JPH10324566A - Dielectric ceramic composition, its production and dielectric resonator and dielectric filter using that - Google Patents

Dielectric ceramic composition, its production and dielectric resonator and dielectric filter using that

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Publication number
JPH10324566A
JPH10324566A JP9129255A JP12925597A JPH10324566A JP H10324566 A JPH10324566 A JP H10324566A JP 9129255 A JP9129255 A JP 9129255A JP 12925597 A JP12925597 A JP 12925597A JP H10324566 A JPH10324566 A JP H10324566A
Authority
JP
Japan
Prior art keywords
dielectric
weight
parts
composition
porcelain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9129255A
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Japanese (ja)
Other versions
JP3376855B2 (en
Inventor
Hidekazu Koga
英一 古賀
Kazuto Sakaguchi
和人 坂口
Eisuke Kurokawa
英輔 黒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Priority to JP12925597A priority Critical patent/JP3376855B2/en
Publication of JPH10324566A publication Critical patent/JPH10324566A/en
Application granted granted Critical
Publication of JP3376855B2 publication Critical patent/JP3376855B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain a dielectric ceramic compsn. having a proper dielectric const., high unloaded Q and a small temp. coefft. of resonance frequency by constituting the compsn. of MgTi2 O5 , CoTiO5 or (MgCo)Ti2 O5 , etc. SOLUTION: Powders of MgO, CaO, MgTi2 O5 , CoTi2 O5 or (MgCo)Ti2 O5 , TiO2 , Nb2 O5 , Cr2 O3 , MnO2 , Fe2 O3 , NiO and Al2 O3 having <=1 μm particle size are mixed in a wet state to obtain a starting material. The starting material is fired in an oxygen atmosphere to obtain a dielectric ceramic compsn. The obtd. compsn. consists of a phase of MgTi2 O5 , CoTi2 O5 or (MgCo)Ti2 O5 as a solid solution of these and a phase of MgTi2 O5 and CaTiO5 or (MgCo)Ti2 O5 as a solid solution of these, and the compsn. is expressed by the general formula, (Mgx Cay Coz )n O-TiO2 ((x), (y), (z), (n) satisfy 0.87<=x<0.95, 0.05<=y<=0.09, 0<z<=0.04, 0.85<=n<1.00 and x+y+z=1.0). Thereby, decrease in the Q due to CaTiO3 can be prevented, and a resonator having small temp. dependence characteristics and high Q can be obtd.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は特に、マイクロ波、
ミリ波などの高周波領域において誘電体共振器として利
用される誘電体磁器組成物及びその製造方法とそれを用
いた誘電体共振器と誘電体フィルタに関するものであ
る。
[0001] The present invention relates in particular to microwaves,
The present invention relates to a dielectric ceramic composition used as a dielectric resonator in a high frequency region such as a millimeter wave, a method for manufacturing the same, and a dielectric resonator and a dielectric filter using the same.

【0002】[0002]

【従来の技術】近年、自動車電話、携帯電話、衛星放送
等、マイクロ波領域の電磁波を利用する通信機器におい
て誘電体共振器や誘電体フィルタ等に誘電体部品が使用
されている。このような誘電体部品に誘電体磁器組成物
を使用するには、用途やデバイスにあう適切な誘電率を
有することの他に、マイクロ波領域で低損失であるこ
と、及び共振周波数の温度変化が小さいこと、すなわち
誘電率の温度変化が小さいことが重要である。従来、こ
のような用途に関係あるものとして、例えば特公昭63
−138605号公報のMgTiO3−CaTiO3−N
2Ti27系、特公平6−92727号公報のMgT
iO3−CaTiO3−Ta25系が知られている。
2. Description of the Related Art In recent years, dielectric components have been used for dielectric resonators, dielectric filters, and the like in communication devices utilizing electromagnetic waves in the microwave region, such as automobile telephones, mobile telephones, satellite broadcasting, and the like. In order to use a dielectric porcelain composition for such a dielectric component, in addition to having an appropriate dielectric constant suitable for an application or a device, low loss in a microwave region, and temperature change of a resonance frequency are required. Is small, that is, the temperature change of the dielectric constant is small. Conventionally, for example, Japanese Patent Publication No. Sho 63
Of JP -138605 MgTiO 3 -CaTiO 3 -N
d 2 Ti 2 O 7 system, MgT disclosed in Japanese Patent Publication No. 6-92727
iO 3 -CaTiO 3 -Ta 2 O 5 systems are known.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記M
gTiO3−CaTiO3−Nd2Ti27系、MgTi
3−CaTiO3−Ta25系は、Q値が充分とはいえ
ず更に高いQ値の誘電体が望まれていた。また
However, the above M
gTiO 3 —CaTiO 3 —Nd 2 Ti 2 O 7 system, MgTi
The O 3 —CaTiO 3 —Ta 2 O 5 system does not have a sufficient Q value, and a dielectric having a higher Q value has been desired. Also

【0004】[0004]

【外1】 [Outside 1]

【0005】の共振を利用した大型の共振器の場合、空
気中での焼成の際に、その焼結体が還元されやすく、素
子内部が青銅色になってQ値が低くなる欠点を有してい
た。このため焼成後更にアニール処理をしたりする特殊
で複雑な製造プロセスが必要である。そして誘電体磁器
表面に直接AgまたはCu電極を形成する同軸誘電体共
振器やストリップライン共振器などへの応用の場合、誘
電体表面の粗度が大きいと電極による導体損失が増加し
て共振器のQ値が低下してしまう。従って、このような
用途において誘電体磁器のQ値を十分に引き出すには、
電極による導体損失をできるだけ小さくすることが重要
であり、微細な結晶粒子より構成された表面粗度の小さ
い誘電体磁器組成物が望まれていた。
[0005] In the case of a large resonator utilizing resonance, there is a disadvantage that the sintered body is easily reduced during firing in air, and the inside of the element becomes bronze and the Q value becomes low. I was For this reason, a special and complicated manufacturing process for further annealing after firing is required. In the case of application to a coaxial dielectric resonator or a strip line resonator in which an Ag or Cu electrode is formed directly on the surface of a dielectric ceramic, if the roughness of the dielectric surface is large, conductor loss due to the electrode increases and the Q value decreases. Therefore, in order to obtain the sufficient Q value of the dielectric porcelain in such an application,
It is important to minimize the conductor loss due to the electrodes, and a dielectric ceramic composition composed of fine crystal grains and having a small surface roughness has been desired.

