is applied to the electrode pad 6 having the through hole, and a bar-shaped bump member 45B is fitted to form a bump by ordinary soldering. Examples of the conductive paste 8 include a silver paste, a copper paste, a solder paste, a cream solder, a silver-copper alloy paste, a silver palladium alloy paste, and a carbon paste. When the electronic component 40 is mounted on the surface of the electrode pad 6 in the through hole, an insulating film, an insulating sheet, and an insulating coating are provided between the wiring board 1 and the electronic component 40.

【0011】さらに、本発明に使用する棒形状のバンプ
部材45Bとして、図2に示すように円柱形状バンプ部
材45C,角柱形状バンプ部材45D,変形の棒形状バ
ンプである突起付き棒形状バンプ部材などの種類がある
が、図2(a)に示すように棒形状バンプ部材45Bの
一つである単純な形状の円柱形状バンプ部材45Cにお
いて、このバンプの外径d1より貫通孔の電極パッド6
の内径は若干大きくし、挿入時に必要以上の間隙が生じ
ないようにする。
Further, as a rod-shaped bump member 45B used in the present invention, as shown in FIG. 2, a columnar bump member 45C, a prismatic bump member 45D, a rod-shaped bump member with projections which is a modified rod-shaped bump, etc. there are types 2 in cylindrical bumps member 45C having a simple shape is one of the rod-shaped bumps member 45B (a), the electrode pads 6 of the through hole than the outer diameter d 1 of the bump
Has a slightly larger inner diameter so that an unnecessary gap does not occur during insertion.

【0012】また、棒形状のバンプ部材45Bを貫通孔
の電極パッド6へはめ込む作業の効率向上や嵌合状態の
安定化を図るため、棒形状バンプ部材45Bの一つであ
る角柱形状のバンプ部材45Dを貫通孔の電極パッド6
の貫通孔の内に圧入することができる。この角柱形状の
バンプ部材45Dとしては、図2(b)の正面図,平面
図で示してあるように、角柱形状バンプ部材45Dの多
角形の角に接する外接径d2より、配線基板1に形成さ
れている貫通孔の電極パッド6の貫通孔の内径は若干小
さくして、非貫通孔の内に角柱形状バンプ部材45Dを
圧入し、固定することにより嵌合状態を安定化すること
ができる。この角柱形状のバンプ部材45Dには、四角
柱形状,六角柱形状,八角柱形状のように線対称となる
多角柱形状のバンプが嵌合状態が安定し良好である。
Further, in order to improve the efficiency of fitting the rod-shaped bump member 45B into the electrode pad 6 of the through hole and to stabilize the fitting state, a prismatic bump member which is one of the rod-shaped bump members 45B is used. 45D is a through-hole electrode pad 6
Can be press-fitted into the through hole. The bumps member 45D of this prismatic, front view of FIG. 2 (b), as is shown in plan view, than the circumscribed diameter d 2 which is in contact with the corners of the polygonal prismatic bumps member 45D, the wiring board 1 The fitting state can be stabilized by making the inner diameter of the through hole of the electrode pad 6 of the formed through hole slightly smaller and press-fitting and fixing the prismatic bump member 45D into the non-through hole. . Polygonal pillar-shaped bumps that are line-symmetric such as a square pillar, a hexagonal pillar, and an octagonal pillar are stably and well fitted to the prismatic bump member 45D.

