JPH0722685A - Focus composition method of beam and its focus composition device - Google Patents

Abstract

PURPOSE:To make it possible for focuses of a plurality of beams to coincide each other readily. CONSTITUTION:A first laser beam 11 oscillated from a first laser beam oscillator 1 is reflected to form a circle by a first reflection plate 3 wherein a hole part 3b is formed, and a second laser beam 12 oscillated from a second laser beam oscillator 2 is oscillated toward the hole part 3b to be coaxial with the first laser beam 11. Flux of the coaxial first laser beam 11 and second laser beam 12 is focused by a focusing lens 6 to make focuses thereof coincide with each other and composed on a work 101. The work 101 is processed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a device for synthesizing a plurality of light beams so that the focal points of the light beams coincide with each other. , A high effect can be obtained.

[0002]

2. Description of the Related Art Among various light rays, a laser beam is mentioned as one having a strong directivity. By applying the characteristics of the laser beam and focusing the laser beam on the surface of the work, various processing such as welding, cutting, and surface treatment can be performed on the work. When using a laser beam for such applications, in order to increase the output of the laser beam,
Laser beams are oscillated from a plurality of laser beam oscillators, respectively, and the laser beams are combined so that their focal points coincide with each other on the surface of the work.

FIG. 4 shows a conventional focus combining device for a laser beam used in such a case. The laser beam 20a oscillated from the laser beam oscillator 21a is reflected by the reflection plate 22a and sent into the processing nozzle 23a, and is focused by the focusing lens 24a so that the workpiece 101 is focused. On the other hand, the laser beam 20b oscillated from the laser beam oscillator 21b is reflected by the reflection plate 22b and sent into the processing nozzle 23b, and is focused on the work 101 by the focusing lens 24b so as to match the focus of the laser beam 20a. It

As a result, the work 101 is processed with high efficiency.

[0005]

In the above-described laser beam focus combining method, the focusing lenses 24a and 24b must be adjusted so that the focal points of the laser beams 20a and 20b match on the work 101. Focus synthesis work is very time-consuming. Further, when the portion to be processed of the work 101 is gradually moved to the inside due to cutting or the like, the focusing lenses 24a and 24b must be constantly adjusted in accordance with the progress of cutting so as to correct the shift of the focus. Labor is required.

[0006]

In order to solve the above-mentioned problems, the present invention reflects the first light rays so that the cross-sectional shape in the direction orthogonal to the traveling direction of the first light rays forms an annular shape. At the same time, the second light ray is sent so as to be coaxial with the reflected light of the first light ray, and the light flux of the first light ray and the second light ray that are coaxial with each other is converged to combine the focal points, thereby making the focal point of the light ray. The synthesis method was constructed.

Further, a first light beam transmitter for sending out the first light beam, and an incident light and a reflection light of the first light beam which are provided on the path line of the first light beam so as to irradiate the object to be irradiated with the first light beam. A first reflector having a hole formed coaxially with the light, and a first reflector to the hole so as to be coaxial with the reflected light of the first light ray reflected by the first reflector. A second light beam transmitter that sends out two light beams, and a focusing lens that focuses the light fluxes of the first light ray and the second light ray that are coaxial to each other so that their focal points match on the irradiation target, The focus synthesizer was constructed.

[0008]

In the light beam focus synthesizing device having the above-described structure,
When the first light beam sent from the first light beam transmitter is incident on the first reflection plate, the first light beam is reflected in a ring shape because the hole is formed in the first reflection plate. on the other hand,
When the second light beam is sent out from the second light beam transmitter, the second light beam passes through the hole of the first reflecting plate, so that the first light beam and the second light beam travel coaxially. When the light fluxes of the first light ray and the second light ray pass through the focusing lens, they form a coaxial light flux, so that the focal point of the first light ray and the focal point of the second light ray always coincide with each other.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which a light beam focus tuning / synthesizing apparatus using the light beam focus tuning / synthesizing method according to the present invention is applied to a laser beam processing apparatus will be described with reference to FIGS.
Note that FIG. 1 shows a schematic configuration thereof, and FIG. 2 shows an enlargement of a main part thereof.

As shown in these figures, the incident light is reflected on the path line of the first laser beam 11 which is the first light beam oscillated by the first laser beam oscillator 1 which is the first light beam transmitter. A first reflecting plate 3 that reflects the first laser beam 11 is provided so that the light beams are orthogonal to each other.

As shown in FIG. 2, the first reflecting plate 3 is provided with a hole 3a which is coaxial with the incident light and the reflected light of the first laser beam 11.

That is, the first laser beam 11 oscillated from the first laser beam oscillator 1 is reflected by the first reflection plate 3 in a ring shape in the direction orthogonal to the incident light, and at the same time, the first reflection is performed. The incident light corresponding to the hole 3a of the plate 3 goes straight without being reflected.

The first laser beam 11 passing through the hole 3a of the first reflecting plate 3 is absorbed by the beam damper 5 provided on the pass line.

On the extension of the reflected light of the first laser beam 11, which is on the pass line of the second laser beam 12 which is the second light beam emitted by the second laser beam oscillator 2 which is the second light beam transmitter, The second reflection plate 4 that reflects the second laser beam 12 is provided so that the reflected light is orthogonal to the incident light.

