JP2020134217A - Spring structure and inspection jig having the same - Google Patents
Spring structure and inspection jig having the same Download PDFInfo
- Publication number
- JP2020134217A JP2020134217A JP2019025165A JP2019025165A JP2020134217A JP 2020134217 A JP2020134217 A JP 2020134217A JP 2019025165 A JP2019025165 A JP 2019025165A JP 2019025165 A JP2019025165 A JP 2019025165A JP 2020134217 A JP2020134217 A JP 2020134217A
- Authority
- JP
- Japan
- Prior art keywords
- spring structure
- housing
- conductive portion
- conductive
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 26
- 125000006850 spacer group Chemical group 0.000 claims description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
Description
本発明は、導電性及びバネ性を有するバネ構造体及びそれを備える検査治具に係るものである。 The present invention relates to a spring structure having conductivity and spring property and an inspection jig provided with the spring structure.
このようなバネ構造体は、コンタクトプローブやスイッチ、コネクタ等、様々な機器の一部品として用いられる。 Such a spring structure is used as a part of various devices such as a contact probe, a switch, and a connector.
コンタクトプローブとは、主に、集積回路等の半導体部品や、プリント配線板等の電子基盤の電気的特性、その他電子機器・電子部品の検査に用いられる電子部品であり、バネ性や接触信頼性を確保するためのバネ構造体と、検査対象物と接触するプランジャと、を備えている。また、プランジャは、バネ構造体の両端部に設けられている。 A contact probe is an electronic component mainly used for inspecting semiconductor parts such as integrated circuits, electrical characteristics of electronic boards such as printed wiring boards, and other electronic devices and electronic parts, and has springiness and contact reliability. It is equipped with a spring structure to secure the equipment and a plunger that comes into contact with the inspection object. Further, plungers are provided at both ends of the spring structure.
このようなコンタクトプローブの発明として、例えば、特許文献１には、導電性およびバネ性を有する薄板によって一体で形成されており、一端部を構成するとともに所定の第１被接触物に接触する第１接触部（プランジャ）と、他端部を構成するとともに所定の第２被接触物に接触する第２接触部（プランジャ）と、第１接触部と第２接触部とを繋ぐとともにコンタクトプローブの長手方向へコンタクトプローブを変形させるための変形部（バネ構造体）とを備えたコンタクトプローブが記載されている。変形部は、第１接触部に繋がる第１変形部と、第２接触部に繋がる第２変形部と、第１変形部と第２変形部との間に配置される第３変形部とを備え、第３変形部のバネ定数は、第１変形部のバネ定数および第２変形部のバネ定数よりも小さくなっている。
このような構成により、所定の接触圧で被接触物に接触させることが可能で、かつ、撓み量を所定量以上とすることが可能となる。
As an invention of such a contact probe, for example, in Patent Document 1, a thin plate having conductivity and spring property is integrally formed, and one end portion thereof is formed and the contact probe comes into contact with a predetermined first contact object. The contact probe connects the first contact portion (plunger), the second contact portion (plunger) that constitutes the other end portion and contacts a predetermined second contact object, the first contact portion and the second contact portion, and the contact probe. A contact probe provided with a deformed portion (spring structure) for deforming the contact probe in the longitudinal direction is described. The deformed portion includes a first deformed portion connected to the first contact portion, a second deformed portion connected to the second contact portion, and a third deformed portion arranged between the first deformed portion and the second deformed portion. The spring constant of the third deformed portion is smaller than the spring constant of the first deformed portion and the spring constant of the second deformed portion.
With such a configuration, it is possible to bring the object into contact with a predetermined contact pressure, and the amount of deflection can be set to a predetermined amount or more.
また、特許文献２には、両端に導電端子（プランジャ）を有する蛇腹体（バネ構造体）と、前記導電端子の各々の基部から両側に延在する一対の第１，第２弾性可動腕部と、を備え、一対の前記第１，第２弾性可動腕部の自由端部が、前記導電端子（プランジャ）の軸心方向の押圧に応じて相互に接離可能に配置されていることを特徴とするコンタクトプローブが記載されている。
このような構成により、所望の導通性を有し、接触信頼性の高いコンタクトプローブを提供することが可能となる。
Further, Patent Document 2 describes a bellows body (spring structure) having conductive terminals (plungers) at both ends, and a pair of first and second elastic movable arms extending from the bases of the conductive terminals to both sides. And, the free ends of the pair of the first and second elastic movable arms are arranged so as to be in contact with each other in response to the pressing of the conductive terminal (plunger) in the axial direction. A featured contact probe is described.