【0013】棒形状のバンプ部材45Bとしては、配線
基板1のバンプ接続側の表面5Aからバンプの先端部分
までの高さHを0.30mmとしたが、この高さHが0.
20mm未満では細い棒形状バンプ部材45Bの曲がり
や、この棒形状バンプ部材45Bと、はんだ接合される
親配線基板の接続ランドに塗布されているクリームはん
だ量の過少により接続不良が生じやすい。また、0.6
0mmを越えると親配線基板の接続ランドとの間隔が広く
なり過ぎて、はんだ接合が不完全となり、高精細な電極
パッドや接続端子ピッチが狭い場合はショート不良が発
生しやすくなる。すなわち、パンプ接続側の表面5Aか
らバンプの先端部分までの高さHは0.20〜0.60
mm突出しているのが良好である。
As the rod-shaped bump member 45B, the height H from the surface 5A on the bump connection side of the wiring board 1 to the tip of the bump is set to 0.30 mm.
If the thickness is less than 20 mm, poor connection is likely to occur due to the bending of the thin rod-shaped bump member 45B or the insufficient amount of cream solder applied to the connection land of the parent wiring substrate to be solder-bonded to the rod-shaped bump member 45B. Also, 0.6
If it exceeds 0 mm, the distance between the connection land of the parent wiring board and the connection land becomes too large, so that the solder joint is incomplete. If the pitch of the high-definition electrode pads or the connection terminals is narrow, short-circuit failure is likely to occur. That is, the height H from the surface 5A on the pump connection side to the tip of the bump is 0.20 to 0.60.
It is good that it protrudes by mm.

【0014】なお、バンプ接続側の表面5Aから突出し
ている棒形状のバンプ部材45Bの先端部分までの高さ
Hは、高さ方向の位置決め用治具で棒形状のバンプ部材
45Bの突出する先端面の高さレベルを平坦化すること
ができ、この棒形状のバンプ部材45Bの先端部分と親
配線基板の接続ランドとの間隔が一定となり、電子部品
搭載用配線基板と親配線基板とのバンプ接続による実装
を簡単な構成によって確実に行うことができる。
The height H from the surface 5A of the bump connection side to the tip of the rod-shaped bump member 45B is determined by the height-direction positioning jig. The height of the surface can be flattened, and the distance between the tip of the rod-shaped bump member 45B and the connection land of the parent wiring substrate becomes constant, so that the bump between the electronic component mounting wiring substrate and the parent wiring substrate becomes bumpy. Mounting by connection can be reliably performed with a simple configuration.

【0015】本発明においては、電子部品搭載用の配線
基板1はガラスエポキシ基材,フェノール基材,合成樹
脂基材と呼ばれるCEM材,テフロン含有基材,ポリイ
ミド樹脂基材,BTレジン(ビスマレィミド−トリアジ
ン樹脂)基材,変性BTレジン基材またはセラミック基
材などの基材から最適なものを選択して使用する。ま
た、配線基板1の構造として、片面配線基板,両面配線
基板,多層配線基板のどれでもよく、導体パターンの形
成はサブトラクティブ法でもアクティブ法でも限定され
るものではない。
In the present invention, the wiring board 1 for mounting electronic components is made of a glass epoxy base, a phenol base, a CEM material called a synthetic resin base, a Teflon-containing base, a polyimide resin base, a BT resin (bismaleimide-based). Triazine resin) An optimum material is selected from substrates such as a substrate, a modified BT resin substrate or a ceramic substrate and used. Further, the structure of the wiring board 1 may be any of a single-sided wiring board, a double-sided wiring board, and a multilayer wiring board, and the formation of the conductor pattern is not limited to the subtractive method or the active method.

【0016】[0016]

【発明の効果】以上説明したように、従来の電子部品4
0を搭載した配線基板31の下面外層導体35に形成さ
れている電極パッド36は平面的で多数の球形状バンプ
部材45(例えば、はんだボール)を正確に位置決めを
し、さらに球形状バンプの先端面の高さの差をなくして
固定することは非常に難しいが、本発明では、所定箇所
に形成した貫通孔の電極パッド6内に棒形状のバンプ部
材45Bをはめ込むことにより、正しい電極パッド位置
に容易に位置決めをすることができる。
As described above, the conventional electronic component 4
The electrode pads 36 formed on the lower surface outer layer conductor 35 of the wiring board 31 on which the 0 is mounted accurately position a large number of spherical bump members 45 (for example, solder balls) in a planar manner, and furthermore, the tip of the spherical bump. Although it is very difficult to fix without eliminating the height difference between the surfaces, in the present invention, the rod-shaped bump member 45B is fitted into the electrode pad 6 of the through hole formed at a predetermined position, so that the correct electrode pad position can be obtained. Can be easily positioned.

