JPH1019932A - Contact probe for testing liquid crystal displaying body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a contact probe for testing a liquid crystal displaying body wherein spaces between contact pins are varied little. SOLUTION: In a contact probe 10 for testing a liquid crystal displaying body which has a construction wherein contact pins 4 arranged in parallel are stuck on one surface of a nonconducting resin film 5 so that they intersect the nonconducting resin film 5 perpendicularly and that the fore end parts thereof project from the film, a metal film 21 is stuck on the nonconducting resin film 5 in addition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contact probe for conducting an electrical test by contacting each terminal of a liquid crystal display.

[0002]

2. Description of the Related Art Conventionally, it has been known that a contact probe is used to conduct an electrical test of a liquid crystal display. This contact probe is, as shown in a perspective view of FIG. For example, on one side of a non-conductive resin film 5 such as a polyimide resin film,
The contact pins 4 arranged in parallel and made of a u-plated metal are attached to one surface of the non-conductive resin film 5 at right angles to the longitudinal direction of the non-conductive resin film 5. Part of the contact pin 4 protrudes from the end of the conductive resin film 5. FIG. 6 is a sectional view taken along line AA of the contact probe 10 of FIG.

A method of setting the contact probe 10 in a jig in order to conduct an electrical test of a liquid crystal display using the contact probe 10 will be described more specifically with reference to FIGS. I do. FIG. 7 is an exploded perspective view of a jig for setting the contact probe 10. The jig comprises a top clamp 7 and a bottom clamp 8, and the top clamp 7 is a non-conductive resin film on the tip end side of the contact pin 4. First projection 9, which holds down 5, TABI
It has a second projection 13 for pressing the terminal 12 on the C11 side and a third projection 14 for pressing the TAB itself. The bottom clamp 8 has an inclined plate 15 and a mounting plate 16 mounted on a bottom plate 17.

A contact probe 10 is mounted on an inclined plate 15.
After the terminal 12 on the TABIC 11 side is placed between the non-conductive resin films 5 of the contact probe 10, the first protrusion 9 of the top clamp 7 is The second protrusion 13 is placed on the non-conductive resin film 5 on the tip side of the TABIC 11 so as to be in contact with the terminal 12 on the TABIC 11 side, and is attached with a bolt 18 as shown in FIG. FIG. 8 is a perspective view showing a state in which the contact probe 10 is attached to a jig with bolts 18.

[0005] Next, as shown in FIG. 9, the jig to which the contact probe 10 is attached is inserted into a frame 19 having a frame shape.
Attach to At this time, since the contact pins 4 of the contact probe 10 are kept in an inclined state, the contact pins 4 projecting from the tip of the contact probe 10 are pressed against terminals (not shown) of the liquid crystal display 20. .

FIG. 10 is a sectional view taken along the line BB of FIG. 9 in a state in which the contact probe 10 is attached to a frame 19 having a frame shape by bolts 18 'on a jig. The signal obtained from the contact pin 4 while in contact with the terminal (not shown) of the body 20 is TA
It can be transmitted to the outside through the BIC 11.

[0007]

As shown in FIGS. 5 and 6, the conventional contact probe 10 has an N-type contact probe.
It has a structure in which the contact pins 4 are made of a metal plated with Au on an i or Ni alloy and a nonconductive resin film 5 made of a polyimide resin is adhered to one surface of the nonconductive resin film 5 made of a polyimide resin. Numeral 5 absorbs moisture and elongation occurs. For this reason, the conventional contact probe 10 is provided between the contact pins 4 as shown in FIG. , The leading end of the contact pin 4 cannot be accurately brought into contact with a predetermined position of the liquid crystal display terminal, and an accurate electrical test cannot be performed.

