JPH10197558A - Performance checking mechanism for ic device - Google Patents

Performance checking mechanism for ic device

Info

Publication number
JPH10197558A
JPH10197558A JP9011911A JP1191197A JPH10197558A JP H10197558 A JPH10197558 A JP H10197558A JP 9011911 A JP9011911 A JP 9011911A JP 1191197 A JP1191197 A JP 1191197A JP H10197558 A JPH10197558 A JP H10197558A
Authority
JP
Japan
Prior art keywords
contact
performance
casings
contactor
connated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9011911A
Other languages
Japanese (ja)
Inventor
Katsumasa Itabashi
克正 板橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ITABASHI GIKEN KK
Original Assignee
ITABASHI GIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ITABASHI GIKEN KK filed Critical ITABASHI GIKEN KK
Priority to JP9011911A priority Critical patent/JPH10197558A/en
Publication of JPH10197558A publication Critical patent/JPH10197558A/en
Pending legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve performance checking accuracy by housing contactors having contactor base parts on the central side and contactor lever parts extendedly arranged on its both ends, in a large number of contactor housing chambers formed in a pair of connated casings. SOLUTION: In a pair of casings 1a and 1b, a large number of contactor housing chambers 3a having small through holes 4a are respectively formed in a row in the vertical direction of connated surfaces 2a on both bottom surfaces. Contactors 5 are formed of contactor base parts 5a formed in a coil spring shape on the central side and contactor lever parts 5b which are extendedly arranged on its both ends and are formed in a bar shape and have contact surfaces 5c on the tips. The base parts 5a are respectively housed in the housing chambers 3a, and the lever parts 5b are respectively penetrated through the small holes 4a, and the connated surfaces 2a of the casings 1a and 1b are connated to each other. Then, one side contact surface 5c is brought into contact with an electrode of an IC device, and the other side contact surface 5c is connected to a performance checker, and performance is checked. In this way, the contactors 5 can be simplified and miniaturized, and a performance checking mechanism can cope with a performance check of the miniaturized IC device.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はICデバイスの性能をチ
ェックするICデバイス用性能チェック機構に関するも
のであって、更に、詳細には、極小化するICデバイス
の多数の電極に同時に接触させてICデバイスの性能を
的確にチェックする性能チェック機構に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a performance checking mechanism for an IC device for checking the performance of an IC device, and more particularly, to an IC device which is simultaneously contacted with a large number of electrodes of an IC device to be minimized. The present invention relates to a performance check mechanism for accurately checking the performance of a device.

【0002】[0002]

【従来技術】従来、これ等のICデバイスのチェック機
構は、図2に図示する如く、ケーシング11の一面に多
数の接触子収納部12を一列状に形成し、該夫々の接触
子収納部12の底面に貫通小孔13を貫設させると共
に、接触子14は筒状の接触子基部14aを備え、該接
触子基部14aの先端側に接触面14bを形成した接触
子杆部14cを延設させ、前記接触子収納部12に接触
子基部14aを収納させると共に接触子杆部14cを貫
通小孔13に貫通させて、前記筒状の接触子基部14a
の内筒にピストン状の押圧子15の先端にコイルスプリ
ング16を介装挿通させて、接触子の接触面にICデバ
イスの電極を接触させて性能をチェックしていた。
2. Description of the Related Art Conventionally, such a check mechanism of an IC device has, as shown in FIG. The contact 14 has a cylindrical contact base 14a, and a contact rod 14c having a contact surface 14b formed at the tip end of the contact base 14a. Then, the contact base portion 14a is housed in the contact housing portion 12 and the contact rod portion 14c is made to penetrate through the small through-hole 13 so that the cylindrical contact base portion 14a is formed.
A coil spring 16 is inserted through the inner cylinder of the piston 15 at the tip of a piston-shaped pressing element 15, and the electrode of the IC device is brought into contact with the contact surface of the contact element to check the performance.

【0003】[0003]

【解決しようとする課題】然し乍、近年のICデバイス
は加速度的に極小化されており、前述のようなICデバ
イスの性能チェック機構では、構造が複雑なためICデ
バイスの極小化に追いつけず、性能チェックの精度、効
率化の低下に繋がっていた。
However, IC devices in recent years have been miniaturized at an accelerating rate, and the performance check mechanism of the IC device described above cannot keep up with the miniaturization of IC devices due to its complicated structure. This has led to a decrease in the accuracy and efficiency of performance checks.

