JPH10315104A - Multi-head polishing device for glass plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a multi-head polishing device which can polish glass efficiently to a high precision flat surface with no unevenness in polishing and no polishing streaks. SOLUTION: This device comprises a rotary bottom surface plate 1 having a polishing surface 1a on the top, a rotary disc 2 mounted coaxially with the rotary shaft 0 of the bottom surface plate 1 above the bottom surface plate 1 and having support arms 2a at equal intervals on the circumference thereof, oscillating arms 3 mounted on the tips of the support arms such that they can be oscillated on the bottom surface plate 1 in the radial direction of the bottom surface plate 1, glass holding parts 4 for holding a plate glass 6 and pressing it on the polishing surface 1a of the bottom surface plate 1, and cams 5 arranged coaxially with the rotary disc 2 and oscillating the tips of the oscillating arms 3 in the radial direction of the bottom surface plate 1 via cam-driven rollers 3c while the rotary disc 2 is rotating.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is intended to polish a flat glass plate used for a glass plate for a plasma display, a glass substrate for a liquid crystal, or a plate glass for various electronic parts requiring a strict surface flatness to a highly accurate flat surface. The present invention relates to a plate glass multi-head polishing apparatus.

[0002]

2. Description of the Related Art In general, a formed glass sheet has fine irregularities on its surface, and requires polishing in order to be applied to the above-mentioned applications. Conventionally, as a multi-head polishing machine,
As shown in FIG. 3, a lower surface plate 10 having a polishing surface 10a on the upper surface and rotating, and a support arm provided above the lower surface plate 10 concentrically with the rotation center axis of the lower surface plate 10 and at circumferentially equidistant positions. And a glass holding member 13 rotatably supported at the tip of each support arm 11. Each glass holding member 13 holds a sheet glass 14,
The lower platen 1 is rotated while rotating each plate glass 14.
An apparatus is known in which a plurality of glass sheets are simultaneously polished by pressing the glass plate 14 against the polishing surface 10a of the base plate 10 and rotating the plate glass 14 at the tip of the support arm 11 by contact frictional force generated by the rotation of the lower platen 10.

[0003]

However, in the conventional multi-head polishing apparatus, the peripheral portion of the plate glass having a large peripheral speed due to the driven rotation is polished while drawing a spiral orbit, while the peripheral speed is substantially reduced. The central part of the sheet glass, which is zero in general, is polished while drawing the orbit of a single circle, in other words, constantly passing on the same circumference, so that the peripheral part and the central part of the sheet glass are greatly polished A difference in the amount occurs, and the amount of polishing at the central portion is smaller than that at the peripheral portion. As a result, there is a problem that polishing unevenness of the plate glass occurs. Also, on the polished surface on the upper surface of the lower platen, uneven wear occurs in a region where the central portion of the sheet glass passes, which is smaller than that in a region where the peripheral portion of the sheet glass passes. Polishing striations were formed on the plate glass to be polished by contact with the polished surface of abrasion, and it was not possible to obtain a plate glass having a uniform, highly accurate flat surface.

SUMMARY OF THE INVENTION An object of the present invention is to provide a multi-head type polishing apparatus for a flat glass capable of efficiently polishing a highly accurate flat surface without polishing unevenness and polishing streaks.

[0005]

In order to achieve the above object, the present invention provides a rotating lower platen having a polished surface on an upper surface thereof, and a concentrically provided rotation center axis of the lower platen above the lower platen; A turning table having supporting arms at circumferentially equidistant positions; a swinging arm supported at the tip of each supporting arm so as to be able to swing in and out of the lower platen substantially in the radial direction on the lower platen; A glass holding member that is rotatably supported at the tip and holds the plate glass and presses against the polishing surface of the lower surface plate, and is installed concentrically with the revolving disk,
A swinging cam for swinging the tip of the swinging arm in and out of the lower platen substantially in the radial direction via a cam driven roller during the turning operation of the turning plate. Is provided.

Since the apparatus of the present invention has the above-mentioned structure, the plate glass is held by each glass holding member, and the revolving plate is turned to press the plate glass against the polishing surface of the lower plate while revolving the plate glass. The plate glass is driven to rotate (rotate) at the tip of the support arm by the contact friction force, and, during the turning operation of the turning table, the sheet glass is moved by the swing applying cam through the cam driven roller and the swing arm to the approximate diameter of the lower platen. By swinging in and out of the direction, a plurality of glass sheets can be polished at the same time, thereby eliminating the difference in the amount of polishing between the peripheral part and the central part of the glass sheet, and causing uneven wear on the polishing surface of the lower platen There is no polishing unevenness and polishing streaks,
A highly accurate flat surface can be efficiently polished.

[0007]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a schematic plan view of an apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic longitudinal sectional side view thereof, wherein 1 is a lower platen, 2 is a turning table, 3 is a swing arm, 4 is a glass holding member, and 5 is a glass holding member. The swing imparting cam 6 indicates a sheet glass.

The lower platen 1 has a polished surface 1a on the upper surface, is rotatably supported at a fixed position by a suitable supporting means (not shown), and is rotated at a constant rotational speed by a suitable driving means (not shown) such as a motor. It is driven to rotate.

The turning table 2 is supported above the lower table 1 via a suitable support shaft 7a and a supporting member 7b so as to be concentric with the rotation center axis O of the lower table 1 and rotatably. The support arms 2a are radially protruded at circumferentially equal positions.
The swivel 2 is driven by appropriate driving means (not shown).
It is driven to rotate at a constant speed in a direction opposite to the lower stool 1.

The swing arm 3 has its base end pivotally supported on the lower platen 1 via the pivot shaft 3a at the distal end of each support arm 2a so as to be able to swing inward and outward substantially in the radial direction of the lower platen 1. .