With such a configuration, it is possible to provide a contact probe having desired conductivity and high contact reliability.
しかしながら、特許文献１及び特許文献２に記載のバネ構造体は、何れも蛇型に湾曲した形状であるため、製造に際して、製造機器の精密な制御が必要となり、不良品の発生等製造性の悪化が懸念される。 However, since the spring structures described in Patent Document 1 and Patent Document 2 both have a serpentine curved shape, precise control of the manufacturing equipment is required at the time of manufacturing, and the manufacturability such as the occurrence of defective products is improved. There is concern about deterioration.
本発明は上記のような実状に鑑みてなされたものであり、所望の導電性及びバネ性を確保しつつ、簡易に製造可能なバネ構造体及びそれを備える検査治具を提供することを課題とする。 The present invention has been made in view of the above-mentioned actual conditions, and it is an object of the present invention to provide a spring structure that can be easily manufactured while ensuring desired conductivity and springiness, and an inspection jig provided with the spring structure. And.
上記課題を解決するために、本発明は、導電性及びバネ性を有し、軸方向に伸縮可能なバネ構造体であって、
前記軸方向に対して略平行に延びる一対の第一導電部と、略巻きバネ状の第二導電部と、前記第一導電部と前記第二導電部とを連結する一対の連結部と、を備え、
前記第一導電部、前記第二導電部及び前記連結部は、一体に形成されていることを特徴とする。
In order to solve the above problems, the present invention is a spring structure that has conductivity and springiness and can expand and contract in the axial direction.
A pair of first conductive portions extending substantially parallel to the axial direction, a substantially wound spring-shaped second conductive portion, and a pair of connecting portions connecting the first conductive portion and the second conductive portion. With
The first conductive portion, the second conductive portion, and the connecting portion are integrally formed.
本発明によれば、各部が単一の棒状体により形成されていることで簡易な構造となり、略巻きバネ状の第二導電部によりバネ性を確保しつつ、製造性を向上させることが可能となる。 According to the present invention, each part is formed of a single rod-like body to form a simple structure, and a substantially wound spring-like second conductive part can secure springiness and improve manufacturability. It becomes.
本発明の好ましい形態では、前記第一導電部が延びる方向と前記第二導電部の中心軸方向とが一致していることを特徴とする。 A preferred embodiment of the present invention is characterized in that the direction in which the first conductive portion extends and the direction in the central axis of the second conductive portion coincide with each other.
このような構成とすることで、バネ構造体が軸方向に押圧された際の、バネ構造体の周方向への変位を抑制することが可能となる。 With such a configuration, it is possible to suppress the displacement of the spring structure in the circumferential direction when the spring structure is pressed in the axial direction.
本発明の好ましい形態では、前記第一導電部と前記連結部とがなす角度が、９０度以下であることを特徴とする。 A preferred embodiment of the present invention is characterized in that the angle formed by the first conductive portion and the connecting portion is 90 degrees or less.
このような構成とすることで、バネ構造体が軸方向に押圧された際の、バネ構造体の周方向への変位を、さらに抑制することが可能となる。 With such a configuration, it is possible to further suppress the displacement of the spring structure in the circumferential direction when the spring structure is pressed in the axial direction.
本発明の好ましい形態では、前記第一導電部及び前記第二導電部は、銅、銀、金、白金の何れかを含む合金により形成されていることを特徴とする。 A preferred embodiment of the present invention is characterized in that the first conductive portion and the second conductive portion are formed of an alloy containing any one of copper, silver, gold, and platinum.
このような構成とすることで、本発明の導電性及びバネ性がさらに良好なものとなる。 With such a configuration, the conductivity and springiness of the present invention are further improved.