【0006】本発明は上記問題点を解決するものであ
り、適度な誘電率、高い無負荷Q値及び小さい共振周波
数の温度係数を有する誘電体磁器組成物を提供すること
を目的とするものである。
An object of the present invention is to provide a dielectric ceramic composition having an appropriate dielectric constant, a high unloaded Q value, and a temperature coefficient of a small resonance frequency. is there.

【0007】[0007]

【課題を解決するための手段】この目的を達成するため
に本発明の誘電体磁器組成物は、一般式として(Mg x
CayCoznO−TiO2(ただし、x+y+z=1.
0)で表され、x、y、z及びnはモル比を表し、 0.87≦x<0.95 0.05≦y≦0.09 0<z≦0.04 0.85≦n<1.00 の範囲にある誘電体磁器組成物である。
[MEANS FOR SOLVING THE PROBLEMS] To achieve this object
The dielectric ceramic composition of the present invention has a general formula (Mg x
CayCoz)nO-TiOTwo(However, x + y + z = 1.
0), x, y, z and n represent a molar ratio, and 0.87 ≦ x <0.95 0.05 ≦ y ≦ 0.090 0 <z ≦ 0.04 0.85 ≦ n < 1.00 is a dielectric porcelain composition.

【0008】この構成により上記の目的が達成できる。With this configuration, the above object can be achieved.

【0009】[0009]

【発明の実施の形態】本発明の請求項1に記載の発明
は、一般式として(MgxCayCoznO−TiO
2(ただし、x+y+z=1.0)で表され、x、y、
z及びnはモル比を表し、 0.87≦x<0.95 0.05≦y≦0.09 0<z≦0.04 0.85≦n<1.00 の範囲にある誘電体磁器組成物であり、共振周波数が負
の温度係数のMgTiO 3に正の温度係数のCaTiO3
を加えて零の温度特性を得るのが従来材料の温度特性の
改善方法だがCaTiO3量に伴ってQ値が低下する欠
点を有しており、この解決策としてMg及びCaの一部
をCoで置換すると同時に限定した(MgCaCo)O
とTiO2のモル比にすることで従来材料の欠点であっ
たQ値の低下を防止して高いQ値と小さい温度係数を両
立できることを見いだした。また主成分の組成比によっ
て、高いQ値を維持しつつ誘電率と共振周波数の温度係
数を調整できる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention
Is represented by the general formula (MgxCayCoz)nO-TiO
Two(Where x + y + z = 1.0), and x, y,
z and n represent a molar ratio, and a dielectric porcelain in the range of 0.87 ≦ x <0.95 0.05 ≦ y ≦ 0.090 0 <z ≦ 0.04 0.85 ≦ n <1.00 The composition has a negative resonance frequency.
Temperature coefficient of MgTiO ThreeHas a positive temperature coefficient of CaTiOThree
To obtain a zero temperature characteristic is the temperature characteristic of the conventional material.
Improvement method but CaTiOThreeThe lack that Q value decreases with quantity
The solution is that some of Mg and Ca
Is replaced with Co and (MgCaCo) O
And TiOTwoIs a disadvantage of conventional materials.
High Q value and low temperature coefficient
I found that I could stand. Also, depending on the composition ratio of the main component,
Therefore, while maintaining a high Q value, the temperature relationship between permittivity and resonance frequency
The number can be adjusted.

【0010】請求項2に記載の発明は、請求項1に記載
の誘電体磁器組成物が、MgTi25、CoTi25
いはこれらが固溶した(MgCo)Ti25相と、Mg
TiO3相及びCaTiO3相或いはこれらが固溶した
(MgCa)TiO3相から成る誘電体磁器組成物であ
り、共振周波数の温度係数が正に大きいCoTi25
いはMgOを固溶した(MgCo)Ti25相によっ
て、MgTiO3の負の温度特性を補償することで従来
材料のCaTiO3によるQ値の低下を防止し、小さい
温度特性と高いQ値を得ることができる。
According to a second aspect of the present invention, there is provided the dielectric ceramic composition according to the first aspect, wherein the composition comprises MgTi 2 O 5 , CoTi 2 O 5, or a (MgCo) Ti 2 O 5 phase in which these are dissolved. Mg
A dielectric porcelain composition comprising a TiO 3 phase and a CaTiO 3 phase or a (MgCa) TiO 3 phase in which these are dissolved, and a solid solution of CoTi 2 O 5 or MgO having a positive temperature coefficient of resonance frequency (MgCo). ) by Ti 2 O 5 phase, to prevent the decrease in Q value due to the CaTiO 3 conventional material by compensating for the negative temperature characteristic of MgTiO 3, it is possible to obtain a small temperature characteristic and a high Q value.

【0011】請求項3に記載の発明は、請求項1または
2に記載の誘電体磁器組成物100重量部に対して、副
成分としてニオブ酸化物をNb25に換算して、0.3
重量部以下(ただし0重量部を除く)の範囲で含有させ
た誘電体磁器組成物であり、ニオブ酸化物を含有させる
ことによって、磁器の結晶粒子が微細になり焼結体磁器
表面の粗度は小さくなる。従って誘電体磁器表面に直接
Ag、Cu等の電極を形成する同軸共振器やストリップ
ライン共振器の導体損失を小さくでき、高いQ値の共振
器を得ることができる。
According to a third aspect of the present invention, niobium oxide is converted into Nb 2 O 5 as an auxiliary component in an amount of 0.1 part by weight with respect to 100 parts by weight of the dielectric porcelain composition according to the first or second aspect. 3
A dielectric porcelain composition containing not more than 0 parts by weight (excluding 0 parts by weight). By containing niobium oxide, the crystal grains of the porcelain become finer, and the roughness of the surface of the sintered porcelain becomes Becomes smaller. Therefore, the conductor loss of a coaxial resonator or a stripline resonator in which an electrode of Ag, Cu or the like is formed directly on the surface of the dielectric ceramic can be reduced, and a resonator having a high Q value can be obtained.

