JPH01313196A - Laser beam machine - Google Patents

Abstract

PURPOSE:To form a simultaneous multipoint optical system suitable for a compact and small-sized material to be machined by forming in a step shape the reflection surfaces to a laser beam of a return mirror. CONSTITUTION:The laser beam 13 emitted from a laser beam oscillator 12 is bent by the return mirror 14. Since the reflection surfaces 14a and 14b of the return mirror 14 are formed in a step shape, the laser beam is then diverged into two laser beams 15 and 16. The diverged laser beams 15 and 16 are condensed by condenser lens 17 and 18 respectively and irradiate the material 19 to be machined. In addition, since a spot interval of the laser beams irradiated the material 19 to be machined is determined by the heights of the reflection surface 14a of the upper step and the reflection surface 14b of the lower step, the laser beams can irradiate simultaneously at the spot interval of about the beam diameter of the laser beams 15 and 16.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a laser processing device suitable for use when processing is performed by simultaneously irradiating a plurality of processing points with laser light. .

(Prior Art) Conventionally, when processing is performed by simultaneously irradiating two points with laser light emitted from one laser oscillator,
A laser processing device as shown in FIG. 3 is used.

That is, a laser beam 2 emitted from a laser oscillator 1 is branched by a half mirror 3 into a reflected beam 5 and a transmitted beam 6.

The reflected light 5 is condensed by a condensing lens 7 and is directed toward the workpiece 11
is irradiated to. Further, the transmitted light 6 is bent by the total reflection mirror 4, further condensed by the condenser lens 8, and irradiated onto the workpiece 11.

Note that the neutral density filters 9 and 10 arranged on the optical path are neutral density filters for power balance correction by the half mirror 3.

(Problem to be Solved by the Invention) In the conventional laser processing apparatus as described above, the laser beam 2 is split into two using two folding mirrors, a half mirror 3 and a total reflection mirror 4. The distance between the optical axes of the reflected light 5 and the transmitted light 6 relative to the workpiece 11 increases. Therefore, such an optical system cannot be used for a workpiece in which the distance between the spots of laser irradiation light is required to be as long as the laser beam diameter.

Also, since half mirror 3 generally has an error of several percent,
In order to correct the power balance, a neutral density filter 9 is used.
and 10 are required. Normally, a neutral density filter is inserted on the optical path side with high power and matched with the optical path side with low power, but this results in an energy loss corresponding to the energy attenuated by the neutral density filter.

SUMMARY OF THE INVENTION An object of the present invention is to provide a laser processing apparatus that is suitable for simultaneous two-point processing of a workpiece with no energy loss and a spot interval as short as the laser beam diameter.

[Structure of the Invention] (Means for Solving the Problems) This invention bends a laser beam emitted from a laser oscillator by a folding mirror, focuses the bent laser beam, and irradiates it onto a workpiece. In this laser processing apparatus, the reflection surface of the above-mentioned folding mirror for laser beams is formed in a stepped shape.

(Function) According to this invention, since the laser beam is branched into a plurality of parts by the step-like reflecting surface of the folding mirror, it is possible to shorten the interval between the optical axes of each branching path to about the diameter of the laser beam. be. Furthermore, since a half mirror is not used, a neutral density filter for power balance correction is not required, and energy loss is also eliminated.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

The laser processing apparatus according to the present invention is configured as shown in FIG.
A folding mirror 14 is disposed on the optical path 3.

This folding mirror 14 differs from the conventional one in that the reflecting surface is formed in a stepped shape. These step-like reflective surfaces 14a, 14
Corresponding to b, condenser lenses 17 and 18 are arranged on the optical paths of the laser beams 15 and 16, respectively. The condensing lenses 17 and 18 are for condensing the laser beams 15 and 16 bent by the folding mirror 14 and irradiating them onto one workpiece.

Now, during operation, the laser beam 13 emitted from the laser oscillator 12 is bent by the folding mirror 14.
Since the reflective surface 14a114b of the folding mirror 14 is formed in a step-like shape, the laser beam is split into two laser beams 15 and 16. The branched laser beams 15 and 16 are respectively condensed by condensing lenses 17 and 18, and irradiated onto the workpiece 19.

Note that the spot interval of the laser beam irradiated onto one workpiece depends on the shape of the folding mirror 14, that is, the upper reflecting surface 14a.
Since this is determined by the height of the lower reflective surface 14b, simultaneous irradiation is possible with a spot interval approximately equal to the beam diameter of the laser beams 15 and 16.

As described above, in this embodiment, since the laser beam 13 is branched by the reflecting surfaces 14a and 14b of the folding mirror 14, it is possible to simultaneously irradiate two points with a spot interval of about the beam diameter of the laser beam 15.16. becomes. Furthermore, since no half mirror is used, an efficient and compact simultaneous multi-point processing optical system can be constructed.

(Modification) FIG. 2 shows a modification of the present invention, which provides the same effects as the above embodiment. That is, in this modification, the light condensed by the condensing lenses 17 and 18 of the above embodiment is made to enter the optical fibers 20 and 21. The laser beams emitted from these optical fibers 20 and 21 are each directed to a condenser lens 2.
2 and 23, and irradiates the workpiece 19. In addition, in the above embodiment and modification, the folding mirror 14
Although two reflecting surfaces 14a and 14b are formed in the above, the number of reflecting surfaces is not limited to two, and it is also possible to form multiple reflecting surfaces by increasing the number of steps as needed.

[Effects of the Invention] According to the present invention, simultaneous multi-point processing is possible with a spot interval approximately equal to the beam diameter of the laser beam. As a result, it is possible to construct a simultaneous multi-point optical system that is more compact and suitable for small workpieces.

Furthermore, according to the present invention, since the laser beam is branched only by the total reflection surface of the folding mirror, an efficient simultaneous multi-point optical system without energy loss can be constructed.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a laser processing device according to an embodiment of the present invention, FIG. 2 is a schematic diagram showing a modification of the invention, and FIG. 3 is a schematic diagram showing a conventional laser processing device. It is. 12... Laser oscillator, 13... Laser light, 14.
... Reflection mirror, 14a, 14b.''Reflection surface, 17.
18... Condenser lens, 19... Workpiece. Applicant Representative Patent Attorney Takehiko Suzue 140 Reflective Surface Figure 1

Claims (1)

[Scope of Claims] A laser processing device that bends a laser beam emitted from a laser oscillator by a folding mirror, focuses the folded laser beam, and irradiates it onto a workpiece to perform processing. A laser processing device characterized in that a reflective surface of a mirror for laser light is formed in a step-like manner.