また、前述した本発明のバネ構造体は、前記第一導電部の一方が挿通される位置決め孔が設けられている第一筺体と、前記第一導電部の他方が挿通される位置決め孔が設けられている第二筺体と、を有している筺体を備える検査治具に用いることができる。 Further, the spring structure of the present invention described above is provided with a first housing provided with a positioning hole through which one of the first conductive portions is inserted and a positioning hole through which the other of the first conductive portions is inserted. It can be used for an inspection jig including a second housing and a housing having the same.
この検査治具では、バネ構造体の位置決めを正確に行うことができ、精度の高い検査を行うことが可能となる。また、バネ構造体の破壊を抑制することが可能となる。 With this inspection jig, the spring structure can be accurately positioned, and highly accurate inspection can be performed. In addition, it is possible to suppress the destruction of the spring structure.
本発明の好ましい形態では、前記筺体は、前記第一筺体と前記第二筺体との間に介装されるスペーサーを有していることを特徴とする。 In a preferred embodiment of the present invention, the housing is characterized by having a spacer interposed between the first housing and the second housing.
このような構成とすることで、位置決め孔から突出する第一導電部の長さを、検査状況等に応じて自在に調節することが可能となる。 With such a configuration, the length of the first conductive portion protruding from the positioning hole can be freely adjusted according to the inspection situation and the like.
本発明によれば、所望の導電性及びバネ性を確保しつつ、簡易に製造可能なバネ構造体及びそれを備える検査治具を提供することができる。 According to the present invention, it is possible to provide a spring structure that can be easily manufactured while ensuring desired conductivity and springiness, and an inspection jig provided with the spring structure.
以下、図面を用いて、本発明の実施形態に係るバネ構造体及びそれを備える検査治具について説明する。
なお、以下に示す実施形態は本発明の一例であり、本発明を以下の実施形態に限定するものではない。また、これらの図において、符号１は、本実施形態に係るバネ構造体、符号２は、本実施形態に係る検査治具を示す。
Hereinafter, the spring structure according to the embodiment of the present invention and the inspection jig provided with the spring structure will be described with reference to the drawings.
The embodiments shown below are examples of the present invention, and the present invention is not limited to the following embodiments. Further, in these figures, reference numeral 1 indicates a spring structure according to the present embodiment, and reference numeral 2 indicates an inspection jig according to the present embodiment.
図１（ア）は、バネ構造体１の正面図、図１（イ）は、（ア）の部分拡大図である。
図１（ア）に示すように、バネ構造体１は、銅合金により形成され、導電性及びバネ性を有し、軸方向Ａに伸縮可能な構成となっている。
また、バネ構造体１は、軸方向Ａに対して略平行に延びる細長の一対の第一導電部１１と、軸方向Ａ外側に付勢する略巻きバネ状の第二導電部１２と、第一導電部１１と第二導電部１２とを連結する一対の連結部１３と、を備えている。
FIG. 1A is a front view of the spring structure 1, and FIG. 1B is a partially enlarged view of FIG. 1A.
As shown in FIG. 1A, the spring structure 1 is formed of a copper alloy, has conductivity and springiness, and has a structure that can expand and contract in the axial direction A.
Further, the spring structure 1 includes a pair of elongated first conductive portions 11 extending substantially parallel to the axial direction A, a substantially wound spring-shaped second conductive portion 12 urging outward in the axial direction A, and a second conductive portion 12. A pair of connecting portions 13 for connecting the one conductive portion 11 and the second conductive portion 12 are provided.
一対の連結部１３は、第二導電部１２の両端から、第二導電部１２の中心軸に向かって、かつ軸方向Ａに対して垂直方向に延びており、その端部が、各第一導電部１１の一端と連結している。 The pair of connecting portions 13 extend from both ends of the second conductive portion 12 toward the central axis of the second conductive portion 12 and in the direction perpendicular to the axial direction A, and the end portions thereof are each first. It is connected to one end of the conductive portion 11.
