JPH10216662A - Bubbled cleaning tank - Google Patents

Abstract

PROBLEM TO BE SOLVED: To conduct bubble cleaning without scattering a liq. chemical during cleaning and with high safety and efficiency. SOLUTION: One cleaning tank 1 is divided by a partition into a liq. chemical tank 1A and a pure water tank 1B, and a bubbler 5 is provided at the bottom of each tank to constitute a bubbled cleaning tank. The bubbler 5 is formed by providing a bubble plate consisting of an open-cell synthetic resin sheet and made hydrophilic at the compressed air outlet of the casing 6 to be supplied with compressed air from a blower 16. Further, a receiver fabricated by latticing plates is furnished above the bubble plate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bubbling type cleaning tank for blowing bubbles into a cleaning tank.

[0002]

2. Description of the Related Art Conventionally, for cleaning semiconductor products, quartz glass, etc., chemicals in a tank are circulated by a pump, and cleaning is performed by flowing a liquid, and a cleaning object is immersed in the chemicals in the tank. However, depending on the shape of the object to be cleaned, complicated grooves or corners of the product member may not be completely cleaned. To cope with this, an ultrasonic generator is provided in the cleaning tank, and means for emitting ultrasonic waves into the cleaning tank and removing contamination on the surface of the inside of the tank to be cleaned in a liquid subjected to ultrasonic vibration is implemented. However, there were also points that were not satisfactory in cleaning semiconductor products, quartz glass, and the like. Also, two tanks, a chemical tank and a pure water tank, are prepared in order to enhance the cleaning result. The object to be cleaned is put into the chemical tank, and the surface of the object to be cleaned is treated with the chemical solution to remove dirt that has become easy to fall off. Was moved to a pure water tank and washed to remove chemicals and dirt. In this conventional apparatus, the cleaning tank is made up of two tanks, a chemical tank and a pure water tank, which are installed separately, and the object to be cleaned which has been washed in the chemical tank is removed from the chemical tank and transferred to a cleaning tank which is separated from the tank. Since the operation of changing was carried out, the chemical solution was scattered, and the safety and the cleaning effect were poor, and the productivity was not improved.

[0003]

SUMMARY OF THE INVENTION In view of the above points, the present invention provides a bubbling method which can perform a highly safe operation without scattering of a chemical solution during a cleaning operation and can perform a bubbling cleaning having a high cleaning performance. The purpose is to obtain a type washing tank.

[0004]

SUMMARY OF THE INVENTION The present invention provides a bubbling system in which a washing tank is divided into a chemical solution tank and a pure water tank by providing a partition in one washing tank, and a foaming device is provided at the bottom of each tank. A washing tank was used. In the foaming apparatus, a foam plate made of a continuous porous synthetic resin plate and subjected to a hydrophilic treatment is provided at a compressed air outflow portion of a housing to which compressed air is sent from a blower. Then, a pedestal in which the plate-like members are assembled in a lattice shape is provided above the bubble plate.

[0005]

Embodiments of the present invention will be described below with reference to the drawings.

[0006] The washing tank 1 is mounted on a gantry 2 in a rectangular parallelepiped.
Chemical solution tank 1A and pure water tank 1B by partition wall 3 provided at the center
And the other two sections. Foaming devices 5 are provided at the tank bottoms 4 of the chemical solution tank 1A and the pure water tank 1B, respectively. The foaming apparatus 5 attaches the housing 6 with the open top to the gantry 2 by the fixing means 7, and attaches the foam plate 8 to the open top by the fixing means 9. That is, as shown in FIG. 4, a receiving plate 9A is fixed to the tank bottom 4 surrounding the upper edge of the housing 6, and a bubble plate 8 is placed thereon via a packing 9B made of a Teflon soft sheet. 9C is applied, and the above-mentioned parts are integrally tightened and fixed by a Teflon bolt 9D. Then, as shown in FIG. 2, there is provided a pedestal 11 which covers the upper surface of the bubble plate 8 and assembles the plate-like members 10 in a lattice. The cradle 11 is mounted on the tank bottom 4 by the legs 12.

The bubble plate 8 is made of a resin having porous continuous pores. For example, when a polypropylene resin is finely pulverized and sintered at a uniform temperature in a furnace, a plate having porous continuous pores can be obtained. I can do it. However, since the resin has a unique water repellency, a substance containing a hydrophilic group is held (adsorbed or bonded) on the surface of the porous plate 7 to perform a hydrophilic treatment so that bubbles are generated finely and strongly. ing.

[0008] At the bottom of the housing 6, an air supply pipe 12 is opened. In the illustrated example, the air supply pipe 12 is bifurcated,
The number of openings of the air supply pipe may be one or more. The air supply pipe 12 is connected to a blower 16 via an air pipe 14 via an electromagnetic valve 13 and an electromagnetic valve 15.

A drain pipe 17 is provided at the bottom 4 of each of the chemical solution tank 1A and the pure water tank 1B of the cleaning tank 1, and a tank wall 1 of the pure water tank 1B.
A cleaning water supply pipe 19 and an overflow pipe 20 are attached to 8.

