JPH10267848A - Method for emission spectroscopic analysis - Google Patents
Method for emission spectroscopic analysisInfo
- Publication number
- JPH10267848A JPH10267848A JP7797397A JP7797397A JPH10267848A JP H10267848 A JPH10267848 A JP H10267848A JP 7797397 A JP7797397 A JP 7797397A JP 7797397 A JP7797397 A JP 7797397A JP H10267848 A JPH10267848 A JP H10267848A
- Authority
- JP
- Japan
- Prior art keywords
- intensity
- accuracy
- spectral
- threshold value
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、不活性ガス雰囲気
中で金属試料と対電極との間で多数回のスパーク放電を
行い試料中の元素分析を行う発光分光分析方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an emission spectroscopy method for performing elemental analysis in a sample by performing a large number of spark discharges between a metal sample and a counter electrode in an inert gas atmosphere.
【0002】[0002]
【従来の技術】従来発光分光分析では放電ごとのマトリ
ックス元素の強度をモニターし、強度低下したスパーク
は発光不良によるものとし、強度が非常に高いときは異
常発光であるとし、検出器の飽和などが発生したものと
考え、これらの異常値を除去して分析値を求めていた。
その除外する値(しきい値)はスパーク強度の低い所及
び高い所の両方の数%〜20%程度としていた。このよ
うなしきい値で測定データを適宜カットして精度を高め
るようにしていた。すなわち、今までは、しきい値を適
当に決めていた。しきい値が大きすぎるとデータ量が減
少してばらつきが大きくなり精度不良となるという問題
があり、しきい値を小さくすると、異常値がばらつくと
いう問題がある。2. Description of the Related Art In conventional emission spectroscopy, the intensity of matrix elements for each discharge is monitored. Sparks with reduced intensity are attributed to poor light emission. When the intensity is extremely high, abnormal emission is determined. Therefore, it was considered that the abnormalities occurred, and these abnormal values were removed to obtain an analysis value.
Excluded values (thresholds) were set to several percent to 20% at both low and high spark intensity locations. The measurement data is appropriately cut at such a threshold value to improve the accuracy. That is, the threshold value has been appropriately determined until now. If the threshold value is too large, there is a problem that the data amount decreases, the variation increases, and the accuracy becomes poor. If the threshold value is reduced, an abnormal value varies.
【0003】ところがこのような従来の方法では分析精
度が必ずしも良くならず、適宜定める上記しきい値が最
良の値であるか否か不明であった。However, in such a conventional method, the analysis accuracy is not always improved, and it is unclear whether or not the above-mentioned appropriately determined threshold value is the best value.
【0004】[0004]
【発明が解決しようとする課題】本発明は上記実情に鑑
み、上記しきい値の適正な決定方法を探究した結果完成
したものであって、しきい値を最も適正に定め、分析精
度を高めることを目的とする。SUMMARY OF THE INVENTION In view of the above circumstances, the present invention has been completed as a result of a search for an appropriate method for determining the threshold value. The purpose is to:
【0005】[0005]
【課題を解決するための手段】本発明は、多数の試料に
より実際に精度を計算して精度が最高になるように決定
する方法であって、その技術手段は、不活性ガス雰囲気
中で金属試料と対電極との間で多数回のスパーク放電を
行い試料中の元素分析を行う発光分光分析方法におい
て、予め繰り返し測定精度と母材元素のスペクトル強度
との関係を求め、測定精度が最も高くなる母材元素のス
ペクトル強度を求め、これをしきい値とし、1放電毎の
母材元素のスペクトル強度を測定し、このスペクトル強
度が前記しきい値の範囲内にあるときのデータから濃度
を求めることを特徴とする発光分光分析方法である。SUMMARY OF THE INVENTION The present invention is a method of actually calculating accuracy by using a large number of samples and determining the accuracy so that the accuracy is maximized. In an emission spectroscopy method in which a number of spark discharges are performed between a sample and a counter electrode to perform elemental analysis in the sample, the relationship between the measurement accuracy and the spectrum intensity of the base material element is determined in advance, and the measurement accuracy is the highest. The spectrum intensity of the base material element is determined, and the obtained value is used as a threshold value. The spectrum intensity of the base material element is measured for each discharge, and the concentration is determined from the data when the spectrum intensity is within the range of the threshold value. This is an emission spectroscopic analysis method characterized by being determined.
【0006】前記測定データは測定元素と母材元素のス
ペクトル強度比とし、このスペクトル強度比と母材元素
のスペクトル強度との関係を求めると精度の高い測定を
行うことができる。When the measured data is a spectrum intensity ratio between the measured element and the base material element, and a relationship between the spectrum intensity ratio and the spectrum intensity of the base material element is obtained, highly accurate measurement can be performed.