【0017】また、従来の技術では多数の球形状バンプ
部材45を平面的な電極パッド36に仮固定した後の作
業中や運搬中に、球形状のバンプ部材45が位置ずれし
たり、離脱する不良が生じていたが、本発明の立体的に
形成された貫通孔の電極パッド6の貫通孔の内に、棒形
状のバンプ部材45Bをはめ込み固定したことにより、
作業中や運搬中の不良が発生しなくなった。このよう
に、貫通孔の電極パッド6の内に、凸形状となっている
棒形状のバンプ部材45Bをはめ込み、リフローはんだ
付けなどでバンプを形成するため、接続品質が安定す
る。
Further, in the prior art, the spherical bump members 45 are displaced or detached during the work or transportation after a large number of spherical bump members 45 are temporarily fixed to the planar electrode pads 36. Although a defect occurred, the rod-shaped bump member 45B was fitted and fixed in the through hole of the electrode pad 6 of the three-dimensionally formed through hole of the present invention.
Defects during work and transportation no longer occur. As described above, the bump-shaped bump member 45B having a convex shape is fitted into the through-hole electrode pad 6, and the bump is formed by reflow soldering or the like, so that the connection quality is stabilized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を説明する電子部品搭載状態の配線基板
断面図。
FIG. 1 is a cross-sectional view of a wiring board in a state where electronic components are mounted, explaining the present invention.

【図2】本発明に使用される棒形状のバンプの一例を示
す正面図と平面図。
FIG. 2 is a front view and a plan view showing an example of a rod-shaped bump used in the present invention.

【図3】従来の電子部品搭載用の配線基板断面図。FIG. 3 is a cross-sectional view of a conventional wiring board for mounting electronic components.

【符号の説明】[Explanation of symbols]

1…配線基板 3…電子部品搭載面の表面外層導体 4…スルーホールめっき層 5…バンプ接続側の表面外
層導体 5A…バンプ接続側の表面 6…貫通孔の電極パッド
7…ソルダーレジスト 8…導電性ペースト R…球形状バンプの先端面の高さ
の差 31…配線基板 33…上面外層導体 35…下面外層導体 36…電極
パッド 40…電子部品 45…球形状バンプ部材 45B…棒
形状のバンプ部材 45C…円柱形状バンプ部材 45D…角柱形状バンプ
部材 H…バンプ接続側の表面からバンプの先端面のレベルま
での高さ
DESCRIPTION OF SYMBOLS 1 ... Wiring board 3 ... Outer surface conductor on electronic component mounting surface 4 ... Through-hole plating layer 5 ... Outer surface conductor on bump connection side 5A ... Surface on bump connection side 6 ... Electrode pad of through hole
7: Solder resist 8: Conductive paste R: Difference in height of tip of spherical bump 31: Wiring board 33: Upper outer layer conductor 35: Lower outer layer conductor 36: Electrode pad 40: Electronic component 45: Spherical bump member 45B: rod-shaped bump member 45C: cylindrical bump member 45D: prismatic bump member H: height from the surface on the bump connection side to the level of the tip end surface of the bump

