JPH10287969A5 - - Google Patents

Info

Publication number
JPH10287969A5
JPH10287969A5 JP1997099171A JP9917197A JPH10287969A5 JP H10287969 A5 JPH10287969 A5 JP H10287969A5 JP 1997099171 A JP1997099171 A JP 1997099171A JP 9917197 A JP9917197 A JP 9917197A JP H10287969 A5 JPH10287969 A5 JP H10287969A5
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
peltier element
temperature
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1997099171A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10287969A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9917197A priority Critical patent/JPH10287969A/ja
Priority claimed from JP9917197A external-priority patent/JPH10287969A/ja
Publication of JPH10287969A publication Critical patent/JPH10287969A/ja
Publication of JPH10287969A5 publication Critical patent/JPH10287969A5/ja
Withdrawn legal-status Critical Current

Links

JP9917197A 1997-04-16 1997-04-16 真空成膜装置 Withdrawn JPH10287969A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9917197A JPH10287969A (ja) 1997-04-16 1997-04-16 真空成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9917197A JPH10287969A (ja) 1997-04-16 1997-04-16 真空成膜装置

Publications (2)

Publication Number Publication Date
JPH10287969A JPH10287969A (ja) 1998-10-27
JPH10287969A5 true JPH10287969A5 (enExample) 2005-03-03

Family

ID=14240214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9917197A Withdrawn JPH10287969A (ja) 1997-04-16 1997-04-16 真空成膜装置

Country Status (1)

Country Link
JP (1) JPH10287969A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4589346B2 (ja) * 1999-07-14 2010-12-01 三星モバイルディスプレイ株式會社 有機エレクトロルミネッセンス素子及びパネルの製造方法と製造装置
JP3625736B2 (ja) * 2000-04-27 2005-03-02 古河電気工業株式会社 光学フィルタの製造方法
JP2005082837A (ja) 2003-09-05 2005-03-31 Shin Meiwa Ind Co Ltd 真空成膜方法、装置、及びそれらを用いて製造されたフィルタ

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