JPH10275830A - Fine ball-mounting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make fine balls to be sucked one by one to each suction hole of a suction jig by surely removing excessive balls sucked into icicle-like forms. SOLUTION: A fine ball-mounting device is provided with a suction head 6, which makes small balls 9 to be sucked to suction holes 6A formed on a suction jig 6B, by sucking the balls 9 through the holes 6A by means of a sucking means 6D and a stocking pan 7 for stocking the balls 9 to be sucked to the head 6. The device is also provided with an excessive fine ball-removing filter 11 in which removing holes 11A having diameters which are slightly larger than those of the balls 9 at the positions, corresponding to the suction holes 6A of the jig 6B above the pan 7. A sliding mechanism 13, which slides the filter 11 after the balls 9, are sucked into the suction holes 6A by communicating the removing holes 11A with the suction holes 6A by positioning the suction head 6 above the pan 7 through the filter 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-ball mounting apparatus for adsorbing micro-balls serving as bumps and mounting them on a work such as a substrate or a chip.

[0002]

2. Description of the Related Art Conventionally, a fine ball mounting apparatus for sucking a fine ball serving as a bump and mounting the fine ball on a work such as a substrate or a chip is provided with a suction apparatus for suctioning the fine balls to be mounted on the work. ing. A suction device in this type of fine ball mounting device will be described with reference to an example shown in FIG. In the figure, reference numeral 6 denotes a suction head. The suction head 6 is provided with a plate-shaped suction jig 6B having an arbitrary number of suction holes 6A according to the work on which the fine balls are mounted, and a suction means 6D in a block 6C. Guides 4A, 4B attached
Are connected to guide shafts 3A and 3B slidably supported by the guide shafts 3A and 3B. Then, it is moved up and down by a lifting mechanism 2 composed of a cylinder.

The suction means 6D sucks the fine balls 9 into the suction holes 6A formed in the suction jig 6B by vacuum suction. In addition, the stock plate 7 and the fine ball floating portion 8
It is installed above. A large number of fine balls 9 are stored on the stock plate 7 and float by the fine ball floating portion 8. The fine ball floating portion 8 has a function of facilitating the suction of the fine ball 9 by the suction jig 6B, and is controlled by the control unit 1 together with the lifting mechanism 2 and the suction means 6D. Also, fine balls 9
There are various methods for the floating method described in, for example, JP-A-7-153765 and JP-A-8-162494.

Next, a method of attracting fine balls will be described with reference to a flowchart shown in FIG. First, the suction head 6 is positioned at a position close to the stock tray 7 by the elevating mechanism 2 (Step 201), and then the fine balls 9 are floated by the fine ball floating portion 8 (Step 202). Next, the fine ball 9 is sucked by the suction means 6D (Step 203), and is stopped for a predetermined time (Step 204). Then, the fine ball 9 is lifted by the lifting mechanism 2 (Step 205). It shifts to the mounting process.

When the fine balls 9 are sucked and held from the stock dish 7 as in the above-mentioned conventional method, the fine balls 9 held by the suction holes 6A are irritated even though it is desired to hold them one by one. Was in a state. Therefore, in the conventional fine ball mounting apparatus, a method of applying vibration to the suction head 6 that sucks and holds the fine ball 9 to shake off an extra fine ball has been used. The above method is described in detail in JP-A-8-162494 and JP-A-8-162495.

[0006]

However, since the fine ball 9 is light in weight, it is difficult to reliably shake off the icicle-shaped fine ball 9 by the above-mentioned method, and the fine ball 9 which is normally adsorbed is not used. Was shaken off by the vibration.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and when a fine ball is sucked to a suction head, an extra fine ball sucked in an icicle shape is removed, and the fine ball is sucked. It is an object of the present invention to provide a fine ball mounting device provided with a suction device capable of accurately sucking one by one.

[0008]

In order to achieve the above object, a fine ball mounting apparatus according to the first aspect of the present invention includes a fine ball mounting device for sucking a fine ball to be a bump and mounting the sucked fine ball on a work. An apparatus, comprising: a suction jig having a plurality of suction holes formed therein; a suction head for sucking the fine balls into the suction holes by suction means; and a ball supply in which the fine balls to be sucked to the suction heads are stored. And a suction device having a portion, and a through hole having a diameter slightly larger than the diameter of the fine ball is provided at a position corresponding to the suction hole formed in the suction jig in the ball supply portion. The formed excess fine ball removing filter is provided, and the excess fine ball removing filter is configured such that when the suction head is installed above the ball supply unit, the through hole absorbs the suction. And communicates with, after the finely balls suction through the through-hole to the suction hole by the suction means, the is characterized by being relatively slid with respect to suction jig.

[0009]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of a fine ball mounting apparatus according to the present invention. Note that the same reference numerals are given to the same structural parts as those of the above-described conventional technology, and description thereof will be omitted. As shown in FIG. 1, the suction device constituting the fine ball mounting device of the present embodiment is provided with an excess fine ball removal filter 11 via a slide mechanism 13 above the stock plate (ball supply unit) 7. Have been. The excess fine ball removing filter 11 has a thickness dimension larger than the diameter of the fine ball 9, and is located at a position corresponding to the suction hole 6 </ b> A formed in the suction jig 6 </ b> B. Slightly larger removal hole (through hole) 11
A is pierced on each side.