[0008]

Means for Solving the Problems Accordingly, the present inventors have
As a result of a study to solve such a problem, a study was conducted to obtain a contact probe in which the interval t between the contact pins 4 of the conventional contact probe 10 has a constant interval, and FIG. As shown in a perspective view of FIG. 1, a metal film 21 is further attached to a non-conductive resin film 5 side of a conventional liquid crystal display test contact probe including a contact pin 4 and a non-conductive resin film 5. Thus, even when the humidity changes, the obtained contact probe 10 has a smaller change in the distance t between the contact pins 4 than the conventional contact probe 10 and thus provides accurate contact. The tip of the probe contact pin can be brought into contact with the liquid crystal display,
(B) It has been found that a non-conductive resin film may be further attached on the metal film.

The present invention has been made based on such knowledge, and as shown in FIG. 1 and FIG. 2 which is a sectional view taken along the line CC of FIG. 1, (1) contact pins arranged in parallel. A liquid crystal display body test contact probe which is attached to one surface of the non-conductive resin film so as to be orthogonal to the non-conductive resin film and the tip of the contact pin projects from the non-conductive resin film, A contact probe for testing a liquid crystal display, wherein a metal film is further adhered on the non-conductive resin film; (2) contact pins arranged in parallel so as to be orthogonal to the non-conductive resin film; A liquid crystal display test core attached to one side of a non-conductive resin film so that the tips of the contact pins protrude from the non-conductive resin film. In the tact probe, a contact probe for testing a liquid crystal display is obtained by attaching a metal film on the non-conductive resin film and further attaching a non-conductive resin film on the metal film. .

The non-conductive resin film of the contact probe for testing a liquid crystal display of the present invention is made of a polyimide resin film, and the contact pins 4 are made of Ni or a Ni alloy plated with Au. 2
1 is made of Ni, Ni alloy, Cu or Cu alloy film.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Contact Probe 1 of the Present Invention
0 is shown in FIG. First, a Cu base metal layer 1 is formed on a supporting metal plate 6 made of stainless steel, and a photoresist layer 2 is formed on the base metal layer 1 (FIG. 3A). Is exposed by applying a mask 3 having a predetermined pattern (FIG. 3 (b)). The photoresist layer 2 is developed to remove a portion to become the contact pin 4, and an opening 2a is formed in the remaining photoresist layer 2. (FIG. 3C), a Ni layer serving as a contact pin 4 is formed in the opening 2a by plating.
(D)), the photoresist layer 2 is removed (FIG. 3)
(E)).

Next, a composite film composed of the non-conductive resin film 5 and the metal film 21 is bonded on the Ni layer via an adhesive 5a (FIG. 3 (f)). The part consisting of the contact pins 4 and the base metal layer 1 is separated from the supporting metal plate 6 (FIG. 3).
(G)) Then, by removing the base metal layer 1, a contact probe 10 in which the non-conductive resin film 5 and the metal film 21 are adhered to the contact pins 4 is produced (FIG. 3 (h)).

As shown in the cross-sectional view of FIG. 4, a contact probe 10 of the present invention has a non-conductive resin film 5, a metal film 21, and a non-conductive resin film 5 on a contact pin 4 in order. May be formed to form a composite film adhered by the above. The method of using the contact probe of the present invention is exactly the same as the method of using the conventional contact probe described with reference to FIGS.

Example A method shown in FIG. 3 was used.
Pin count: 100 pin Ni contact pins, thickness:
A contact probe of the present invention having a structure in which a non-conductive resin film made of a polyimide resin and a pure copper film having a thickness of 50 μm were adhered and the distance between the pins at both ends was 9.900 mm was produced.

On the other hand, for comparison, width: 100 μm at room temperature
m, the number of pins: a structure in which a Ni contact pin having 100 pins and a non-conductive resin film made of polyimide resin having a thickness of 50 μm are adhered, the distance between the pins at both ends: 9.90
A conventional contact probe of 0 mm was manufactured.