【0007】[0007]
【発明の実施の形態】Al濃度が250ppm含有され
る珪素鋼板のAl濃度分析において、発光分光分析方法
で得られる1放電毎のスペクトル強度比を調べたところ
図2が得られた。図2は横軸が放電回数、縦軸は1放電
ごとのAl/Feスペクトルの強度比である。Al/F
eスペクトル強度比は、通常は約1〜2の範囲にある
が、異常に高くなる場合があり、異常放電と呼ばれてい
るが、これが、分析精度を低下させる原因となる。した
がって異常放電となったデータを棄却すれば精度は向上
する。BEST MODE FOR CARRYING OUT THE INVENTION In the Al concentration analysis of a silicon steel sheet having an Al concentration of 250 ppm, FIG. 2 was obtained by examining the spectral intensity ratio for each discharge obtained by the emission spectral analysis method. In FIG. 2, the horizontal axis represents the number of discharges, and the vertical axis represents the intensity ratio of the Al / Fe spectrum for each discharge. Al / F
The e-spectral intensity ratio is usually in the range of about 1 to 2, but may be abnormally high, and is called abnormal discharge, which causes a decrease in analysis accuracy. Therefore, the accuracy can be improved by rejecting the data having an abnormal discharge.
【0008】図2の放電回数1120〜1200回目の
部分を拡大して図3に示した。図3にはAl/Feスペ
クトル強度比とともに、Al、O、Feスペクトル強度
も示した。図3において、A、B点でAl/Feスペク
トル強度比が高くなっている。これらのA、B点におけ
るAl、O、Feのスペクトル強度の変動を見ると (イ)Al強度は正常である (ロ)O強度が高くなっており、酸化物に放電されたた
めと考えられる (ハ)Fe強度が低い。 となっている。Alの酸化物などに放電するとFe強度
が異常に低くなることが考えられ、Fe強度が異常に低
くなった放電でのデータを除去すると、精度が向上す
る。すなわち、Fe強度が低いデータを棄却すれば、A
l強度が正常であるのにスペクトル強度比が異常な点は
除外される。次に、C点では、 (a)Al強度が高い (b)Fe強度も高い (c)Al/Fe強度比は正常 となっている。以上から、Al/Fe強度比とFe強度
の関係を抽出して調べた。その結果を図4に示した。図
4より、Fe強度が低くなると、Al/Feの強度のば
らつきが大きくなる。特にFeの強度が、1000以下
となると大きくばらつくことが知見された。FIG. 3 is an enlarged view of the portion of the 1120 to 1200 discharges shown in FIG. FIG. 3 also shows the Al, O, and Fe spectral intensities along with the Al / Fe spectral intensity ratio. In FIG. 3, the Al / Fe spectral intensity ratio is high at points A and B. The fluctuations in the spectrum intensities of Al, O, and Fe at points A and B are as follows: (a) Al intensity is normal; (b) O intensity is high, which is considered to be due to discharge to the oxide ( C) Fe strength is low. It has become. It is conceivable that the discharge to the Al oxide or the like causes an abnormal decrease in the Fe intensity. If data in the discharge in which the Fe intensity is abnormally reduced is removed, the accuracy is improved. That is, if data with low Fe intensity is rejected, A
Points where the 1 intensity is normal but the spectral intensity ratio is abnormal are excluded. Next, at the point C, (a) the Al intensity is high, (b) the Fe intensity is high, and (c) the Al / Fe intensity ratio is normal. From the above, the relationship between the Al / Fe intensity ratio and the Fe intensity was extracted and examined. The result is shown in FIG. As shown in FIG. 4, when the Fe intensity decreases, the variation in the Al / Fe intensity increases. In particular, it has been found that when the strength of Fe is 1000 or less, it greatly varies.
【0009】そこで、不良データを除去するため、Fe
強度を変えて繰り返し精度を求めたところ図1の結果を
得た。すなわち、最も繰り返し精度が低くなる最適値が
存在することが明らかになった。図1に示す実施例の分
析精度は、全データでの繰り返し精度(σ)は、4.7
ppmであったが、Fe強度が1100未満のデータを
除去したときの繰り返し精度(σ)は、2.6ppmで
あり、本発明による実施例では分析精度が著しく向上し
た。Therefore, in order to remove defective data, Fe
When the repetition accuracy was obtained by changing the strength, the result of FIG. 1 was obtained. That is, it has been clarified that there is an optimum value at which the repetition accuracy is lowest. The analysis accuracy of the embodiment shown in FIG. 1 is such that the repetition accuracy (σ) for all data is 4.7.
ppm, but the repetition accuracy (σ) when removing data having an Fe intensity of less than 1100 was 2.6 ppm. In the examples according to the present invention, the analysis accuracy was significantly improved.