【0004】[0004]

【課題を解決する手段】本発明は上記の課題に鑑みて、
鋭意研鑚の結果、合着面で合着される一対のケーシング
と、ケーシングの合着面の垂直方向に且つ一列状に形成
した多数の接触子収納室と、接触子収納室の底面に貫設
させた貫通小孔と、接触子の中央辺にコイルスプリング
状に形成した接触子基部と、接触子基部の両端へ延設し
た棒状の接触子杆部と、接触子杆部の先端に形成した接
触面とを備えたものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems.
As a result of diligent study, a pair of casings to be joined at the joining surface, a large number of contact storage chambers formed vertically and in a row in the joining surface of the casing, and A through hole, a contact base formed in the shape of a coil spring at the center of the contact, a rod-shaped contact rod extending to both ends of the contact base, and a tip formed at the tip of the contact rod. And a contact surface that is provided.

【0005】従って、本発明の目的は、極小化されたI
Cデバイスの性能チャックに対応しうるICデバイス用
性能チェック機構を創案して提供するものである。
Accordingly, it is an object of the present invention to provide a miniaturized I
An object of the present invention is to provide and provide a performance check mechanism for an IC device that can correspond to a performance chuck of a C device.

【0006】[0006]

【作用】本発明は、接触子をコイルスプリング状の接触
子基部と、該接触子基部から延設させた接触子杆部から
成る単一部材に形成しているために、ICデバイス用性
能チェック機構の極小化が図れると共に、トラブルの発
生も激減するものである。
According to the present invention, since the contact is formed as a single member consisting of a contact base in the form of a coil spring and a contact rod extending from the contact base, a performance check for an IC device is performed. In addition to minimizing the mechanism, the occurrence of troubles is drastically reduced.

【0007】[0007]

【実施例】以下、本発明のICデバイス用性能チェック
機構を実施例の図面によって具体的に説明する。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a performance check mechanism for an IC device according to the present invention.

【0008】図1は本発明に係るICデバイス用性能チ
ェック機構の実施例の要部説明図であり、図2は従来の
ICデバイス用性能チェック機構の説明図である。
FIG. 1 is an explanatory view of a main part of an embodiment of a performance check mechanism for an IC device according to the present invention, and FIG. 2 is an explanatory view of a conventional performance check mechanism for an IC device.

【0009】本発明はICデバイスの性能をチェックす
るICデバイス用性能チェック機構に関するものであっ
て、更に、詳細には、極小化するICデバイスの多数の
電極に同時に接触させてICデバイスの性能を的確にチ
ェックする性能チェック機構に関するものであり、合着
面で合着される一対のケーシング1a.1bと、該夫々
のケーシング1a.1bの合着面2a.2bの垂直方向
に且つ一列状に形成した多数の接触子収納室3a.3b
と、該多数の接触子収納室3a.3bの夫々の底面に貫
設させた貫通小孔4a.4bと、多数の接触子5の夫々
の中央辺にコイルスプリング状に形成した接触子基部5
aと、該夫々の接触子基部5aの両端へ夫々延設した棒
状の接触子杆部5b.5bと、該夫々の接触子杆部5
b.5bの先端に形成した接触面5c.5cとを備え、
前記多数の接触子収納室3a.3bに夫々接触子基部5
aを収納し、前記夫々の貫通小孔4a.4bに夫々の接
触子杆部5b.5bを貫通させると共に、前記一対のケ
ーシング1a.1bの合着面2a.2bを合着させたも
のである。
The present invention relates to a performance checking mechanism for an IC device for checking the performance of an IC device. More specifically, the present invention relates to a mechanism for checking the performance of an IC device by simultaneously contacting a large number of electrodes of an IC device to be minimized. The present invention relates to a performance checking mechanism for accurately checking a pair of casings 1a. 1b and the respective casings 1a. 1b coalescing surface 2a. 2b, a large number of contact storage chambers 3a. 3b
And the plurality of contact storage chambers 3a. 3b, through-holes 4a. 4b, and a contact base 5 formed in a coil spring shape on the central side of each of the plurality of contacts 5
a, and rod-shaped contact rod portions 5b. b extending to both ends of the respective contact base portions 5a. 5b and the respective contact rod portions 5
b. 5b. A contact surface 5c. 5c,
The plurality of contact storage chambers 3a. 3b, each of the contact bases 5
a in each of the through holes 4a. 4b have respective contact rod portions 5b. 5b and the pair of casings 1a. 1b coalescing surface 2a. 2b is coalesced.