【0012】請求項4に記載の発明は、請求項1,2及
び3のうちいずれか一つに記載の誘電体磁器組成物10
0重量部に対して、副成分としてCr、Mn、Fe、N
iから選ばれる一種以上の酸化物をCr23、Mn
2、Fe23、NiOに換算して、0.3重量部以下
(ただし0重量部を除く)の範囲で含有させた誘電体磁
器組成物であり、共振周波数の温度係数を若干正側へ調
整できる。このためQ値を低下させるCaTiO3含有
量を減らせるため高いQ値が得られる。また誘電特性の
焼成温度依存性の安定化効果も有しているので量産時の
特性が安定化する。
According to a fourth aspect of the present invention, there is provided the dielectric ceramic composition according to any one of the first, second and third aspects.
Cr, Mn, Fe, N
One or more oxides selected from i are Cr 2 O 3 , Mn
A dielectric ceramic composition containing 0.3 parts by weight or less (excluding 0 parts by weight) in terms of O 2 , Fe 2 O 3 , and NiO. Can be adjusted to the side. For this reason, a high Q value is obtained because the CaTiO 3 content, which lowers the Q value, can be reduced. In addition, it also has the effect of stabilizing the dielectric characteristics depending on the firing temperature, so that the characteristics during mass production are stabilized.

【0013】請求項5に記載の発明は、請求項1,2,
3及び4のうちいずれか一つに記載の誘電体磁器組成物
100重量部に対して、副成分としてアルミニウム酸化
物をAl23に換算して0.3重量部以下(ただし0重
量部を除く)の範囲で含有させた誘電体磁器組成物であ
り、磁器の結晶粒子が微細になると同時に粒界部のAl
固溶相が粒子間の結合を強化させて機械的強度が増すの
で熱衝撃、落下、共振器の周波数調整の研磨加工等に対
して高い信頼性を得ることができる。また微細な磁器表
面のため同軸共振器やストリップライン共振器等の導体
損失を低下でき、高いQ値の共振器を得ることができ
る。
[0013] The invention according to claim 5 is the invention according to claims 1, 2, and 3.
3 parts or 4 and 100 parts by weight of the dielectric porcelain composition described in any one of the above, aluminum oxide as an auxiliary component is not more than 0.3 parts by weight in terms of Al 2 O 3 (however, 0 parts by weight) Is a dielectric ceramic composition contained in the range of (A.
Since the solid solution phase strengthens the bond between the particles and increases the mechanical strength, high reliability can be obtained against thermal shock, dropping, polishing for adjusting the frequency of the resonator, and the like. In addition, due to the fine porcelain surface, conductor loss such as a coaxial resonator and a stripline resonator can be reduced, and a resonator having a high Q value can be obtained.

【0014】請求項6に記載の発明は、請求項1,2,
3,4及び5のうちいずれか一つに記載の誘電体磁器組
成物中に含まれる不純物として、NaをNa2Oに換算
して、前記誘電体磁器組成物100重量部中、0.03
重量部以下の範囲の含有量とする誘電体磁器組成物であ
り、不純物Naの含有量が限定した範囲内において優れ
た誘電特性が得られる。
The invention according to claim 6 is the invention according to claims 1, 2, and
As an impurity contained in the dielectric ceramic composition according to any one of 3, 4, and 5, Na is converted to Na 2 O, and the content is 0.03 in 100 parts by weight of the dielectric ceramic composition.
It is a dielectric porcelain composition having a content in the range of not more than parts by weight, and excellent dielectric properties can be obtained in a range where the content of the impurity Na is limited.

【0015】請求項7に記載の発明は、請求項1,2,
3,4及び5のうちいずれか一つに記載の誘電体磁器組
成物中に含まれる不純物として、KをK2Oに換算し
て、前記誘電体磁器組成物100重量部中、0.03重
量部以下の範囲の含有量とする誘電体磁器組成物であ
り、不純物Kの含有量が限定した範囲内において優れた
誘電特性が得られる。
The invention according to claim 7 is the invention according to claims 1, 2, and
As an impurity contained in the dielectric porcelain composition according to any one of 3, 4, and 5, K is converted into K 2 O, and 0.03 in 100 parts by weight of the dielectric porcelain composition. It is a dielectric porcelain composition having a content of not more than parts by weight, and excellent dielectric properties can be obtained within a range where the content of impurity K is limited.

【0016】請求項8に記載の発明は、請求項1,2,
3,4及び5のうちいずれか一つに記載の誘電体磁器組
成物を、MgTi25、CoTi25或いは(MgC
o)Ti25を出発原料として製造する誘電体磁器組成
物の製造方法であり、磁器の均質化が図られるので、高
いQ値と結晶粒子の微細化に効果があり、高いQ値の共
振器を得ることができる。
The invention described in claim 8 is the invention according to claims 1, 2, and
The dielectric porcelain composition described in any one of 3, 4 and 5 is prepared by using MgTi 2 O 5 , CoTi 2 O 5 or (MgC
o) This is a method for producing a dielectric porcelain composition produced using Ti 2 O 5 as a starting material. Since the porcelain is homogenized, it has an effect on a high Q value and finer crystal grains, and has a high Q value. A resonator can be obtained.

【0017】請求項9に記載の発明は、請求項8に記載
の出発原料の粒子径が1μm以下のものであり、磁器の
結晶粒子の微細化と均一化が図られるので磁器の表面粗
度が低下し、直接電極を形成する形態の共振器(例えば
同軸共振器やストリップライン共振器)の導体損失を低
下させ、高いQ値の共振器を得ることができる。
According to a ninth aspect of the present invention, the starting material according to the eighth aspect has a particle size of 1 μm or less, and the crystal grains of the porcelain can be made finer and more uniform. , The conductor loss of a resonator directly forming an electrode (for example, a coaxial resonator or a stripline resonator) is reduced, and a resonator having a high Q value can be obtained.

【0018】請求項10に記載の発明は、請求項1,
2,3,4及び5のうちいずれか一つに記載の誘電体磁
器組成物を酸素雰囲気中で焼成する誘電体磁器組成物の
製造方法であり、大型の共振器素子の内部、外部の特性
分布の均一化によって高い信頼性と高いQ値が得られる
効果がある。
The invention described in claim 10 is the first invention.
A method for producing a dielectric ceramic composition according to any one of 2, 3, 4, and 5, wherein the dielectric ceramic composition is fired in an oxygen atmosphere. Uniform distribution has the effect of obtaining high reliability and a high Q value.