【0010】実施例では、検量線用の試料を複数回測定
したデータを用いて、測定元素と母材元素のスペクトル
強度比と母材元素のスペクトル強度の関係からしきい値
を決定した。この時、 (1)予め多数回の測定結果で最適値を決定しておき、
この値でデータ処理する (2)数回測定した実際のデータを用いて最適値を決定
し、この値でデータ処理する という2つの方法が考えられるが、何れでも良い。In the examples, the threshold value was determined from the relationship between the spectral intensity ratio of the measured element and the base material element and the spectral intensity of the base material element, using data obtained by measuring the calibration curve sample a plurality of times. At this time, (1) an optimum value is determined in advance by a number of measurement results,
Data processing is performed using this value. (2) There are two methods of determining an optimum value using actual data measured several times and performing data processing using this value. Either method may be used.
【0011】[0011]
【発明の効果】従来、発光分光分析で測定精度を向上さ
せる目的で、しきい値を適宜のパーセンテージで規定
し、不良データを除外するようにしていたが、本発明で
は、鋼板中の溶解Al濃度を測定する場合に、Al/F
e強度比とFe強度の関係を求め、ばらつきが大きくな
るFe強度を見出し、この強度付近で実際にデータ除去
し、精度を求め、精度が最良となったFe強度をしきい
値とし、毎回測定毎に最適値をみつけるようにしたか
ら、迅速に分析精度の高いデータを得ることができるよ
うになった。Conventionally, in order to improve the measurement accuracy in the emission spectroscopy, the threshold value is specified by an appropriate percentage to exclude defective data. When measuring the concentration, use Al / F
Find the relationship between the e-intensity ratio and the Fe intensity, find the Fe intensity at which the variation increases, actually remove the data near this intensity, determine the accuracy, measure the Fe intensity at which the accuracy is the best as the threshold, and measure each time Since the optimum value is found every time, data with high analysis accuracy can be obtained quickly.
【図1】しきい値となるFeスペクトル強度を変化させ
てデータ除去したときの繰返し精度の変化を示すグラフ
である。FIG. 1 is a graph showing a change in repetition accuracy when data is removed by changing an Fe spectrum intensity serving as a threshold.
【図2】1放電ごとのAl/Feスペクトル強度比を示
すグラフである。FIG. 2 is a graph showing an Al / Fe spectrum intensity ratio for each discharge.
【図3】1放電ごとのAl、O、Fe、Al/Feスペ
クトル強度比を示すグラフである。FIG. 3 is a graph showing Al, O, Fe, and Al / Fe spectral intensity ratios for each discharge.
【図4】Feスペクトル強度とAl/Feスペクトル強
度との関係を示すグラフである。FIG. 4 is a graph showing the relationship between the Fe spectrum intensity and the Al / Fe spectrum intensity.
Claims (2)
との間で多数回のスパーク放電を行い試料中の元素分析
を行う発光分光分析方法において、予め繰り返し測定精
度と母材元素のスペクトル強度との関係を求め、該測定
精度が最も高くなる母材元素のスペクトル強度を求め、
これをしきい値とし、1放電毎の母材元素のスペクトル
強度を測定し、該スペクトル強度が前記しきい値の範囲
内にあるときのデータから濃度を求めることを特徴とす
る発光分光分析方法。1. An emission spectroscopic analysis method for performing elemental analysis in a sample by performing a number of spark discharges between a metal sample and a counter electrode in an inert gas atmosphere. Determine the relationship with the intensity, determine the spectral intensity of the base metal element is the highest measurement accuracy,
An emission spectroscopy method comprising: measuring a spectrum intensity of a base material element for each discharge with the threshold value as a threshold; and obtaining a concentration from data when the spectrum intensity is within the range of the threshold value. .
クトル強度比であることを特徴とする請求項1記載の発
光分光分析方法。2. The emission spectral analysis method according to claim 1, wherein said data is a spectral intensity ratio of a measured element and a base material element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7797397A JPH10267848A (en) | 1997-03-28 | 1997-03-28 | Method for emission spectroscopic analysis |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7797397A JPH10267848A (en) | 1997-03-28 | 1997-03-28 | Method for emission spectroscopic analysis |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10267848A true JPH10267848A (en) | 1998-10-09 |
Family
ID=13648856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7797397A Pending JPH10267848A (en) | 1997-03-28 | 1997-03-28 | Method for emission spectroscopic analysis |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10267848A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100862786B1 (en) | 2006-12-19 | 2008-10-13 | 주식회사 포스코 | Apparatus measuring impurities of molten iron and method sameof |
-
1997
- 1997-03-28 JP JP7797397A patent/JPH10267848A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100862786B1 (en) | 2006-12-19 | 2008-10-13 | 주식회사 포스코 | Apparatus measuring impurities of molten iron and method sameof |
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