JPH10156571A - Laser beam machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To practise stable and high efficient laser working even when an abject to be machined is irradiated with laser beams of different waveforms to each other on the same spot simultaneously for laser beam machining. SOLUTION: The laser beam machine is equipped with a pair of laser oscillators 1, 2 to generate laser beams 3, 8 of different waveforms to each other, a total reflection mirror 4 to reflect laser beam 3 emitted by a laser oscillator 1 on one side, and a half mirror 5 which reflects laser beam 8 emitted by the other laser oscillator 2 and at the same time allows the laser beam 3 reflected by the total reflection mirror 4 to pass through. By means of the half mirror 5, the laser beam 7 transmitted from the laser oscillator 1 on one side and the reflected laser beam 9 from the other laser oscillator 2 are synthesized on the same axis, and after transmission through a condensing lens 11, optical fibers 12 and a condensing lens 14, are irradiated on the object 15 to be machined in the vertical direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing apparatus for processing a workpiece using a laser beam, and more particularly to a laser processing apparatus in which laser beams having mutually different waveforms are simultaneously radiated to the same portion on the workpiece. The present invention relates to a laser processing apparatus for performing the above.

[0002]

2. Description of the Related Art Conventionally, there has been known a laser processing apparatus which performs laser processing by simultaneously irradiating laser beams having mutually different waveforms to the same portion on a workpiece. As shown in FIG. 3, such a conventional laser processing apparatus includes a pair of laser oscillators 31 and 43 for generating laser beams having mutually different waveforms, and a pair of these laser oscillators 31 and 4.
And an optical system for branching each of the laser beams 32 and 44 emitted from 3 and guiding them to the vicinity of the workpieces 40 and 42.

Here, an optical system that splits the laser beam 32 and guides it to the vicinity of the workpieces 40 and 42 includes a half mirror 33 and a total reflection mirror 34 that split the laser beam 32 into two.
And condenser lenses 35 and 36 provided after the half mirror 33 and the total reflection mirror 34 to condense each of the two branched laser lights. It comprises optical fibers 37 and 38 provided with incident ends, and condensing lenses 39 and 41 for condensing laser light emitted from the emitting ends of the optical fibers 37 and 38 onto workpieces 40 and 42. I have.

An optical system that splits the laser beam 44 and guides it to the vicinity of the workpieces 40 and 42 includes a half mirror 45 and a total reflection mirror 46 that split the laser beam 44 into two.
And condensing lenses 47 and 48 provided after the half mirror 45 and the total reflection mirror 46 to condense each of the bifurcated laser beams. It is composed of optical fibers 49 and 50 provided with incident ends, and condenser lenses 51 and 52 for condensing laser light emitted from the exit ends of the optical fibers 49 and 50 on the workpieces 40 and 42. I have.

In FIG. 3, a laser beam 32 emitted from one laser oscillator 31 is bifurcated by a half mirror 33 and a total reflection mirror 34. Each of the split laser beams is condensed by condensing lenses 35 and 36 and is incident on the incident ends of optical fibers 37 and 38. Each of the incident laser beams is transmitted to the vicinity of the workpieces 40 and 42 by the optical fibers 37 and 38, and then transmitted to the optical fibers 37 and 38.
The light exits from the exit end 38. And the optical fiber 37
The laser light emitted from the laser beam is condensed by a condenser lens 39 and irradiates a predetermined portion on a workpiece 40, and the laser light emitted from the optical fiber 38 is condensed by a condenser lens 41 to be processed. The light is irradiated on a predetermined portion on the reference numeral 42.

Similarly, a laser beam 44 emitted from the other laser oscillator 43 is split into two by a half mirror 45 and a total reflection mirror 46. Each of the bifurcated laser beams is condensed by condensing lenses 47 and 48 and is incident on the incident ends of optical fibers 49 and 50. Each of the incident laser beams is converted by the optical fibers 49 and 50 into the workpiece 4.
After being transmitted to the vicinity of 0,42, the optical fibers 49,5
0 is emitted from the exit end. Then, the laser light emitted from the optical fiber 49 is condensed by the condenser lens 51 and is irradiated on a predetermined position on the workpiece 40 (the irradiation position of the laser light emitted from the optical fiber 37).
The laser light emitted from 0 is condensed by the condenser lens 52 and is irradiated on a predetermined portion on the workpiece 42 (the irradiation position of the laser light emitted from the optical fiber 38).

[0007]

As described above, in the conventional laser processing apparatus, for example, laser beams 32 and 4 transmitted by independent optical fibers 37 and 49, respectively.
A part of 4 is simultaneously irradiated on the same place on the workpiece 40. However, since the condenser lenses 39 and 51 disposed between the emission ends of the optical fibers 37 and 49 and the workpiece 40 mechanically interfere with each other, the laser light emitted from the optical fibers 37 and 49 is processed. The workpiece 40 is irradiated from an oblique direction. In such a case, the energy distribution at the processing point on the workpiece 40 becomes non-uniform, and the reflectance of the laser light on the workpiece 40 increases, so that stable and efficient laser processing can be performed. There is a problem that can not be. This problem is caused by the work 4
The same applies to No. 2.

