JPH10206190A5 - - Google Patents

Info

Publication number
JPH10206190A5
JPH10206190A5 JP1997008377A JP837797A JPH10206190A5 JP H10206190 A5 JPH10206190 A5 JP H10206190A5 JP 1997008377 A JP1997008377 A JP 1997008377A JP 837797 A JP837797 A JP 837797A JP H10206190 A5 JPH10206190 A5 JP H10206190A5
Authority
JP
Japan
Prior art keywords
light intensity
intensity distribution
shows
scale
moving scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997008377A
Other languages
English (en)
Japanese (ja)
Other versions
JP3650241B2 (ja
JPH10206190A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP00837797A priority Critical patent/JP3650241B2/ja
Priority claimed from JP00837797A external-priority patent/JP3650241B2/ja
Publication of JPH10206190A publication Critical patent/JPH10206190A/ja
Priority to US09/196,055 priority patent/US6201239B1/en
Publication of JPH10206190A5 publication Critical patent/JPH10206190A5/ja
Application granted granted Critical
Publication of JP3650241B2 publication Critical patent/JP3650241B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP00837797A 1997-01-21 1997-01-21 光学式エンコーダ Expired - Fee Related JP3650241B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP00837797A JP3650241B2 (ja) 1997-01-21 1997-01-21 光学式エンコーダ
US09/196,055 US6201239B1 (en) 1997-01-21 1998-11-20 Optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00837797A JP3650241B2 (ja) 1997-01-21 1997-01-21 光学式エンコーダ

Publications (3)

Publication Number Publication Date
JPH10206190A JPH10206190A (ja) 1998-08-07
JPH10206190A5 true JPH10206190A5 (https=) 2004-12-16
JP3650241B2 JP3650241B2 (ja) 2005-05-18

Family

ID=11691543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00837797A Expired - Fee Related JP3650241B2 (ja) 1997-01-21 1997-01-21 光学式エンコーダ

Country Status (1)

Country Link
JP (1) JP3650241B2 (https=)

Similar Documents

Publication Publication Date Title
US5021649A (en) Relief diffraction grating encoder
US7220960B2 (en) Optical encoder having a light source scale and photodetector and an optical lens module using the optical encoder
EP0752599B1 (en) Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor
JP3254737B2 (ja) エンコーダー
US5671052A (en) Optical encoder
JPS625677A (ja) 周波数安定化半導体レ−ザ−素子
US5113071A (en) Encoder in which single light source projects dual beams onto grating
JP3213552B2 (ja) エンコーダの原点位置検出装置
US5572008A (en) Optical information reading apparatus with concave mirror
JPH10206190A5 (https=)
US5473470A (en) Polarization detector
JP2000275065A (ja) 光学式エンコーダ
JPH10190148A5 (https=)
JP3172360B2 (ja) ビーム３分割用反射型回折格子およびこれを用いた光ピックアップ
JP3432235B2 (ja) ホログラフィックフィルタの作成方法
JPS61263291A (ja) レ−ザ角速度センサの読出し装置
JP2537596B2 (ja) 回折格子の製造方法
JP3650241B2 (ja) 光学式エンコーダ
JP3182349B2 (ja) エンコーダの原点位置検出装置
JP4322978B2 (ja) 光学式エンコーダ
JPH01187413A (ja) 反射型エンコーダ
JP2783806B2 (ja) 光出力モニタ装置
JP3639378B2 (ja) 光学式エンコーダ
JP2972023B2 (ja) ホログラムスキャナ
JP2000173075A5 (https=)