【0019】請求項11に記載の発明は、請求項1,
2,3,4及び5のうちいずれか一つに記載の誘電体磁
器組成物を使用した誘電体共振器であり、高い誘電体の
Q値と微細な磁器表面を有しているので、金属製の空胴
容器内に素子を載置する
The invention described in claim 11 is the first invention.
A dielectric resonator using the dielectric ceramic composition described in any one of 2, 3, 4, and 5, which has a high dielectric Q value and a fine porcelain surface. The element in a hollow container made of

【0020】[0020]

【外2】 [Outside 2]

【0021】の共振を利用した共振器の場合や、磁器に
直接電極を形成する同軸共振器、ストリップライン共振
器の場合でも高いQ値が得られる。
A high Q value can be obtained even in the case of a resonator utilizing resonance, or in the case of a coaxial resonator or a stripline resonator in which electrodes are formed directly on porcelain.

【0022】請求項12に記載の発明は、請求項11記
載の誘電体共振器によって構成された誘電体フィルタで
あり、高いQ値の誘電体共振器を使用することによって
フィルタの挿入損失を小さくできる。
According to a twelfth aspect of the present invention, there is provided a dielectric filter including the dielectric resonator according to the eleventh aspect, wherein the insertion loss of the filter is reduced by using a dielectric resonator having a high Q value. it can.

【0023】[0023]

【実施例】【Example】

(実施例1)以下、本発明の第1の実施例について詳細
に説明する。
Embodiment 1 Hereinafter, a first embodiment of the present invention will be described in detail.

【0024】出発原料には化学的に高純度で粒子径が1
μm以下のMgO、CaO、MgTi25、CoTi2
5、TiO2、Nb25、Cr23、MnO2、Fe2
3、NiO及びAl23粉末を所定の組成比になるよう
に秤量し、これらの粉末をポリエチレン製のボールミル
に入れ、安定化ジルコニア製の玉石及びエタノールを加
え約20時間湿式混合した。ここで使用する出発原料の
粒子径が1μmより大きい場合、最終焼結体磁器の結晶
粒子径が大きくなったり、異常粒成長したりするので同
軸共振器やストリップラインの導体損失が増して共振器
のQ値が低くなる問題が生じる。このため粒子径が1μ
m以下の出発原料の使用は必須である。そして湿式混合
後、乾燥し、この乾燥粉末を高アルミナ質のルツボに入
れ、空気中で800〜1100℃にて2時間仮焼した。
次に、この仮焼粉末を、混合時と同じボールミルにエタ
ノールとともに入れ、約20時間の湿式粉砕後、乾燥し
た。次に、この粉砕粉末に、有機バインダーを加え、均
質に混合した後32メッシュのふるいを通して整粒し、
金型と油圧プレスを用いて成形圧力2ton/cm2
直径17mm、厚み6〜8mmに成形した。次いで、成
形体をアルミナ質のサヤに入れ、空気中にて1200〜
1400℃の焼成温度で2〜50時間焼成し、(表1)
の試料番号1〜31に示す組成の誘電体磁器を得た。
The starting material is chemically pure and has a particle size of 1
μm or less of MgO, CaO, MgTi 2 O 5 , CoTi 2
O 5, TiO 2, Nb 2 O 5, Cr 2 O 3, MnO 2, Fe 2 O
3 , NiO and Al 2 O 3 powders were weighed so as to have a predetermined composition ratio, and these powders were put into a polyethylene ball mill, and stabilized zirconia balls and ethanol were added and wet-mixed for about 20 hours. If the particle size of the starting material used here is larger than 1 μm, the crystal grain size of the final sintered ceramic becomes large, or abnormal grain growth occurs, so that the conductor loss of the coaxial resonator or strip line increases and the resonator becomes The problem arises that the Q value of is low. Therefore, the particle size is 1μ
The use of starting materials less than m is essential. After wet mixing, the mixture was dried, and the dried powder was placed in a high alumina crucible and calcined in air at 800 to 1100 ° C. for 2 hours.
Next, this calcined powder was put together with ethanol in the same ball mill as at the time of mixing, wet-pulverized for about 20 hours, and then dried. Next, an organic binder was added to the pulverized powder, mixed homogeneously, and sieved through a 32 mesh sieve.
Using a mold and a hydraulic press, molding was performed at a molding pressure of 2 ton / cm 2 to a diameter of 17 mm and a thickness of 6 to 8 mm. Next, the molded body was put in an alumina sheath, and in the air at 1200 to 1200 m.
Baking at a baking temperature of 1400 ° C. for 2 to 50 hours, (Table 1)
Was obtained.

【0025】[0025]

【表1】 [Table 1]

【0026】この実施例で示す試料の特性は、空気中で
焼成した時の特性であるが、酸素雰囲気中で焼成した場
合は特にQ値が空気中焼成に比較して約20%向上する
効果を有している。そして本発明の磁器組成物は酸素雰
囲気中で焼成する事によって、磁器の均質な焼結化が図
られて高い信頼性が得られると同時に高いQ値の共振器
が得られる。次に、得られた焼結体について両面を研磨
し、マイクロ波での誘電特性を測定した。測定は、誘電
体共振器法によって行い、誘電率(εr)、Q・f積、
共振周波数の温度係数τf(ppm/℃)を算出した。
誘電率及びQ値の測定において、共振周波数は5.0〜
6.5GHzであった。共振周波数の温度係数(τf
は−25〜85℃の範囲で測定した。
The characteristics of the sample shown in this example are the characteristics when fired in air, and when fired in an oxygen atmosphere, the Q value is particularly improved by about 20% as compared with the air fired. have. By firing the porcelain composition of the present invention in an oxygen atmosphere, homogeneous sintering of the porcelain can be achieved, high reliability can be obtained, and a resonator having a high Q value can be obtained. Next, both sides of the obtained sintered body were polished, and the dielectric characteristics in a microwave were measured. The measurement is performed by the dielectric resonator method, and the dielectric constant (ε r ), the Q · f product,
The temperature coefficient τ f (ppm / ° C.) of the resonance frequency was calculated.
In the measurement of the dielectric constant and the Q value, the resonance frequency is 5.0 to 5.0.
It was 6.5 GHz. Temperature coefficient of resonance frequency (τ f )
Was measured in the range of −25 to 85 ° C.

【0027】上記測定結果を1〜31の試料番号別に
(表1)に示す。(表1)において、*印を付したもの
は本発明の請求の範囲外の比較例である。
The above measurement results are shown in Table 1 for each sample number of 1 to 31. In Table 1, those marked with * are comparative examples outside the scope of the claims of the present invention.