さらにバネ構造体１の構成を詳述すれば、バネ構造体１を構成する各部材（第一導電部１１、第二導電部１２及び連結部１３）は、単一の棒状体を湾曲させることにより一体に形成されている。
なお、第二導電部１２の総巻き数は２であるが、これに限定されず、検査状況等に応じて適宜変更可能である。
Further elaborating the configuration of the spring structure 1, each member (first conductive portion 11, second conductive portion 12 and connecting portion 13) constituting the spring structure 1 is formed by bending a single rod-shaped body. Is integrally formed by.
The total number of turns of the second conductive portion 12 is 2, but the total number of turns is not limited to this, and can be appropriately changed depending on the inspection situation and the like.
図１（イ）に示すように、バネ構造体１は、第一導電部１１と連結部１３とがなす角度θが、９０度となるように構成されている。
なお、第一導電部１１と連結部１３とがなす角度は、９０度以下であれば特に限定されない。また、バネ構造体１を構成する各部材の境界線は点線で示している。
As shown in FIG. 1A, the spring structure 1 is configured such that the angle θ formed by the first conductive portion 11 and the connecting portion 13 is 90 degrees.
The angle formed by the first conductive portion 11 and the connecting portion 13 is not particularly limited as long as it is 90 degrees or less. The boundary line of each member constituting the spring structure 1 is shown by a dotted line.
図１（ウ）は、バネ構造体１の平面図、図１（エ）は、（ウ）の部分拡大図である。
図１（ウ）に示すように、バネ構造体１は、第一導電部１１が延びる方向と第二導電部１２の中心軸方向とが一致する構成となっている。
なお、図１（エ）においても、図１（ウ）と同様に、バネ構造体１を構成する各部材の境界線は点線で示している。
FIG. 1 (c) is a plan view of the spring structure 1, and FIG. 1 (d) is a partially enlarged view of (c).
As shown in FIG. 1 (c), the spring structure 1 has a configuration in which the direction in which the first conductive portion 11 extends and the direction in the central axis of the second conductive portion 12 coincide with each other.
In addition, also in FIG. 1 (d), the boundary line of each member constituting the spring structure 1 is shown by a dotted line as in FIG. 1 (c).
なお、バネ構造体１の軸方向Ａの長さａ１は、例えば、２１．６ｍｍに設定されている。また、第二導電部１２と連結部１３を合わせた軸方向Ａの長さａ２は、例えば、３．６ｍｍに設定されている。また、バネ構造体１の直径は、例えば、０．２６ｍｍに設定されている。 The length a1 of the spring structure 1 in the axial direction A is set to, for example, 21.6 mm. Further, the length a2 in the axial direction A in which the second conductive portion 12 and the connecting portion 13 are combined is set to, for example, 3.6 mm. The diameter of the spring structure 1 is set to, for example, 0.26 mm.
図２に示すように、筺体Ｈは、第一導電部１１の一方が挿通される位置決め孔ｒ１が設けられている略長方形板状の第一筺体Ｈ１と、第一導電部１１の他方が挿通される位置決め孔ｒ２が設けられている略長方形板状の第二筺体Ｈ２と、第一筺体Ｈ１と第二筺体Ｈ２との間に介装されるスペーサーＨ３と、を有している。 As shown in FIG. 2, the housing H has a substantially rectangular plate-shaped first housing H1 provided with a positioning hole r1 through which one of the first conductive portions 11 is inserted, and the other of the first conductive portions 11 is inserted. It has a substantially rectangular plate-shaped second housing H2 provided with a positioning hole r2 to be formed, and a spacer H3 interposed between the first housing H1 and the second housing H2.
また、図２（ウ）に示すように、位置決め孔ｒ１及びｒ２は共に、厚さ方向に貫通しており、一方の開口端近傍から開口端に向かうに伴って漸次拡径するテーパー部ｔを有している。そして、筺体Ｈは、位置決め孔ｒ１及びｒ２それぞれのテーパー部ｔが向かい合うようにして組み立てられる。こうすることで、テーパー部ｔ及びスペーサーＨ３により、第二導電部１２が収まる空間が形成される。 Further, as shown in FIG. 2C, both the positioning holes r1 and r2 penetrate in the thickness direction, and a tapered portion t whose diameter gradually increases from the vicinity of one opening end toward the opening end Have. Then, the housing H is assembled so that the tapered portions t of the positioning holes r1 and r2 face each other. By doing so, the tapered portion t and the spacer H3 form a space in which the second conductive portion 12 can be accommodated.