The glass holding member 4 is rotatably supported at the tip of each swing arm 3 via a support shaft 4a, and is adhered and held via an appropriate adhesive 4b capable of peeling off one surface of the plate glass 6. This is for pressing against the polishing surface 1a of the lower platen 1. Normally, the glass holding member 4 can be individually raised and lowered at the tip of each swing arm 3 through an appropriate lifting / lowering means (not shown) such as a cylinder in order to attach and detach the glass sheet 6.
Alternatively, the glass holding members 4 can be raised and lowered simultaneously by raising and lowering the revolving disk 2 with respect to the lower platen 1 by appropriate lifting and lowering means (not shown), and applying a polishing pressure by appropriate means. It is possible.

The swing imparting cam 5 is provided on a support shaft 7a of the turntable 2.
A support leg which is installed concentrically with the swivel 2 via a fixed shaft 8 provided therethrough and is fixed, and protrudes from a part of the swing arm 3 during the swiveling operation of the swivel 2. 3b for swinging the tip of the swing arm 3 inward and outward substantially in the radial direction of the lower platen 1 via a cam driven roller 3c attached to the tip of 3b.
FIG. 1 illustrates a case in which cam surfaces including four peaks and valleys, which gradually change in unevenness in the radial direction of the swivel 2, are equally spaced in the circumferential direction, but other configurations are also possible. The cam follower roller 3c at the tip of the support leg 3b
A spring (not shown) is provided between the part of the swing arm 3 and the part of the support arm 2a so as to always contact the cam surface. Note that the swing range of the swing arm 3 is adjusted by changing the length of the swing arm 3 or changing the shape of the swing imparting cam 5.

In the drawings, the sheet glass 6 is illustrated as being rectangular, but may be circular or other shapes.

The configuration of the apparatus according to the embodiment of the present invention is as described above. Next, the polishing operation of the plate glass 6 by the above-described apparatus will be described. First, one surface of the plate glass 6 is adhered to each glass holding member 4, and the lower platen 1 and the rotating plate 2 are rotated in opposite directions, and the plate glass 6 is moved via the glass holding member 4 to the lower platen 1.
Is pressed against the polishing surface 1a, and one side of the plate glass 6 is polished while supplying the polishing slurry from above the polishing surface 1a.

The mode of polishing the plate glass 6 by the above-described apparatus of the present invention is as if the plate glass 6 itself revolves around the lower platen 1 while rotating, and also swings inward and outward substantially in the radial direction of the lower platen 1. And is performed by these combined actions.

That is, first, the rotation of the plate glass 6 is performed by rotating the lower platen 1 and the revolving plate 2 in opposite directions so that the frictional force generated between the plate glass 6 and the polishing surface 1a of the lower platen 1 is reduced. A rotational torque centering on the support shaft 4a is generated due to a difference in the peripheral speed between the lower surface plate 1 and the revolving lathe 2 in the radial direction, and the rotational torque causes the glass holding member 4 to be supported by the tip of the swing arm 3. Rotation about axis 4a (rotation)
It is caused by doing. Next, the revolving operation of the plate glass 6 is caused by the rotation of the turning table 2. Further, the swinging operation of the plate glass 6 is such that the cam follower roller 3 c at the tip of the support leg 3 b of the swing arm 3 comes into contact with the unevenness of the cam surface of the swing imparting cam 5 during the swinging operation of the swivel 2. It is caused by moving. This swinging causes the ring-shaped polishing surface 1a of the lower surface plate 1 so that the entire surface of the polishing surface 1a of the lower surface plate 1 is worn almost uniformly.
It is preferable to set the inner and outer peripheral edges to such an extent that the glass sheet 6 protrudes to some extent.

In the above embodiment, the swivel 2 is swiveled and the swinging cam 5 is fixed to perform the swinging operation. However, the swivel 2 is fixed and the swinging cam 5 is swung. A swing operation may be performed.

[0018]

According to the present invention, the plate glass is held by each glass holding member, and the turning plate is turned to press each plate glass against the polished surface of the lower platen while revolving. Each plate glass is driven and rotated (rotated) at the tip of the support arm, and, during the turning operation of the turntable, the plate glass is moved in and out of the lower platen substantially in the radial direction through the cam driven roller and the rocking arm by the rocking cam. By swinging, a plurality of glass sheets can be polished at the same time, thereby eliminating the difference in the amount of polishing between the peripheral part and the central part of the glass sheet, and because the uneven polishing does not occur on the polishing surface of the lower platen,
Polishing can be efficiently performed on a highly accurate flat surface without polishing unevenness and polishing streaks.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of an apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic vertical sectional side view of FIG.

FIG. 3 is a schematic plan view of a conventional multi-head polishing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Lower surface plate 1a Polishing surface 2 Revolver 2a Support arm 3 Swing arm 4 Glass holding member 5 Swing imparting cam 6 Sheet glass

Claims (1)

[Claims] A rotating lower surface plate having a polished surface on an upper surface thereof;
A swivel provided above the lower surface plate concentrically with the rotation center axis of the lower surface plate and having supporting arms at circumferentially equidistant positions, and at the tip of each support arm, substantially radially inside and outside the lower surface plate on the lower surface plate A swinging arm supported so as to be able to swing, a glass holding member rotatably supported at the tip of each swinging arm, holding a plate glass and pressing against a polishing surface of the lower platen, and concentric with the turning plate And a swing imparting cam for swinging the tip of the swing arm in and out of the lower platen substantially in the radial direction through a cam driven roller during the turning operation of the turntable. Multi-head polishing machine.