【0028】本発明の誘電体磁器組成物の組成範囲を限
定した理由を(表1)と(図1)を参照しながら説明す
る。
The reasons for limiting the composition range of the dielectric ceramic composition of the present invention will be described with reference to (Table 1) and (FIG. 1).

【0029】(表1)と(図1)から明らかなように、
CaOのモル比(y)が0.09より多い場合の(領域
A)は、Q値が低下したり共振周波数の温度係数
(τf)が正側へ大きくなり実用的でなくなる。そして
CaOのモル比(y)が0.05より少ない(領域C)
は共振周波数の温度係数(τf)が負側へ大きくなる。
また、CoOのモル比(z)が0.04より多い場合の
(領域B)はQ値が低下するので本発明の範囲から除外
した。そして(MgCaCo)nOとTiO2の比の
(n)を1.0より小さくすると、Q値の向上と温度特
性を正側へとシフトさせる効果があるのでQ値を低下さ
せるCaOの含有量を減らすことができる。しかし、
(n)が0.85より小さい場合はQ値の低下を招くの
で(n)の範囲は限られる。これらの高いQ値と小さい
温度特性の試料をX線回折で分析した結果、共振周波数
の温度係数が正に大きいCoTi25(Mgも固溶)相
の生成による効果であることがわかった。つまり温度係
数が正に大きいCoTi25(Mgも固溶)相を温度特
性の調整に利用することでCaTiO3だけで調整した
場合よりも同じ温度係数で比較すると高いQ値が得られ
る。尚、このとき他にMgTiO 3、CaTiO3が生成
していた。したがって本実施例のようにMg、Coソー
スをMgTi25、CoTi25を出発原料に使用する
ことによって、高いQ値と小さい温度係数の両立に必須
の結晶相であるCoTi25(Mgも固溶)を均質かつ
安定に生成させることが可能になる。そして(n)が1
以上のときはCoTi25相が生成せずMgTiO3
CaTiO3の混相(Coを固溶)になり、温度特性の
改善効果がなくQ値も低いものになる。また(n)が
0.85より小さい場合はQ値が低下したり温度特性が
悪化するので本発明の範囲から除外した。このようにし
て主成分の組成範囲が限定されるのである。次に副成分
の添加効果の説明をする。Nb25の添加は、磁器の結
晶粒子径の微細化に効果がある。無添加のとき7〜10
μmの結晶粒子径がNb添加によって3〜6μmの結晶
粒子径で均一に焼結できるようになる。磁器に直接Ag
やCu電極を形成する同軸共振器やストリップライン共
振器の場合は電極による導体損失が大きい。これを低損
失にするには磁器表面の粗度を低下させて電極の表面抵
抗を小さくする必要がある。Nb添加による磁器表面の
結晶粒子径の微細化は導体損失を小さくできるので誘電
体磁器の高いQ値を引き出せ高いQ値(低損失)の共振
器が得られる。しかし過剰に添加するとQ値の低下を招
くので、その添加量は0.3重量部以下に限られる。ま
た、Cr23、MnO2、Fe23、NiOを添加した
場合、共振周波数の温度係数(τf)は、若干正に変化
する傾向がある。これを利用することで微妙な温度特性
の調整も可能であるし、Q値を低下させるCaO含有量
(τfの正側への調整成分)を若干減らせるので高いQ
値が得られる効果もある。しかし副成分の添加量が0.
30重量%より増加させるとf・Q積を低下させるので
本発明の範囲から除外した。そしてAl23の添加は磁
器の微細化と機械的強度を向上させる効果がある。磁器
の微細化による効果についてはNbと同じ効果が得られ
る。一方、機械的強度についてはAl23の高強度によ
って、粒界部の主成分とAlとの固溶相が微細な結晶粒
子間の結合力を強化させるので機械的強度が向上する。
例えば、Al無添加の場合は約1.2〜1.5t/cm
2の抗折強度であるが、Alを添加した場合1.8〜
2.2t/cm2の高い強度が得られるようになる。従
って、共振器の熱衝撃、落下等に対する信頼性が向上す
る。また製造工程での周波数調整等の素子の研磨や加工
などでの素子の欠けや割れを防ぐ効果もある。しかし、
その添加量を0.30重量部より増加させるとQ値を低
下させるので本発明の範囲から除外した。このようにし
て本発明の組成範囲と副成分とその添加量が限定される
のである。以上より本発明の実施例の中には、例えばε
rが21、Q・f積が71430で共振周波数の温度係
数(τf)が+2.5ppm/℃の優れたマイクロ波誘
電特性を有する組成がある(試料5)。
As is clear from Table 1 and FIG.
When the molar ratio (y) of CaO is more than 0.09 (region
A) is the temperature coefficient of the resonance frequency
f) Increases to the positive side and becomes impractical. And
The molar ratio (y) of CaO is less than 0.05 (region C)
Is the temperature coefficient of the resonance frequency (τf) Increases to the negative side.
Further, when the molar ratio (z) of CoO is more than 0.04,
(Region B) is excluded from the scope of the present invention because the Q value decreases.
did. And (MgCaCo)nO and TiOTwoOf the ratio
When (n) is smaller than 1.0, the improvement of the Q value and the temperature characteristics are improved.
Has the effect of shifting the characteristic to the positive side,
The content of CaO to be added can be reduced. But,
If (n) is smaller than 0.85, the Q value will decrease.
And the range of (n) is limited. These high Q values and small
As a result of analyzing the sample with temperature characteristics by X-ray diffraction, the resonance frequency
CoTi whose temperature coefficient isTwoOFive(Mg also dissolved) phase
It was found that the effect was due to generation of. In other words, the temperature
CoTi with a very large numberTwoOFive(Mg is also a solid solution)
CaTiO is used to adjust the propertiesThreeJust adjusted
Higher Q value can be obtained by comparing with the same temperature coefficient than the case
You. At this time, other than MgTiO Three, CaTiOThreeIs generated
Was. Therefore, as in the present embodiment, Mg, Co saw
To MgTiTwoOFive, CoTiTwoOFiveUse as starting material
Indispensable for both high Q value and small temperature coefficient
CoTi, the crystalline phase ofTwoOFive(Mg is also a solid solution)
It is possible to generate it stably. And (n) is 1
Above is CoTiTwoOFiveNo phase is formed and MgTiOThree,
CaTiOThreeIn a mixed phase (solid solution of Co)
There is no improvement effect and the Q value is low. (N)
If the value is smaller than 0.85, the Q value decreases and the temperature characteristic decreases.
Since it deteriorated, it was excluded from the scope of the present invention. Like this
This limits the composition range of the main component. Next, the subcomponent
The effect of adding is described. NbTwoOFiveAddition of porcelain
It is effective in reducing the crystal grain size. 7 to 10 when not added
Crystal having a crystal particle diameter of 3 to 6 μm by adding Nb
Sintering can be performed uniformly with the particle size. Ag directly on porcelain
Coaxial resonators and strip lines forming Cu and Cu electrodes
In the case of a vibrator, conductor loss due to electrodes is large. This is low loss
To reduce the surface roughness of the electrodes, reduce the roughness of the porcelain surface.
It is necessary to reduce the resistance. Nb addition of porcelain surface
Diminishing the crystal grain size can reduce conductor loss, so dielectric
High Q value of body porcelain and high Q value (low loss) resonance
A vessel is obtained. However, excessive addition causes a decrease in the Q value.
Therefore, the amount of addition is limited to 0.3 parts by weight or less. Ma
CrTwoOThree, MnOTwo, FeTwoOThree, NiO added
In this case, the temperature coefficient of the resonance frequency (τf) Changes slightly positive
Tend to. Subtle temperature characteristics by using this
Can be adjusted, and the CaO content that lowers the Q value
fHigh Q because the positive component of the
There is also an effect that a value can be obtained. However, the additive amount of the subcomponent is 0.
If it exceeds 30% by weight, the fQ product will decrease.
It was excluded from the scope of the present invention. And AlTwoOThreeAddition of magnetic
This has the effect of miniaturizing the vessel and improving the mechanical strength. porcelain
The same effect as Nb can be obtained for the effect of miniaturization of
You. On the other hand, regarding mechanical strength, AlTwoOThreeDue to the high strength of
Therefore, the solid solution phase of the main component of the grain boundary and Al is fine crystal grains.
Since the bonding force between the children is strengthened, the mechanical strength is improved.
For example, when Al is not added, about 1.2 to 1.5 t / cm
TwoFlexural strength of 1.8 to 1.8 when Al is added.
2.2t / cmTwoHigh strength can be obtained. Obedience
The reliability of the resonator against thermal shock,
You. Polishing and processing of elements such as frequency adjustment in the manufacturing process
Also, there is an effect of preventing chipping or cracking of the element due to the above. But,
When the amount added is more than 0.30 parts by weight, the Q value decreases.
It was excluded from the scope of the present invention. Like this
Therefore, the composition range of the present invention, the subcomponents and the amount added are limited.
It is. From the above, some examples of the present invention include, for example, ε
rIs 21, the Q · f product is 71430, and the temperature
Number (τf) Is +2.5 ppm / ° C excellent microwave induction
There is a composition having electrical characteristics (Sample 5).