以下、図３を用いて、筺体Ｈの構成をさらに詳述する。 Hereinafter, the configuration of the housing H will be described in more detail with reference to FIG.
図３に示すように、第一筺体Ｈ１及び第二筺体Ｈ２は、短辺方向及び長辺方向に沿って等間隔に、複数の位置決め孔ｒ１及びｒ２が形成された位置決め孔形成部Ｈ１ａ及びＨ２ａと、筺体Ｈを構成する各部材を連結する連結具Ｂ（図４参照）を挿通するための連結孔ｃ１及びｃ２が形成された外枠部Ｈ１ｂ及びＨ２ｂと、により構成されている。
なお、位置決め孔Ｈ１及びＨ２の数は同一である。
As shown in FIG. 3, the first housing body H1 and the second housing body H2 have positioning hole forming portions H1a and H2a in which a plurality of positioning holes r1 and r2 are formed at equal intervals along the short side direction and the long side direction. And the outer frame portions H1b and H2b in which the connecting holes c1 and c2 for inserting the connecting tool B (see FIG. 4) for connecting the members constituting the housing H are formed.
The number of positioning holes H1 and H2 is the same.
第一筺体Ｈ１において、位置決め孔形成部Ｈ１ａは、外枠部Ｈ１ｂから上方に突出形成されており、外枠部Ｈ１ｂと異なる厚みとなっている。第二筺体Ｈ２において、位置決め孔形成部Ｈ２ａと外枠部Ｈ２ｂとは、同一の厚みで形成されている。 In the first housing H1, the positioning hole forming portion H1a is formed so as to project upward from the outer frame portion H1b, and has a thickness different from that of the outer frame portion H1b. In the second housing H2, the positioning hole forming portion H2a and the outer frame portion H2b are formed to have the same thickness.
スペーサーＨ３は、外形が略長方形状の枠体であり、その周縁に沿って筺体Ｈを構成する各部材を連結するための連結孔ｃ３が形成されている。 The spacer H3 is a frame body having a substantially rectangular outer shape, and a connecting hole c3 for connecting each member constituting the housing body H is formed along the peripheral edge thereof.
筺体Ｈは、第一筺体Ｈ１、第二筺体Ｈ２及びスペーサーＨ３それぞれの周縁を一致させることで、各部材が有する連結孔ｃ１、ｃ２及びｃ３のそれぞれの中心軸が一致し、複数の位置決め孔ｒ１及びｒ２のそれぞれの中心軸が一致するように構成されている。 By matching the peripheral edges of the first housing H1, the second housing H2, and the spacer H3, the housing H has the central axes of the connecting holes c1, c2, and c3 of each member, and the plurality of positioning holes r1 And r2 are configured so that their respective central axes coincide with each other.
検査治具２を用いて検査を実施する際、使用者は、まず、第二筺体Ｈ２の各位置決め孔ｒ２にバネ構造体１の一方の第一導電部１１を挿通させる。 When performing an inspection using the inspection jig 2, the user first inserts one of the first conductive portions 11 of the spring structure 1 into each positioning hole r2 of the second housing H2.
次に、使用者は、第二筺体Ｈ２の上面にスペーサーＨ３を載置し、スペーサーＨ３の上面に第一筺体Ｈ１を載置する。このとき、第一筺体Ｈ１、第一筺体Ｈ２及びスペーサーＨ３それぞれの周縁を一致させることで、各部材が有する連結孔ｃの中心軸が一致し、複数の位置決め孔ｒ１及びｒ２の中心軸が一致する。
このため、上記した手順で組み立てることで、バネ構造体１の他方の第一導電部１１が、第一筺体Ｈ１の各位置決め孔ｒ１に挿通される。
Next, the user places the spacer H3 on the upper surface of the second housing H2, and places the first housing H1 on the upper surface of the spacer H3. At this time, by matching the peripheral edges of the first housing body H1, the first housing body H2, and the spacer H3, the central axes of the connecting holes c of each member are aligned, and the central axes of the plurality of positioning holes r1 and r2 are aligned. To do.