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 電子部品を搭載する配線基板の電極パッ
ドにバンプを形成する方法において、基材に単数または
複数の貫通孔を穿設し、当該貫通孔にめっきを施すこと
によりスルーホールを形成する第1の工程と、棒形状の
バンプ部材を上記スルーホールに圧入する第2の工程
と、はんだや導電性ペーストにより各上記バンプ部材と
各上記スルーホールとを接続する第3の工程とを有する
ことを特徴とする配線基板のバンプ形成方法。
In a method of forming a bump on an electrode pad of a wiring board on which an electronic component is mounted, one or more through holes are formed in a base material, and the through holes are formed by plating the through holes. A first step of pressing a rod-shaped bump member into the through-hole, and a third step of connecting each bump member and each through-hole with solder or conductive paste. A method for forming a bump on a wiring board, comprising:
【請求項2】 上記の棒形状のバンプ(45B)に角柱
形状のバンプ部材(45D)を使用し、上記貫通孔の孔
径を角柱形状のバンプ部材(45D)の外接径(d2
より若干小さくすることを特徴とする請求項1に記載の
バンプ形成方法。
2. A prismatic bump member (45D) is used for the rod-shaped bump (45B), and the hole diameter of the through hole is set to the circumscribed diameter (d 2 ) of the prismatic bump member (45D).
2. The bump forming method according to claim 1, wherein the bump is made slightly smaller.
JP14844297A 1997-05-23 1997-05-23 Formation of bump on wiring board Pending JPH10326961A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14844297A JPH10326961A (en) 1997-05-23 1997-05-23 Formation of bump on wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14844297A JPH10326961A (en) 1997-05-23 1997-05-23 Formation of bump on wiring board

Publications (1)

Publication Number Publication Date
JPH10326961A true JPH10326961A (en) 1998-12-08

Family

ID=15452901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14844297A Pending JPH10326961A (en) 1997-05-23 1997-05-23 Formation of bump on wiring board

Country Status (1)

Country Link
JP (1) JPH10326961A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7274570B2 (en) 2002-06-07 2007-09-25 Matsushita Electric Industrial Co., Inc. Electronic component mounting board, electronic component module, method of manufacturing electronic component mounting board, and communications equipment
JP2012029166A (en) * 2010-07-26 2012-02-09 Seiko Instruments Inc Package, method of manufacturing package, piezoelectric transducer, and oscillator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7274570B2 (en) 2002-06-07 2007-09-25 Matsushita Electric Industrial Co., Inc. Electronic component mounting board, electronic component module, method of manufacturing electronic component mounting board, and communications equipment
JP2012029166A (en) * 2010-07-26 2012-02-09 Seiko Instruments Inc Package, method of manufacturing package, piezoelectric transducer, and oscillator

Similar Documents

Publication Publication Date Title
US6617695B1 (en) Semiconductor device and semiconductor module using the same
JP3294740B2 (en) Semiconductor device
JP2000164618A (en) Metal foil with bumps, circuit board and semiconductor device using the same
US6791035B2 (en) Interposer to couple a microelectronic device package to a circuit board
JP3013807B2 (en) Method for forming bumps on wiring board
JP5157455B2 (en) Semiconductor device
US5868304A (en) Socketable bump grid array shaped-solder on copper spheres
EP1460888A1 (en) Low-profile electronic circuit module and method for manufacturing the same
JP2943788B2 (en) Wiring board for mounting electronic components
JPH10326961A (en) Formation of bump on wiring board
JPH10313170A (en) Wiring board
JP2646331B2 (en) Lead pin carrier
JP2006253167A (en) Method of manufacturing cavity structure printed wiring board and mounting structure
US6070782A (en) Socketable bump grid array shaped-solder on copper spheres
JPH113956A (en) Formation of bump
JPH10303359A (en) Bump member for wiring board
JPH11163489A (en) Mounting structure of electronic component
JPH05327161A (en) Electronic circuit module
JPH08139226A (en) Semiconductor circuit device and method for mounting its circuit
JP2580607B2 (en) Circuit board and method of manufacturing circuit board
JP2002076561A (en) Solid circuit board device and manufacturing method therefor
JP3845314B2 (en) BGA component, BGA component mounting method, and semiconductor device
JP2751897B2 (en) Ball grid array mounting structure and mounting method
JP3604001B2 (en) Method for manufacturing semiconductor device
TWM637322U (en) Package structure