JPH10209230A5 - - Google Patents

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Publication number
JPH10209230A5
JPH10209230A5 JP1997009967A JP996797A JPH10209230A5 JP H10209230 A5 JPH10209230 A5 JP H10209230A5 JP 1997009967 A JP1997009967 A JP 1997009967A JP 996797 A JP996797 A JP 996797A JP H10209230 A5 JPH10209230 A5 JP H10209230A5
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JP
Japan
Prior art keywords
past case
failure analysis
analysis device
feature
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997009967A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10209230A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9009967A priority Critical patent/JPH10209230A/ja
Priority claimed from JP9009967A external-priority patent/JPH10209230A/ja
Publication of JPH10209230A publication Critical patent/JPH10209230A/ja
Publication of JPH10209230A5 publication Critical patent/JPH10209230A5/ja
Pending legal-status Critical Current

Links

JP9009967A 1997-01-23 1997-01-23 不良解析装置およびその方法 Pending JPH10209230A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9009967A JPH10209230A (ja) 1997-01-23 1997-01-23 不良解析装置およびその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9009967A JPH10209230A (ja) 1997-01-23 1997-01-23 不良解析装置およびその方法

Publications (2)

Publication Number Publication Date
JPH10209230A JPH10209230A (ja) 1998-08-07
JPH10209230A5 true JPH10209230A5 (enExample) 2005-01-06

Family

ID=11734708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9009967A Pending JPH10209230A (ja) 1997-01-23 1997-01-23 不良解析装置およびその方法

Country Status (1)

Country Link
JP (1) JPH10209230A (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6466895B1 (en) * 1999-07-16 2002-10-15 Applied Materials, Inc. Defect reference system automatic pattern classification
DE19946787A1 (de) * 1999-09-29 2001-04-05 Focke & Co Verfahren und Vorrichtung zur Diagnose von Maschinen
JP4274649B2 (ja) 1999-10-07 2009-06-10 株式会社日立製作所 微細パターン検査方法及び装置
US7225107B2 (en) * 2001-05-24 2007-05-29 Test Advantage, Inc. Methods and apparatus for data analysis
JP2003100826A (ja) 2001-09-26 2003-04-04 Hitachi Ltd 検査データ解析プログラムと検査装置と検査システム
JP2003242482A (ja) * 2002-02-14 2003-08-29 Hitachi High-Technologies Corp 回路パターンの検査方法および検査装置
JP4038161B2 (ja) * 2003-08-29 2008-01-23 株式会社神戸製鋼所 金属板材の表面欠陥の原因推定装置および原因推定プログラムならびに原因推定方法
JP4758619B2 (ja) * 2003-12-10 2011-08-31 株式会社日立ハイテクノロジーズ 問題工程特定方法および装置
US7019835B2 (en) * 2004-02-19 2006-03-28 Molecular Imprints, Inc. Method and system to measure characteristics of a film disposed on a substrate
JP2006018630A (ja) * 2004-07-02 2006-01-19 Canon Inc データ検索方法及び装置、プログラム、コンピュータ可読メモリ
US7340359B2 (en) * 2005-05-02 2008-03-04 Optimaltest Ltd Augmenting semiconductor's devices quality and reliability
JP4711077B2 (ja) 2006-06-09 2011-06-29 富士ゼロックス株式会社 故障診断システム、画像形成装置および故障診断プログラム
US7916275B2 (en) * 2007-09-19 2011-03-29 Asml Netherlands B.V. Methods of characterizing similarity or consistency in a set of entities
JP5448598B2 (ja) * 2009-06-24 2014-03-19 東京エレクトロン株式会社 パーティクル発生要因判定システム、課金方法、及び記憶媒体
JP7247774B2 (ja) * 2019-06-14 2023-03-29 株式会社プロテリアル 情報処理システムおよび情報処理方法
KR102798763B1 (ko) * 2019-08-09 2025-04-22 주식회사 엘지에너지솔루션 제조 설비 품질에 대한 정량화 진단법
CN112669307A (zh) 2021-01-06 2021-04-16 大冶特殊钢有限公司 基于机器视觉的低倍酸蚀缺陷自动识别与评级的方法及系统
JP7401514B2 (ja) * 2021-12-24 2023-12-19 三菱重工パワーインダストリー株式会社 伝熱管損傷原因推論装置及び伝熱管損傷原因推論方法
CN114815741B (zh) * 2022-06-27 2022-09-09 南通端高科技有限公司 一种基于信息采集的模式控制系统

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