Therefore, by assembling according to the above procedure, the other first conductive portion 11 of the spring structure 1 is inserted into each positioning hole r1 of the first housing H1.
最後に、使用者は、各部材が有する連結孔ｃ１、ｃ２及びｃ３に、適宜ボルト等の連結具Ｂを挿通させ、各部材を連結させる。 Finally, the user inserts a connecting tool B such as a bolt into the connecting holes c1, c2, and c3 of each member as appropriate to connect the members.
なお、使用者は、検査状況等に応じて、筺体Ｈの周囲に当接され、筺体Ｈを構成する各部材間のずれを防止する、略四角筒状の固定枠Ｚを取り付けた後、連結具Ｂを挿通させて、各部材を連結しても良い。 It should be noted that the user attaches a substantially square tubular fixing frame Z, which is brought into contact with the periphery of the housing H and prevents displacement between the members constituting the housing H, depending on the inspection situation, and then is connected. Each member may be connected by inserting the tool B.
こうすることで、図４に示すように、バネ構造体１が筺体Ｈの内部に組み込まれた状態となり、検査治具２を構成する。また、バネ構造体１の両端が、位置決め孔ｒ１及びｒ２から突出した状態となる。
なお、図４（ア）において、筺体Ｈは点線で示しており、連結具Ｂは省略している。
By doing so, as shown in FIG. 4, the spring structure 1 is incorporated inside the housing H, and the inspection jig 2 is configured. Further, both ends of the spring structure 1 are in a state of protruding from the positioning holes r1 and r2.
In FIG. 4A, the housing H is shown by a dotted line, and the connector B is omitted.
そして、使用者は、第一導電部１１の端部に適宜プランジャ（図示せず）を装着し、プランジャの一端を、抵抗値の解析等を行う電子機器に接続される、導電可能な素材で形成され基台（図示せず）等に接触させ、他端を検査対象に接触させることで、測定を行う。また、使用者は、プランジャを装着せず、第一導電部１１の端部を接触端子として、測定を行うこともできる。 Then, the user attaches a plunger (not shown) to the end of the first conductive portion 11 as appropriate, and one end of the plunger is made of a conductive material connected to an electronic device for analyzing resistance values and the like. The measurement is performed by contacting the formed base (not shown) or the like and contacting the other end with the inspection target. Further, the user can also perform the measurement by using the end portion of the first conductive portion 11 as a contact terminal without attaching the plunger.
なお、本実施形態において、バネ構造体１の軸方向Ａに沿った全長は２１．６ｍｍ、バネ構造体１を形成している棒状体の径は０．２６ｍｍ、第二導電部１２の軸方向Ａに沿った全長は３．６ｍｍ、に設計されている。 In the present embodiment, the total length of the spring structure 1 along the axial direction A is 21.6 mm, the diameter of the rod-shaped body forming the spring structure 1 is 0.26 mm, and the axial direction of the second conductive portion 12. The total length along A is designed to be 3.6 mm.
本実施形態によれば、バネ構造体１の第一導電部１１、第二導電部１２及び連結部１３が一体に形成されていることで簡易な構造となり、略巻きバネ状の第二導電部１２によりバネ性を確保しつつ、製造性を向上させることが可能となる。 According to the present embodiment, the first conductive portion 11, the second conductive portion 12, and the connecting portion 13 of the spring structure 1 are integrally formed to form a simple structure, and the second conductive portion having a substantially wound spring shape. 12 makes it possible to improve manufacturability while ensuring springiness.
また、第一導電部１１が延びる方向と第二導電部１２の中心軸方向とが一致していることで、バネ構造体１が軸方向Ａに押圧された際の、バネ構造体１の周方向への変位を抑制することが可能となる。 Further, since the direction in which the first conductive portion 11 extends and the direction in the central axis of the second conductive portion 12 coincide with each other, the circumference of the spring structure 1 when the spring structure 1 is pressed in the axial direction A It is possible to suppress the displacement in the direction.