【0010】即ち、本発明のICデバイス用性能チェッ
ク機構のケーシング1a.1bは樹脂モールド成型等の
手段によって形成したもので、外観は函状のもので、夫
々の平坦状の合着面2a.2bによって一方のケーシン
グ1aと他方のケーシング1bとに分割されるものであ
り、一方のケーシング1aと他方のケーシング1bと対
称に形成しても、非対称に形成しても構わないものであ
る。
That is, the casing 1a. Of the performance check mechanism for IC devices of the present invention. 1b is formed by means such as resin molding and has a box-like appearance, and each of the flat bonding surfaces 2a. It is divided into one casing 1a and the other casing 1b by 2b, and may be formed symmetrically or asymmetrically with the one casing 1a and the other casing 1b.

【0011】そして、図1に図示する如く、一方のケー
シング1aと他方のケーシング1bとへ夫々の合着面2
a.2bに対して直角方向に多数の有底の円筒状の接触
子収納室3a.3bを一列状に夫々形成しているもので
ある。
Then, as shown in FIG. 1, the respective joining surfaces 2 are attached to one casing 1a and the other casing 1b.
a. 2b, a large number of cylindrical contact storage chambers 3a. 3b are formed in a line.

【0012】更に、前記多数の接触子収納室3a.3b
の夫々の底面にはケーシング1a.1bを貫通させて後
述する接触子5の接触子杆部5b.5bを挿通させる貫
通小孔4a.4bを貫設させているものである。
Further, the plurality of contact chambers 3a. 3b
Has a casing 1a. 1b to penetrate through the contact rod 5b. 5b to penetrate through holes 4a. 4b.

【0013】次いで、接触子5は導電性の鉄族金属線等
を用いており、中央辺を捲回させて熱処理をして伸縮可
能な弾力を有するコイルスプリング状に形成した接触子
基部5aを備えており、更に、接触子基部5aの両端へ
は棒状の接触子杆部5b.5bを延設しており、接触子
杆部5b.5bの先端は接触面5c.5cを形成してい
るものである。
Next, the contact 5 is made of a conductive iron group metal wire or the like. Further, a bar-shaped contact rod 5b. 5b are extended, and the contact rod portions 5b. 5b has a contact surface 5c. 5c.

【0014】更に、接触子5には通電性、耐腐食性、摺
動性を考慮してめっき加工を施しているものである。
Further, the contact 5 is plated in consideration of electrical conductivity, corrosion resistance and slidability.

【0015】本発明のICデバイス用性能チェック機構
は一方のケーシング1aと他方のケーシング1bとを合
着面2a.2bで分割しておき、片側のケーシング1a
の合着面2aの垂直方向に形成した一列状の多数の接触
子収納室3aに順次接触子5を挿入するものであるが、
接触子5の挿入側の接触子基部5aの一端はケーシング
の接触子収納室3aの底面に当接し、接触子杆部5bは
貫通小孔4aを貫通してケーシング1aの外方に突出す
るものである。
The performance check mechanism for an IC device according to the present invention includes the first casing 1a and the second casing 1b joined to each other at the joining surfaces 2a. 2b, and the casing 1a on one side
The contact 5 is sequentially inserted into a large number of contact storage chambers 3a in a row formed in the vertical direction of the joining surface 2a.
One end of the contact base 5a on the insertion side of the contact 5 abuts against the bottom surface of the contact housing 3a of the casing, and the contact rod 5b penetrates through the small through-hole 4a and protrudes outward from the casing 1a. It is.

【0016】そして、他側のケーシング1bの合着面2
bを片側のケーシング1aの合着面2aに合着させる
と、片側のケーシング1aの合着面2aから突出してい
る接触子基部5aは他側のケーシング1bの接触子収納
室3bに収納されると同時に、他側のケーシング1bの
夫々の貫通小孔4bに夫々の接触5子の接触子杆部5b
を貫通させるもので、接触子杆部5bの先端辺は他側の
ケーシング1bの外方に突出するものである。
The joining surface 2 of the other casing 1b
When b is bonded to the bonding surface 2a of the casing 1a on one side, the contact base 5a protruding from the bonding surface 2a of the casing 1a on one side is stored in the contact storage chamber 3b of the casing 1b on the other side. At the same time, the contact rod portions 5b of the respective contacts 5 are inserted into the respective small through holes 4b of the casing 1b on the other side.
The tip side of the contact rod portion 5b projects outward from the casing 1b on the other side.