The filter 11 for removing excess fine balls is slid by a slide mechanism 13 whose driving is controlled by the control unit 1. Also,
An O-ring 12 </ b> A is provided on the outer peripheral side at the upper end of the surplus fine ball removal filter 11.

Next, the operation of the fine ball mounting apparatus having the suction device having the above structure will be described with reference to the flowchart shown in FIG. First, the suction head 6 is moved to a position above the stock tray 7 by a moving mechanism (not shown), and in this state, the suction head 6 is lowered by the elevating mechanism 2 composed of a cylinder. It is installed on the upper side via a surplus fine ball removing filter 11. Thus, the suction head 6 is brought into close contact with the O-ring 12A, and the space below the suction jig 6B is sealed (step 101). At this time, the suction jig 6
The suction hole 6A of B is positioned at a position corresponding to the removal hole 11A of the surplus fine ball removal filter 11, that is, at a position where it communicates. Further, between the suction jig 6B and the excess fine ball removing filter 11, the suction holes 6A of the suction jig 6B are provided.
When the fine ball 9 is sucked, a gap wider than the protrusion size of the sucked fine ball 9 is formed.

Next, the fine ball floating section 8 is driven by the control section 1 to float the fine balls 9 accommodated in the stock dish 7 (step 102), and the control section 1 drives the suction means 6D. Then, the suction jig 6
It is sucked through the suction hole 6A of B (step 103). As a result, the fine balls 9 floated by the fine ball floating portion 8 are sucked into the removal holes 11A formed in the excess fine ball removal filter 11, and one fine ball 9 is pulled into the suction holes of the suction jig 6B. Adsorbed to 6A. That is, the fine balls 9 other than the fine balls 9 sucked into the suction holes 6A enter the removal holes 11A of the excess fine ball removal filter 11.

After stopping for a predetermined time (step 104), the slide mechanism 13 is driven by the control section 1, and the extra fine ball removing filter 11 is driven by the slide mechanism 13.
Is slid (step 105). As a result, only one fine ball 9 is sucked into the suction holes 6A of the suction jig 6B, and the other fine balls 9 are sucked.
Remains in the removal hole 11A of the excess fine ball removal filter 11 and falls into the stock dish 7. Then, in this state, the suction head 6 is raised by the lifting mechanism 2 (Step 106), and the excess fine ball removing filter 11 is returned to the original position by the slide mechanism 13 (Step 107).

Thereafter, the suction head 6 is moved above the work (not shown) and lowered while the fine balls 9 are sucked one by one into the suction holes 6A, and the fine balls 9 are positioned at predetermined positions on the work. Is mounted. in this way,
According to the fine ball mounting device provided with the suction device described above,
When the fine balls 9 are sucked into the suction holes 6A of the suction jig 6B, the surplus fine balls 9 sucked in an icicle shape by the surplus fine ball removing filter 11 are surely removed,
The fine balls 9 can be sucked one by one into each suction hole 6A. That is, as in the conventional case, the suction jig 6
Compared to the case where the fine ball 9 adsorbed excessively is shaken off by applying a vibration to B, the fine ball 9 adsorbed normally is not accidentally shaken off, and only the extra fine ball 9 is reliably removed. Can be removed.

In the above described fine ball mounting apparatus, when removing the excessive fine balls 9, the excess fine ball removing filter 11 is slid by the slide mechanism 13, but the suction jig 6B side of the suction head 6 is moved. Of course, it is possible to slide.

[0016]

As described above, according to the fine ball mounting apparatus of the present invention, the following effects can be obtained.
According to the fine ball mounting device of the first aspect, when the fine balls are sucked into the suction holes of the suction jig, the excess fine balls sucked in an icicle shape by the surplus fine ball removal filter are surely removed. The fine balls can be sucked one by one into each of the suction holes. In other words, as compared with the case where the suction jig is vibrated to shake off the surplus fine balls as in the related art, the surplus fine balls are not mistakenly shaken off by mistake. Can be reliably removed.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a suction device constituting a fine ball mounting device according to an embodiment of the present invention.

FIG. 2 is a flowchart illustrating a fine ball suction step by a suction device constituting the fine ball mounting device according to the embodiment of the present invention.

FIG. 3 is a sectional view of a suction device for explaining a conventional technique of a suction device constituting a fine ball mounting device.

FIG. 4 is a flowchart illustrating a process of sucking a fine ball by a conventional suction device.

[Explanation of symbols]

 Reference Signs List 6 suction head 6A suction hole 6B suction jig 6D suction means 7 stock dish (ball supply unit) 9 fine ball 11 surplus fine ball removal filter 11A removal hole (through hole)

Claims (1)

[Claims] 1. A fine ball mounting apparatus for sucking a fine ball to be a bump and mounting the sucked fine ball on a work, comprising: a suction jig having a plurality of suction holes formed therein; The apparatus further comprises a suction device having a suction head for sucking the fine balls into the suction holes, and a ball supply unit in which the fine balls to be sucked to the suction heads are stored. In a position corresponding to the suction hole formed in the above, there is provided a surplus fine ball removal filter in which a through-hole having a diameter slightly larger than the diameter of the fine ball is formed, the surplus fine ball removal filter, When the suction head is installed above the ball supply unit, the through hole communicates with the suction hole, and the suction means causes the fine hole to pass through the through hole to the suction hole. Is absorbed,
A fine ball mounting device, which is slid relative to the suction jig.