また、第一導電部１１と連結部１３とがなす角度が、９０度であることで、バネ構造体１が軸方向Ａに押圧された際の、バネ構造体１の周方向への変位を、さらに抑制することが可能となる。 Further, since the angle formed by the first conductive portion 11 and the connecting portion 13 is 90 degrees, the displacement of the spring structure 1 in the circumferential direction when the spring structure 1 is pressed in the axial direction A is increased. , It becomes possible to further suppress.
また、第一導電部１１及び第二導電部１２が、銅合金により形成されていることで、バネ構造体１の導電性及びバネ性がさらに良好なものとなる。 Further, since the first conductive portion 11 and the second conductive portion 12 are formed of a copper alloy, the conductivity and the spring property of the spring structure 1 are further improved.
また、第一導電部１１の一方が挿通される位置決め孔ｒ１が設けられている第一筺体Ｈ１と、第一導電部１１の他方が挿通される位置決め孔ｒ２が設けられている第二筺体Ｈ２と、を有している筺体Ｈを備える検査治具により、バネ構造体１の位置決めを正確に行うことができ、精度の高い検査を行うことが可能となる。また、バネ構造体１の破壊を抑制することが可能となる。 Further, a first housing H1 provided with a positioning hole r1 through which one of the first conductive portions 11 is inserted, and a second housing H2 provided with a positioning hole r2 through which the other of the first conductive portions 11 is inserted. With the inspection jig provided with the housing H having the above, the spring structure 1 can be accurately positioned, and a highly accurate inspection can be performed. Further, it is possible to suppress the destruction of the spring structure 1.
また、筺体Ｈが、第一筺体Ｈ１と第二筺体Ｈ２との間に介装されるスペーサーＨ３を有しているで、位置決め孔ｒ１及びｒ２から突出する第一導電部１１の長さを、検査状況等に応じて自在に調節することが可能となる。 Further, since the housing H has a spacer H3 interposed between the first housing H1 and the second housing H2, the length of the first conductive portion 11 protruding from the positioning holes r1 and r2 can be determined. It can be freely adjusted according to the inspection situation and the like.
なお、前記実施形態において示した各構成部材の諸形状や寸法等は一例であって、設計要求等に基づき種々変更可能である。 The various shapes, dimensions, and the like of each component shown in the above embodiment are examples, and can be variously changed based on design requirements and the like.
１ バネ構造体
１１ 第一導電部
１２ 第二導電部
１３ 連結部
２ 検査治具
Ｈ 筺体
Ｈ１ 第一筺体
Ｈ２ 第二筺体
Ｈ３ スペーサー
Ｈ１ａ、Ｈ２ａ 位置決め孔形成部
Ｈ１ｂ、Ｈ２ｂ 外枠部
ｒ１、ｒ２ 位置決め孔
ｔ テーパー部
ｃ１、ｃ２、ｃ３ 連結孔
Ｂ 連結具
Ｚ 固定枠
1 Spring structure 11 1st conductive part 12 2nd conductive part 13 Connecting part 2 Inspection jig H housing H1 1st housing H2 2nd housing H3 Spacer H1a, H2a Positioning hole forming parts H1b, H2b Outer frame parts r1, r2 Positioning Hole t Tapered part c1, c2, c3 Connecting hole B Connecting tool Z Fixing frame
Claims (6)
前記軸方向に対して略平行に延びる一対の第一導電部と、略巻きバネ状の第二導電部と、前記第一導電部と前記第二導電部とを連結する一対の連結部と、を備え、
前記第一導電部、前記第二導電部及び前記連結部は、一体に形成されていることを特徴とするバネ構造体。 A spring structure that has conductivity and springiness and can expand and contract in the axial direction.
A pair of first conductive portions extending substantially parallel to the axial direction, a substantially wound spring-shaped second conductive portion, and a pair of connecting portions connecting the first conductive portion and the second conductive portion. With
A spring structure characterized in that the first conductive portion, the second conductive portion, and the connecting portion are integrally formed.