A guide rail 21 is provided above the tank walls of the washing tank 1A and the pure water tank 1B and the partition wall 3, and an opening / closing lid 22 is slidably fitted and supported. Guide rail 21 for each tank
Is a plurality of multi-stages (in the example shown, two at the top and bottom, four on both sides)
) Of the open / close lid 22.

The guide rail 21 is longer than the cleaning tank 1 and protrudes on both sides of the cleaning tank 1. When the upper surface of the cleaning tank 1 is fully opened during operation, the opening / closing lid 22 is placed on the protruding portion on both sides of the guide rail 21. When the cleaning tank is closed, the open / close lid 22 at the upper and lower part is moved over the cleaning tank 1 along the guide rail 21 to close the cleaning tank 1.

The washing tank 1 is preferably made of plastic in consideration of anti-corrosion properties. In particular, for cleaning for semiconductors, a metal-free plastic and a plastic which can withstand acids and alkalis are required. When used in a hydrofluoric acid cleaning tank, a polypropylene material is suitable.

Next, the cleaning operation by the cleaning tank 1 of the present invention will be described. When the object to be cleaned is quartz glass, the chemical solution tank 1A is a hydrofluoric acid tank. The chemical used varies depending on the type of the object to be cleaned. The object to be cleaned is on the pedestal 11 and is ejected from the bubble plate 8, and is beaten by the rectified air bubbles by the plate 10 constituting the pedestal 11, thereby removing the contamination on the surface. That is, when the electromagnetic valves 15 and 13 are opened and the blower 16 is operated, the air is filled in the housing 6 of the foaming device 5 through the air pipe 14 and the air supply pipe 12, and fine pores existing on the entire surface of the bubble plate 8 are formed. , The air in the housing 6 is ejected strongly as fine bubbles into the chemical solution tank 1A and the pure water tank 1B.

When bubbles are blown out of the bubble plate 8, the air blown out of the pores adheres to the surface of the pores and increases the volume before the bubbles increase because the bubble plate 8 is subjected to hydrophilic treatment. In the state described above. Cleaning is performed in which bubbles ejected into the cleaning tank collide with an object to be cleaned and remove dirt by an impact due to bubbles or an impact due to bursting of bubbles. Further, pure water is supplied to the pure water tank 1B by opening the solenoid valve 19A of the cleaning water supply pipe 19. The overflowed pure water overflows from the overflow pipe 20. When the cleaning in the chemical solution tank 1A is completed, the object to be cleaned is replaced in the pure water tank 1B in contact with the chemical solution tank 1A. Since the chemical solution tank 1A and the pure water tank 1B are provided adjacent to each other, even when the transfer from the chemical solution tank 1A to the pure water tank 1B is performed, the chemical solution may be scattered around the outside of the cleaning tank 1. There is no. The cleaning solution put in the pure water tank 1B is subjected to bubbling to remove the hydrofluoric acid solution and dirt similarly to the chemical liquid tank 1A.

During the washing, the opening / closing lid 22 is moved along the guide rail 21 to cover the upper surface of the washing tank 1A so as to prevent the liquid from scattering. When the cleaning in the pure water tank 1B is completed, the object to be cleaned is moved to a sink tank (not shown), and the object is cleaned with ultrapure water using a spray gun, thereby completing the cleaning.

[0016]

According to the present invention, the cleaning tank is of a two-tank type, so that when the object to be cleaned is transferred from the chemical tank to the pure water tank, the chemical is not scattered outside the tank, and the workability can be simplified, and The manufacturing cost of the cleaning tank was reduced.

Further, by providing the bubble plate at the bottom of the cleaning tank, and by subjecting the bubble plate to a hydrophilic treatment, fine bubbles are strongly generated and the impact of the bubbles can be applied to the object to be cleaned. The effect can be enhanced.

Further, in order to clean the object to be cleaned on a receiving table provided on the bubble plate and having a plate-like body assembled in a lattice, the ejected bubbles are rectified by the plate-like body constituting the receiving table. And more powerfully hits the object to be cleaned, and enhances the cleaning effect.

[Brief description of the drawings]

FIG. 1 is a plan view of a cleaning tank according to the present invention with a pedestal and a bubble plate removed.

FIG. 2 is a partially longitudinal front view of the cleaning tank of the present invention.

FIG. 3 is a side view of the cleaning tank of the present invention.

FIG. 4 is an enlarged cross-sectional view of a foam plate mounting portion of the foaming apparatus casing.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning tank 1A Chemical liquid tank 1B Pure water tank 2 Frame 3 Partition wall 5 Foaming device 6 Casing 8 Bubble plate 10 Plate-shaped body 11 Receiving stand 14 Air piping 16 Blower 21 Guide rail

Claims (3)

[Claims] 1. A bubbling type cleaning tank comprising a cleaning tank divided into a chemical liquid tank and a pure water tank by providing a partition in one cleaning tank, and a foaming device provided at the bottom of each tank. 2. The foaming device according to claim 1, wherein a foam plate made of a continuous porous synthetic resin plate and subjected to a hydrophilic treatment is provided at a pressurized air outflow portion of a housing to which pressurized air from the blower is sent. The described bubbling-type washing tank. 3. The bubbling type cleaning tank according to claim 1, wherein a receiving table in which the plate-like members are assembled in a lattice is provided on the bubble plate.