That is, the second laser beam 12 oscillated from the second laser beam oscillator 2 is caused to travel coaxially by the second reflecting plate 4 at the central portion of the annular second laser beam 12. It is sent to the hole 3a of the reflection plate 3.

The first laser beam 11 which is reflected by the first reflector 3 and the second reflector 4 and travels coaxially.
Further, on the path line of the second laser beam 12, a processing nozzle 7 in which the focusing lens 6 is coaxially attached is provided coaxially.

That is, the first laser beam 11 and the second laser beam 12 are focused by the focusing lens 6 so that their focal points coincide with each other, and on the workpiece 101, which is an object to be irradiated, provided on the tip side of the processing nozzle 7. It is synthesized by.

In order to process a work using such a laser beam processing apparatus, the first laser beam oscillator 1 and the second laser beam oscillator 2 are activated and the first laser beam 11 and the second laser beam 12 are oscillated. To do.

A part of the oscillated first laser beam 11 passes through the hole 3a by the first reflecting plate 3 and is absorbed by the beam damper 5, and the rest is reflected annularly.
The oscillated second laser beam 12 is reflected by the second reflecting plate 4 toward the hole 3a of the first reflecting plate 3 so as to travel coaxially with the annular first laser beam 11. The first laser beam 11 and the second laser beam 12 traveling coaxially are focused by the focusing lens 6 so that their focal points coincide with each other, and the workpiece 101 is fed from the tip side of the processing nozzle 7.
Is synthesized on the surface of.

As a result, the work 101 is processed with high power by the combined first laser beam 11 and second laser beam 12.

Therefore, the two laser beam oscillators 1, 2
The laser beams 11 and 12 oscillated from
Since the light is focused by one focusing lens 7, the focus of the laser beam can be easily matched on the surface of the work 101.

Another embodiment will be described with reference to FIG. The schematic structure is shown in FIG. However, the same parts as those in the above-described embodiment are designated by the same reference numerals and the description thereof will be omitted.

As shown in FIG. 3, the oscillation port portion of the first laser beam oscillator 1 is set to the ring mode.
That is, the first laser beam 11 oscillated from the first laser beam oscillator 1 is already oscillated in a ring shape during oscillation. As a result, not only the beam damper is unnecessary, but also the portion absorbed by the beam damper is reflected by the first reflecting plate 3 and used for processing the work 101, so that the work 101 can be processed with higher output. .

In this embodiment, the laser beam 1 oscillated from each of the two laser beam oscillators 1 and 2.
Although 1 and 12 are combined, for example, two light rays traveling coaxially form one light flux. Therefore, if this light flux is regarded as the first light flux, the above-described embodiment is applied. Thus, the three light rays can be similarly combined. As a result, it is possible to combine the focal points in the same way as in the case of one light beam, while achieving higher output.

[0025]

As described above, according to the focus combining method and the focus combining apparatus of the present invention, the second light beam is sent so as to be coaxial with the first light beam reflected in an annular shape, and these light fluxes are emitted. To focus and synthesize the focus,
The focal points of the light rays can be easily combined without having to focus and combine the individual light rays so that the focal points match.

Further, when the present invention is applied to a laser beam processing apparatus, a plurality of laser beams are focused by a single focusing lens even if the position of the workpiece to be processed gradually deepens, so that the workpiece can be easily processed. You can focus on the parts. Further, since laser beams having different wavelengths can be combined coaxially, not only high output but also highly accurate processing can be performed.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an embodiment in which a light beam focus combining apparatus according to the present invention is applied to a laser beam processing apparatus.

FIG. 2 is an enlarged view of a main part thereof.

FIG. 3 is a schematic configuration diagram of another embodiment in which the light beam focus combining apparatus according to the present invention is applied to a laser beam processing apparatus.

FIG. 4 is a schematic configuration diagram of a conventional laser beam processing apparatus.

[Explanation of symbols]

 1 First Laser Beam Oscillator 2 Second Laser Beam Oscillator 3 First Reflector 3b Hole 4 Second Reflector 5 Beam Damper 6 Focusing Lens 7 Processing Nozzle 11 First Laser Beam 12 Second Laser Beam 101 Workpiece

Claims (2)

[Claims] 1. The first light ray is reflected such that the cross-sectional shape of the sent first light ray in a direction orthogonal to the traveling direction is annular, and the first light ray is coaxial with the reflected light of the first light ray. A method of synthesizing a focus of light rays, which comprises sending out two light rays and focusing the light fluxes of the first light ray and the second light ray which are coaxial with each other to synthesize a focus. 2. A first light beam transmitter for emitting a first light beam,
A first reflector provided on the path line of the first light beam to irradiate the irradiated body with the first light beam, and a hole portion that is coaxial with incident light and reflected light of the first light beam, A second light beam transmitter that sends a second light beam to the hole portion of the first reflection plate so as to be coaxial with the reflected light of the first light beam reflected by the first reflection plate, and the second light beam transmitter that is coaxial with the second light beam transmitter. A focus combining device for light rays, comprising: a focusing lens for focusing the light fluxes of the one light ray and the second light ray so that their focal points coincide with each other on the irradiation target.