前記筺体は、前記第一導電部の一方が挿通される位置決め孔が設けられている第一筺体と、前記第一導電部の他方が挿通される位置決め孔が設けられている第二筺体と、を有していることを特徴とする検査治具。 An inspection jig including the spring structure according to any one of claims 1 to 4 and a housing that holds the spring structure.
The housing includes a first housing provided with a positioning hole through which one of the first conductive portions is inserted, and a second housing provided with a positioning hole through which the other of the first conductive portions is inserted. An inspection jig characterized by having.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019025165A JP2020134217A (en) | 2019-02-15 | 2019-02-15 | Spring structure and inspection jig having the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019025165A JP2020134217A (en) | 2019-02-15 | 2019-02-15 | Spring structure and inspection jig having the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2020134217A true JP2020134217A (en) | 2020-08-31 |
Family
ID=72278275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019025165A Pending JP2020134217A (en) | 2019-02-15 | 2019-02-15 | Spring structure and inspection jig having the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2020134217A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63293845A (en) * | 1987-05-27 | 1988-11-30 | Hitachi Ltd | Apparatus for inspecting semiconductor element |
| JPH10197558A (en) * | 1997-01-07 | 1998-07-31 | Itabashi Giken Kk | Performance checking mechanism for ic device |
| JP2004085261A (en) * | 2002-08-23 | 2004-03-18 | Tokyo Electron Ltd | Probe pin and contactor |
| JP2004212287A (en) * | 2003-01-07 | 2004-07-29 | Jst Mfg Co Ltd | Coil spring-like contact |
| JP2009198258A (en) * | 2008-02-20 | 2009-09-03 | Corad Technology Inc | Vertical-probe-mounted probe card |
-
2019
- 2019-02-15 JP JP2019025165A patent/JP2020134217A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63293845A (en) * | 1987-05-27 | 1988-11-30 | Hitachi Ltd | Apparatus for inspecting semiconductor element |
| JPH10197558A (en) * | 1997-01-07 | 1998-07-31 | Itabashi Giken Kk | Performance checking mechanism for ic device |
| JP2004085261A (en) * | 2002-08-23 | 2004-03-18 | Tokyo Electron Ltd | Probe pin and contactor |
| JP2004212287A (en) * | 2003-01-07 | 2004-07-29 | Jst Mfg Co Ltd | Coil spring-like contact |
| JP2009198258A (en) * | 2008-02-20 | 2009-09-03 | Corad Technology Inc | Vertical-probe-mounted probe card |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10557867B2 (en) | Probe pin and inspection device including probe pin | |
| JP6740630B2 (en) | Probe pin and inspection device using the same | |
| US8698513B2 (en) | Probe and method of manufacturing probe | |
| JP6442668B2 (en) | Probe pin and IC socket | |
| US20080088331A1 (en) | Socket for test | |
| US20100244872A1 (en) | Inspection socket and method of producing the same | |
| KR101898350B1 (en) | Press-fit terminal | |
| KR102498454B1 (en) | Contact probe and inspection jig | |
| JP6283929B2 (en) | Inspection jig and method for manufacturing inspection jig | |
| JP6473364B2 (en) | Probe unit | |
| TW201538984A (en) | Contact inspection device | |
| JP2006324228A (en) | Ic socket | |
| JP2017037021A (en) | Inspection contact terminal and electric connection device including the same | |
| EP3364194B1 (en) | Kelvin test probe, kelvin test probe module, and manufacturing method therefor | |
| JP2020134217A (en) | Spring structure and inspection jig having the same | |
| JP7148614B2 (en) | Contact probe and test socket with it | |
| KR102265360B1 (en) | Probe pin using coxial cable and test socket including the same | |
| JP2009014480A (en) | Inspection tool | |
| CN111293448B (en) | Integrated spring needle with pressure welding structure | |
| JP2004138592A (en) | Spring contact and spring probe | |
| JP6841505B2 (en) | Spring structure | |
| WO2012063858A1 (en) | Probe unit | |
| JP2019039756A (en) | probe | |
| JP2002202321A (en) | Conductive contact pin and test head using the same | |
| US7238890B2 (en) | PTFE stud for ultrahigh-value resistor and method therefor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191119 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200929 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201126 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201222 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210222 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20210817 |