The present invention has been made in view of such a point, and even when laser processing is performed by simultaneously irradiating the same portion on a workpiece with laser beams having different waveforms, a stable high laser beam can be obtained. An object of the present invention is to provide a laser processing apparatus capable of realizing efficient laser processing.

[0009]

SUMMARY OF THE INVENTION The present invention provides a pair of laser oscillators for generating laser beams having mutually different waveforms, a reflecting mirror for reflecting a laser beam emitted from one laser oscillator, and another laser oscillator. A half mirror that reflects the laser light emitted from the reflector and transmits the laser light reflected by the reflection mirror, wherein the transmitted laser light from the one laser oscillator and the other laser oscillator are provided in the half mirror. A laser processing apparatus characterized in that reflected laser light from the laser beam is coaxially combined.

The present invention also provides a pair of laser oscillators for generating laser beams having mutually different waveforms, a reflecting mirror for reflecting a laser beam emitted from one laser oscillator, and a laser beam emitted from the other laser oscillator. A half mirror that reflects a part of the light and transmits the rest, and transmits a part of the laser light reflected by the reflection mirror and reflects the rest, wherein the half mirror has the one laser oscillator. And the reflected laser light from the other laser oscillator are coaxially combined, and the reflected laser light from the one laser oscillator and the transmitted laser light from the other laser oscillator are combined. A laser processing device characterized by being coaxially synthesized is provided.

According to the present invention, laser beams having mutually different waveforms are combined coaxially by the half mirror. This makes it possible to irradiate the workpiece with laser beams having mutually different waveforms from the same direction, thereby making the energy distribution at the processing point on the workpiece uniform. In addition, since the laser light is synthesized coaxially, the workpiece can be irradiated with the laser light from the vertical direction, and the reduction in the absorptivity of the laser light to the workpiece can be suppressed.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 are views showing one embodiment of a laser processing apparatus according to the present invention.

As shown in FIG. 1, a laser processing apparatus includes a pair of laser oscillators 1 and 2 for generating laser beams 3 and 8 having different waveforms from each other and a laser beam 3 emitted from one of the laser oscillators 1. A total reflection mirror 4 for reflecting light,
A part of the laser light 8 emitted from the other laser oscillator 2 is reflected to be a reflected laser light 9, and the rest is transmitted to be a transmitted laser light 10, and a part of the laser light 3 reflected by the total reflection mirror 4. Partially transmitted and transmitted laser light 7
And a half mirror 5 that reflects the rest to produce a reflected laser beam 6.

The pair of laser oscillators 1 and 2 are arranged such that the optical axes of the laser beams 3 and 8 emitted from the laser oscillators 1 and 2 are parallel to each other. The total reflection mirror 4 reflects the laser light 3 emitted from one of the laser oscillators 1 in a direction orthogonal to its optical axis, and the optical axis of this reflected light and the laser light 3 emitted from the other laser oscillator 2. The half mirror 5 is arranged at a position where the optical axis of the laser light 8 intersects.

The total reflection mirror 4 and the half mirror 5 have substantially the same optical axis of the transmitted laser light 7 from one laser oscillator 1 and the reflected laser light 9 from the other laser oscillator 2. The positional relationship and the inclination are determined so that the optical axis of the reflected laser light 6 from one laser oscillator 1 and the optical axis of the transmitted laser light 10 from the other laser oscillator 2 substantially coincide with each other. I have.

Further, on an optical path between the half mirror 5 and the workpiece 15, a condenser lens 11 for condensing the transmitted laser light 7 and the reflected laser light 9 synthesized by the half mirror 5, and a condenser lens 11 An optical fiber 12 having an incident end provided at a position where a laser beam is condensed by a lens 11 and a laser beam 13 emitted from an emission end of the optical fiber 12 are processed 1
And a condensing lens 14 for condensing light on the light source 5.

On the optical path between the half mirror 5 and the workpiece 21, a total reflection mirror 16 for reflecting the reflected laser light 6 and the transmitted laser light 10 synthesized by the half mirror 5, and a total reflection mirror A condensing lens 17 for condensing the laser light reflected by 16, an optical fiber 18 provided with an incident end at a position where the laser light is condensed by the condensing lens 17, and an optical fiber 18 emitted from the emitting end. A condensing lens 20 for condensing the laser light 19 on the workpiece 21 is provided.

Next, the operation of the present embodiment having such a configuration will be described.

The laser light 3 emitted from one of the laser oscillators 1 is reflected by a total reflection mirror 4 and then partially transmitted through a half mirror 5 to transmit a transmitted laser light 7.
And the rest is reflected to become a reflected laser beam 6.

A part of the laser light 8 emitted from the other laser oscillator 2 is reflected by the half mirror 5 to become a reflected laser light 9, and the rest is transmitted to become a transmitted laser light 10.

