JPH10321828A - 固体撮像素子の製造方法 - Google Patents

固体撮像素子の製造方法

Info

Publication number
JPH10321828A
JPH10321828A JP9129229A JP12922997A JPH10321828A JP H10321828 A JPH10321828 A JP H10321828A JP 9129229 A JP9129229 A JP 9129229A JP 12922997 A JP12922997 A JP 12922997A JP H10321828 A JPH10321828 A JP H10321828A
Authority
JP
Japan
Prior art keywords
film
pad electrode
imaging device
solid
state imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP9129229A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10321828A5 (https=
Inventor
Koji Matsuzaki
康二 松崎
Toshirou Kurusu
敏郎 久留巣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9129229A priority Critical patent/JPH10321828A/ja
Publication of JPH10321828A publication Critical patent/JPH10321828A/ja
Publication of JPH10321828A5 publication Critical patent/JPH10321828A5/ja
Abandoned legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9129229A 1997-05-20 1997-05-20 固体撮像素子の製造方法 Abandoned JPH10321828A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9129229A JPH10321828A (ja) 1997-05-20 1997-05-20 固体撮像素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9129229A JPH10321828A (ja) 1997-05-20 1997-05-20 固体撮像素子の製造方法

Publications (2)

Publication Number Publication Date
JPH10321828A true JPH10321828A (ja) 1998-12-04
JPH10321828A5 JPH10321828A5 (https=) 2004-11-04

Family

ID=15004363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9129229A Abandoned JPH10321828A (ja) 1997-05-20 1997-05-20 固体撮像素子の製造方法

Country Status (1)

Country Link
JP (1) JPH10321828A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040095971A (ko) * 2003-04-29 2004-11-16 매그나칩 반도체 유한회사 씨모스 이미지센서
KR100587591B1 (ko) * 1999-09-06 2006-06-08 매그나칩 반도체 유한회사 고체촬상소자의 패드 개구부 형성방법
KR100649018B1 (ko) * 2004-06-22 2006-11-24 동부일렉트로닉스 주식회사 이미지 센서의 금속패드 산화 방지 방법
US7534642B2 (en) 2004-12-23 2009-05-19 Samsung Electronics Co., Ltd. Methods of manufacturing an image device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100587591B1 (ko) * 1999-09-06 2006-06-08 매그나칩 반도체 유한회사 고체촬상소자의 패드 개구부 형성방법
KR20040095971A (ko) * 2003-04-29 2004-11-16 매그나칩 반도체 유한회사 씨모스 이미지센서
KR100649018B1 (ko) * 2004-06-22 2006-11-24 동부일렉트로닉스 주식회사 이미지 센서의 금속패드 산화 방지 방법
US7534642B2 (en) 2004-12-23 2009-05-19 Samsung Electronics Co., Ltd. Methods of manufacturing an image device

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