【0017】次いで、片側の接触5子の先端に形成した
接触面5cをICデバイスの電極に接触させて、他側の
接触子5の先端に形成した接触面5cを性能チェッカー
に接続させてICデバイスの性能をチェックするもので
ある。
Next, the contact surface 5c formed at the tip of one contact 5 is brought into contact with the electrode of the IC device, and the contact surface 5c formed at the tip of the other contact 5 is connected to the performance checker. This is to check the performance of the device.

【0018】[0018]

【発明の効果】本発明はICデバイス用性能チェック機
構は、前述の構成にように合着面で合着する一対のケー
シングを設け、ケーシングには接触子を内装する接触子
収納室と、貫通小孔とを設け、接触子はコイルスプリン
グ状の接触子基部と、該接触子基部から延設させた接触
子杆部から成る単一部材に形成し単純化されており、極
小化が図れると共に、的確に機能しトラブルの発生も激
減するものであり、画期的で実用性の高い発明である。
According to the present invention, the performance check mechanism for an IC device is provided with a pair of casings which are joined together at the joining surface as described above. A small hole is provided, and the contact is formed as a single member including a coil spring-shaped contact base and a contact rod extending from the contact base, thereby simplifying the contact. It is an invention that is epoch-making and highly practical because it functions properly and the occurrence of troubles is drastically reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は本発明に係るICデバイス用性能チェッ
ク機構の実施例の要部説明図である。
FIG. 1 is an explanatory view of a main part of an embodiment of a performance check mechanism for an IC device according to the present invention.

【図2】図2は従来のICデバイス用性能チェック機構
の説明図である。
FIG. 2 is an explanatory diagram of a conventional IC device performance check mechanism.

【符号の説明】[Explanation of symbols]

1a ケーシング 1b ケーシング 2a 合着面 2b 合着面 3a 接触子収納室 3b 接触子収納室 4a 貫通小孔 4b 貫通小孔 5 接触子 5a 接触子基部 5b 接触子杆部 5c 接触面 1a Casing 1b Casing 2a Joining surface 2b Joining surface 3a Contact storage chamber 3b Contact storage chamber 4a Small through hole 4b Small through hole 5 Contact 5a Contact base 5b Contact rod 5c Contact surface

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】合着面で合着される一対のケーシングと、
該夫々のケーシングの合着面の垂直方向に且つ一列状に
形成した多数の接触子収納室と、該多数の接触子収納室
の夫々の底面に貫設させた貫通小孔と、多数の接触子の
夫々の中央辺にコイルスプリング状に形成した接触子基
部と、該夫々の接触子基部の両端へ夫々延設した棒状の
接触子杆部と、該夫々の接触子杆部の先端に形成した接
触面とを備え、前記多数の接触子収納室に夫々接触子基
部を収納し、前記夫々の貫通小孔に夫々の接触子杆部を
貫通させると共に、前記一対のケーシングの合着面を合
着させたことを特徴とするICデバイス用性能チェック
機構。
1. A pair of casings joined at a joining surface,
A large number of contact storage chambers formed in a row in a direction perpendicular to the joining surface of the respective casings, a small through-hole penetrating through the bottom surface of each of the multiple contact storage chambers, A contact base formed in a coil spring shape on the center side of each of the contacts, rod-shaped contact rods extending to both ends of the respective contact bases, and a tip formed on each of the contact rods; The contact bases are respectively housed in the large number of contact storage chambers, the respective contact rods are passed through the respective small through holes, and the joint surfaces of the pair of casings are formed. A performance checking mechanism for an IC device, wherein the performance checking mechanism is combined.
JP9011911A 1997-01-07 1997-01-07 Performance checking mechanism for ic device Pending JPH10197558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9011911A JPH10197558A (en) 1997-01-07 1997-01-07 Performance checking mechanism for ic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9011911A JPH10197558A (en) 1997-01-07 1997-01-07 Performance checking mechanism for ic device

Publications (1)

Publication Number Publication Date
JPH10197558A true JPH10197558A (en) 1998-07-31

Family

ID=11790910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9011911A Pending JPH10197558A (en) 1997-01-07 1997-01-07 Performance checking mechanism for ic device

Country Status (1)

Country Link
JP (1) JPH10197558A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020134217A (en) * 2019-02-15 2020-08-31 株式会社サンケイエンジニアリング Spring structure and inspection jig having the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63293845A (en) * 1987-05-27 1988-11-30 Hitachi Ltd Apparatus for inspecting semiconductor element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63293845A (en) * 1987-05-27 1988-11-30 Hitachi Ltd Apparatus for inspecting semiconductor element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020134217A (en) * 2019-02-15 2020-08-31 株式会社サンケイエンジニアリング Spring structure and inspection jig having the same

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