【0030】(実施例2)以下、本発明の第2の実施例
について詳細に説明する。
(Embodiment 2) Hereinafter, a second embodiment of the present invention will be described in detail.

【0031】実施例1の試料5の組成を、同じく配合、
混合、仮焼、粉砕、整粒した後、外形35mm、内径
7.6mmで高さが22mmの円筒形状に1〜2t/c
2の成形圧力で成形した。その後、空気中及び酸素雰
囲気中で1200〜1400℃の温度において2〜50
時間焼成を行った。そしてAgメッキしたキャビティ内
のアルミナ支持台上に試料を置き
The composition of Sample 5 of Example 1 was similarly blended,
After mixing, calcining, pulverizing, and sizing, 1-2 t / c into a cylindrical shape having an outer diameter of 35 mm, an inner diameter of 7.6 mm, and a height of 22 mm.
Molding was performed at a molding pressure of m 2 . Then, at a temperature of 1200 to 1400 ° C. in air and an oxygen atmosphere, 2 to 50
The firing was performed for a time. Then place the sample on the alumina support in the Ag-plated cavity

【0032】[0032]

【外3】 [Outside 3]

【0033】の共振周波数とQ値の測定を行った。また
アルキメデス法で磁器密度の測定も行った。
The resonance frequency and Q value were measured. The porcelain density was also measured by the Archimedes method.

【0034】その結果を32〜33の試料番号別に(表
2)に示す。
The results are shown in Table 2 for each sample number of 32-33.

【0035】[0035]

【表2】 [Table 2]

【0036】この(表2)から明らかなように、酸素雰
囲気中で焼成した実施例の試料のQ・f積が比較例より
も約20%程高いことがわかる。また共振周波数が実施
例のほうが低い。これは試料の磁器密度が大きいために
誘電率が高くなった結果であるが、酸素雰囲気中で焼成
すると素子内部まで均一に焼結できるからである。大気
中で焼成した比較例の試料は素子の内外部で磁器の密度
が異なり、特に内部はポーラスになっている。大型素子
の主な用途である基地局フィルタには高い信頼性が要求
されるが、素子が不均質の場合は信頼性(熱衝撃、耐湿
性等)が低下するので均質な高い信頼性の素子が求めら
れる。
As is evident from Table 2, the Q.f product of the sample fired in the oxygen atmosphere is about 20% higher than that of the comparative example. Also, the embodiment has a lower resonance frequency. This is a result of an increase in the dielectric constant due to the high density of the porcelain of the sample. However, firing in an oxygen atmosphere enables uniform sintering even inside the element. In the sample of the comparative example fired in the air, the density of the porcelain differs between the inside and outside of the element, and the inside is particularly porous. High reliability is required for base station filters, which are the main applications of large-sized elements. However, if the elements are not uniform, the reliability (thermal shock, moisture resistance, etc.) will be reduced, so a uniform and highly reliable element will be required. Is required.

【0037】以上より酸素雰囲気中で大型素子を焼成す
ることによって高い信頼性の高いQ値の共振器を提供で
きる。
As described above, by firing a large-sized element in an oxygen atmosphere, a resonator having a highly reliable Q value can be provided.

【0038】(実施例3)以下、本発明の第3の実施例
について詳細に説明する。
(Embodiment 3) Hereinafter, a third embodiment of the present invention will be described in detail.