As described above, when the laser beams 3 and 8 pass through the half mirror 5, the transmitted laser beam 7 from one laser oscillator 1 and the reflected laser beam 9 from the other laser oscillator 2 are coaxial with each other. The reflected laser beam 6 from one laser oscillator 1 and the transmitted laser beam 10 from the other laser oscillator 2 are also coaxially combined. Although the optical axes of the transmitted laser light 7 and the reflected laser light 9 and the optical axes of the reflected laser light 6 and the transmitted laser light 10 are shifted by a predetermined distance due to the thickness of the half mirror 5,
Since this shift amount is very small and both optical axes are parallel to each other, the condensing lenses 11 and 1 provided on the optical path are provided.
The light condensing positions connected via 4, 17, and 20 are the same.

The laser beams 3 and 8 generated by the pair of laser oscillators 1 and 2 have a continuous oscillation waveform 22 and a pulse oscillation waveform 23 as shown in FIGS.
As a result of combining these laser beams, FIG.
A laser beam having a waveform 24 as shown in FIG. Note that the waveform of the combined laser beam is shown in FIG.
Various types of waveforms other than those shown in (a) and (b) can be used, so that various types of processing can be supported.

The transmitted laser light 7 and the reflected laser light 9 that are coaxially combined in the half mirror 5 are condensed by a condenser lens 11 and are incident on an incident end of an optical fiber 12. The incident laser light is transmitted to the vicinity of the workpiece 15 by the optical fiber 12, and then emitted from the emission end of the optical fiber 12. Then, the laser light 13 combined with different waveforms emitted from the optical fiber 12 is condensed by the condensing lens 14 and irradiates the workpiece 15 from the vertical direction.

The reflected laser beam 6 and the transmitted laser beam 10 coaxially combined in the half mirror 5 are reflected by a total reflection mirror 16 and then condensed by a condenser lens 17 to be incident on an optical fiber 18. It is incident on the edge.
The incident laser beam is applied to the workpiece 2 by the optical fiber 18.
After being transmitted to the vicinity of 1, the light is emitted from the emission end of the optical fiber 18. Then, the laser light 19 combined with different waveforms emitted from the optical fiber 18 is condensed by the condensing lens 20 and irradiates the workpiece 21 from the vertical direction.

As described above, according to the present embodiment, the laser beams 3 and 8 having different waveforms from each other are coaxially combined in the half mirror 5 and are simultaneously irradiated on the workpieces 15 and 21 from the vertical direction. Therefore, the workpieces 15 and 2
The energy distribution of the two types of laser beams 3 and 8 at the processing point on 1 can be made uniform and the reduction in the absorptivity of the laser beams 3 and 8 to the workpieces 15 and 21 can be suppressed. Efficient laser processing can be realized.

Further, the number of required optical components such as an optical fiber and a condensing lens is about half that of the conventional laser processing apparatus shown in FIG. 3, so that an inexpensive and compact laser processing apparatus can be used. Can be realized.

In this embodiment, the two workpieces 15 and 21 are irradiated with laser light. However, for example, only one workpiece 15 is irradiated with laser light. In this case, the total reflection mirror 16 and the optical members 17, 18, and 20 provided at the subsequent stage can be omitted.

[0028]

As described above, according to the present invention, laser beams having mutually different waveforms are synthesized coaxially,
The laser beam synthesized in this manner can be applied to the workpiece from the same direction, preferably the vertical direction, so that stable and efficient laser processing can be realized.

[Brief description of the drawings]

FIG. 1 is a diagram showing one embodiment of a laser processing apparatus according to the present invention.

FIG. 2 is a diagram showing waveforms of laser light before and after combination in the laser processing apparatus shown in FIG.

FIG. 3 is a view showing a conventional laser processing apparatus.

[Explanation of symbols]

 1,2 laser oscillator 3,8 laser light 4,16 total reflection mirror 5 half mirror 6,9 reflected laser light 7,10 transmitted laser light 11,14,17,20 condensing lens 12,18 optical fiber 13,19 ( Synthesized laser light 15,21 Workpiece

Claims (2)

[Claims] 1. A pair of laser oscillators for generating laser light having different waveforms from each other, a reflecting mirror for reflecting laser light emitted from one laser oscillator, and reflecting a laser light emitted from the other laser oscillator. And a half mirror for transmitting the laser light reflected by the reflection mirror, wherein the transmitted laser light from the one laser oscillator and the reflected laser light from the other laser oscillator are coaxial with each other. A laser processing apparatus characterized by being synthesized above. A pair of laser oscillators for generating laser beams having different waveforms from each other; a reflection mirror for reflecting the laser beam emitted from one of the laser oscillators; and a laser beam emitted from the other laser oscillator. A half mirror that reflects a portion while transmitting the remainder, and transmits a part of the laser light reflected by the reflection mirror and reflects the remainder, wherein the half mirror transmits the laser light from the one laser oscillator. The laser light and the reflected laser light from the other laser oscillator are coaxially combined, and the reflected laser light from the one laser oscillator and the transmitted laser light from the other laser oscillator are coaxially combined. A laser processing device characterized by being synthesized.