After keeping the contact probe of the present invention and the conventional contact probe in an atmosphere at a temperature of 25 ° C. and a humidity of 70% for 3 hours, the contact probe of the present invention and the conventional contact probe at both ends thereof are obtained. As a result of measuring the distance between the contact pins, the distance between the contact pins at both ends of the contact probe of the present invention was 9.8976 mm.
The distance between the contact pins at both ends of the conventional contact probe is 9.8712 mm, and it can be seen that the change in the distance between the pins at both ends of the structure to which the pure copper film is attached is small.

[0017]

As described above, the contact probe of the present invention has a small change in the distance between the contact pins at both ends of the contact probe even in a high-temperature and high-humidity environment. Even if it does, the tip of the contact pin can be accurately brought into contact with the predetermined position of the liquid crystal display accurately, which can greatly contribute to the development of the semiconductor industry, such as no inspection errors of the liquid crystal display. is there.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a part of a contact probe of the present invention.

FIG. 2 is a sectional view taken along line CC of FIG.

FIG. 3 is a schematic explanatory view showing a method for manufacturing a contact probe of the present invention.

FIG. 4 is a sectional view showing another embodiment of the contact probe of the present invention.

FIG. 5 is a schematic perspective view of a conventional contact probe.

FIG. 6 is a sectional view taken along line AA of FIG. 6;

FIG. 7 is an exploded perspective view of a jig for mounting a conventional contact probe.

FIG. 8 is a perspective view showing a state in which a conventional contact probe is attached to a jig.

FIG. 9 shows a conventional contact probe attached to a jig.
It is a schematic perspective view which shows the state attached to the frame.

FIG. 10 is a sectional view taken along the line BB of FIG. 9 showing a state in which a conventional contact probe is attached to a jig and is attached to a frame.

FIG. 11 is a front view of the conventional contact probe of FIG. 5 viewed from a direction D.

[Description of Signs] 1 Base metal layer 2 Photoresist layer 3 Mask 4 Contact pin 5 Non-conductive resin film 6 Support metal plate 7 Top clamp 8 Bottom clamp 9 First protrusion 10 Contact probe 11 TABIC 12 Terminal 13 Second protrusion 14 Third protrusion 15 Inclined plate 16 Mounting plate 17 Bottom plate 18 Bolt 19 Frame 20 Liquid crystal display 21 Metal film

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Mitsuyoshi Ueki 12-6 Technopark, Mita-shi, Hyogo Mitsubishi Materials Corporation Mita Plant (72) Inventor Hideaki Yoshida 12-6 Technopark, Mita-shi, Hyogo Mitsubishi (72) Inventor Tadashi Nakamura 12-6 Technopark, Mita City, Hyogo Prefecture Inside of Mita Plant, Mitsubishi Materials Corporation

Claims (5)

[Claims] A contact pin arranged in parallel with one side of a non-conductive resin film so that the contact pins are orthogonal to the non-conductive resin film and the tips of the contact pins project from the non-conductive resin film. A contact probe for a liquid crystal display test, comprising: attaching a metal film on the non-conductive resin film. 2. The method according to claim 1, wherein the contact pins arranged in parallel are arranged on one surface of the non-conductive resin film so that the contact pins are orthogonal to the non-conductive resin film and the tips of the contact pins project from the non-conductive resin film. A liquid crystal display test contact probe having a liquid crystal display, wherein a metal film is bonded on the non-conductive resin film, and a non-conductive resin film is further bonded on the metal film. Test contact probe. 3. A contact probe for testing a liquid crystal display according to claim 1, wherein said contact pins are formed of Au or Ni plated with Ni or a Ni alloy. 4. The method according to claim 1, wherein the metal film is a Ni film, a Ni film,
3. An alloy film, a Cu film, and one of a Cu alloy film.
The contact probe for liquid crystal display test described in the above. 5. The contact pin according to claim 1, wherein the contact pin is a contact pin having a structure in which Au is plated on Ni or a Ni alloy, and the metal film is one of a Ni film, a Ni alloy film, a Cu film and a Cu alloy film. 3. The contact probe according to claim 1, wherein the contact probe is made of a metal film.