【0039】出発原料には化学的に高純度なもの(純度
99.99%以上)と工業用の原料(純度98.0〜9
9.9%)を使用し、MgO、CaO、MgTi25
CoTi25、TiO2粉末を所定の組成比になるよう
に秤量し、次に、実施例1と同様にして、焼結体を作成
し、マイクロ波誘電特性を評価した。そして各々の焼結
体に含まれる不純物の含有量を蛍光X線分析を行い、予
め組成及びNa2O、K2Oの含有量の判明している試料
を標準試料として磁器の組成と不純物含有量を求めた。
各試料の誘電特性と磁器中の不純物であるNa2O、K2
Oの含有量を(表3)に示す。
As starting materials, those having high chemical purity (purity 99.99% or more) and industrial materials (purity 98.0-9)
9.9%) using MgO, CaO, MgTi 2 O 5 ,
CoTi 2 O 5 and TiO 2 powder were weighed so as to have a predetermined composition ratio, and then a sintered body was prepared in the same manner as in Example 1, and the microwave dielectric properties were evaluated. The content of impurities contained in each sintered body was analyzed by fluorescent X-ray analysis, and the composition of ceramics and the content of impurities were determined using a sample whose composition and Na 2 O and K 2 O contents were known in advance as a standard sample. The amount was determined.
Dielectric properties of each sample and impurities Na 2 O and K 2 in porcelain
The content of O is shown in (Table 3).

【0040】[0040]

【表3】 [Table 3]

【0041】(表3)より明らかなように、我々は出発
原料の中に含まれる極微量の不純物であるNa2O、K2
Oの含有量が最終焼結体磁器の誘電特性へ多大な影響を
与えていることを突き止めた。Na2O及びK2Oの含有
量が0.03重量部より多くなると、f・Q積が急激に
低下してしまう。また誘電率と温度特性にも変化を与え
る。更に、焼結体磁器に異常粒成長を招き磁器強度も低
下してしまう。特に基地局フィルタへの応用の場合は低
損失もさることながら素子の発熱や耐環境性等高い信頼
性が求められる。従って、特に磁器中のNa2O及びK2
Oの含有量を0.03重量部以下になるように出発原料
の使用や誘電体磁器の製造工程のなかで使用される純
水、分散剤及びバインダー等についてNa、Kを含まな
い、或いは本発明の範囲内の不純物含有量にすることに
よって高いf・Q積と高信頼性を得ることができる。以
上のように本発明の範囲内にNa、Kの含有量を管理し
た出発原料及び製造工程を採用することにより、従来、
出発原料の原料ロットや製造工程に敏感であったり不安
定であった高いQ値と高い信頼性を有する誘電体磁器の
誘電特性を再現性よく安定化できる。
As is clear from Table 3, we have trace amounts of impurities such as Na 2 O and K 2 contained in the starting materials.
It has been found that the content of O has a great influence on the dielectric properties of the final sintered ceramic. When the contents of Na 2 O and K 2 O are more than 0.03 parts by weight, the f · Q product sharply decreases. It also changes the dielectric constant and temperature characteristics. Further, abnormal grain growth occurs in the sintered ceramics, and the strength of the ceramics also decreases. In particular, in the case of application to a base station filter, high reliability such as heat generation and environmental resistance of the element is required as well as low loss. Therefore, in particular, Na 2 O and K 2 in porcelain
The pure water, the dispersant, the binder, and the like used in the use of the starting materials and in the production process of the dielectric porcelain do not contain Na or K so that the content of O is 0.03 parts by weight or less. By setting the impurity content within the range of the invention, a high fQ product and high reliability can be obtained. As described above, by adopting the starting material and the production process in which the contents of Na and K are controlled within the scope of the present invention,
Dielectric characteristics of a dielectric ceramic having a high Q value and a high reliability, which were sensitive or unstable to a raw material lot or a manufacturing process of a starting material, can be stabilized with good reproducibility.

【0042】[0042]

【発明の効果】以上のように本発明は、一般式として
(MgxCayCoznO−TiO2(ただし、x+y+
z=1.0)で表され、x、y、z及びnはモル比を表
し、 0.87≦x<0.95 0.05≦y≦0.09 0<z≦0.04 0.85≦n<1.00 の範囲にある誘電体磁器組成物であり、Mg及びCaの
一部をCoで置換すると同時に限定した(MgCaC
o)OとTiO2のモル比にすることで従来材料の欠点
であったQ値の低下を防止して高いQ値と小さい温度係
数を両立できる。また主成分の組成比によって、高いQ
値を維持しつつ誘電率と共振周波数の温度係数を調整で
きる。
The present invention as described above, according to the present invention is, as a general formula (Mg x Ca y Co z) n O-TiO 2 ( provided that, x + y +
z = 1.0), x, y, z, and n represent a molar ratio, and 0.87 ≦ x <0.95 0.05 ≦ y ≦ 0.090 0 <z ≦ 0.040. A dielectric ceramic composition in the range of 85 ≦ n <1.00, in which a part of Mg and Ca is replaced with Co and limited at the same time (MgCaC
o) By setting the molar ratio of O to TiO 2 , a decrease in the Q value, which is a disadvantage of the conventional material, can be prevented, and both a high Q value and a small temperature coefficient can be achieved. Also, due to the composition ratio of the main component, a high Q
The temperature coefficient of the dielectric constant and the resonance frequency can be adjusted while maintaining the values.

【0043】さらに誘電体磁器の表面は微細な結晶粒子
により構成されているので、この誘電体磁器組成物を用
いて例えば素子に直接電極を形成させる同軸誘電体共振
器を形成した際電極部の導体損失を小さくできるため共
振器のQ値を高くすることができる。また素体と電極と
の接着強度を大きくできるので高信頼性の誘電体共振器
を得ることができる。
Further, since the surface of the dielectric porcelain is composed of fine crystal grains, for example, when a coaxial dielectric resonator for directly forming an electrode on an element is formed using this dielectric porcelain composition, the electrode portion is formed. Since the conductor loss can be reduced, the Q value of the resonator can be increased. Further, since the bonding strength between the element body and the electrode can be increased, a highly reliable dielectric resonator can be obtained.

【0044】その上、本発明の誘電体磁器組成物を用い
たマイクロ波用誘電体共振器及び温度補償用磁器コンデ
ンサは、通信機器、電気機器の小型化及び高性能化に寄
与するところが大であり工業的利用価値が大きいもので
ある。
In addition, the microwave dielectric resonator and the temperature compensating ceramic capacitor using the dielectric ceramic composition of the present invention greatly contribute to miniaturization and high performance of communication equipment and electric equipment. There is a large industrial use value.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の誘電体磁器組成物の主成分の組成範囲
を示す図
FIG. 1 is a view showing a composition range of a main component of a dielectric ceramic composition of the present invention.

