JPH10223576A5 - - Google Patents

Info

Publication number
JPH10223576A5
JPH10223576A5 JP1997021527A JP2152797A JPH10223576A5 JP H10223576 A5 JPH10223576 A5 JP H10223576A5 JP 1997021527 A JP1997021527 A JP 1997021527A JP 2152797 A JP2152797 A JP 2152797A JP H10223576 A5 JPH10223576 A5 JP H10223576A5
Authority
JP
Japan
Prior art keywords
film
grindstone
semiconductor substrate
polishing
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997021527A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10223576A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2152797A priority Critical patent/JPH10223576A/ja
Priority claimed from JP2152797A external-priority patent/JPH10223576A/ja
Publication of JPH10223576A publication Critical patent/JPH10223576A/ja
Publication of JPH10223576A5 publication Critical patent/JPH10223576A5/ja
Pending legal-status Critical Current

Links

JP2152797A 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置 Pending JPH10223576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2152797A JPH10223576A (ja) 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2152797A JPH10223576A (ja) 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置

Publications (2)

Publication Number Publication Date
JPH10223576A JPH10223576A (ja) 1998-08-21
JPH10223576A5 true JPH10223576A5 (enrdf_load_stackoverflow) 2004-12-24

Family

ID=12057436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2152797A Pending JPH10223576A (ja) 1997-02-04 1997-02-04 膜平坦化方法および膜平坦化装置

Country Status (1)

Country Link
JP (1) JPH10223576A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009269147A (ja) * 2008-05-09 2009-11-19 Fujitsu Ltd 研磨体及びその製造方法

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