Claims (12)

【特許請求の範囲】[Claims] 【請求項1】 一般式として(MgxCayCoznO−
TiO2(ただし、x+y+z=1.0)で表され、
x、y、z及びnはモル比を表し、 0.87≦x<0.95 0.05≦y≦0.09 0<z≦0.04 0.85≦n<1.00 の範囲にある誘電体磁器組成物。
1. A as a general formula (Mg x Ca y Co z) n O-
TiO 2 (where x + y + z = 1.0)
x, y, z and n represent a molar ratio, and in the range of 0.87 ≦ x <0.95 0.05 ≦ y ≦ 0.090 0 <z ≦ 0.04 0.85 ≦ n <1.00 Certain dielectric porcelain compositions.
【請求項2】 請求項1に記載の誘電体磁器組成物が、
MgTi25、CoTi25或いはこれらが固溶した
(MgCo)Ti25相と、MgTiO3相及びCaT
iO3相或いはこれらが固溶した(MgCa)TiO3
から成る誘電体磁器組成物。
2. The dielectric ceramic composition according to claim 1,
MgTi 2 O 5 , CoTi 2 O 5 or (MgCo) Ti 2 O 5 phase in which these are dissolved, MgTiO 3 phase and CaT
A dielectric ceramic composition comprising an TiO 3 phase or a (MgCa) TiO 3 phase in which these are dissolved.
【請求項3】 請求項1または2に記載の誘電体磁器組
成物100重量部に対して、ニオブ酸化物をNb25
換算して、0.3重量部以下(ただし0重量部を除く)
の範囲で含有させた誘電体磁器組成物。
3. Niobium oxide is converted to Nb 2 O 5 in an amount of 0.3 parts by weight or less (provided that 0 parts by weight is used) based on 100 parts by weight of the dielectric porcelain composition according to claim 1 or 2. except)
The dielectric ceramic composition contained in the range of.
【請求項4】 請求項1,2及び3のうちいずれか一つ
に記載の誘電体磁器組成物100重量部に対してCr、
Mn、Fe、Niから選ばれる一種以上の酸化物をCr
23、MnO2、Fe23、NiOに換算して0.3重
量部以下(ただし0重量部を除く)の範囲で含有させた
誘電体磁器組成物。
4. The composition according to claim 1, wherein 100 parts by weight of the dielectric porcelain composition is Cr,
One or more oxides selected from Mn, Fe and Ni are Cr
A dielectric ceramic composition containing not more than 0.3 parts by weight (excluding 0 parts by weight) in terms of 2 O 3 , MnO 2 , Fe 2 O 3 , and NiO.
【請求項5】 請求項1,2,3及び4のうちいずれか
一つに記載の誘電体磁器組成物100重量部に対してA
23に換算して0.3重量部以下(ただし0重量部を
除く)の範囲で含有させた誘電体磁器組成物。
5. The dielectric ceramic composition according to claim 1, 2, 3, or 4, wherein A is 100 parts by weight.
A dielectric ceramic composition contained in a range of 0.3 parts by weight or less (excluding 0 parts by weight) in terms of l 2 O 3 .
【請求項6】 請求項1,2,3,4及び5のうちいず
れか一つに記載の誘電体磁器組成物中に含まれる不純物
として、NaをNa2Oに換算して、前記誘電体磁器組
成物100重量部中、0.03重量部以下の範囲の含有
量とする誘電体磁器組成物。
6. The dielectric material according to claim 1, wherein Na is converted to Na 2 O as an impurity contained in the dielectric porcelain composition according to any one of claims 1, 2, 3, 4, and 5. A dielectric porcelain composition having a content of 0.03 parts by weight or less based on 100 parts by weight of the porcelain composition.
【請求項7】 請求項1,2,3,4及び5のうちいず
れか一つに記載の誘電体磁器組成物中に含まれる不純物
として、KをK2Oに換算して、前記誘電体磁器組成物
100重量部中、0.03重量部以下の範囲の含有量と
する誘電体磁器組成物。
7. The dielectric material according to claim 1, wherein K is converted to K 2 O as an impurity contained in the dielectric porcelain composition according to any one of claims 1, 2, 3, 4, and 5. A dielectric porcelain composition having a content of 0.03 parts by weight or less based on 100 parts by weight of the porcelain composition.
【請求項8】 請求項1,2,3,4及び5のうちいず
れか一つに記載の誘電体磁器組成物を、MgTi25
CoTi25或いは(MgCo)Ti25を出発原料と
して製造する誘電体磁器組成物の製造方法。
8. The dielectric porcelain composition according to claim 1, wherein the composition is MgTi 2 O 5 ,
A method for producing a dielectric ceramic composition using CoTi 2 O 5 or (MgCo) Ti 2 O 5 as a starting material.
【請求項9】 請求項8記載の出発原料の粒径が1μm
以下のものを使用する誘電体磁器組成物の製造方法。
9. The starting material according to claim 8, which has a particle size of 1 μm.
A method for producing a dielectric porcelain composition using:
【請求項10】 請求項1,2,3,4及び5のうちい
ずれか一つに記載の誘電体磁器組成物を酸素雰囲気中で
焼成する誘電体磁器組成物の製造方法。
10. A method for producing a dielectric ceramic composition according to claim 1, wherein the dielectric ceramic composition is fired in an oxygen atmosphere.
【請求項11】 請求項1,2,3,4及び5のうちい
ずれか一つに記載の誘電体磁器組成物を使用した誘電体
共振器。
11. A dielectric resonator using the dielectric porcelain composition according to any one of claims 1, 2, 3, 4 and 5.
【請求項12】 請求項11記載の誘電体共振器によっ
て構成された誘電体フィルタ。
12. A dielectric filter comprising the dielectric resonator according to claim 11.
JP12925597A 1997-05-20 1997-05-20 Dielectric ceramic composition, method of manufacturing the same, dielectric resonator and dielectric filter using the same Expired - Fee Related JP3376855B2 (en)

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CN111470861A (en) * 2020-04-22 2020-07-31 吴坚强 Microwave dielectric ceramic material and method for preparing microwave ceramic filter device by using same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005187218A (en) * 2003-12-24 2005-07-14 Kyocera Corp Dielectric porcelain, laminated electronic component, and production method for laminated electronic component
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